Patents for G03B 27 - Photographic printing apparatus (25,157) |
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05/15/2012 | US8179517 Exposure apparatus and method, maintenance method for exposure apparatus, and device manufacturing method |
05/15/2012 | US8179516 Protective layer on objective lens for liquid immersion lithography applications |
05/15/2012 | US8177368 Projection apparatus and method for Pepper's ghost illusion |
05/10/2012 | US20120113405 Method for determining a commutation offset and for determining a compensation map for a stage |
05/10/2012 | US20120113404 Optimization Flows of Source, Mask and Projection Optics |
05/10/2012 | US20120113403 Exposure method and exposure apparatus |
05/10/2012 | US20120113402 Lithographic apparatus and device manufacturing method |
05/09/2012 | EP2449787A1 Method and system for differential distortion correction for three-dimensional (3d) projection |
05/09/2012 | EP2255249B1 Plate pallet alignment system |
05/08/2012 | US8174681 Calibration of lithographic process models |
05/08/2012 | US8174680 Substrate handler, lithographic apparatus and device manufacturing method |
05/08/2012 | US8174679 Illumination optical system, exposure apparatus, and device fabrication method |
05/08/2012 | US8174678 Lithographic apparatus with adjusted exposure slit shape enabling reduction of focus errors due to substrate topology and device manufacturing method |
05/08/2012 | US8174677 Illumination optical system for microlithography |
05/08/2012 | US8174676 Method for correcting a lithography projection objective, and such a projection objective |
05/08/2012 | US8174675 Measuring apparatus, optical system manufacturing method, exposure apparatus, device manufacturing method, and processing apparatus |
05/08/2012 | US8174674 Lithographic apparatus and device manufacturing method |
05/08/2012 | US8174673 Method for wafer alignment |
05/08/2012 | US8174671 Lithographic projection apparatus and method for controlling a support structure |
05/08/2012 | US8174670 Measurement method and exposure apparatus |
05/08/2012 | US8174669 Liquid immersion optical tool, method for cleaning liquid immersion optical tool, liquid immersion exposure method and method for manufacturing semiconductor device |
05/08/2012 | US8174668 Exposure apparatus and method for producing device |
05/03/2012 | US20120108072 Showerhead configurations for plasma reactors |
05/03/2012 | US20120107743 Lithography using photoresist with photoinitiator and photoinhibitor |
05/03/2012 | US20120105820 Vibration control apparatus, lithography apparatus, and method of manufacturing article |
05/03/2012 | US20120105819 Lithographic apparatus for transferring pattern from patterning device onto substrate, and damping method |
05/03/2012 | US20120105818 Lithographic apparatus and method |
05/03/2012 | US20120105817 Leaf spring, stage system, and lithographic apparatus |
05/02/2012 | CN1550879B Digital print cartridge and ink jet cartridge |
05/01/2012 | US8169595 Optical apparatus and method for modifying the imaging behavior of such apparatus |
05/01/2012 | US8169594 Illumination system of a microlithographic projection exposure apparatus |
05/01/2012 | US8169593 Lithographic apparatus and device manufacturing method |
05/01/2012 | US8169592 Exposure apparatus and method for producing device |
05/01/2012 | US8169591 Exposure apparatus, exposure method, and method for producing device |
05/01/2012 | US8169590 Exposure apparatus and device fabrication method |
05/01/2012 | US8169473 Method and system for exposing a photoresist in a magnetic device |
04/26/2012 | US20120099095 Dual-stage exchange system for lithographic apparatus |
04/26/2012 | US20120099094 Dual-stage exchange system for lithographic apparatus |
04/26/2012 | US20120099093 Polarization actuator |
04/26/2012 | US20120099092 Detection of contamination in euv systems |
04/26/2012 | US20120099091 Method of optimizing a lithographic process, device manufacturing method, lithographic apparatus, computer program product and simulation apparatus |
04/26/2012 | US20120099090 System and methods related to generating electromegnetic radiation interference patterns |
04/26/2012 | US20120099089 Apparatus and methods for measuring thermally induced reticle distortion |
04/26/2012 | US20120099088 High heat load optics with a liquid metal interface for use in an extreme ultraviolet lithography system |
04/25/2012 | CA2750733A1 Color motion picture print films |
04/24/2012 | US8164754 Immersion exposure apparatus and device manufacturing method |
04/24/2012 | US8164741 Lithographic apparatus and device manufacturing method |
04/24/2012 | US8164740 Illumination system coherence remover with two sets of stepped mirrors |
04/24/2012 | US8164739 Controlling fluctuations in pointing, positioning, size or divergence errors of a beam of light for optical apparatus |
04/24/2012 | US8164738 Illumination optical system, exposure apparatus, and device manufacturing method |
04/24/2012 | US8164737 Lithographic apparatus having an active damping subassembly |
04/24/2012 | US8164736 Exposure method, exposure apparatus, and method for producing device |
04/24/2012 | US8164735 Regulating device, exposure apparatus and device manufacturing method |
04/24/2012 | US8164734 Vacuum system for immersion photolithography |
04/24/2012 | US8163467 Dummy light-exposed substrate, method of manufacturing the same, immersion exposure apparatus, and device manufacturing method |
04/19/2012 | WO2012051486A1 Method and system for producing video archive on film |
04/19/2012 | US20120094238 Substrate holding device, exposure apparatus, and device manufacturing method |
04/19/2012 | US20120092641 Method for positioning an object by an electromagnetic motor, stage apparatus and lithographic apparatus |
04/19/2012 | US20120092640 Shared Compliance in a Rapid Exchange Device for Reticles, and Reticle Stage |
04/19/2012 | US20120092639 Resist pattern calculation method and calculation program storage medium |
04/19/2012 | US20120092638 Method Of Aligning A Wafer Stage And Apparatus For Performing The Same |
04/19/2012 | US20120092637 Microlithographic projection exposure apparatus |
04/19/2012 | US20120092636 Metrology Apparatus, Lithography Apparatus and Method of Measuring a Property of a Substrate |
04/19/2012 | US20120092635 Method and apparatus for printing periodic patterns |
04/19/2012 | US20120092634 Method and apparatus for printing periodic patterns |
04/19/2012 | US20120092633 Reflective film interface to restore transverse magnetic wave contrast in lithographic processing |
04/19/2012 | US20120092632 Diffraction unlimited photolithography |
04/19/2012 | US20120092631 Gas manifold, module for a lithographic apparatus, lithographic apparatus and device manufacturing method |
04/19/2012 | DE112008004240T5 Vorrichtung zur Archivierung von digitalem Inhalt und Verfahren dafür Device for archiving digital content and method therefor |
04/19/2012 | CA2813777A1 Method and system for producing video archive on film |
04/19/2012 | CA2813774A1 Method and system of archiving video to film |
04/17/2012 | US8159674 Exposure method and exposure device |
04/17/2012 | US8159654 Pressure body and pellicle mounting apparatus |
04/17/2012 | US8159653 Substrate position detection apparatus, and method of adjusting a position of an imaging component of the same |
04/17/2012 | US8159652 Positioning apparatus, exposure apparatus using thereof and device manufacturing method |
04/17/2012 | US8159651 Illumination system coherence remover with a series of partially reflective surfaces |
04/17/2012 | US8159650 Device manufacturing method, device manufacturing system, and measurement/inspection apparatus |
04/17/2012 | US8159649 Exposure method, exposure apparatus, photomask and method for manufacturing photomask |
04/17/2012 | US8159648 Method and device for the correction of imaging defects |
04/17/2012 | US8159647 Lithographic apparatus and device manufacturing method |
04/12/2012 | US20120088196 Exposure apparatus, exposure method, and blind for exposure apparatus |
04/12/2012 | US20120086931 Stage device including a heat insulating sheet supported by an auxiliary member |
04/12/2012 | US20120086930 Photolithography exposure apparatus having blinding plates and method of driving the same |
04/12/2012 | US20120086929 Lithographic apparatus and device manufacturing method |
04/12/2012 | US20120086928 Lithographic apparatus and device manufacturing method |
04/12/2012 | US20120086927 Detection device, movable body apparatus, pattern formation apparatus and pattern formation method, exposure apparatus and exposure method, and device manufacturing method |
04/12/2012 | US20120086926 Lithographic apparatus and device manufacturing method |
04/12/2012 | US20120086925 Method for avoiding contamination and euv-lithography-system |
04/11/2012 | CN102414781A Substrate support structure, clamp preparation unit, and lithography system |
04/10/2012 | US8154779 Image reading apparatus |
04/10/2012 | US8154710 Lithography process window analyzing method and analyzing program |
04/10/2012 | US8154709 Method of placing a substrate, method of transferring a substrate, support system and lithographic projection apparatus |
04/10/2012 | US8154708 Lithographic apparatus and device manufacturing method |
04/10/2012 | US8154707 Illumination optical system and exposure apparatus having the same |
04/10/2012 | US8154706 Scanning optical device, image forming apparatus using the same, and method of adjusting scanning optical device |
04/10/2012 | US8154705 Method of defining patterns in small pitch and corresponding exposure system |
04/05/2012 | US20120082940 Photolithography process for semiconductor device |
04/05/2012 | US20120081689 Method for determining exposure condition and computer-readable storage media storing program for determining exposure condition |
04/05/2012 | US20120081688 Apparatus and method for preparing lenticular sheet |
04/05/2012 | US20120081687 Interference projection exposure system and method of using same |