| Patents for G03B 27 - Photographic printing apparatus (25,157) |
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| 06/06/2013 | US20130141707 EUV Exposure Apparatus |
| 06/06/2013 | US20130141705 Exposure apparatus and exposure method |
| 06/04/2013 | US8456618 Stage apparatus, exposure apparatus, and method of manufacturing device |
| 06/04/2013 | US8456617 Exposure method, exposure device, and micro device manufacturing method |
| 06/04/2013 | US8456616 Optical system for microlithography |
| 06/04/2013 | US8456615 Optical system having heat dissipation arrangement |
| 06/04/2013 | US8456614 Optical element supporting device, exposure apparatus using same, and device manufacturing method |
| 06/04/2013 | US8456613 Method and apparatus for quantification of illumination non-uniformity in the mask plane of a lithographic exposure system |
| 06/04/2013 | US8456612 Exposure apparatus and method of manufacturing device |
| 06/04/2013 | US8456611 System and method to increase surface tension and contact angle in immersion lithography |
| 06/04/2013 | US8456610 Environmental system including vacuum scavenge for an immersion lithography apparatus |
| 06/04/2013 | US8456609 Exposure apparatus and device manufacturing method |
| 06/04/2013 | US8456608 Maintenance method, maintenance device, exposure apparatus, and device manufacturing method |
| 05/30/2013 | US20130137050 Method of calculating amount of fluctuation of imaging characteristic of projection optical system, exposure apparatus, and method of fabricating device |
| 05/30/2013 | US20130135603 C-core actuator for moving a stage |
| 05/30/2013 | US20130135601 Two-beam interference apparatus and two-beam interference exposure system |
| 05/30/2013 | US20130135600 Inspection Method and Apparatus, and Corresponding Lithographic Apparatus |
| 05/30/2013 | US20130135596 Liquid recovery apparatus, exposure apparatus, exposure method, and device manufacturing method |
| 05/28/2013 | US8451510 Image processing apparatus and image processing method thereof |
| 05/28/2013 | US8451472 Immediate verification of printed copy |
| 05/28/2013 | US8451454 Stage system, lithographic apparatus including such stage system, and correction method |
| 05/28/2013 | US8451431 Control systems and methods applying iterative feedback tuning for feed-forward and synchronization control of microlithography stages and the like |
| 05/28/2013 | US8451430 Illumination optical system, exposure apparatus, and device manufacturing method |
| 05/28/2013 | US8451429 Dichroic mirror, method for manufacturing a dichroic mirror, lithographic apparatus, semiconductor device and method of manufacturing therefor |
| 05/28/2013 | US8451428 Computer generated hologram, exposure apparatus and device fabrication method |
| 05/28/2013 | US8451427 Illumination optical system, exposure apparatus, optical element and manufacturing method thereof, and device manufacturing method |
| 05/28/2013 | US8451426 Exposure method and exposure apparatus |
| 05/28/2013 | US8451425 Exposure apparatus, exposure method, cleaning apparatus, and device manufacturing method |
| 05/28/2013 | US8451424 Exposure apparatus, method for producing device, and method for controlling exposure apparatus |
| 05/28/2013 | US8451423 Lithographic apparatus and method |
| 05/28/2013 | US8451422 Re-flow and buffer system for immersion lithography |
| 05/28/2013 | US8450046 Methods for enhancing photolithography patterning |
| 05/23/2013 | US20130130182 Apparatus and method of direct writing with photons beyond the diffraction limit |
| 05/23/2013 | US20130128255 Encoder device, method for measuring moving amount, optical apparatus, exposure apparatus, exposure method and method for producing device |
| 05/23/2013 | US20130128247 Level Sensor, a Method for Determining a Height Map of a Substrate, and a Lithographic Apparatus |
| 05/21/2013 | US8446570 System and method for using a two part cover and a box for protecting a reticle |
| 05/21/2013 | US8446569 Exposure apparatus, exposure method and device manufacturing method |
| 05/21/2013 | US8446568 Lithographic apparatus and device manufacturing method |
| 05/21/2013 | US8446567 Stage system calibration method, stage system and lithographic apparatus comprising an encoder measurement system to measure position of stage system |
| 05/21/2013 | US8446566 Method of loading a substrate on a substrate table and lithographic apparatus and device manufacturing method |
| 05/21/2013 | US8446565 Methods of optical proximity correction in manufacturing semiconductor devices |
| 05/21/2013 | US8446564 Lithographic apparatus and device manufacturing method |
| 05/21/2013 | US8446563 Lithographic apparatus and device manufacturing method |
| 05/21/2013 | US8446562 Actuator system using multiple piezoelectric actuators |
| 05/21/2013 | US8446561 Lithographic apparatus and a method of measuring flow rate in a two phase flow |
| 05/21/2013 | US8446560 Lithographic apparatus comprising a magnet, method for the protection of a magnet in a lithographic apparatus and device manufacturing method |
| 05/21/2013 | US8445876 Extreme ultraviolet light source apparatus |
| 05/21/2013 | US8443513 Substrate processing apparatus |
| 05/21/2013 | CA2695136C Reusable paper media with compatibility markings and printer with incompatible media sensor |
| 05/16/2013 | US20130122428 Exposure system, method of forming pattern using the same and method of manufacturing display substrate using the same |
| 05/16/2013 | US20130120733 Position measurement apparatus and exposure apparatus which measure position of object using reference mark, and method of manufacturing device |
| 05/16/2013 | US20130120724 Method for splitting a pattern for use in a multi-beamlet lithography apparatus |
| 05/16/2013 | US20130120722 Method and system for forming alignment film region through uv light exposure |
| 05/15/2013 | CN102213908B Full-rotation exposure device for enlarge-printing of stereograph |
| 05/14/2013 | US8443307 Methods and system for model-based generic matching and tuning |
| 05/14/2013 | US8441747 Optical module with minimized overrun of the optical element |
| 05/14/2013 | US8441694 Method and an apparatus for adjusting a scanning target area of an image reproduction device |
| 05/14/2013 | US8441618 Substrate transfer method and apparatus |
| 05/14/2013 | US8441617 Substrate placement in immersion lithography |
| 05/14/2013 | US8441616 Lithographic apparatus and device manufacturing method |
| 05/14/2013 | US8441615 System for isolating an exposure apparatus |
| 05/14/2013 | US8441614 Processing apparatus and device manufacturing method |
| 05/14/2013 | US8441613 Projection objective and projection exposure apparatus for microlithography |
| 05/14/2013 | US8441612 LED light source, its manufacturing method, and LED-based photolithography apparatus and method |
| 05/14/2013 | US8441611 Lithographic apparatus and method |
| 05/14/2013 | US8441610 Assembly comprising a conditioning system and at least one object, a conditioning system, a lithographic apparatus and methods |
| 05/14/2013 | US8441609 Lithographic apparatus and a method of operating the lithographic apparatus |
| 05/09/2013 | US20130115723 Method of manufacturing semiconductor device and semiconductor manufacturing system |
| 05/09/2013 | US20130114062 Compact encoder head for interferometric encoder system |
| 05/09/2013 | US20130114061 Double pass interferometric encoder system |
| 05/09/2013 | US20130114055 Mask and optical filter manufacturing apparatus including the same |
| 05/08/2013 | CN202929347U 3-D image print film and display apparatus applying the 3-D image print film |
| 05/08/2013 | CN102192444B Light source apparatus |
| 05/08/2013 | CN101939686B Device and method for exposing a photo material |
| 05/07/2013 | US8436985 Combination stop for catoptric projection arrangement |
| 05/07/2013 | US8436984 Lithographic apparatus and method of irradiating at least two target portions |
| 05/07/2013 | US8436983 Optical system, exposure system, and exposure method |
| 05/07/2013 | US8436982 Projection objective for microlithography |
| 05/07/2013 | US8436981 Exposing method, exposure apparatus, and device fabricating method |
| 05/07/2013 | US8436980 Illumination optical apparatus, relay optical system, exposure apparatus, and device manufacturing method |
| 05/07/2013 | US8436979 Exposure apparatus, and device manufacturing method |
| 05/07/2013 | US8436978 Exposure apparatus, and device manufacturing method |
| 05/07/2013 | US8436977 Lithographic method to apply a pattern to a substrate and lithographic apparatus |
| 05/02/2013 | WO2013062010A1 Lighting unit and image scanner using same |
| 05/02/2013 | WO2013062009A1 Lighting unit and image scanner using same |
| 05/02/2013 | US20130108969 Method and an apparatus having a compressible collar for thermally treating a photosensitive precursor |
| 05/02/2013 | US20130107241 Lithographic apparatus and substrate handling method |
| 05/02/2013 | US20130107240 Maskless Vortex Phase Shift Optical Direct Write Lithography |
| 05/02/2013 | US20130107239 Optical arrangement for euv lithography and method for configuring such an optical arrangement |
| 05/02/2013 | US20130107236 Lithographic apparatus and device manufacturing method |
| 05/02/2013 | US20130107235 Pattern-forming method |
| 05/01/2013 | CN202916581U Lithographic-paper blueprinting device of blue-print machine |
| 04/30/2013 | US8432534 Holding apparatus, position detection apparatus and exposure apparatus, moving method, position detection method, exposure method, adjustment method of detection system and device manufacturing method |
| 04/30/2013 | US8432533 Method and system for photolithographic fabrication with resolution far below the diffraction limit |
| 04/30/2013 | US8432532 Projection optical system with rarefaction compensation |
| 04/30/2013 | US8432531 Lithographic apparatus and a method of operating the apparatus |
| 04/30/2013 | US8432530 Device, method, and system for measuring image profiles produced by an optical lithography system |
| 04/30/2013 | US8432529 Lithographic apparatus and monitoring method |
| 04/30/2013 | US8432072 Three axis linear actuator |
| 04/25/2013 | US20130100427 Metrology Method and Apparatus, and Device Manufacturing Method |