Patents for G03B 27 - Photographic printing apparatus (25,157) |
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01/01/2013 | US8345224 Methods and devices for driving micromirrors |
01/01/2013 | US8345223 Optical element, lithographic apparatus including such an optical element, device manufacturing method, and device manufactured thereby |
01/01/2013 | US8345222 High transmission, high aperture catadioptric projection objective and projection exposure apparatus |
01/01/2013 | US8345221 Aberration measurement method, exposure apparatus, and device manufacturing method |
01/01/2013 | US8345220 Aberration measurement method, exposure apparatus, and device manufacturing method |
01/01/2013 | US8345219 Method and apparatus for setting an illumination optical unit |
01/01/2013 | US8345218 Immersion lithographic apparatus, drying device, immersion metrology apparatus and device manufacturing method |
01/01/2013 | US8345217 Liquid recovery member, exposure apparatus, exposing method, and device fabricating method |
01/01/2013 | US8345216 Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method |
01/01/2013 | US8344341 Lithographic apparatus and device manufacturing method |
12/27/2012 | WO2012176487A1 Image scanning unit |
12/27/2012 | US20120328836 Method and Apparatus to Allow a Plurality of Stages to Operate in Close Proximity |
12/27/2012 | US20120327388 Laser exposure method and product |
12/27/2012 | US20120327387 Positioning device, lithographic apparatus, positioning method and device manufacturing method |
12/27/2012 | US20120327386 Lithographic apparatus, method of deforming a substrate table and device manufacturing method |
12/27/2012 | US20120327385 Optical system for semiconductor lithography |
12/27/2012 | US20120327384 Mirror elements for euv lithography and production methods therefor |
12/27/2012 | US20120327383 System and Method to Ensure Source and Image Stability |
12/27/2012 | US20120327382 Projection objective for microlithography |
12/27/2012 | US20120327381 Radiation Source, Lithographic Apparatus and Device Manufacturing Method |
12/27/2012 | US20120325099 Multibeam exposure scanning method and apparatus, and method of manufacturing printing plate |
12/26/2012 | EP2537304A1 Substrate support structure, clamp preparation unit, and lithography system |
12/25/2012 | US8339579 Exposure method |
12/25/2012 | US8339578 Optical system, exposure system, and exposure method |
12/25/2012 | US8339577 Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus |
12/25/2012 | US8339576 Projection objective of a microlithographic projection exposure apparatus |
12/25/2012 | US8339575 Off-axis objectives with rotatable optical element |
12/25/2012 | US8339574 Lithographic apparatus and device manufacturing method |
12/25/2012 | US8339573 Method and apparatus for photoimaging a substrate |
12/25/2012 | US8339572 Lithographic apparatus and device manufacturing method |
12/25/2012 | US8339571 Lithographic method and apparatus |
12/25/2012 | US8339570 Mark position detection device and mark position detection method, exposure apparatus using same, and device manufacturing method |
12/25/2012 | US8339569 Temperature-control device for an optical assembly |
12/25/2012 | US8339568 Foreign particle inspection apparatus, exposure apparatus, and method of manufacturing device |
12/25/2012 | US8338060 Pellicle for lithography and method for manufacturing the same |
12/20/2012 | US20120320362 Multiple-blade holding devices |
12/20/2012 | US20120320361 Cluster tool architecture for processing a substrate |
12/20/2012 | US20120320360 Exposure apparatus and device fabrication method |
12/20/2012 | US20120320359 Lithographic apparatus and device manufacturing method |
12/20/2012 | US20120320358 Method for operating a projection exposure apparatus with correction of imaging aberrations induced by the mask |
12/20/2012 | US20120320357 Clamping device, assembly and lithographic projection apparatus |
12/20/2012 | US20120320356 Wavefront modification apparatus, lithographic apparatus and method |
12/20/2012 | US20120320355 Light source apparatus and image projection apparatus |
12/20/2012 | US20120320354 Multilayer mirror and lithographic apparatus |
12/20/2012 | US20120320353 Projection exposure apparatus and optical system |
12/20/2012 | US20120320352 Multibeam exposure scanning method and apparatus, and method of manufacturing printing plate |
12/20/2012 | US20120320351 Immersion lithography system using a sealed wafer bath |
12/20/2012 | US20120320350 Exposure apparatus, exposure method, and device fabrication method |
12/20/2012 | US20120320349 Photolithography systems and associated methods of overlay error correction |
12/20/2012 | US20120320348 Reflective mask for euv lithography |
12/19/2012 | EP2536121A1 Illuminating apparatus, image reading apparatus, and image forming apparatus |
12/18/2012 | US8335024 Multiple feeding preventing apparatus and image forming device including the same and image forming method |
12/18/2012 | US8334968 Recording medium storing program for determining exposure parameter, exposure method, and method of manufacturing device |
12/18/2012 | US8334967 Substrate support system having a plurality of contact lands |
12/13/2012 | US20120314198 Methods of estimating point spread functions in electron-beam lithography processes |
12/13/2012 | US20120314197 Maskless processing apparatus |
12/13/2012 | US20120314195 Method for determining illumination source with optimized depth of focus |
12/13/2012 | US20120314194 Lithographic apparatus and device manufacturing method |
12/13/2012 | US20120314193 Exposure apparatus, exposure method, exposure apparatus maintenance method, exposure apparatus adjustment method and device manufacturing method |
12/12/2012 | CN102819193A Method for determining illumination source with optimized depth of focus |
12/11/2012 | US8331713 Image processing apparatus, image processing method, program and learning apparatus |
12/11/2012 | US8330941 Calibration method for a lithographic apparatus |
12/11/2012 | US8330940 Lithographic apparatus, device manufacturing method and position control method |
12/11/2012 | US8330939 Immersion exposure apparatus and device manufacturing method with a liquid recovery port provided on at least one of a first stage and second stage |
12/11/2012 | US8330938 Solid-state array for lithography illumination |
12/11/2012 | US8330937 Stray light feedback for dose control in semiconductor lithography systems |
12/11/2012 | US8330936 Lithographic apparatus and device manufacturing method |
12/11/2012 | US8330935 Exposure apparatus and measuring device for a projection lens |
12/11/2012 | US8330934 Exposure apparatus and device manufacturing method |
12/11/2012 | US8330131 Source-collector module with GIC mirror and LPP EUV light source |
12/06/2012 | US20120308936 Exposure apparatus for photoalignment process and method for manufacturing liquid crystal display |
12/06/2012 | US20120307228 Positioning apparatus, exposure apparatus and device manufacturing method |
12/06/2012 | US20120307227 Movable body drive method, pattern formation method, exposure method, and device manufacturing method for maintaining position coordinate before and after switching encoder head |
12/06/2012 | US20120307226 Detection apparatus, exposure apparatus, device fabrication method and filter |
12/06/2012 | US20120307225 Optical Imaging Writer System |
12/06/2012 | US20120307224 Spectral purity filter |
12/06/2012 | US20120307223 Lithographic apparatus and device manufacturing method |
12/06/2012 | US20120307222 Lithographic apparatus and device manufacturing method |
12/06/2012 | US20120307221 Imaging device with varying optical signal |
12/06/2012 | US20120307220 Maintenance Method, Exposure Method, Exposure Apparatus, and Method for Producing Device |
12/06/2012 | US20120307219 Criss-cross writing strategy |
12/06/2012 | US20120307218 Method of correcting defects in a reflection-type mask and mask-defect correction apparatus |
12/06/2012 | US20120307217 System and method for treating substrate |
12/06/2012 | US20120307216 Temperature sensing probe, burl plate, lithographic apparatus and method |
12/06/2012 | US20120307215 Flow Through MEMS Package |
12/05/2012 | CN102809892A Moving, compressing and shading mechanism for digital stereo image processing and method thereof |
12/04/2012 | USRE43841 Printing by active tiling |
12/04/2012 | US8325326 Stage unit, exposure apparatus, and exposure method |
12/04/2012 | US8325325 Movable body apparatus, movable body drive method, exposure apparatus, exposure method, and device manufacturing method |
12/04/2012 | US8325324 Illuminating optical apparatus, exposure apparatus and device manufacturing method |
12/04/2012 | US8325322 Optical correction device |
12/04/2012 | US8325321 Lithography system, method of heat dissipation and frame |
11/29/2012 | US20120301684 Photosensitive film pattern and method for manufacturing a photosensitive film pattern |
11/29/2012 | US20120300323 Exposure method for color filter substrate |
11/29/2012 | US20120300188 Lithographic apparatus comprising a substrate table |
11/29/2012 | US20120300187 Lithographic apparatus and component |
11/29/2012 | US20120300186 Multi-stage system, a control method therefor, and a lithographic apparatus |
11/29/2012 | US20120300185 Catoptric illumination system for microlithography tool |
11/29/2012 | US20120300184 Surface correction on coated mirrors |
11/29/2012 | US20120300183 Optical arrangement in a microlithographic projection exposure apparatus |