C30B 31 - Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor

Patents for C30B 31 - Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor (2,201)
06/2012
06/13/2012	CN202275863U 一种用于制作晶体硅太阳能电池pn结的石英炉管 A method for the production of quartz crystalline silicon solar cell of the pn junction tubes
06/13/2012	CN102492988A Preparation method of ion implantation monocrystal jewel colour generation
06/06/2012	CN202268377U 一种晶体硅太阳电池动态扩散装置 A crystalline silicon solar cell dynamic diffuser
06/06/2012	CN102487100A Diffusion method used for solar cell
06/06/2012	CN101792933B Method for preparing material of solar grade silicon monocrystals by mixing and doping
06/05/2012	USRE43450 Method for fabricating semiconductor thin film
05/2012
05/30/2012	CN202247018U Phosphorus oxychloride temperature control system with constant-temperature groove protection device
05/30/2012	CN102477583A 一种对晶硅薄膜掺杂制备超浅结的方法 A crystalline silicon thin films for ultra-shallow junction doping method
05/30/2012	CN101603205B Carbon-doped yttrium aluminium garnet crystal and two-step preparation method thereof
05/23/2012	CN202230992U Air inlet passage device of DCE purging by diffusion furnace tube
05/23/2012	CN102471923A 用于制备鲜艳浅蓝色或鲜艳浅蓝色/绿色的单晶cvd金刚石的方法及其获得的产品 Methods for the preparation of bright blue or bright blue / green crystal cvd diamond and its products obtained
05/02/2012	EP2446072A1 Method for making fancy orange coloured single crystal cvd diamond and product obtained
05/02/2012	EP2446071A1 Method for treating diamond material and product obtained
05/02/2012	EP2446070A1 Method for making fancy pale blue or fancy pale blue /green single crystal cvd diamond and product obtained
05/02/2012	EP2446069A1 Method for treating single crystal cvd diamond and product obtained
05/02/2012	CN102433589A Controllable diffusion furnace tube with multiple gas inlet ends and gas outlet ends
04/2012
04/25/2012	CN102428540A 用于对硅片进行掺硼的方法 Boron-doped silicon wafer method for
04/25/2012	CN101787566B 直拉硅单晶的镓元素掺杂方法及所用掺杂装置 Czochralski silicon single crystal gallium doping methods and apparatus used in doping
04/18/2012	CN102420111A 提高外延层电阻均匀性的方法、外延片及半导体器件 Improve the uniformity of the epitaxial layer resistivity method, epitaxial wafers and semiconductor devices
04/11/2012	EP2439317A1 Process and apparatus for production of crystals of compound of metal belonging to group-13 on periodic table
04/11/2012	CN101824654B 一种制作黑硅材料的方法 A method of making a method of black silicon material
04/04/2012	EP1704118B1 Method for the fabrication of a composite
04/04/2012	CN102403412A 一种类单晶太阳能电池的磷扩散方法 A phosphorus diffusion method type single crystal solar cell
03/2012
03/28/2012	CN102395445A Device and method for simultaneously microstructuring and doping semiconductor substrates
03/28/2012	CN102392307A Thermostatic device for solar cell diffusion source phosphorous oxychloride
03/28/2012	CN101824653B Method for manufacturing black silicon material by scanning and irradiation of light source of broad-pulse laser
03/21/2012	CN102383198A Three-step variable-temperature diffusion process for silicon cell
03/21/2012	CN102383197A Method for processing substrates with process gas
03/21/2012	CN102383112A Thermal processing apparatus
03/15/2012	DE102004041883B4 Halbleitervorrichtung Semiconductor device
03/14/2012	EP2428596A2 Laser crystal components joined with thermal management devices
03/14/2012	CN202164389U 提高太阳能电池扩散均匀性的石英舟 Diffusion of the solar cell to improve the uniformity of the quartz boat
03/01/2012	DE102007063017B4 Substrathalterung für Gasdiffusionsöfen Substrate holder for Gasdiffusionsöfen
02/2012
02/22/2012	CN202148370U 一种太阳电池扩散工艺的尾排装置 Last row apparatus for solar cell diffusion process
02/15/2012	EP2417621A1 Method for boron doping silicon wafers
02/15/2012	CN101562214B 二氧化钛纳米管阵列掺杂方法 Titania nanotube arrays doping methods
02/08/2012	CN102347223A Method for doping silicon wafer with colloidal silicon nano particles
02/01/2012	CN102339896A Manufacturing process for new-generation silicon-based solar cell p-n junction
02/01/2012	CN102337594A Continuously diffusion processing device
01/2012
01/18/2012	CN102321921A Method for rapidly preparing large-area and uniform black silicon material, and device thereof
01/11/2012	EP2403679A2 Device and method for simultaneously microstructuring and doping semiconductor substrates
01/04/2012	CN202099414U Solar battery silicon chip diffusion furnace
01/04/2012	CN102308032A GaN substrate, method for manufacturing GaN substrate, method for manufacturing GaN layer bonded substrate and method for manufacturing semiconductor device
12/2011
12/28/2011	EP2400532A2 Diamond semiconductor element and process for producing the same
12/28/2011	EP2400531A2 Diamond semiconductor element and process for producing the same
12/28/2011	EP2400530A2 Diamond semiconductor element and process for producing the same
12/28/2011	CN202090105U 扩散炉 Diffusion furnace
12/28/2011	CN102299204A 一种太阳能电池片扩散工艺中的退舟出炉方法 A solar cell sheet diffusion process of withdrawal method baked boat
12/28/2011	CN102299060A 连续扩散处理装置 Continuous diffusion processing means
12/28/2011	CN102299059A 连续扩散处理装置 Continuous diffusion processing means
12/28/2011	CN102296367A 连续扩散处理装置 Continuous diffusion processing means
12/21/2011	CN202084521U 一种应用于晶片扩散掺杂的固定装置 Applied to the proliferation of doping wafers fixtures
12/14/2011	EP2395134A1 GaN SUBSTRATE AND METHOD OF ITS MANUFACTURE, METHOD OF MANUFACTURING GaN LAYER-BONDED SUBSTRATE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
11/2011
11/30/2011	CN102263153A 一种改进太阳能电池的扩散方法 An improved solar cell proliferation
11/24/2011	WO2011143777A1 Production of decorated carbon nanotubes
11/23/2011	CN202047173U Doping device applicable to light-dope and medium-and-high-resistance czochralski silicon monocrystal
11/23/2011	CN102251285A Soakage controllable zinc oxide single crystal surface modification method
11/16/2011	CN102244140A Diffusion turnover box
11/16/2011	CN102242401A Diffusion flow equalizing plate used for horizontal diffusion furnace
11/16/2011	CN101671841B Method for preparing nitrogenous dopant for preparing czochralski silicon single crystal
11/09/2011	CN202030864U Silicon carbide paddle for diffusion furnace
11/09/2011	CN202030863U Silicon carbide paddle capable of preventing pushing boat
11/02/2011	EP1393351B1 Method and device for doping, diffusion and oxidation of silicon wafers under reduced pressure
10/2011
10/27/2011	WO2011130859A1 Controlled release formulation based on hematin anhydride crystals for the induction of an innate immune reaction
10/26/2011	CN101694011B Device and method for decreasing temperature rise of wafer in ion implantation process
10/12/2011	CN202007282U Diffusion furnace
10/12/2011	CN101118940B Built crystal substrate and liquid built crystal growing method
10/05/2011	CN102206866A Hydrogen plasma passivation method by preventing discharge with medium
09/2011
09/29/2011	US20110236844 Pulsed processing semiconductor heating methods using combinations of heating sources
09/28/2011	CN201990768U 扩散炉用排气柜及扩散炉 Diffusion furnace exhaust cabinets and diffusion furnace
09/28/2011	CN201990767U 一种扩散间炉门装置 An inter-diffusion door apparatus
09/28/2011	CN201990766U 扩散炉用炉体及扩散炉 Diffusion furnace furnace and diffusion furnace
09/21/2011	CN102191563A Preparation method of codoped silicon-base impurity intermediate belt material
09/21/2011	CN102191562A Boron diffusion method for N-type crystalline silica solar cell
09/15/2011	US20110222840 Heating Configuration For Use in Thermal Processing Chambers
09/07/2011	CN201962420U Infrared heating quartz furnace structure used for producing crystal silicon chip PN junction
09/07/2011	CN101609794B Apparatus and method of temperature conrol during cleaving processes of thick film materials
08/2011
08/31/2011	CN201952526U 一种高纯度三氯氧磷液位差储运供料装置 A high-purity phosphorus oxychloride poor storage and feeding device level
08/31/2011	CN102168312A High-nitrogen-doped silicon chip and rapid nitrogen doping method
08/25/2011	DE102011004247A1 Verfahren zur Herstellung eines Siliziumkarbid-Substrats A method for producing a silicon carbide substrate
08/24/2011	CN201942793U 一种半导体高温扩散炉管 A semiconductor high-temperature diffusion furnace tube
08/24/2011	CN102163664A Method of treating a silicon carbide substrate for improved epitaxial deposition and resulting structure and device
08/24/2011	CN102162138A Doped gas supply equipment and doped gas supply method
08/17/2011	CN1972879B Selective doping of a material
08/17/2011	CN102157606A Diffusion method used for crystalline silicon solar battery
08/17/2011	CN102154707A Multiplex temperature control device for diffusion furnace
08/16/2011	US8000587 Pulsed processing semiconductor heating methods and associated system using combinations of heating sources
07/2011
07/27/2011	EP1926843B1 Doping of particulate semiconductor materials
07/27/2011	CN201908156U Pressure balancing system for tail gas of diffusion furnace
07/27/2011	CN201908155U Automatic phosphorus oxychloride supplementation device of diffusion furnace
07/27/2011	CN102134753A Automatic liquid-replenishing device for diffusion furnace in solar battery production
07/26/2011	CA2687129C Nanocrystalline alloys of the fe3al(ru) type and use thereof optionally in nanocrystalline form for making electrodes for sodium chlorate synthesis
07/20/2011	CN1845292B Magnetic field assistant self glow plasma ion implantation device
07/13/2011	CN201896206U Adjustable diffusion-furnace structure
07/06/2011	CN201890953U Diffusion furnace device
06/2011
06/22/2011	CN201873778U Multiple temperature control device of diffusion furnace
06/15/2011	CN102094247A Two-end gas intake device for phosphorous diffusion furnace tube
06/15/2011	CN101775661B Preparation method of sapphire doping agent
05/2011
05/24/2011	US7949237 Heating configuration for use in thermal processing chambers
05/18/2011	EP1405018B1 Wafer boat with arcuate wafer support arms

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