| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 06/13/1996 | DE19539961C1 Method for thermal evaporation of electrically conductive materials |
| 06/13/1996 | DE19516233C1 Vaporiser boat used in PVD techniques |
| 06/13/1996 | DE19515172C1 Depositing coloured layers onto substrates |
| 06/13/1996 | CA2206109A1 Sputtering apparatus having an on board service module |
| 06/12/1996 | EP0716441A2 Substrate holding device and manufacturing method therefor |
| 06/12/1996 | EP0716161A1 Apparatus for coating of optical substrate |
| 06/12/1996 | EP0716160A1 Geometries and configurations for magnetron sputtering apparatus |
| 06/12/1996 | EP0716159A1 Brazable articles |
| 06/12/1996 | EP0666933B1 Device for plasma-supported electron beam high-rate vapour deposition |
| 06/12/1996 | CN2228916Y Magneto-controlled sputtering - multi-arc multifunction vacuum plating apparatus |
| 06/11/1996 | US5525805 Pulsed ion beam source |
| 06/11/1996 | US5525420 Method for increasing the service life of tools and a wear protection-coated tool |
| 06/11/1996 | US5525380 Method of making a device for converting infrared radiation |
| 06/11/1996 | US5525369 Cooling and tensioning a composite of metal and polymeric material while depositing a metal from vapor phase |
| 06/11/1996 | US5525199 Low pressure reactive magnetron sputtering apparatus and method |
| 06/11/1996 | US5525158 Thin film deposition apparatus |
| 06/06/1996 | WO1996017369A1 Process of metallizing phosphor screens |
| 06/06/1996 | WO1996017225A2 Highly sensitive optical fiber cavity coating removal detection |
| 06/06/1996 | WO1996017171A2 Getter pump module and system |
| 06/06/1996 | WO1996017114A1 PROCESS FOR FORMING A FILM, ESPECIALLY OF LiNbO3, AND A COMPONENT CONTAINING SUCH A FILM |
| 06/06/1996 | WO1996017101A1 A PROCESS FOR IN-SITU DEPOSITION OF A Ti/TiN BARRIER METAL STACK |
| 06/06/1996 | CA2485918A1 Getter pump module and system |
| 06/06/1996 | CA2206264A1 Getter pump module and system |
| 06/05/1996 | EP0715336A2 Method and apparatus for planar magnetron sputtering |
| 06/05/1996 | EP0715335A1 System for processing a workpiece in a plasma |
| 06/05/1996 | EP0714997A1 Process for manufacturing layers of diamond doped with boron |
| 06/05/1996 | EP0714996A1 A method for minimising thermal gradients in an object |
| 06/05/1996 | EP0714454A1 Masking means and cleaning techniques for surfaces of substrates |
| 06/05/1996 | DE4442885A1 Verfahren zur Bildung einer Schicht, insbesondere aus LiNbO¶3¶ sowie eine solche Schicht enthaltendes Bauelement A method for forming a layer, in particular of LiNbO¶3¶ and such a layer containing component |
| 06/05/1996 | DE4442733A1 Evaporator for vacuum vapour coating strip e.g. with zinc@ |
| 06/05/1996 | DE19544123A1 Process for plasma coating articles |
| 06/04/1996 | US5523955 System for characterizing AC properties of a processing plasma |
| 06/04/1996 | US5523652 Microwave energized ion source for ion implantation |
| 06/04/1996 | US5523166 High density tantalum, aluminum, silicon, titanium, barium, strontium, zirconium, yttrium, and/or hafnium oxide coating;defect-free, microelectronics |
| 06/04/1996 | US5522976 Target comprising high melting inorganic compound interpenetrating support layer of metal foam or felt; large area, efficiency |
| 06/04/1996 | US5522955 Process and apparatus for producing thin lithium coatings on electrically conductive foil for use in solid state rechargeable electrochemical cells |
| 06/04/1996 | US5522535 Methods and structural combinations providing for backing plate reuse in sputter target/backing plate assemblies |
| 05/30/1996 | WO1996016531A1 An apparatus for generation of a linear arc discharge for plasma processing |
| 05/30/1996 | WO1996016198A1 Apparatus for the relative vacuum deposition of a material on bulk parts |
| 05/30/1996 | WO1996016197A1 Process for coating substrates and a device for carrying out said process |
| 05/30/1996 | WO1996016196A2 Laser deposition of coatings |
| 05/30/1996 | WO1996009622A3 Apparatus and method for sputtering carbon |
| 05/29/1996 | EP0714122A1 Method for forming nitrogen-doped group ii-vi compound semiconductor film |
| 05/29/1996 | EP0458991B1 Process for forming epitaxial film |
| 05/29/1996 | EP0442939B1 Improved magnetron sputtering cathode |
| 05/29/1996 | CN1123341A Gaseous ion film-plating method and device thereof |
| 05/29/1996 | CN1123340A Surface treatment for precision metallic coupling moving parts |
| 05/28/1996 | US5520966 Embedding ions such as molybdenum which alloy with the aluminum of the honeycomb |
| 05/28/1996 | US5520851 Indium tin oxide on a substrate for radiation transparent multilayer element |
| 05/28/1996 | US5520785 Annealing |
| 05/28/1996 | US5520784 Ultrasonic enhancement of aluminum step coverage and apparatus |
| 05/28/1996 | US5520664 Applying nonleaching metal |
| 05/28/1996 | US5520501 Wafer holding apparatus |
| 05/28/1996 | US5520142 Decompression container |
| 05/28/1996 | US5520002 High speed pump for a processing vacuum chamber |
| 05/23/1996 | WO1996015544A1 Device for coating substrates using a vapour phase material in a reduced pressure or vacuum environment |
| 05/23/1996 | WO1996015284A1 Method of producing reactive element modified-aluminide diffusion coatings |
| 05/23/1996 | WO1996015283A1 Method of bonding targets to backing plate member |
| 05/23/1996 | WO1996014957A1 Backing plate reuse in sputter target/backing |
| 05/23/1996 | WO1996014956A1 Bonding of targets to backing plate members |
| 05/22/1996 | EP0713242A2 Device for suppressing arcing in cathode sputtering installations |
| 05/22/1996 | EP0712942A1 Filmed substrate, and method and apparatus for producing the same |
| 05/22/1996 | EP0712940A1 Durable thermal barrier coating |
| 05/22/1996 | EP0712818A2 Article for use under high vacuum at high temperature |
| 05/22/1996 | CN1122843A Coating of chromium and nitrogen having good wear resistance properties |
| 05/22/1996 | CN1031837C Alternating electric field vacuum ion sedimentation and equipment thereof |
| 05/21/1996 | US5519566 Method of manufacturing ferroelectric bismuth layered oxides |
| 05/21/1996 | US5518967 Process for producing a semiconductor device capable of planarizing a metal film surface thereon |
| 05/21/1996 | US5518807 Porous oxiding fluoropolymer, oxidizable metal layer |
| 05/21/1996 | US5518780 Method of making hard, transparent amorphous hydrogenated boron nitride films |
| 05/21/1996 | US5518771 Method and apparatus for subjecting a workpiece to elevated pressure |
| 05/21/1996 | US5518599 Cross flow metalizing of compact discs |
| 05/21/1996 | US5518597 Cathodic arc coating apparatus and method |
| 05/21/1996 | US5518596 Procedure and apparatus for improving a plasma accelerator plating apparatus used for diamond plating |
| 05/21/1996 | US5518594 Windows for automobiles and buildings, energy efficient, sputtering apparatus |
| 05/21/1996 | US5518593 Shield configuration for vacuum chamber |
| 05/21/1996 | US5518592 Seal cartridge for a rotatable magnetron |
| 05/21/1996 | US5518548 Deposition barrier |
| 05/21/1996 | US5518536 Alkaline earth metal-heptane dionate compounds |
| 05/21/1996 | US5518432 Electroluminescence; manganese doped zinc sulfide |
| 05/17/1996 | WO1996014653A2 Method and apparatus for reducing arcing in plasma processing chambers |
| 05/17/1996 | WO1996014448A1 Method for depositing a hard protective coating |
| 05/15/1996 | EP0711817A2 Water-repellent thin films and methods for the preparation thereof |
| 05/15/1996 | EP0628090B1 A coated article |
| 05/15/1996 | DE19514251C1 Sodium sensitive film field-effect sensor construction |
| 05/15/1996 | CN2227136Y Convenient washing basin |
| 05/14/1996 | US5516732 Wafer processing machine vacuum front end method and apparatus |
| 05/14/1996 | US5516725 Contact alloy having capacity when in combination with a substrate compound to exist as a two phase binary equilibrium reciprocal system; sputtering; annealing |
| 05/14/1996 | US5516555 Evaporation method for forming a gas barrier film having an organosilicon dispersed discontinuously in an inorganic matrix |
| 05/14/1996 | US5516403 Reversing orientation of sputtering screen to avoid contamination |
| 05/09/1996 | WO1996013688A1 Antireflection coating for a temperature sensitive substrate |
| 05/09/1996 | WO1996013620A1 In situ getter pump system and method |
| 05/09/1996 | DE4439924A1 Carbon@ cladding layer for electrostatic spraying |
| 05/09/1996 | DE4439920A1 Depositing material on a substrate in a chamber by sublimation |
| 05/09/1996 | DE4439841A1 Thin film with fine, even microstructure for ultrafiltration or catalytic membranes |
| 05/09/1996 | DE19515882C1 Vacuum coating of disc-shaped substrates |
| 05/09/1996 | DE19504088C1 Thin layer electrode for determining concentration of metal ions in solution |
| 05/08/1996 | EP0710992A1 Superconducting metal oxide film and method of preparing same |
| 05/08/1996 | EP0710977A1 Surface treatment method and system |
| 05/08/1996 | EP0710830A2 In-process film thickness monitoring system |