| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 09/17/1996 | US5556472 Film deposition apparatus |
| 09/17/1996 | US5556462 Growth method by repeatedly measuring flux in MBE chamber |
| 09/17/1996 | US5556204 Method and apparatus for detecting the temperature of a sample |
| 09/12/1996 | WO1996027689A1 Method and apparatus for cooling a sputtering target |
| 09/12/1996 | WO1996027451A1 Multilayer ion plated coatings comprising titanium oxide |
| 09/12/1996 | DE19508898A1 Prodn. of indium oxide-tin oxide target for cathode sputtering |
| 09/12/1996 | DE19508535A1 Magnetron cathodic sputtering target |
| 09/11/1996 | EP0731206A1 Product of vapor deposition and method of manufacturing same |
| 09/11/1996 | EP0731189A1 Apparatus and method for depositing films on substrate via on-axis laser ablation |
| 09/11/1996 | EP0731188A2 Apparatus and method for depositing films on substrate via off-axis laser ablation |
| 09/11/1996 | EP0731183A1 Sealing device for inlet or outlet of atmosphere equipment |
| 09/11/1996 | EP0730670A1 Coated body, its method of production and its use |
| 09/11/1996 | EP0730669A1 Magneto-optical alloy sputter targets |
| 09/11/1996 | EP0730513A1 An abrasive material for precision surface treatment and a method for the manufacturing thereof |
| 09/11/1996 | EP0611479A4 High-temperature superconductor compound thin film and method. |
| 09/10/1996 | US5554857 Method and apparatus for ion beam formation in an ion implanter |
| 09/10/1996 | US5554854 In situ removal of contaminants from the interior surfaces of an ion beam implanter |
| 09/10/1996 | US5554415 Vaporization with lasers; coating |
| 09/10/1996 | US5554266 Semiconductor device manufacturing apparatus |
| 09/10/1996 | US5554249 Magnetron plasma processing system |
| 09/10/1996 | US5554224 Substrate heater for thin film deposition |
| 09/10/1996 | US5554222 Ionization deposition apparatus |
| 09/10/1996 | US5553700 Treatment method and apparatus for printed circuit boards and the like |
| 09/10/1996 | US5553396 Vacuum processing apparatus and operating method therefor |
| 09/08/1996 | CA2171126A1 Apparatus and method for depositing films on substrate via off-axis laser ablation |
| 09/08/1996 | CA2171125A1 Apparatus and method for depositing films on substrate via on-axis laser ablation |
| 09/06/1996 | WO1996017225A3 Highly sensitive optical fiber cavity coating removal detection |
| 09/05/1996 | DE19518781C1 Metal body with alpha-alumina coating for e.g. shaping tool |
| 09/04/1996 | EP0730045A2 Steel sheet with Zn-Mg binary coating layer excellent in corrosion resistance and manufacturing method thereof |
| 09/04/1996 | EP0730044A2 Boron-aluminum nitride coating and method of producing same |
| 09/04/1996 | EP0729640A1 Methods and apparatus for altering material using ion beams |
| 09/04/1996 | EP0729593A1 Method of producing a surface-layer structure, and use of the method |
| 09/04/1996 | EP0729520A1 Method and device for coating the inside walls of hollow articles, in particular small articles |
| 09/04/1996 | EP0729302A1 Anti-microbial materials |
| 09/04/1996 | EP0636285B1 Stabilizer for switch-mode powered rf plasma processing |
| 09/04/1996 | EP0605444B1 Process and apparatus for surface hardening of refractory metal workpieces |
| 09/04/1996 | CN1130407A Filmed substrate, and method and apparatus for producing the same |
| 09/04/1996 | CN1130215A Method and equipment for plane magnetic control sputtering plating |
| 09/04/1996 | CN1130214A Technology and equipment for vacuum continuous permeating plating poly alloy and compound thin film for blind hole |
| 09/04/1996 | CN1032702C Golden gradual change alternative coating work-piece and its preparing method |
| 09/03/1996 | US5552675 High temperature reaction apparatus |
| 09/03/1996 | US5552375 Semiconductors and conductors with sputtered superconductors and photoresists then etching |
| 09/03/1996 | US5552341 Semiconductor device and method for manufacturing the same |
| 09/03/1996 | US5552327 Methods for monitoring and controlling deposition and etching using p-polarized reflectance spectroscopy |
| 09/03/1996 | US5552226 Improved adhesion, treating polycarbonate with sulfur hexafluoride plasma |
| 09/03/1996 | US5552203 Magnetic disk having a protective layer of sputtered particles of two differently controlled grain sizes |
| 09/03/1996 | US5552180 Multilayer heat processable vacuum coatings with metallic properties |
| 09/03/1996 | US5551982 Semiconductor wafer process chamber with susceptor back coating |
| 09/03/1996 | US5551959 Abrasive article having a diamond-like coating layer and method for making same |
| 08/29/1996 | WO1996026532A1 Deposition apparatus |
| 08/29/1996 | WO1996026531A2 Filtered cathodic arc source |
| 08/29/1996 | WO1996026305A1 Method for producing uniaxial tetragonal thin films of ternary intermetallic compounds |
| 08/29/1996 | WO1996026302A1 Reactive sputtering process |
| 08/29/1996 | WO1996025960A1 Implant |
| 08/29/1996 | WO1996014653A3 Method and apparatus for reducing arcing in plasma processing chambers |
| 08/29/1996 | DE19606463A1 Multi-chamber cathode sputtering appts. |
| 08/29/1996 | DE19534898A1 Electrophoretic dip lacquering of plastic substrates, for automobile work |
| 08/29/1996 | DE19506188A1 Implantat Implant |
| 08/28/1996 | EP0729173A1 Metal ion implanting apparatus |
| 08/28/1996 | EP0728707A2 Method for manufacturing an optical element |
| 08/28/1996 | EP0728230A1 Method of depositing monomolecular layers |
| 08/28/1996 | EP0728224A1 Apparatus for a thin film manufacturing |
| 08/28/1996 | EP0728223A1 Superplastic titanium by vapor deposition |
| 08/28/1996 | EP0728069A1 Abrasion wear resistant coated substrate product |
| 08/28/1996 | EP0655974A4 Antireflection coatings. |
| 08/28/1996 | CN2233931Y Rotary magnetic cavity columnar multi-arc source-plain magnetic controlled sputtering source ion coater |
| 08/28/1996 | CN1032673C Method for manufacturing electric heating films and its products |
| 08/27/1996 | US5550091 Method of sputtering a silicon nitride film |
| 08/27/1996 | US5550089 Electron beam evaporation of gadolinium-gallium oxide to form gallium oxide coating onto semiconductor substrate |
| 08/27/1996 | US5549980 Cemented carbide with binder phase enriched surface zone |
| 08/27/1996 | US5549979 Magnetic recording medium |
| 08/27/1996 | US5549975 Coated tool and cutting process |
| 08/27/1996 | US5549802 Cleaning of a PVD chamber containing a collimator |
| 08/27/1996 | US5549764 Wear resistant coated steel article |
| 08/27/1996 | US5549435 Chamber and a chamber combination for a vacuum facility and a method for transporting through at least one workpiece |
| 08/27/1996 | US5549237 Apparatus and method for cold welding thin wafers to hard substrates |
| 08/27/1996 | EP0746636A4 Corrosion prevention of honeycomb core panel construction using ion beam enhanced deposition |
| 08/22/1996 | WO1996025768A1 METHOD OF FABRICATING HIGH-EFFICIENCY Cu(In,Ga)(Se,S)2 THIN FILMS FOR SOLAR CELLS |
| 08/22/1996 | WO1996025537A1 Method and apparatus for producing single crystal carbon films |
| 08/22/1996 | WO1996025535A1 Device having a switch comprising a chromium layer and method for depositing chromium layers by sputtering |
| 08/22/1996 | WO1996025534A1 Apparatus and method for a reliable return current path for sputtering processes |
| 08/22/1996 | WO1996025533A1 High utilization sputtering target |
| 08/22/1996 | WO1996025532A1 Mechanically joined sputtering target and adapter therefor |
| 08/22/1996 | WO1996025531A1 Gas manifold for an off-axis sputter apparatus |
| 08/22/1996 | WO1996025291A1 Compounds of carbon and nitrogen on a substrate |
| 08/22/1996 | DE19505879A1 Reusable mask for precious metal PVD process |
| 08/22/1996 | DE19505258A1 Appts. for simultaneous plating |
| 08/22/1996 | CA2213073A1 Mechanically joined sputtering target and adapter therefor |
| 08/22/1996 | CA2208342A1 Gas manifold for an off-axis sputter apparatus |
| 08/21/1996 | EP0727510A2 Improved Alumina coated cemented carbide body |
| 08/21/1996 | EP0727506A1 Golden ornament and method for production thereof |
| 08/21/1996 | EP0727505A1 Process for the codeposition of metallic oxides on a plastic film |
| 08/21/1996 | EP0726967A1 A method and an apparatus for generation of a discharge in own vapors of a radio frequency electrode for sustained self-sputtering and evaporation of the electrode |
| 08/21/1996 | EP0674804B1 Metal vapour deposition unit |
| 08/21/1996 | EP0519921B1 Electrochromic element, materials for use in such element, processes for making such element and such materials and use of such element in an electrochromic glass device |
| 08/21/1996 | CN1129463A Sealing device for inlet or outlet of atmosphere equipment |
| 08/20/1996 | US5547767 Wear resistant coating |
| 08/20/1996 | US5547715 Method for fabricating an ignitable heterogeneous stratified metal structure |
| 08/20/1996 | US5547714 Forming amorphous carbon film over solid |
| 08/20/1996 | US5547557 Indium-nickel alloy |