Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
01/2006
01/25/2006CN1238552C Sputtering target assembly of oxide sintered body
01/25/2006CN1238547C Refractory metal plates with uniform texture and methods of making same
01/24/2006US6989573 Lanthanide oxide/zirconium oxide atomic layer deposited nanolaminate gate dielectrics
01/24/2006US6989457 Chemical vapor deposition precursors for deposition of tantalum-based materials
01/24/2006US6989304 Method for manufacturing a ruthenium film for a semiconductor device
01/24/2006US6989083 Method for preparing carbon nano-fine particle, apparatus for preparing the same and mono-layer carbon nanotube
01/24/2006US6988306 Machining the surface to get gradient thickness, thinner center, uniformly distributing magnetic leakage flux across the sputter target; producing uniformly sputtered films on wafers; semiconductors
01/24/2006CA2184432C Apparatus for coating substrates in a vacuum
01/19/2006WO2006007341A1 Coated article and process for coating article with anticorrosive finish
01/19/2006WO2006007280A1 Vaporizing temperature sensitive materials
01/19/2006WO2006007062A2 Msvd coating process
01/19/2006WO2006006637A1 Magnetron sputtering device making magnetic flux arrangement (balanced type/unbalanced type) switchable and film forming method for inorganic thin film material using this device, and dual-type magnetron sputtering device and film forming method for inorganic thin film material making possible low-temperature film forming b
01/19/2006WO2006006633A1 MgO DEPOSITION MATERIAL
01/19/2006WO2006006627A1 MgO DEPOSITION MATERIAL
01/19/2006WO2006006522A1 Sputtering target material
01/19/2006WO2006005288A1 Method for producing a coat on a piston ring and piston ring
01/19/2006WO2006005095A1 Material for conductor tracks made of copper alloy
01/19/2006WO2005103321A3 Ionized physical vapor deposition (ipvd) process
01/19/2006WO2005089107A3 Apparatus and method for applying coatings onto the interior surfaces of components and related structures produced therefrom
01/19/2006WO2005004189A3 Sidewall magnet improving uniformity of inductively coupled plasma and shields used therewith
01/19/2006US20060014912 preparing a green powder product of polyvinylidene fluoride comprising crystal form by subjecting vinylidene fluoride to radical polymerization in the presence of a bromine or iodine compound having 1 to 20 carbon atoms which contains perfluoroalyl groups as chain transferring agent; ferroelectricity
01/19/2006US20060014304 Superconductor and process for producing the same
01/19/2006US20060014041 durable cutting tools having hard coatings comprising borides, nitrides, borides or oxides of aluminum, titanium and/or chromium, intermediate layers and alumina coatings
01/19/2006US20060013972 Multilayer sheet and package body made from the multilayer sheet for packaging food, medicine or tool
01/19/2006US20060013964 Apparatus and method for focused electric field enhanced plasma-based ion implantation
01/19/2006US20060013949 Vapor deposition crucible
01/19/2006US20060012881 Atomic layer controlled optical filter design for next generation dense wavelength division multiplexer
01/19/2006US20060012013 Columnar structured material and method of manufacturing the same
01/19/2006US20060012005 Method for producing a component comprising a conductor structure that is suitable for use at high frequencies
01/19/2006US20060011995 Method of forming an oxide film
01/19/2006US20060011970 Field-effect transistors having doped aluminum oxide dielectrics
01/19/2006US20060011603 Melting and vaporizing apparatus and method
01/19/2006US20060011473 Discharging power source, sputtering power source, and sputtering device
01/19/2006US20060011471 allows selective formation of features, without any shape limitation, giving rise to a novel product, offering novel esthetic possibilities and making it possible to renew and improve the appearance of watches, in particular the appearance of watches having fixed and rotary bezels
01/19/2006US20060011470 Sputtering magnetron control devices
01/19/2006US20060011469 Coating system for coating a mold
01/19/2006US20060011468 Method and system for coating internal surfaces of prefabricated process piping in the field
01/19/2006US20060011467 Method of manufacturing the multi-tip probe, a multi-tip probe, and surface characteristic analysis apparatus
01/19/2006US20060011466 Method of fabricting indium tin oxide film with well thermal stabilization and low resistivity
01/19/2006CA2569860A1 Highly oxidation resistant hard coating for cutting tools
01/18/2006EP1617456A1 Driving mechanism for a vacuum treating system
01/18/2006EP1616978A1 Multilayer coating excellent in wear and heat resistance
01/18/2006EP1616975A2 Coated substrate
01/18/2006EP1616974A1 METHOD FOR PREPARING ALUMINA COATING FILM COMPRISING a-TYPE C RYSTAL STRUCTURE AS PRIMARY CRYSTAL STRUCTURE AND METHOD FOR MANUFACTURING MEMBER COATED WITH LAMINATED COATING FILM
01/18/2006EP1616694A1 Process for producing packaging laminate material
01/18/2006CN2752272Y Energy-saving zinc evaporation source
01/18/2006CN1723741A Light-emitting device, film-forming method and manufacturing apparatus thereof, and cleaning method of the manufacturing apparatus
01/18/2006CN1723294A Polygonal barrel spattering device, polygonal barrel spattering method, coated particle formed by the device and method, microcapsule, and method of manufacturing the microcapsule
01/18/2006CN1723292A High purity nickel/vanadium sputtering components; and methods of making sputtering components
01/18/2006CN1721666A Exhaust pipe for internal combustion engine
01/18/2006CN1721571A Method for preparing sensitive membrane on acoustic surface wave liquid phase array sensor
01/18/2006CN1721570A Method for aluminide coating a hollow article
01/18/2006CN1721569A Coat base with curved surface and method for manufacturing such coat base
01/18/2006CN1721346A Core for molding glass and manufacturing method thereof
01/18/2006CN1721306A Device for changing a web roll
01/18/2006CN1237202C Visibly marked parts and method for using same
01/18/2006CN1237200C Silicon dioxide deposition by plasma activated evaporation process
01/18/2006CN1237199C Substrate with transparent conductive film and organic electroluminescence device using the substrate
01/17/2006US6987162 Method and apparatus of producing high-density polyimide (HPI) film
01/17/2006US6987063 Method to reduce impurity elements during semiconductor film deposition
01/17/2006US6986965 Device enclosures and devices with integrated battery
01/17/2006US6986834 Hafnium silicide target and manufacturing method for preparation thereof
01/12/2006WO2006004673A1 Single piece coil support assemblies, coil constructions and methods of assembling coil constructions
01/12/2006WO2006003398A1 Thin film aluminium nitride ultrasound transducers integrated on the test components
01/12/2006WO2006003322A2 Ion implanter operating in pulsed plasma mode
01/12/2006WO2006003231A1 Phosphorus effusion cell arrangement and method for producing molecular phosphorus
01/12/2006WO2006002673A1 Method for producing a metal wire coated with a layer of brass
01/12/2006WO2005080626A9 A method for coating a medical device using a matrix assisted pulsed-laser evaporation technique and associated system and medical device
01/12/2006WO2005052979A3 Plasma source with segmented magnetron cathode
01/12/2006US20060008669 providing a metal or alloy substrate, depositing stainless steel on the substrate; depositing a carbide or nitride of a first metal on the substrate, thus forming nanocomposite coating of stainless steel and carbide or nitride on the substrate
01/12/2006US20060008657 Forming at least one dielectric layer on the substrate, forming an infrared (IR) reflecting layer comprising silver on the substrate over at least the first dielectric layer, forming at least one additional dielectric layer on the substrate over at least the IR reflecting layer; solar control coatings
01/12/2006US20060008656 Overcoat layer (e.g., of silicon nitride) of a low-E coating is ion beam treated in a manner so as to cause the ion beam treated layer to include nitrogen-doped and/or nitrogen graded silicon nitride; durability
01/12/2006US20060008655 Coated Article having low-E coating with ion beam treated IR reflecting layer and corresponding method
01/12/2006US20060008654 Coated article having low-E coating with ion beam treated IR reflecting layer and corresponding method
01/12/2006US20060006497 Capacitors having doped aluminum oxide dielectrics
01/12/2006US20060006382 Composite material
01/12/2006US20060006064 Target tiles in a staggered array
01/12/2006US20060006059 Method for preparing alumna coating film having alpha-type crystal structure as primary structure
01/12/2006US20060006058 Staggered target tiles
01/12/2006US20060005745 Method of producing a titanium-suboxide-based coating material, correspondingly produced coating material and sputter target provided there-with
01/12/2006DE112004000235T5 Fotomasken-Rohling, Fotomaske und Bild-Übertragungsverfahren unter Verwendung einer Fotomaske Photomask blank photo mask and image transmission method using a photomask
01/12/2006DE112004000219T5 Gemischtphase-Kompressions-Tantaldünnfilme und Verfahren zum Herstellen derselben Mixed phase compression tantalum thin films and methods of making the same
01/12/2006DE102005023904A1 Depositing films on substrate, e.g. liner or barrier layer in semiconductor devices, by depositing first films of target material with magnetron, and depositing second film using reactive physical vapor deposition process with magnetron
01/12/2006DE102004030523A1 Transportsystem für Nanopartikel und Verfahren zu dessen Betrieb Transport system for nanoparticles and method for its operation
01/12/2006DE102004029595A1 Preparation of nano-column of arrays in polymer matrix on a substrate, comprises simultaneous separation of metal and polymer steam from the gaseous phase
01/12/2006DE102004029526A1 Vorrichtung zur Kohlenstoffabschiebung Apparatus for carbon removal
01/12/2006DE102004029525A1 Befestigungseinheit für Zündeinheiten und Vorrichtung zur Kohlenstoffabscheidung Mounting unit for ignition units and apparatus for carbon capture
01/12/2006DE102004028840A1 Device for producing multiple layer systems comprises a coating chamber divided into locally delimited coating zones formed by coating sources to coat substrates with coating material
01/12/2006DE102004028487A1 Verfahren zur Herstellung verschleissfester Flanken für einen Trapezring für Verbrennungsmotoren Process for the preparation of wear-edges for a keystone ring for internal combustion engines
01/12/2006DE102004027722A1 Lock device used in vacuum chambers for coating substrates comprises a motor for introducing a torque in the pivoting shaft on an inlet site lying in a fixing region of a shut-off device
01/11/2006EP1614773A2 Insert for metal cutting
01/11/2006EP1614767A1 Target tiles in a staggered array
01/11/2006EP1614766A1 Method for forming porous thin film
01/11/2006EP1614765A2 Low temperature growth of oriented carbon nanotubes
01/11/2006EP1614764A1 Decorative coating by deposition of alternating nitrure layers
01/11/2006EP1614655A1 Hard coating and its production method
01/11/2006EP1614199A1 Coated optics to improve durability
01/11/2006EP1614139A1 Sputtering chamber comprising a liner
01/11/2006EP1613788A1 Method and apparatus for depositing material on a substrate
01/11/2006EP1390560B1 Process for making platelets