Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
02/2006
02/22/2006CN1737187A Method for protecting articles, and related compositions
02/22/2006CN1737186A Plasma arc processing apparatus
02/22/2006CN1737185A Process for preparing TiO2-X membrane on material using plasma submerged ion implantation method and application thereof
02/22/2006CN1736927A Sunshine control film glass series of three-layer film structure
02/22/2006CN1736924A Holding device for a screen
02/22/2006CN1243122C Vapor source having linear aperture and coating process
02/21/2006US7003219 Substrate processing method
02/21/2006US7001859 Low conductivity and sintering-resistant thermal barrier coatings
02/21/2006US7001675 Method of forming a nanocomposite coating
02/21/2006US7001672 Laser based metal deposition of implant structures
02/21/2006US7001491 Vacuum-processing chamber-shield and multi-chamber pumping method
02/21/2006US7001467 Direct-write laser transfer and processing
02/21/2006US7000565 Plasma surface treatment system and plasma surface treatment method
02/16/2006WO2006017070A2 Protective cotaing on a substrate and method of making thereof
02/16/2006WO2006016165A1 Semiconductor device manufacturing apparatus and a method of controlling a semiconductor device manufacturing process
02/16/2006WO2005115936A3 NANO GLASS POWER AND USE THEREOF, PARTICULARLY MULTICOMPONENT GLASS POWDER WITH A MEAN PARTICLE SIZE OF LESS THAN 1 µM
02/16/2006WO2005089092A3 Growth of in-situ thin films by reactive evaporation
02/16/2006WO2005086645A3 Coated article with low-e coating including ir reflecting layer(s) and corresponding method
02/16/2006US20060035452 Transparent oxide semiconductor thin film transistor
02/16/2006US20060035396 Semiconductor device manufacturing apparatus and a method of controlling a semiconductor device manufacturing process
02/16/2006US20060035067 Film multilayer body and flexible circuity board
02/16/2006US20060035025 Activated species generator for rapid cycle deposition processes
02/16/2006US20060035023 Method for making a strain-relieved tunable dielectric thin film
02/16/2006US20060035021 Vertical-offset coater and methods of use
02/16/2006US20060035015 Making a cathode structure for OLEDS
02/16/2006US20060033057 Deposition system and film thickness monitoring device thereof
02/16/2006US20060032741 Sputtering cathode adapter assembly and method
02/16/2006US20060032740 Slotted thin-film sputter deposition targets for ferromagnetic materials
02/16/2006US20060032739 Method for producing silicon oxide film and method for producing optical multilayer film
02/16/2006US20060032738 Power delivery control and balancing between multiple loads
02/16/2006US20060032737 Magnetron sputtering device, a cylindrical cathode and a method of coating thin multicomponent films on a substrate
02/16/2006US20060032736 Deformation reduction at the main chamber
02/16/2006US20060032735 Rejuvenation of refractory metal products
02/16/2006US20060032073 Vacuum processing apparatus and operating method therefor
02/16/2006DE19837516B9 Verfahren und Vorrichtung zur Ausbildung einer dünnen Schicht Method and apparatus for forming a thin layer
02/16/2006DE112004000651T5 Gleitelement Slider
02/16/2006DE10393947T5 Widerstandsbeheiztes Schiffchen und Herstellungsverfahren dafür Resistance heated boat and manufacturing method thereof
02/16/2006DE102005011327A1 Device for applying a film to a flat substrate comprises a disk arranged in a chamber, bearing bodies arranged on the periphery of the disk, a drive unit for rotating the disk and/or bearing bodies and a unit for applying a film
02/16/2006DE102005008410B3 Coating steel bands comprises heating bands and applying liquid metal coating
02/16/2006CA2576935A1 Method of making vapour deposited oxygen-scavenging particles
02/15/2006EP1626432A1 Magnetron sputtering device, cylinder cathode and a method of applying thin films of different materials to a substrate
02/15/2006EP1626416A1 Amorphous transparent conductive film, sputtering target as its raw material, amorphous transparent electrode substrate, process for producing the same and color filter for liquid crystal display
02/15/2006EP1626104A1 Member with coating layers used for casting
02/15/2006EP1626103A2 Mask frame assembly for depositing thin layer and organic light emitting display device manufactured using the mask frame assembly
02/15/2006EP1625631A1 Pulverized organic semiconductors and method for vapor phase deposition onto a support
02/15/2006EP1625628A2 METHOD FOR PRODUCING TRANSPARENT P-CONDUCTIVE CuAlO2
02/15/2006EP1625603A2 Generation of uniformly-distributed plasma
02/15/2006EP1131054B1 Methods for preparing coated drug particles and pharmaceutical formulations thereof
02/15/2006CN2758276Y Evaporation device of metal smoke
02/15/2006CN1735707A 镍合金溅射靶 Nickel alloy sputtering target
02/15/2006CN1735699A Surface hardened stainless steel with improved wear resistance and low static friction properties
02/15/2006CN1735562A A process for the production of porous inorganic materials or a matrix material containing nanoparticles
02/15/2006CN1734717A Process for manufacturing photosensitive flat-panel with Se allotropic P.N or N.P structure
02/15/2006CN1734711A Vacuum processing device
02/15/2006CN1734606A Silver alloy reflective film, sputtering target therefor, and optical information recording medium using the same
02/15/2006CN1733973A Method for preparing nanometer zinc oxide thin film using high temperature oxidation
02/15/2006CN1733966A Apparatus for heating substrate and method for controlling temperature of susceptor for heated substrate
02/15/2006CN1733965A Magnetron sputtering device, a cylindrical cathode and a method of coating thin multicomponent films on a substrate
02/15/2006CN1733964A Resin composition for direct vapor deposition, molded articles made by using the same, and surface-metallized lamp housing
02/15/2006CN1733954A Aluminium alloy for tribologically stressed surfaces
02/15/2006CN1733444A Method for manufacturing forming die for optical element, forming die for optical element and optical element
02/15/2006CN1733393A Member with coating layers used for casting
02/15/2006CN1242456C Semiconductor device manufacturing apparatus employing vacuum system
02/15/2006CN1242399C Tetrahedral amorphous carbon film and preparation method thereof
02/15/2006CN1242383C Magnetic thin film disk with a nonuniform composition
02/15/2006CN1241857C Coated glass with ultraviolet ray cutting-off function and preparation method thereof
02/15/2006CN1241734C Resin shaping block
02/15/2006CN1241732C Method of manufacturing metallic composite material
02/14/2006US6998661 Integrated circuit structure including electrodes with PGO ferroelectric thin film thereon
02/14/2006US6998497 Metal bis-triflimide compounds and methods for synthesis of metal bis-triflimide compounds
02/14/2006US6998341 Process for forming a diffusion barrier material nitride film
02/14/2006US6998331 Methods for fabricating three dimensional anisotropic thin films and products produced thereby
02/14/2006US6998286 Thin film-structure and a method for producing the same
02/14/2006US6998173 Formed by sintering in atmosphere having partial pressure and for part of time a nitrogen partial pressure; no carbon penetration or carbon precipitation in zone of binder enrichment
02/14/2006US6998172 Thermally-stabilized thermal barrier coating
02/14/2006US6998156 Deposition of thin films using an infrared laser
02/14/2006US6998153 Nitriding silicon surface of wafer with nitrogen plasma; overcoating with nickel; annealing
02/14/2006US6998070 Sputtering target and transparent conductive film
02/14/2006US6998034 in which time to deposit a film on a substrate can be prolonged or the degree of freedom to form a laminated film can be enhanced
02/14/2006US6998033 Providing an annular adapter body; providing an annular electrical-insulator ring; providing a replaceable annular adapter shield attachable to the outside surface of the body; providing a replaceable annular dark-space shield attachable
02/14/2006US6998028 depositing on a substrate a buffer, a superconductor layer, a capping layer; increased capacity
02/09/2006WO2006013968A1 Thin-film forming apparatus
02/09/2006WO2006013826A1 Bi LAYERED COMPOUND NANOPLATE, ARRAY THEREOF, PROCESS FOR PRODUCING THEM, AND APPARATUS UTILIZING THE SAME
02/09/2006US20060030134 Ion sources and ion implanters and methods including the same
02/09/2006US20060030074 Method for connecting substrate and composite element
02/09/2006US20060029816 Low-E coated articles having zirconium inclusive dielectric layer
02/09/2006US20060029723 repairing a coated high pressure turbine blade, which has been exposed to engine operation, to restore coated airfoil contour dimensions of the blade, and improve upon the prior bond coat
02/09/2006US20060027451 Methods for sputtering a target material by intermittently applying a voltage thereto and related apparatus, and methods of fabricating a phase-changeable memory device employing the same
02/09/2006US20060027450 Arrangement and method for the production of gas-impermeable layers
02/09/2006DE102004034448A1 Measurement of layer thickness of a coating on a substrate useful in semiconductor production involves preparing composition of first material containing two substrates and depositing layers of second and third materials on first substrate
02/09/2006DE102004034417A1 Beschichtetes Substrat mit gewölbter Oberfläche und Verfahren zur Herstellung eines solchen beschichteten Substrats A coated substrate with a curved surface and methods for producing such coated substrate
02/09/2006DE102004032635A1 Verfahren zur Herstellung eines Titan-Suboxid-basierten Beschichtungswerkstoff, entsprechend hergestellter Beschichtungswerkstoff und damit versehenes Sputtertarget A process for producing a titanium suboxide based coating material, coating material and correspondingly produced sputtering target provided therewith
02/08/2006EP1624087A1 A method for depositing thin layers of titanium dioxide on support surfaces and artefacts obtained by said method
02/08/2006EP1624086A1 Device and method for producing gas barrier layers
02/08/2006EP1623053A1 Process for the preparation of a composite material
02/08/2006EP1622970A1 Process for preparing a composite material
02/08/2006EP1622760A2 Coated article with niobium zirconium inclusive layer(s) and method of making same
02/08/2006EP0977905B1 Method of reducing sputtering burn-in time, minimizing sputtered particulate, and target assembly therefor
02/08/2006CN2756642Y Isoplasma depositing device for making belt shape sponge polymer conduction
02/08/2006CN1732284A Vacuum deposition apparatus and method of producing vapor-deposited film