| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 03/16/2006 | US20060057014 Iron silicide sputtering target and method for production thereof |
| 03/16/2006 | US20060055322 Alkali metal generating agent, alkali metal generator, photoelectric surface, secondary electron emission surface, electron tube, method for manufacturing photoelectric surface, method for manufacturing secondary electron emission surface, and method for manufacturing electron tube |
| 03/16/2006 | US20060054888 Semiconductor device and method for manufacturing semiconductor device |
| 03/16/2006 | US20060054497 Especially for measuring characteristics of a metallic target and other interior surfaces of a sputtering chamber; a sensor that emits a energy beam to an evaluation surface, detects another energy beam and provides an output signal from which a characteristic can be determined; arm provides transport |
| 03/16/2006 | US20060054496 Biased pulse DC reactive sputtering of oxide films |
| 03/16/2006 | US20060054495 Substrate processing system |
| 03/16/2006 | US20060054494 Physical vapor deposition apparatus for depositing thin multilayer films and methods of depositing such films |
| 03/16/2006 | US20060054493 Method for the production of a substrate and unit for the same |
| 03/16/2006 | US20060054492 Coated article with improved barrier layer structure and method of making the same |
| 03/16/2006 | US20060054250 High-tensile, malleable molded bodies of titanium alloys |
| 03/16/2006 | US20060054089 Source for thermal physical vapor deposition of organic electroluminescent layers |
| 03/16/2006 | US20060054082 Substrate holding and rotating apparatus |
| 03/16/2006 | DE102004045049A1 Protection layer application, involves applying undercoating with heat insulating layer, and subjecting diffusion layer to abrasive treatment, so that outer structure layer of diffusion layer is removed by abrasive treatment |
| 03/16/2006 | CA2579634A1 Fuel cell separator and method for manufacturing the same |
| 03/16/2006 | CA2556573A1 Coater having interrupted conveyor system |
| 03/15/2006 | EP1634978A1 Wear resistant coating and process of its manufacture |
| 03/15/2006 | EP1634977A1 Process for inhibiting the formation of a secondary reaction zone (SRZ) and coating system therefor |
| 03/15/2006 | EP1634686A1 Method of forming film on molded body, method of producing molded body with film formed thereon, mold for producing molded body with film formed thereon |
| 03/15/2006 | EP1634317A2 Deposition apparatus and method |
| 03/15/2006 | EP1633902A2 Physical vapor deposition of titanium-based films |
| 03/15/2006 | EP1507723B1 Method and device for handling workpieces |
| 03/15/2006 | CN2765321Y Crazing-proof reinforcing hoop for magnetic control sputtering medium target |
| 03/15/2006 | CN1748264A Ferroelectric film, semiconductor device, ferroelectric film manufacturing method, and ferroelectric film manufacturing apparatus |
| 03/15/2006 | CN1747217A Device and method for preparing solid thin-membrane lithium battery by in-situ deposition |
| 03/15/2006 | CN1747139A Improvement of atomic layer deposition and apparatus thereof |
| 03/15/2006 | CN1746332A Sputtering target and production method therefor |
| 03/15/2006 | CN1746331A Cleaning apparatus |
| 03/15/2006 | CN1746330A Cleaning apparatus |
| 03/15/2006 | CN1746329A Polymorphic indium tin oxide thin-membrane and production of polymorphic indium tin oxide electrode |
| 03/15/2006 | CN1746015A Method and structure for metallizing rubber surface |
| 03/15/2006 | CN1245747C Substrate support member for use in FPP manufacturing apparatus |
| 03/15/2006 | CN1245534C Non-magentic shielding type ferromagnetic target as sputter cathode and its sputtering method |
| 03/15/2006 | CN1245533C Composite element and method for preparation thereof |
| 03/15/2006 | CN1245347C Method for imparting hydrophilicity to substrate |
| 03/14/2006 | US7011894 Method of making a protective coating forming a thermal barrier with a bonding underlayer on a superalloy substrate, and a part obtained thereby |
| 03/14/2006 | US7011734 Method of manufacturing semiconductor device having silicide layer |
| 03/14/2006 | US7011733 Method and apparatus for depositing films |
| 03/14/2006 | US7011732 Sputtering an alloy in oxygen to form a spinel oxides of two different transition metals; stoichiometry; infrared transmission, electroconductivity, stability; optical coatings for light emitting diode, transistor, solar cells, flat panel displays |
| 03/14/2006 | US7011691 Sputtering target; radiation transparent; electroconductivity; indium, tungsten oxide |
| 03/14/2006 | US7010837 Method for manufacturing an electronic component |
| 03/09/2006 | WO2006026621A2 Molybdenum tubular sputtering targets with uniform grain size and texture |
| 03/09/2006 | WO2006025821A1 System for and method of manufacturing a large-area backplane by use of a small-area shadow mask |
| 03/09/2006 | WO2006025558A1 Write-onece-read-many optical recording medium and sputtering target thereof |
| 03/09/2006 | WO2006025242A1 Double-layered flexible board and method for manufacturing same |
| 03/09/2006 | WO2006025240A1 Double layer flexible board and method for manufacturing the same |
| 03/09/2006 | WO2006025195A1 SiO DEPOSITION MATERIAL, RAW MATERIAL Si POWDER, AND METHOD FOR PRODUCING SiO DEPOSITION MATERIAL |
| 03/09/2006 | WO2006025194A1 SiO DEPOSITION MATERIAL, Si POWDER FOR SiO RAW MATERIAL, AND METHOD FOR PRODUCING SiO |
| 03/09/2006 | WO2006024808A2 Method for transferring a functional organic molecule onto a transparent substrate |
| 03/09/2006 | WO2006024386A2 Layered composite comprising cubic boron nitride |
| 03/09/2006 | WO2005118908A3 Producing repetitive coatings on a flexible substrate |
| 03/09/2006 | WO2005098082A3 Device for coating both sides of a substrate with a hydrophobic layer |
| 03/09/2006 | WO2005074640A3 Physical vapor deposition target constructions |
| 03/09/2006 | US20060051826 Method and device for the incorporating a compound in the pores of a porous material and uses thereof |
| 03/09/2006 | US20060051623 Substrate with silica between grains; sputtering under vacuum |
| 03/09/2006 | US20060051622 High density magnetic recording medium using FePtC thin film and manufacturing method thereof |
| 03/09/2006 | US20060051618 PVD coated ruthenium featured cutting tools |
| 03/09/2006 | US20060051601 Ceramic film and method of manufacturing the same, ferroelectric capacitor, semiconductor device, and other element |
| 03/09/2006 | US20060051597 Article coated with titanium compound film, process for producing the article and sputtering target for use in coating the film |
| 03/09/2006 | US20060051584 Process for producing a product having a structured surface |
| 03/09/2006 | US20060051572 Packaging material |
| 03/09/2006 | US20060051522 Method of pulsed laser assisted surface modification |
| 03/09/2006 | US20060051495 Device and method for the evaporative deposition of a coating material |
| 03/09/2006 | US20060050371 Antireflection coating for ultraviolet light at large angles of incidence |
| 03/09/2006 | US20060049755 Alkali metal generating agent, alkali metal generator, photoelectric surface, secondary electron emission surface, electron tube, method for manufacturing photoelectric surface, method for manufacturing secondary electron emission surface, and method for manufacturing electron tube |
| 03/09/2006 | US20060049547 Method for producing nanoparticles |
| 03/09/2006 | US20060049044 Substrate holder for a vapour deposition system |
| 03/09/2006 | US20060049043 Magnetron assembly |
| 03/09/2006 | US20060049042 Cathode for sputter coating |
| 03/09/2006 | US20060049041 Anode for sputter coating |
| 03/09/2006 | US20060049040 Apparatus and method for two dimensional magnetron scanning for sputtering onto flat panels |
| 03/09/2006 | US20060049036 Method and apparatus for real-time control and monitor of deposition processes |
| 03/09/2006 | US20060049035 Surfaces of machine or engine parts, in particular for internal combustion engines, which are exposed to frictional wear, comprising at least one nanocrystalline functional layer made up of at least two chromium nitride phases for reducing friction |
| 03/09/2006 | US20060049034 Laser ablation apparatus and method of preparing nanoparticles using the same |
| 03/09/2006 | US20060048708 Coater having interrupted conveyor system |
| 03/08/2006 | EP1632586A2 Film formation source, vacuum film formation apparatus, and method of manufacturing organic EL panel |
| 03/08/2006 | EP1632585A2 Material and method to prevent low temperature degradation of zirconia in biomedical implants |
| 03/08/2006 | EP1397260A4 Polymeric antireflective coatings deposited by plasma enhanced chemical vapor deposition |
| 03/08/2006 | CN1745453A Method and apparatus for plasma treatment of surface in vacuum |
| 03/08/2006 | CN1745197A Composite barrier films and method |
| 03/08/2006 | CN1745192A Coating plant with a charging lock and device therefor |
| 03/08/2006 | CN1745191A Ge-cr alloy sputtering target and manufacturing method thereof |
| 03/08/2006 | CN1745158A Controlled sulfur species deposition process |
| 03/08/2006 | CN1743503A Diamond film containing chronium and its preparing method |
| 03/08/2006 | CN1743498A Rotary magnetic field planar target magnetic-controlled sputtering apparatus |
| 03/08/2006 | CN1743497A Sputtering target material for improved magnetic layer |
| 03/08/2006 | CN1743496A Sputtering device with gas injection assembly |
| 03/08/2006 | CN1743495A Organic matter vaporization plating device |
| 03/08/2006 | CN1244713C Sputtering device utilizing magnetic field to form metal film |
| 03/08/2006 | CN1244712C Coating process for Ti-Ni inner support rack |
| 03/07/2006 | US7009487 Fabrication of nano-scale temperature sensors and heaters |
| 03/07/2006 | US7008688 Hard multilayer coating, hard multilayer coated tool including the hard multilayer coating, and method of forming the hard multilayer coating |
| 03/07/2006 | US7008669 Ceramic and method of manufacturing the same, dielectric capacitor, semiconductor device, and element |
| 03/07/2006 | US7008520 Sputtering device |
| 03/07/2006 | US7008519 Sputtering target for forming high-resistance transparent conductive film, and method for producing the film |
| 03/07/2006 | US7008518 sputter coating system of a coating station and a monitoring station;a sputtering target with a detector positioned for measuring the beams reflected during thin film is deposition |
| 03/07/2006 | US7008517 Shutter disk and blade for physical vapor deposition chamber |
| 03/07/2006 | US7007373 GMR sensor for sensing magnetically recorded information on a data storage medium including a ferromagnetic free layer and a ferromagnetic pinned layer sandwiching an electrically conductive spacer layer. |
| 03/06/2006 | CA2577162A1 Molybdenum sputtering targets |
| 03/02/2006 | WO2006023650A1 Method of enhancing fuel cell water management |
| 03/02/2006 | WO2006023321A2 Slotted thin-film sputter deposition targets for ferromagnetic materials |