| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 01/01/2008 | US7314650 Electroless and electrolytic deposition of metal and metal alloys on a surface of the target backing plate |
| 01/01/2008 | US7314525 Plasma CVD apparatus |
| 01/01/2008 | US7314492 Method for manufacturing alkaline battery |
| 12/27/2007 | WO2007149545A2 Metal binary and ternary compounds produced by cathodic arc deposition |
| 12/27/2007 | WO2007149011A1 Method for producing film coatings by means of laser ablation |
| 12/27/2007 | WO2007148802A1 Method for producing zinc oxide semiconductor crystal |
| 12/27/2007 | WO2007148539A1 Take up type vacuum vapor deposition device |
| 12/27/2007 | WO2007148536A1 Film forming apparatus and film forming method |
| 12/27/2007 | WO2007148396A1 Arc evaporation source and vacuum evaporation system |
| 12/27/2007 | WO2007147832A1 Substrate with antimicrobial properties |
| 12/27/2007 | WO2007147582A1 Method for controlling a reactive high-power pulsed magnetron sputter process and corresponding device |
| 12/27/2007 | WO2007102882A3 Multiple zone sputtering target created through conductive and insulation bonding |
| 12/27/2007 | WO2007085549A3 Method and device for the production of a polycrystalline ceramic film on a substrate capacitive structure comprising said ceramic film and use of said capacitive structure |
| 12/27/2007 | WO2007075977A3 Eb-pvd system with automatic melt pool height control |
| 12/27/2007 | WO2007048098A3 Erosion resistant coatings |
| 12/27/2007 | WO2006073568A3 MULTI-LAYER HIGH QUALITY GATE DIELECTRIC FOR LOW-TEMPERATURE POLY-SILICON TFTs |
| 12/27/2007 | US20070298283 Fabrication method and structure of an ITO anode containing nickel for improving injection efficiency of an OLED |
| 12/27/2007 | US20070298162 Method and Apparatus for Manufacturing Protective Layer |
| 12/27/2007 | US20070297933 Use Of A Titanium-Copper-Nickel-Based Alloy |
| 12/27/2007 | US20070297932 Process for Production of Ge-Cr Alloy Sputtering Target |
| 12/27/2007 | US20070295602 Ground shield with reentrant feature |
| 12/27/2007 | US20070295599 Cryopump, sputtering apparatus, and semiconductor manufacturing apparatus |
| 12/27/2007 | US20070295598 Backing plate assembly |
| 12/27/2007 | US20070295597 Sputter deposition apparatus and method |
| 12/27/2007 | US20070295596 Pvd target |
| 12/27/2007 | US20070295269 Multi-stage flow control apparatus with flexible membrane and method of use |
| 12/27/2007 | US20070295268 Multi-stage flow control apparatus |
| 12/27/2007 | DE4409761B4 Einrichtung zur plasmagestützten Verdampfung in einem Bogenentladungsplasma Means for plasma-assisted evaporation in an arc discharge plasma |
| 12/27/2007 | DE19905518B4 Eine Kombination von Kolbendichtringen zur Verwendung bei Verbrennungskraftmotoren A combination of compression rings for use in internal combustion engines |
| 12/27/2007 | DE19622607B4 Sputterkathode Sputter cathode |
| 12/27/2007 | DE112004001728T5 Rechteckige gefilterte Dampfplasmaquelle und Verfahren zur Steuerung eines Dampfplasmaflusses Rectangular steam filtered plasma source and method for controlling a vapor plasma flow |
| 12/27/2007 | DE102006061324A1 Method for regulating a reactive high performance pulsed sputtering process for coating substrates comprises changing the discharge performance as an adjusting parameter whilst the pulse frequency of the discharge is varied |
| 12/27/2007 | DE102006032959B3 Workpiece support for a vacuum coating installation comprises a support body having radially protruding magnetic holding bodies with a holding surface for workpieces to be coated |
| 12/27/2007 | DE102006029039A1 Monitoring of processes for ion etching or material deposition in vacuum chamber, employs quartz resonator, excitation oscillator and sensor inside chamber |
| 12/27/2007 | DE102006028977A1 Sputter deposition for fabrication of e.g. phase change RAM, has gas inlet for electron cyclotron wave resonance plasma in wall at specific distance from substrate holder |
| 12/27/2007 | DE102005023670B4 Verfahren zum Ausbilden von Metall-Nitrid-Schichten in Kontaktöffnungen und integrierte Schaltung mit derart ausgebildeten Schichten A method of forming metal nitride layers in the contact openings and integrated circuit thus formed layers |
| 12/27/2007 | CA2659588A1 Cvd coating scheme including alumina and/or titanium-containing materials and method of making the same |
| 12/26/2007 | EP1870609A1 Rolling sliding member and rolling apparatus |
| 12/26/2007 | EP1870489A1 Method to obtain a corrosion-resistant and shiny substrate |
| 12/26/2007 | EP1870488A1 Method for controlling the electrostatic state of a foil |
| 12/26/2007 | EP1870487A1 Vaccum coating apparatus |
| 12/26/2007 | EP1870486A1 Golden ornament and process for producing the same |
| 12/26/2007 | EP1869690A2 Method for operating a pulsed arc source |
| 12/26/2007 | EP1869227A1 Feeding particulate material to a heated surface |
| 12/26/2007 | EP1628923B8 Small glass cutter wheel |
| 12/26/2007 | EP1339625B1 Throughput enhancement for single wafer reactor |
| 12/26/2007 | EP1305452A4 Gcib size diagnostics and workpiece processing |
| 12/26/2007 | EP1027172B1 Protective overcoat for replicated diffraction gratings |
| 12/26/2007 | CN200996043Y Shielding frame assembly |
| 12/26/2007 | CN200996042Y Magnetic-controlled sputtering winding film coater |
| 12/26/2007 | CN200996041Y Multi-sectional reaction sputtering air-intaking equipment |
| 12/26/2007 | CN200996040Y Grounding protecting hood |
| 12/26/2007 | CN101094932A Delivering organic powder to a vaporization zone |
| 12/26/2007 | CN101094931A System and method for treating substrates |
| 12/26/2007 | CN101094818A Nano glass powder and use thereof, particularly multicomponent glass powder with a mean particle size of less than 1 [mu]m |
| 12/26/2007 | CN101093794A Apparatus for manufacturing flat-panel display |
| 12/26/2007 | CN101093793A Apparatus for manufacturing flat-panel display |
| 12/26/2007 | CN101093792A Apparatus for manufacturing flat-panel display |
| 12/26/2007 | CN101093751A Method for preparing foil of cathode with high specific volume |
| 12/26/2007 | CN101093115A Nickel-chromium heat collection film for conversion of light and heat of solar energy |
| 12/26/2007 | CN101092959A Parts of refrigeration compressor with antiwear coating, and method for manufacturing antiwear coating layer |
| 12/26/2007 | CN101092735A Multi-piece ceramic crucible and method for making thereof |
| 12/26/2007 | CN101092687A Sputtering apparatus, method of operating the same, and method of manufacturing substrate using the same |
| 12/26/2007 | CN101092686A Vaccum coating apparatus having the transmission roll for the transmission plate substrate |
| 12/26/2007 | CN101092685A Method for forming metal thin film and metallic wiring scheme and method for manufacturing display panel |
| 12/26/2007 | CN101092684A Technique for processing high diaphragming membrane by plasma |
| 12/26/2007 | CN100358111C Method for improving tin sulfide semiconductor film conductivity |
| 12/26/2007 | CN100358109C Apparatus for manufacturing organic electro-luminescent devices for mass production |
| 12/26/2007 | CN100357489C Low contamination components for semiconductor processing apparatus and methods for making components |
| 12/26/2007 | CN100357486C Process for preparing film material by unbalanced normal positional mixing |
| 12/26/2007 | CN100357133C Molded article located in the beam path of radar device, and method of manufacturing the same |
| 12/25/2007 | US7312958 Method for manufacturing magnetic disk apparatus |
| 12/25/2007 | US7312494 Lanthanide oxide / hafnium oxide dielectric layers |
| 12/25/2007 | US7312418 Semiconductor thin film forming system |
| 12/25/2007 | US7311981 Gas turbine part provided with a protective coating |
| 12/25/2007 | US7311976 A layer of (sub)stoichiometric vanadium oxide in terms of oxygen, an antireflective layer for visible wavelengths, and a dielectric chosen from metal oxides, nitrides, silicon oxides, silicon oxycarbides and silicon oxynitrides; solar control glazing |
| 12/25/2007 | US7311961 Method of making coated articles and coated articles made thereby |
| 12/25/2007 | US7311947 Laser assisted material deposition |
| 12/25/2007 | US7311946 Carbiding, nitriding or metallization; vapor deposition of carbides, carbonitrides, nitrides or metal silicon nitrides or carbides from organometallic compounds in presence of adhesion promoter; forming copper film |
| 12/25/2007 | US7311939 Vacuum coating unit and a method for the differentiated coating of spectacle lenses |
| 12/25/2007 | US7311938 applying antireflective coatings onto optical lenses |
| 12/25/2007 | US7311874 Filling microstructure alloy powders in containers, then isostatic pressing and machining, avoid spitting problems during sputtering of the target material on a substrate. |
| 12/25/2007 | US7311796 Plasma processing apparatus |
| 12/25/2007 | US7311783 Multiple axis tumbler coating apparatus |
| 12/25/2007 | US7310874 Method for manufacturing a potassium niobate deposited body |
| 12/25/2007 | US7310862 Method for manufacturing a piezoelectric device |
| 12/21/2007 | WO2007145801A2 Method and apparatus to detect fault conditions of a plasma processing reactor |
| 12/21/2007 | WO2007143962A1 Thermoresistant component with an anti-corrosion layer and a method for the production thereof |
| 12/21/2007 | WO2007084558A3 Method of producing particles by physical vapor deposition in an ionic liquid |
| 12/21/2007 | WO2007024428A3 Monolithic sputter target backing plate with integrated cooling passages |
| 12/20/2007 | US20070292712 High wear resistant hard film |
| 12/20/2007 | US20070292710 Method for repairing components using environmental bond coatings and resultant repaired components |
| 12/20/2007 | US20070292632 Substrate Holding Device, Substrate Processing System And Liquid Crystal Display Device |
| 12/20/2007 | US20070292610 Film formation source, film formation apparatus, film formation method, organic EL panel, and method of manufacturing organic EL panel |
| 12/20/2007 | US20070292604 Processes and systems for engineering a copper surface for selective metal deposition |
| 12/20/2007 | US20070292603 Processes and systems for engineering a barrier surface for copper deposition |
| 12/20/2007 | US20070289869 Large Area Sputtering Target |
| 12/20/2007 | US20070289864 Large Area Sputtering Target |
| 12/20/2007 | US20070289119 Fabrication of layer-by-layer photonic crystals using two polymer microtransfer molding |
| 12/20/2007 | DE102006027853A1 Verfahren und Vorrichtung zum Erzeugen eines Plasmas sowie Verwendung derselben Method and apparatus for generating a plasma, and using the same |