Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
08/2011
08/17/2011EP2356265A1 Test glass changing system
08/17/2011EP2355920A1 Improved drum design for web processing
08/17/2011EP2156912B1 Surface-coated cutting tool
08/17/2011EP1999290B1 Uniformly vaporizing metals and organic materials
08/17/2011EP1953257B1 Magnetron sputtering apparatus
08/17/2011EP1849888B1 Vacuum deposition apparatus of the winding type
08/17/2011EP1759035B1 Vaporizing temperature sensitive materials
08/17/2011EP1392884B1 Recessed sputter target
08/17/2011EP1243016B1 Method and apparatus for ionized physical vapor deposition
08/17/2011CN201933150U Constant and vacuum metal belt material sealing device
08/17/2011CN201933149U 晶圆片背面金层蒸镀工艺用的装片夹具 Loading fixture wafer backside gold layer deposition process used
08/17/2011CN201933148U 真空镀膜的自转式工架机构 Vacuum coating frame body rotation type work
08/17/2011CN201933147U 镀膜玻璃实验线 Experimental line coated glass
08/17/2011CN1936068B Article having patterned decorative coating
08/17/2011CN1702024B Vacuum treating device
08/17/2011CN102160156A Method and apparatus for forming polymerized film
08/17/2011CN102159971A Antireflective film formation method, antireflective film, and film formation device
08/17/2011CN102159748A Film formation method, film formation device, piezoelectric film, piezoelectric device and liquid discharge device
08/17/2011CN102159741A Anti-tarnish silver alloy
08/17/2011CN102159517A Oxide sintered body and sputtering target
08/17/2011CN102159502A Vapor deposition material for the production of strontium /calcium composite oxide films
08/17/2011CN102159330A Dielectric material treatment saystem and method of operating
08/17/2011CN102159024A Aluminum base printed circuit board and preparation method thereof
08/17/2011CN102157708A Apparatus and method for manufacturing organic el device, and apparatus and method for forming film
08/17/2011CN102157682A One-phase ferroelectric film and preparing method thereof as well as effective resistance regulation mode
08/17/2011CN102157681A Sb2Te3-HfO2 nano compound phase change material and application of Sb2Te3-HfO2 nano compound phase change material in phase change memory
08/17/2011CN102157641A Method for manufacture LED (light-emitting diode) chip
08/17/2011CN102157632A Method for improving luminous efficiency of LED (light-emitting diode) by utilizing ZnO nano-cone array
08/17/2011CN102157575A Novel transparent conducting oxide thin film with multi-layer film structure and manufacturing method thereof
08/17/2011CN102157425A Ring assembly for substrate processing chamber
08/17/2011CN102154631A Gas gate for isolating regions of differing gaseous pressure
08/17/2011CN102154623A An active viewport detection assembly for substrate detection in a vapor deposition system
08/17/2011CN102154622A Method for preparing copper-indium-gallium-selenium thin film serving as light absorbing layer of solar cell
08/17/2011CN102154621A Method for preparing Ni-doped AlN-based diluted magnetic semiconductor thin-film material
08/17/2011CN102154620A Preparation method of large-area lanthanide rare earth ion-doped bismuth titanate ferroelectric film
08/17/2011CN102154619A Vacuum high-temperature quick heating device
08/17/2011CN102152541A Method for preparing composite interlayer coating film on surface of engineering plastics
08/17/2011CN102151572A Iron-gadolinium-antimony based composite magnetic particle photo-catalyst in core-shell structure as well as preparation and application thereof
08/17/2011CN102151563A Gadolinium-yttrium-antimony based composite magnetic particle photo catalyst of core-shell structure, preparation and application thereof
08/17/2011CN101777590B Heterogenous junction film material with white light photovoltaic effect and preparation method thereof
08/17/2011CN101724815B Method for preparing energy-saving heating films
08/17/2011CN101698935B Application method of vacuum ion sputtering coating in IML technology
08/17/2011CN101498042B Preparation of resistance variable oxide material Co3O4 thin film
08/17/2011CN101457345B Plane sputtering target spliced by simple metal
08/17/2011CN101447340B Method for preparing electrode with large surface area for dye-sensitized solar cell
08/17/2011CN101435068B Sputtering target and method for preparation thereof
08/17/2011CN101397647B Cu-In-Ga-Se or Cu-In-Al-Se solar cell absorption layer target material and preparation method thereof
08/17/2011CN101311296B Ultraviolet cured paint composition for vacuum coating
08/17/2011CN101297060B Sheet-like plasma generator, and film deposition method and equipment employing such sheet-like plasma generator
08/17/2011CN101225507B Curved surface cutting track obtaining method based on STL file
08/17/2011CN101165617B Method of optimizing process recipe of substrate processing system
08/17/2011CN101070591B Sputtering apparatus, method of driving the same, and method of manufacturing substrate using the same
08/16/2011US7998603 Transparent conductive film, sintered body target for transparent conductive film fabrication, and transparent conductive base material and display device using the same
08/16/2011US7998539 Method of forming thin-film structure by oblique-angle deposition
08/16/2011US7998537 High density thin films; ion bombardment surfaces; crosslinking
08/16/2011US7998535 Method and apparatus for the production of metal coated steel products
08/16/2011US7998527 Composite material and process for preparing a composite material
08/16/2011US7998324 Sputtering target and process for producing si oxide film therewith
08/16/2011US7998320 Sputtering a layer of zinc oxide, silver over the zinc oxide, and nickel chromium oxide over the silver; coating has a maximum specified sheet resistance; making an insulating glass (IG) window unit
08/16/2011US7998319 Process for the formation of miniaturized getter deposits and getter deposits so obtained
08/16/2011US7998307 Electron beam enhanced surface wave plasma source
08/16/2011US7997692 Perovskite oxide, process for producing the same, piezoelectric film, and piezoelectric device
08/16/2011CA2636662C Method of producing particles by physical vapor deposition in an ionic liquid
08/11/2011WO2011096338A1 Transparent-conductive-film-attached substrate for solar cell, solar cell, and processes for production of those products
08/11/2011WO2011096289A1 Substrate for solar cell, solar cell, organic thin film solar cell, process for production of substrate for solar cell, and process for production of organic thin film solar cell
08/11/2011WO2011096030A1 Vapor deposition mask, vapor deposition device, and vapor deposition method
08/11/2011WO2011095619A1 Modular coater
08/11/2011WO2011095594A1 Method for coating substrates from the vapor phase
08/11/2011WO2011095381A1 Transport device and substrate treatment plant
08/11/2011WO2011095292A1 CUTTING TOOLS WITH Al-Cr-B-N / Ti-Al-N MULTILAYER COATINGS
08/11/2011WO2011060905A3 Device and method for thermal evaporation of silicon
08/11/2011US20110195562 Sputtering Apparatus, Thin-Film Forming Method, and Manufacturing Method for a Field Effect Transistor
08/11/2011US20110195265 Hard multilayer film formed body and method for manufacturing same
08/11/2011US20110195261 NON GAMMA-PHASE CUBIC AlCrO
08/11/2011US20110195201 Method for making a nano-optical antenna array
08/11/2011US20110195200 Method and device for descaling a metal strip
08/11/2011US20110195196 Method for manufacturing transparent oxide electrode using electron beam post-treatment
08/11/2011US20110194207 Method of producing magnetic storage medium, magnetic storage medium and information storage device
08/11/2011US20110194181 Film forming method for antireflection film, antireflection film, and film forming device
08/11/2011US20110194106 method and apparatus to prepare a substrate for molecular detection
08/11/2011US20110192997 Grid and method of manufacturing a grid for selective transmission of electromagnetic radiation, particularly x-ray radiation for mammography applications
08/11/2011US20110192719 Sputtering target for forming thin film transistor wiring film
08/11/2011US20110192716 Method for producing an ito layer and sputtering system
08/11/2011US20110192715 Magnetron source and method of manufacturing
08/11/2011US20110192546 WATER-COLLAPSIBLE Al COMPOSITE MATERIAL, Al FILM AND Al POWDER CONSISTING OF THIS MATERIAL, AND METHODS FOR PREPARATION THEREOF, AS WELL AS COMPONENT MEMBERS FOR CONSTITUTING FILM-FORMING CHAMBERS AND METHOD FOR THE RECOVERY OF FILM-FORMING MATERIALS
08/11/2011US20110192344 Film forming apparatus
08/11/2011DE10352516B4 Verfahren und Vorrichtung zur Abscheidung dünner Schichten auf einem organischen Substrat Method and apparatus for the deposition of thin films on an organic substrate
08/11/2011DE102010007516A1 Large-scale cathode for magnetron sputtering within vacuum chamber, comprises target, and device for producing a magnetic field, which is enclosed itself on the surface of the target in circular manner and is formed in tunnel-shaped manner
08/11/2011DE102010007515A1 Operating a large-scale cathode for a magnetron sputtering within a vacuum chamber, where the cathode includes a target, comprises producing a magnetic field by a device, and dividing the target into two partial targets
08/11/2011DE102010007111A1 Verfahren zur Beschichtung von Substraten aus der Dampfphase A process for coating substrates from the vapor phase
08/11/2011CA2788142A1 Cutting tools with al-cr-b-n / ti-al-n multilayer coatings
08/10/2011EP2355126A2 Hard material layer
08/10/2011EP2354271A1 Substrate protection device and method
08/10/2011EP2354270A1 Thin film deposition apparatus
08/10/2011EP2354268A1 Method of manufacturing optical filter
08/10/2011EP2352857A1 Metering of particulate material and vaporization thereof
08/10/2011EP1913624B1 Sputtering target with slow-sputter layer under target material
08/10/2011EP1631986B1 A method of preparation of an epitaxial substrate
08/10/2011EP1411031B1 Ceramic and semiconductor
08/10/2011CN201926529U 用离子束溅射硅薄膜制作的压力应变器件 Pressure ion beam sputtering device silicon thin film production strain