C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
09/2011
09/01/2011	US20110212323 Method for preparing oxide thin film gas sensors with high sensitivity
09/01/2011	US20110212276 Method and device for applying or embedding particles onto or into a layer applied by plasma coating
09/01/2011	US20110212272 Manufacturing method for magnetic recording medium
09/01/2011	US20110212268 Method for high volume manufacture of electrochemical cells using physical vapor deposition
09/01/2011	US20110212255 Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus
09/01/2011	US20110211988 Sputtering target material
09/01/2011	US20110211676 Method and apparatus for applying material to a surface of an anode of an x-ray source, anode and x-ray source
09/01/2011	US20110209995 Physical Vapor Deposition With A Variable Capacitive Tuner and Feedback Circuit
09/01/2011	US20110209989 Physical vapor deposition with insulated clamp
09/01/2011	US20110209988 Thin film coating of blades
09/01/2011	US20110209987 Production of amorphous and crystalline silicon nanoclusters by hydrogen enhanced reactive magnetron sputtering within gas aggregation
09/01/2011	US20110209986 Sputtering apparatus, sputtering method, and electronic device manufacturing method
09/01/2011	US20110209985 Physical Vapor Deposition With Heat Diffuser
09/01/2011	US20110209984 Physical Vapor Deposition With Multi-Point Clamp
09/01/2011	US20110209983 Use of high energy heavy ion beam for direct sputtering
09/01/2011	US20110209982 Methods for depositing a layer on a substrate using surface energy modulation
09/01/2011	US20110209827 Automatic matching unit and plasma processing apparatus
09/01/2011	US20110209749 Pattern transfer method and apparatus, flexible display panel, flexible solar cell, electronic book, thin film transistor, electromagnetic-shielding sheet, and flexible printed circuit board applying thereof
09/01/2011	US20110209590 Method of making a coated cemented carbide insert
09/01/2011	DE102011002451A1 Sputteranlage Sputter
09/01/2011	DE102010030933A1 Feeding gas to rotating magnetron in vacuum coating systems, comprises past guiding substrate to the rotating magnetron in longitudinal extension of the vacuum coating system running transverse to axial direction of the rotating magnetron
09/01/2011	DE102010009795A1 Uniformly coating substrates with metallic back contacts by depositing vaporized evaporation products in process chamber of continuous coating system and annealing process, comprises carrying out annealing process during coating process
09/01/2011	DE102010009794A1 Coating heated substrates in a continuous vacuum coating systems, comprises moving substrate in transport direction continuously through functional process chamber, in which coating particle stream is produced by using the coating sources
09/01/2011	DE102010003215B4 Verfahren und Vorrichtung zur Wärmeabsorption in Vakuumbeschichtungsanlagen Method and apparatus for absorbing heat in vacuum coating systems
09/01/2011	DE102009059097B4 Verfahren und Vorrichtung zur Auswertung des von einem Plasma emittierten Lichtes zur Regelung von plasmagestützten Vakuumprozessen Method and apparatus for evaluation of light emitted from a plasma light to the regulation of plasma-assisted vacuum processes
09/01/2011	CA2791197A1 Synthesis of metal oxides by reactive cathodic arc evaporation
08/2011
08/31/2011	EP2362246A1 Reflective film laminate
08/31/2011	EP2362000A1 Hard multilayer film formed body and method for manufacturing same
08/31/2011	EP2361881A1 Sliding member and process for producing same
08/31/2011	EP2361321A2 Vacuum processing apparatus
08/31/2011	EP2013373B1 Method and system for conditioning a vapor deposition target
08/31/2011	EP1597407B1 Process for the manufacture of a sputtering target
08/31/2011	CN201952490U 一种用于镀膜基片的镀膜夹具 A method for coating a substrate plating jig
08/31/2011	CN201952489U 镀膜机送铝装置 Coater send aluminum device
08/31/2011	CN201952488U 镀膜机炉膛 Coaters furnace
08/31/2011	CN201952487U 真空基片加热装载设备 Vacuum heating the substrate loading apparatus
08/31/2011	CN1745453B Method and apparatus for plasma treatment of surface in vacuum
08/31/2011	CN102171381A Films containing an infused oxygenated gas and methods for their preparation
08/31/2011	CN102171380A Sputtering target and method for manufacturing a sputtering target
08/31/2011	CN102171379A Sputtering apparatus and sputtering method
08/31/2011	CN102171378A Bonded metal and ceramic plates for thermal management of optical and electronic devices
08/31/2011	CN102171377A Deposition apparatus, deposition method, and storage medium having program stored therein
08/31/2011	CN102171160A Oxide sintered compact for producing transparent conductive film
08/31/2011	CN102171159A Oxide sintered compact for producing transparent conductive film
08/31/2011	CN102171116A Conveyor assembly and method for conveying a substrate carrier
08/31/2011	CN102169958A Nanocomposite phase-change material, preparation method and application thereof in phase-change memory
08/31/2011	CN102169912A Mo/Ag laminated metal matrix composite for solar cell interconnected sheet and preparation process thereof
08/31/2011	CN102169908A Composite transparent conductive film of cadmium telluride (CdTe) solar battery and preparation method of composite transparent conductive film
08/31/2011	CN102168268A Preparation method of metal nanocrystal
08/31/2011	CN102168254A Surface hardening method for martensite stainless steel
08/31/2011	CN102168253A Two-channel continuous magnetron sputtering coating equipment based on unbalanced magnetic field
08/31/2011	CN102168252A In chamber sodium doping process and system for large scale fabrication of CIGS based thin film photovoltaic materials
08/31/2011	CN102168251A Evaporation source apparatus
08/31/2011	CN102168250A Evaporation source device
08/31/2011	CN102168249A Evaporation source device
08/31/2011	CN102168248A Evaporation source device
08/31/2011	CN102168247A Preparation method and application of TiO2/WO3 composite film
08/31/2011	CN102168246A Large-area high-uniformity transparent conducting film deposited on flexible substrate and preparation method thereof
08/31/2011	CN102168245A Novel multi-section technology air supply assembly system
08/31/2011	CN102168208A Method for manufacturing ZnSn sputtering target for glass coating
08/31/2011	CN102167950A Vacuum plating paint, and preparation and construction methods thereof
08/31/2011	CN102167521A Self-cleaning conductive glass and preparation method thereof
08/31/2011	CN102166849A Chromium nitride aluminum-titanium composite coating, cutter deposited with same, and preparation method
08/31/2011	CN102166513A Antimony, ytterbium and indium based composite magnetic particle photocatalyst with core-shell structure, preparation and application
08/31/2011	CN101752158B Method for improving slow wave component heat dispersion by utilizing nano material
08/31/2011	CN101748368B Sample clamp for electron beam evaporation film
08/31/2011	CN101724819B Method for preparing Er2O3 coating
08/31/2011	CN101681069B Transparent electrode
08/31/2011	CN101665903B Mask assembly and film coating equipment
08/31/2011	CN101609735B Method for preparing high purity, high density and high yield Si3N4/SiO2 coaxial nano-cable array
08/31/2011	CN101609729B Manufacture method of multilayer transparent electricity conductive film
08/31/2011	CN101476109B Preparation of flexible high-resistance multi-layer transparent conductive film
08/31/2011	CN101407902B Electrical contact strengthening apparatus and method for improving binding force of coating and workpiece
08/31/2011	CN101391502B Composite anti-fake film material, preparation method thereof and anti-fake paper using thereof
08/31/2011	CN101353782B Large area anti-reflection conductive film continuous magnetron sputtering film coating production line
08/31/2011	CN101341274B Amorphous hard carbon coating
08/31/2011	CN101261952B Substrate carrying bench and substrate treatment device
08/31/2011	CN101244897B Preparation method of glass marble cover with amorphous diamond film of photodetection system
08/31/2011	CN101045183B Gold club head with modified surface and its making method
08/30/2011	US8007961 Mask blank substrate set and mask blank set
08/30/2011	US8007644 Inclined carrier transferring apparatus
08/30/2011	US8007641 Method of detecting arc discharges in a plasma process
08/30/2011	US8006637 Method and apparatus for membrane deposition
08/26/2011	CA2732542A1 Precompression effect in pump body
08/25/2011	WO2011102896A1 Sputter target
08/25/2011	WO2011102711A1 Device and method for generating a plasma discharge for patterning the surface of a substrate
08/25/2011	WO2011102425A1 Oxide sintered body, oxide mixture, manufacturing methods for same, and targets using same
08/25/2011	WO2011102405A1 Vertical vacuum device and processing method
08/25/2011	WO2011102396A1 Al alloy film for display device
08/25/2011	WO2011102359A1 Sputtering target-backing plate assembly body
08/25/2011	WO2011102320A1 Electron beam irradiation device and electron beam irradiation method
08/25/2011	WO2011102198A1 Transparent conductive film, process for producing same, and electronic device employing transparent conductive film
08/25/2011	WO2011102122A1 Vacuum processing device
08/25/2011	WO2011101273A1 Coating device, and method for operating a coating device with a shielding plate
08/25/2011	WO2011100998A1 Method and device for producing a semiconductor layer
08/25/2011	WO2011060021A3 Coated cutting insert and method for making the same
08/25/2011	US20110207255 Semiconductor Device and Method for Manufacturing the Same
08/25/2011	US20110206916 Method for producing a multi-colored laser-inscribable film
08/25/2011	US20110206900 Manufacturing method of functional film and functional film
08/25/2011	US20110206866 Deposition apparatus and method

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