Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
07/2011
07/27/2011CN101463467B Alloy splicing target
07/27/2011CN101437978B Method for preparing nickle titanium alloy medical instrument surface coating
07/27/2011CN101394062B Chamber surface passivation method for semi-conductor laser
07/27/2011CN101373703B Cap-opening mechanism and semiconductor processing device and cap-opening control method thereof
07/27/2011CN101307433B Bearing table for sputtering machine table
07/27/2011CN101233792B Plasma generator and film deposit method employing same
07/27/2011CN101140416B 光掩模坯 Photomask blank
07/27/2011CN101096749B Method of recycling crystal sensor of evaporation apparatus
07/26/2011US7985713 Superconducting magnesium boride thin-film and process for producing the same
07/26/2011US7985635 Laser process
07/26/2011US7985449 Methods for depositing metal films onto diffusion barrier layers by CVD or ALD processes
07/26/2011US7985296 Sample fixing device of evaporation machine
07/26/2011US7985188 Vessel, coating, inspection and processing apparatus
07/26/2011US7985081 Transferable micro spring structure
07/21/2011WO2011086940A1 In-Ga-O OXIDE SINTERED BODY, TARGET, OXIDE SEMICONDUCTOR THIN FILM, AND MANUFACTURING METHODS THEREFOR
07/21/2011WO2011086868A1 System of thin film forming apparatus, and thin film forming method
07/21/2011WO2011086847A1 Semiconductor device
07/21/2011WO2011086650A1 Method for manufacturing sintered licoo2, and sputtering target
07/21/2011WO2011086649A1 MANUFACTURING METHOD FOR LiCoO2 SINTERED BODY, AND SPUTTERING TARGET MADE FROM SAME
07/21/2011WO2011085796A1 Coated tool
07/21/2011US20110177696 Sputtering target, method for forming amorphous oxide thin film using the same, and method for manufacturing thin film transistor
07/21/2011US20110177460 process for producing an image on a substrate
07/21/2011US20110177357 Colored device casing and surface-treating method for fabricating same
07/21/2011US20110177351 Colored device casing and surface-treating method for fabricating same
07/21/2011US20110177342 Cured Organopolysiloxane Resin Film Having Gas Barrier Properties and Method Of Producing The Same
07/21/2011US20110177327 Barrier layers, its uses and a process for preparation thereof
07/21/2011US20110177280 Information recording medium and method for producing the same
07/21/2011US20110175500 Colored device casing and surface-treating method for fabricating same
07/21/2011US20110175115 Deposition mask, method for manufacturing display unit using it, and display unit
07/21/2011US20110175084 Thin film semiconductor material produced through reactive sputtering of zinc target using nitrogen gases
07/21/2011US20110174674 Colored device casing and surface-treating method for fabricating same
07/21/2011US20110174673 Colored device casing and surface-treating method for fabricating same
07/21/2011US20110174672 Colored device casing and surface-treating method for fabricating same
07/21/2011US20110174671 Colored device casing and surface-treating method for fabricating same
07/21/2011US20110174670 Colored device casing and surface-treating method for fabricating same
07/21/2011US20110174669 Colored device casing and surface-treating method for fabricating same
07/21/2011US20110174668 Colored device casing and surface-treating method for fabricating same
07/21/2011US20110174667 Colored device casing and surface-treating method for fabricating same
07/21/2011US20110174666 Colored device casing and surface-treating method for fabricating same
07/21/2011US20110174664 Colored device casing and surface-treating method for fabricating same
07/21/2011US20110174663 Colored device casing and surface-treating method for fabricating same
07/21/2011US20110174662 Colored device casing and surface-treating method for fabricating same
07/21/2011US20110174661 Colored device casing and surface-treating method for fabricating same
07/21/2011US20110174612 Sputtering apparatus with rotatable sputtering target
07/21/2011US20110174611 Support device and coating device using same
07/21/2011US20110174608 Method for forming a diamond-like carbon layer on air bearing surface of a slider
07/21/2011US20110174607 Colored device casing and surface-treating method for fabricating same
07/21/2011US20110174361 Transparent conductive layer and transparent electrode comprising the same
07/21/2011DE102010004991A1 Verfahren zum Vakuumbeschichten eines Substrates mit einem transparenten leitfähigen Metalllegierungsoxid sowie eine transparente leitfähige Schicht aus einem Metalllegierungsoxid Method for vacuum coating a substrate with a transparent conductive Metalllegierungsoxid and a transparent conductive layer made of a Metalllegierungsoxid
07/21/2011DE102009054309A1 Component such as a vessel, a screen and/or a mirror comprises a metal substrate, and an emission-protective layer for reducing an emissivity of the component
07/21/2011DE102009053756B4 Verfahren zur Beschichtung eines Substrates in einer Vakuumkammer mit mindestens einem rotierenden Magnetron A method for coating a substrate in a vacuum chamber with at least one rotating magnetron
07/21/2011DE102008048586B4 Einblickvorrichtung für Vakuumanlagen Insight apparatus for vacuum systems
07/21/2011DE102008012931B4 Verfahren und Vorrichtung zum Kühlen von Substraten Method and apparatus for cooling of substrates
07/21/2011DE102007044651B4 Rohrsputtertarget mit grabenförmig strukturierter Außenfläche des Trägerrohres sowie Verfahren zu seiner Herstellung Tube-shaped sputtering target with grave structured outer surface of the carrier tube and to processes for its preparation
07/20/2011EP2345750A1 Thin film-forming sputtering device
07/20/2011EP2345749A1 Gear assembly and wind turbine
07/20/2011EP2344912A1 High refractive index materials for energy efficient lamps
07/20/2011EP2344681A1 Coatings for cutting implements
07/20/2011EP1282161B1 LOW RELATIVE PERMITTIVITY SIOx FILM, PRODUCTION METHOD, SEMICONDUCTOR DEVICE COMPRISING THE FILM
07/20/2011CN201901698U Control system and probe for oxygen content on surface of sputtering target
07/20/2011CN1958170B Gas supplying unit and substrate processing apparatus
07/20/2011CN1916232B Target assembly and sputtering device with target assembly
07/20/2011CN1904132B Sputtering device and sputtering method
07/20/2011CN1904131B Controllable target cooling
07/20/2011CN1845292B Magnetic field assistant self glow plasma ion implantation device
07/20/2011CN102132434A Magnetoresistive element, method for manufacturing same, and storage medium used in the manufacturing method
07/20/2011CN102132368A Electrical contact with anti tarnish oxide coating
07/20/2011CN102131956A Continuous film forming apparatus
07/20/2011CN102131955A Coating chamber with a moveable shield
07/20/2011CN102131954A Magnetron sputter cathode, and filming apparatus
07/20/2011CN102131953A Sputtering target for oxide semiconductor, comprising ingao3(zno) crystal phase and process for producing the sputtering target
07/20/2011CN102131952A Method for depositing a material
07/20/2011CN102131951A Physical vapor deposition apparatus and physical vapor deposition method
07/20/2011CN102131950A Light induced patterning
07/20/2011CN102131949A Mask and method for forming film using mask
07/20/2011CN102130210A Solar cell, antireflection structure thereof and forming method
07/20/2011CN102130067A Surface palladium-plated bonding brass wire
07/20/2011CN102129889A B and Gd-containing overall composite combustible toxic fuel and preparation method
07/20/2011CN102128142A Boron-based hard coating of a wind power assembly component
07/20/2011CN102127764A Method for implementing semi-dry plating on surface of plastic substrate
07/20/2011CN102127747A Modular system and process for continuous deposition of a thin film layer on a substrate
07/20/2011CN102127746A System and process for cadmium telluride reclamation in a vapor deposition conveyor assembly
07/20/2011CN102127745A Modular system and process for continuous deposition of a thin film layer on a substrate
07/20/2011CN102127744A Ion implanter driving mechanism with alarm function and alarm method thereof
07/20/2011CN102127743A Preparation method of Ta-C-N thin-film
07/20/2011CN102127742A Method for preparing silicon nanocone array by using ion beam bombardment
07/20/2011CN102127741A Method for preparing high-purity molybdenum target for thin film solar cell
07/20/2011CN102127740A Sputtering device
07/20/2011CN102127739A Sputtering device
07/20/2011CN102127738A Multilayer thermal barrier coating and preparation method thereof
07/20/2011CN102127737A Method for preparing anti-oxidation Nb coating on surface of carbon material
07/20/2011CN102127736A Metal oxide polycrystal
07/20/2011CN102127735A Method for modifying metal baseband surface used for YBCO (YBa2Cu3O(7-x)) coating
07/20/2011CN102127734A Method for directly coating film on surface of lens aluminium
07/20/2011CN102127733A Warm forging die and manufacturing method thereof
07/20/2011CN101866832B Method for intermittently growing single-layer Ge quantum dots with high dimensional homogeneity on buffer layer by landfill
07/20/2011CN101838795B Ion implantation and deposit method of high-power composite pulse by magnetic control sputtering
07/20/2011CN101824597B Method for growing p-type ZnO crystal thin film by Li-F codoping
07/20/2011CN101824592B Deposition method capable of enhancing preferred orientation growth of AlN film
07/20/2011CN101738652B Method for preparing ultrawide wave band high antireflection film combining three lights