| Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378) |
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| 07/20/2011 | CN101724822B Method for preparing conductive composite atomic oxygen protective coating ITO/MgF2 |
| 07/20/2011 | CN101724814B Improved holding device of evaporated materials of evaporator |
| 07/20/2011 | CN101671811B Method for preparing high-load tribology DLC membrane on surface of titanium |
| 07/20/2011 | CN101660118B Nanometer composite phase-change material, preparation and application thereof |
| 07/20/2011 | CN101613855B Non-equilibrium magnetron-sputtering rare-earth graphite composite film and preparation method thereof |
| 07/20/2011 | CN101613851B Processing method for titanium target material |
| 07/20/2011 | CN101518851B Structure and method for welding target material and backboard |
| 07/20/2011 | CN101503790B Aluminum plating method for plastic film |
| 07/20/2011 | CN101497990B Sputtering film-plating apparatus |
| 07/20/2011 | CN101484608B Take up type vacuum vapor deposition device |
| 07/20/2011 | CN101476104B Zirconium silicon oxide thin film with high dielectric coefficient, and preparation and use thereof |
| 07/20/2011 | CN101456271B Color protection screen of display apparatus and preparation method thereof |
| 07/20/2011 | CN101441411B Surface plasma resonance exposure photolithography method |
| 07/20/2011 | CN101245441B High temperature heating vacuum evaporation film coating device |
| 07/20/2011 | CN101152780B Hard-material-coated member excellent in durability |
| 07/20/2011 | CN101124347B Magnesium oxide single crystal vapor deposition material and process for producing the same |
| 07/20/2011 | CN101086059B Solar energy heat-collecting pipe vacuum magnetic-control sputtering continuous plating line system |
| 07/19/2011 | US7981483 Method to improve electrical leakage performance and to minimize electromigration in semiconductor devices |
| 07/19/2011 | US7981263 Sputtering apparatus, method of driving the same, and method of manufacturing substrate using the same |
| 07/19/2011 | US7981262 Process kit for substrate processing chamber |
| 07/19/2011 | US7981258 Thin-film shape memory alloy device and method |
| 07/19/2011 | US7981257 Current-based method and apparatus for detecting and classifying arcs |
| 07/19/2011 | CA2467790C Non-evaporable getter multilayer deposits obtained by cathodic deposition and process for their manufacturing |
| 07/14/2011 | WO2011084573A1 Methods of forming nickel aluminide coatings |
| 07/14/2011 | WO2011083647A1 Cu-Ga SPUTTERING TARGET, METHOD FOR MANUFACTURING THE TARGET, LIGHT ABSORBING LAYER, AND SOLAR CELL USING THE LIGHT ABSORBING LAYER |
| 07/14/2011 | WO2011083646A1 Sputtering target, compound semiconductor thin film, solar cell having compound semiconductor thin film, and method for manufacturing compound semiconductor thin film |
| 07/14/2011 | WO2011083457A1 Coated cutting tool |
| 07/14/2011 | WO2011083321A1 Medical device and method |
| 07/14/2011 | WO2011000357A3 Method and device for the deposition of thin layers |
| 07/14/2011 | WO2010094376A3 A method and arrangement for vapour phase coating of an internal surface of at least one hollow article |
| 07/14/2011 | US20110171600 Bio-Implant Having a Screw Body with Nanoporous Spiral Groove and the Method of Making the Same |
| 07/14/2011 | US20110171433 Insert sheet and method for manufacturing the same |
| 07/14/2011 | US20110171397 Method of forming pattern and manufacturing method of organic light emitting device |
| 07/14/2011 | US20110171395 Method of forming a sputtering target |
| 07/14/2011 | US20110171379 Growing metal nanowires |
| 07/14/2011 | US20110169027 Patterning Method of Metal Oxide Thin Film Using Nanoimprinting, and Manufacturing Method of Light Emitting Diode |
| 07/14/2011 | US20110168994 Sputtering target for oxide thin film and process for producing the sputtering target |
| 07/14/2011 | US20110168555 Rotary sputtering target and apparatus for manufacture |
| 07/14/2011 | US20110168554 Apparatus for treatment of samples for auger electronic spectrometer (aes) in the manufacture of integrated circuits |
| 07/14/2011 | US20110168553 Sputtering system |
| 07/14/2011 | US20110168552 System for sputtering deposition |
| 07/14/2011 | US20110168547 Method for producing a transparent and conductive metal oxide layer by highly ionized pulsed magnetron sputtering |
| 07/14/2011 | US20110168546 Material of electrode for electrolysis, electrode for electrolysis and manufacturing method of the electrode |
| 07/14/2011 | US20110168545 Multilayer-film sputtering apparatus and method of forming multilayer film |
| 07/14/2011 | US20110168544 Manufacturing Method of Optical Filter |
| 07/14/2011 | DE102010062945A1 Verdampfungsquelle und Beschichtungsvorrichtung mit Verdampfungsquelle Evaporation source and coating apparatus with evaporation source |
| 07/14/2011 | DE102010062937A1 Lineare Verdampfungsquelle und Beschichtungsvorrichtung mit linearer Verdampfungsquelle Linear evaporation source and coating apparatus with linear evaporation source |
| 07/14/2011 | DE102010061633A1 Abkühlsystem und -verfahren für ein Dampfphasenabscheidungssystem Cooling system and method for a vapor deposition system |
| 07/14/2011 | DE102009030876B4 Verfahren zum Beschichten eines Substrats A method for coating a substrate |
| 07/14/2011 | DE102007029683B4 Verfahren zur Messung von Zustandsgrößen an mechanischen Komponenten Method for measuring state quantities of mechanical components |
| 07/14/2011 | DE102005001334C5 Kompartmentsystem einer längserstreckten Vakuumbeschichtungsanlage Kompartmentsystem an elongated vacuum coating system |
| 07/14/2011 | CA2785322A1 Methods of forming nickel aluminide coatings |
| 07/13/2011 | EP2343728A2 Method and device for evaluating the light emitted by a plasma to regulate plasma-supported processes |
| 07/13/2011 | EP2343397A1 Modular system and process for continuous deposition of a thin film layer on a substrate |
| 07/13/2011 | EP2343396A1 Multiple axis tumbler coating apparatus |
| 07/13/2011 | CN201896195U Novel glass coating equipment |
| 07/13/2011 | CN201896194U Novel solar battery coating equipment |
| 07/13/2011 | CN201896193U Delivering-taking device for glass coating equipment |
| 07/13/2011 | CN201896192U Bidirectional graphite boat |
| 07/13/2011 | CN201896191U Novel film-coated probe |
| 07/13/2011 | CN1711369B Apparatus for vacuum treating two dimensionally extended substrates and method for manufacturing such substrates |
| 07/13/2011 | CN102124138A Use of a target for spark evaporation, and method for producing a target suitable for said use |
| 07/13/2011 | CN102124137A Method of making inorganic or inorganic/organic hybrid barrier films |
| 07/13/2011 | CN102124136A Film-forming method |
| 07/13/2011 | CN102124135A Equipment and method for physical vapor deposition |
| 07/13/2011 | CN102122612A Method and system for manufacturing component by using shadow mask technological line |
| 07/13/2011 | CN102122599A Substrate processing system and substrate processing method |
| 07/13/2011 | CN102122009A Method for reversely plating reflection-proof film capable of removing light interference image in optical imaging |
| 07/13/2011 | CN102122006A 太阳光谱选择性吸收涂层及其制备方法 Solar spectrum selective absorbing coating and preparation method |
| 07/13/2011 | CN102121757A Non-vacuum solar spectrum selective absorption coating and preparation method thereof |
| 07/13/2011 | CN102121095A Sputtering system |
| 07/13/2011 | CN102121094A Feed system and related process for introducing source material to a thin film vapor deposition system |
| 07/13/2011 | CN102121093A Metal evaporation composite crucible |
| 07/13/2011 | CN102121092A Sputtering target |
| 07/13/2011 | CN102121091A Cool-down system and method for a vapor deposition system |
| 07/13/2011 | CN102120268A Surface-coated cubic boron nitride base ultra-high pressure sintered material cutting tool |
| 07/13/2011 | CN101495665B Vacuum film forming apparatus and vacuum film forming method |
| 07/13/2011 | CN101397650B Target structure and target holding apparatus |
| 07/13/2011 | CN101376962B Ag base alloy sputtering target and method for manufacturing the same |
| 07/13/2011 | CN101287857B Coating process for manufacture or reprocessing of sputter targets and x-ray anodes |
| 07/12/2011 | US7977255 Method and system for depositing a thin-film transistor |
| 07/12/2011 | US7976907 Method for transferring a functional organic molecule onto a transparent substrate |
| 07/12/2011 | US7976635 Dual substrate loadlock process equipment |
| 07/12/2011 | CA2607620C High strength sputtering target for forming phosphor film in electroluminescence element |
| 07/12/2011 | CA2452229C Article including a substrate with a metallic coating and a protective coating thereon, and its preparation and use in component restoration |
| 07/12/2011 | CA2318612C Heat barrier composition, a mechanical superalloy article provided with a ceramic coating having such a composition, and a method of making the ceramic coating |
| 07/07/2011 | WO2011081368A2 Vaporization apparatus and method for controlling the same |
| 07/07/2011 | WO2011081202A1 Method for manufacturing an electronic component, electronic component, plasma treatment device, control program, and recording medium |
| 07/07/2011 | WO2011081188A1 Quadrupole mass spectroscope |
| 07/07/2011 | WO2011081046A1 Film forming device and film forming method |
| 07/07/2011 | WO2011081025A1 Vacuum deposition apparatus and vacuum deposition method |
| 07/07/2011 | WO2011080932A1 Striker-type plasma generation device and plasma processing device |
| 07/07/2011 | WO2011080927A1 Magnetron sputtering device and method for manufacturing electronic components |
| 07/07/2011 | WO2011080661A1 Method for depositing multi-layered layers and/or gradient layers |
| 07/07/2011 | WO2011037330A3 Sputtering device having a dual chamber |
| 07/07/2011 | WO2011031024A3 Magnetron sputtering target device for large-sized substrate |
| 07/07/2011 | WO2011019566A3 Process kit for rf physical vapor deposition |
| 07/07/2011 | WO2011018544A3 Magnetron device and method for the uniform erosion of a target using such a device |
| 07/07/2011 | US20110165719 Methods of forming an embedded cavity for sensors |
| 07/07/2011 | US20110165461 Electrode including nanocomposite active material, method of preparing the same, and electrochemical device including the same |