Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
09/2011
09/28/2011CN102200497A Method for preparing powdered test sample for transmission electron microscope
09/28/2011CN102199759A Gradient hydrogen process grown ZnO-TCO thin film with textured structure and use thereof
09/28/2011CN102199758A Method for growing ZnO-TCO thin film with suede structure and application
09/28/2011CN102199757A Sample rotary supporting apparatus used for vapor deposition equipment
09/28/2011CN102199756A Preparation method for amorphous tungsten film
09/28/2011CN102199755A Method for growing hydrogenated Ga-Ti codoped ZnO-TCO thin film and application
09/28/2011CN102199754A Magnetic control sputtering apparatus and sputtering method
09/28/2011CN102199753A Magnetron-enhanced aluminum ion vapor deposition process and apparatus
09/28/2011CN102199752A Magneto-controlled sputter growing method for amorphous cadmium telluride thin films
09/28/2011CN102199751A Manufacturing method of CIGS target material
09/28/2011CN102199750A Resistance evaporation coating machine having impact rod structure
09/28/2011CN102199749A Improved structure of tungsten boat for resistance evaporation coating machine
09/28/2011CN102199748A Improved structure of resistance evaporation coating machine
09/28/2011CN102199747A Resistance evaporation coating machine
09/28/2011CN102199746A Method for preparing doped antimonide film P-N (Positive-Negative) junction through thermal evaporation
09/28/2011CN102199745A Deposition device
09/28/2011CN102199744A Preparation method of film with micro-nano wrinkled patterns
09/28/2011CN101962748B Method for plating conductive film on surface of polytetrafluoroethylene by adopting arc ion plating technology
09/28/2011CN101956162B Heating platform
09/28/2011CN101861408B Optical thin film deposition device and optical thin film fabrication method
09/28/2011CN101798675B Cathode device for carrying out linear reactive sputtering film coating by utilizing electric-field confinded plasmas
09/28/2011CN101792111B Method for preparing multilayer raised compound film
09/28/2011CN101724813B Coating fixture, coating device and coating method
09/28/2011CN101696488B Aluminum/titanium compound coating on surface of magnesium alloy by magnetron sputtering and technical method thereof
09/28/2011CN101692432B Combined push rod mechanism
09/28/2011CN101661810B Dark purple external amorphous transparent conductive film and preparation method thereof
09/28/2011CN101657563B Dummy substrate, method for starting film forming apparatus using same, method for maintaining/changing film forming condition, and method for stopping apparatus
09/28/2011CN101657561B Fine control of vaporized organic material
09/28/2011CN101641765B Transition type deposition system and deposition method and device
09/28/2011CN101416131B Processing data management system, processing system and data management method for processing device
09/28/2011CN101186097B Molding method and molding apparatus of mold product having thin film at inner surface
09/27/2011US8027554 Thermo-optic phase shifter and method for manufacturing same
09/27/2011US8025956 Hard film and method of manufacturing the same
09/27/2011US8025777 Processes and device for the deposition of films on substrates
09/27/2011US8025776 Glass electrophoresis microchip and method of manufacturing the same by MEMS fabrication
09/27/2011US8025775 Vacuum plasma generator
09/27/2011US8025749 Ultrafine-grain-copper-base sputter targets
09/27/2011US8025733 Heating crucible and deposition apparatus using the same
09/22/2011WO2011116039A1 Method and system for modifying substrate patterned features using ion implantation
09/22/2011WO2011115834A1 Process chamber liner with apertures for particle containment
09/22/2011WO2011115259A1 NICKEL ALLOY SPUTTERING TARGET, THIN Ni ALLOY FILM, AND NICKEL SILICIDE FILM
09/22/2011WO2011115177A1 Transparent conductive films
09/22/2011WO2011114919A1 Semiconductor device
09/22/2011WO2011114874A1 Film forming method
09/22/2011WO2011114873A1 Film-forming method and film-forming substrate production method
09/22/2011WO2011114872A1 Deposition method and deposition substrate manufacturing method
09/22/2011WO2011114829A1 Mask holding apparatus and thin film forming apparatus
09/22/2011WO2011114657A1 Sputtering target and manufacturing method therefor
09/22/2011WO2011114223A1 A palette system for thin film deposition facilities for collecting and recovering deposited materials
09/22/2011WO2011113927A1 Coating based on nial2o4 in spinel structure
09/22/2011WO2011113548A1 Hexagonal mixed crystal made of an al-cr-o-n substance system
09/22/2011WO2011058123A3 Metal sputtered monofilament or multifilament hppe yarns
09/22/2011US20110230059 Formation of Carbon-Containing Material
09/22/2011US20110229379 Stable Catalyst Layers for Hydrogen Permeable Composite Membranes
09/22/2011US20110228502 Active device array substrate and fabricating method thereof
09/22/2011US20110227037 Enhancement of led light extraction with in-situ surface roughening
09/22/2011US20110226738 Methods of forming transparent structures and electrochromic devices
09/22/2011US20110226617 Dielectric deposition using a remote plasma source
09/22/2011US20110226612 Method and device for reversing the feeding of sputter coating systems in clean rooms
09/22/2011US20110226611 Closed drift magnetic field ion source apparatus containing self-cleaning anode and a process for substrate modification therewith
09/22/2011US20110226336 Chalcogenide-based materials and improved methods of making such materials
09/22/2011US20110226178 Film deposition system
09/22/2011DE102010011592A1 Hohlkathoden-Plasmaquelle sowie Verwendung der Hohlkathoden-Plasmaquelle Hollow cathode plasma source and use of the hollow cathode plasma source
09/22/2011DE102010003106A1 Uniform evaporation of evaporation product in evaporator, comprises heating and evaporating the product in evaporator by heating device, and carrying out position change based on weight change of evaporator in relation to heating device
09/21/2011EP2366815A1 Polymer laminate substrate for formation of epitaxially grown film, and manufacturing method therefor
09/21/2011EP1991716B1 Element
09/21/2011EP1485515B1 Evaluation of chamber components having textured coatings
09/21/2011CN201981256U 镀膜机真空室温度自动控制装置及真空镀膜机 Coater chamber automatic temperature control device and vacuum coating machine
09/21/2011CN201981255U 具有预检测功能的涂层设备 Coating equipment with pre-detection function
09/21/2011CN201981254U 一种纳米银抗菌真空杯和它的镀膜夹具 Nano silver antimicrobial coating vacuum cup and its fixtures
09/21/2011CN201981253U 一种矩形平面磁控溅射阴极 One kind of rectangular planar magnetron sputtering cathodes
09/21/2011CN201981252U 一种新型传动旋转端头 A new drive rotating tip
09/21/2011CN201978905U 屏蔽板自动清洗机 Shielding plate automatic washing machine
09/21/2011CN102197453A Rotatable sputter target backing cylinder, rotatable sputter target, method of producing a rotatable sputter target, and coating installation
09/21/2011CN102197335A Al alloy film for display device, display device and sputtering target
09/21/2011CN102197156A Improved substrate temperature control by using liquid controlled multizone substrate support
09/21/2011CN102197155A Barrier film for semiconductor wiring, sintered sputtering target, and method of manufacturing sputtering targets
09/21/2011CN102196874A Surface covered tool
09/21/2011CN102195006A Flexible electrode based on AZO/graphene/AZO structure and preparation method thereof
09/21/2011CN102194956A Method for evaporating indium tin oxide (ITO)
09/21/2011CN102194536A Method for producing a scintillator and scintillator
09/21/2011CN102191475A Film thickness monitoring method capable of increasing spectral characteristics of film
09/21/2011CN102191474A Vertical heat treatment apparatus and assembly of pressure detection system and temperature sensor
09/21/2011CN102191473A Vertical heat treatment apparatus and method for cooling the apparatus
09/21/2011CN102191472A Method for recycling separation blade
09/21/2011CN102191471A Novel production method of contact surface of electric appliance through plasma magnetron sputtering
09/21/2011CN102191470A Magnetron sputtering source and plasma treatment device
09/21/2011CN102191469A Auxiliary coating device for film product development and coating method thereof
09/21/2011CN102191468A Method and apparatus for static biasing a pre-metalized non-conductive substrate
09/21/2011CN102191467A Metal line, manufacturing method of thin film, TFT array panel, and method for manufacturing the same
09/21/2011CN102191466A Gallium doped zinc oxide target and preparation method of transparent conductive film thereof
09/21/2011CN102191465A Indium-doped zinc oxide target material and preparation method of transparent conducting film
09/21/2011CN102191464A Anticorrosion coating for neodymium-iron-boron rare earth permanent magnet and manufacturing method thereof
09/21/2011CN102191463A Vapor phase deposition material for forming film, film sheet with the film, and laminated sheet
09/21/2011CN102191462A Vapor phase deposition material for forming film, film sheet with the film, and laminated sheet
09/21/2011CN102191461A Vapor phase deposition material for forming film, film sheet with the film, and laminated sheet
09/21/2011CN102191460A Vapor phase deposition material for forming film, film sheet with the film, and laminated sheet
09/21/2011CN102191459A Vapor phase deposition material for forming film, film sheet and laminated sheet having same
09/21/2011CN102191458A Vapor phase deposition material for formation of film, film sheet material and laminated sheet material having same
09/21/2011CN102191457A Anti-defective surface cladding cutting tool excellent in hard cladding layer