Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
08/2011
08/25/2011US20110206859 Engineered fluoride-coated elements for laser systems
08/25/2011US20110206844 Chromium-free passivation of vapor deposited aluminum surfaces
08/25/2011US20110205665 Covalently bound monolayer for a protective carbon overcoat
08/25/2011US20110205615 Mems devices with multi-component sacrificial layers
08/25/2011US20110204408 High thermal performance packaging for optoelectronics devices
08/25/2011US20110203922 Thin-film forming sputtering system
08/25/2011US20110203921 Method of bonding rotatable ceramic targets to a backing structure
08/25/2011US20110203920 Target shaping
08/25/2011US20110203916 Magnetron-sputtering film-forming apparatus and manufacturing method for a semiconductor device
08/25/2011US20110203734 Plasma processing apparatus, magnetoresistive device manufacturing apparatus, magnetic thin film forming method, and film formation control program
08/25/2011DE102010054930A1 Plastic component useful as a trim, a diaphragm, a control element, a radiator grill or a decorative cap in vehicles, comprises a substrate with an applied support layer and a sol-gel coating applied on the support layer
08/25/2011DE102010009325A1 Container for receiving vaporization product, which is placed in a crucible of an electron beam evaporator, comprises a through-hole in its bottom and/or its wall, where the through-hole of a pin is inserted
08/25/2011DE102008039211B4 Rohrtarget mit Endblock zur Kühlmittelversorgung Tube target with end block to the coolant supply
08/25/2011DE102007025577B4 Verfahren zur Herstellung von Titanoxidschichten mit hoher photokatalytischer Aktivität A process for producing titanium oxide layers with a high photocatalytic activity
08/24/2011EP2360761A1 Sealing structure and fuel cell comprising the sealing structure
08/24/2011EP2360697A1 Scintillator panel, radiation detector, and processes for producing these
08/24/2011EP2360291A1 Method and device for quick heating and cooling of a substrate and immediately coating same in a vacuum
08/24/2011EP2360290A1 Method for producing an ITO layer and sputtering system
08/24/2011EP2360289A1 Device and method for deposing a layer composed of at least two components on a substrate
08/24/2011EP2358921A1 Industrial vapour generator for depositing an alloy coating on a metal strip
08/24/2011EP2358529A2 Gradient composition barrier
08/24/2011EP2358483A1 Cleaning method for coating systems
08/24/2011EP1509634B1 Surface treatment system, surface treatment method and product produced by surface treatment method
08/24/2011EP1485516B1 Method for formation of titanium nitride films
08/24/2011EP1088787B1 Process for producing metal oxide, target comprising the metal oxide for forming thin metal oxide film, process for producing the same, and process for producing thin metal oxide film
08/24/2011CN201943835U 具有pvd镀层的活塞环 Piston has pvd coating
08/24/2011CN201942746U 溅射机台用监控硅片位置的装置 Sputtering machine monitoring device wafer position
08/24/2011CN201942745U Metal ceramic composite membrane double-fluid atomization spray nozzle
08/24/2011CN201942744U 发电用太阳能高温集热管卧式镀膜机 Generating solar collector tubes horizontal temperature coating machine
08/24/2011CN201942743U Magnetic control target air-distribution structure
08/24/2011CN201942742U 掩膜板吸附组件 Mask adsorbed components
08/24/2011CN1876368B Hard-coated member
08/24/2011CN102165536A Thin-film superconducting wire rod and superconducting cable conductor
08/24/2011CN102165094A Nickel alloy sputtering target and nickel silicide film
08/24/2011CN102165093A High-purity copper or high-purity copper alloy sputtering target, process for manufacturing the sputtering target, and high-purity copper or high-purity copper alloy sputtered film
08/24/2011CN102165092A Cylindrical sputtering target, and method for manufacturing same
08/24/2011CN102165091A Evaporator for organic materials
08/24/2011CN102165090A Evaporator for organic materials and method for evaporating organic materials
08/24/2011CN102165089A Method for depositing of barrier layers on a plastic substrate as well as coating device therefor and a layer system
08/24/2011CN102165088A Method for producing a layer system on a substrate and layer system
08/24/2011CN102163698A Recovery device and film forming equipment equipped therewith
08/24/2011CN102163651A Process for enabling metallurgical silicon to grow into solar thin film silicon directly and special growing device thereof
08/24/2011CN102163630A Ternary compound solar cell film and preparation method thereof
08/24/2011CN102163485A Multiferroic Fe: BaTiO3 thin film material and preparation method thereof
08/24/2011CN102162131A Method for growing p-type ZnMgO crystal film by doping Ag
08/24/2011CN102162088A Lower clamp for glass substrate loading frame
08/24/2011CN102162087A Processing method of thermal compensation molybdenum wafer surface coating
08/24/2011CN102162086A Preparation method of TiO2/SiO2 composite film
08/24/2011CN102162085A Vapor deposition material for forming thin film, thin film sheet material and laminated sheet material provided with the thin film
08/24/2011CN102162084A High-temperature oxidation resistant nano-ZrOxN1-x film for mold and preparation process thereof
08/24/2011CN102162083A Hard-coating-coated member, tool, and target
08/24/2011CN102162082A Vapor plating mask, vapor plating device and film formation method
08/24/2011CN102161106A Ti-TiN & Ti-MoS2/Ti double-cutting-surface coated cutting tool and preparation process thereof
08/24/2011CN101650955B Sputtering target, thin film for optical information recording medium and process for producing the same
08/24/2011CN101620279B Optical coating device
08/24/2011CN101565822B Release method of residual compression stress in nanocrystalline cubic boron nitride pellicle
08/24/2011CN101542008B Deposition apparatus and method for manufacturing film by using deposition apparatus
08/24/2011CN101403090B Film vapor deposition device of load locking cavity using multi-layer substrate fixer structure
08/24/2011CN101363117B Film coating bracket and film-plating machine
08/24/2011CN101328575B Bearing device for sputtering
08/24/2011CN101328065B Preparation of vitrified Ta2O5-TiO2 composite metal oxide vapor deposition material
08/24/2011CN101311297B Three-dimensional revolving gear of workpieces of vacuum film coating equipment
08/24/2011CN101265502B Method for preparing tantalum doping tin oxide thin film carrier material for gene chip
08/24/2011CN101115860B Production method for vacuum component, resin coating forming device and vacuum film forming system
08/24/2011CN101113514B Substrate processing apparatus
08/24/2011CN101098834B Substrate with antimicrobial properties
08/23/2011US8004173 Antistatic film, spacer using it and picture display unit
08/23/2011US8003563 Method for producing tungsten trioxide powder for photocatalyst, tungsten trioxide powder for photocatalyst, and photocatalyst product
08/23/2011US8003238 Structured material, magnetic recording medium utilizing the same, and magnetic recording/reproducing apparatus
08/23/2011US8003225 Decorative article having a white coating
08/23/2011US8003218 Al-Ni-B alloy material for reflective film
08/18/2011WO2011100102A2 Electron radiation monitoring system to prevent gold spitting and resist cross-linking during evaporation
08/18/2011WO2011099683A1 Cutting tool
08/18/2011WO2011099427A1 Pure copper plate production method, and pure copper plate
08/18/2011WO2011099426A1 Pure copper plate production method, and pure copper plate
08/18/2011WO2011099231A1 Piezoelectric thin film element, piezoelectric thin film device, and process for production of piezoelectric thin film element
08/18/2011WO2011098730A2 Easy-clean cooking surface and culinary article or domestic electrical appliance comprising such a cooking surface
08/18/2011WO2011098538A1 Method for producing an ito layer and sputtering system
08/18/2011WO2011050291A3 Materials and device stack for market viable electrochromic devices
08/18/2011US20110201150 Sputtering Apparatus, Thin-Film Forming Method, and Manufacturing Method for a Field Effect Transistor
08/18/2011US20110200884 Positive current collector and manufacturing method thereof
08/18/2011US20110200806 Protective alumina film and production method thereof
08/18/2011US20110200760 Method for manufacturing the color controlled sappire
08/18/2011US20110200481 WATER-COLLAPSIBLE Al COMPOSITE MATERIAL, Al FILM AND Al POWDER CONSISTING OF THIS MATERIAL, AND METHODS FOR PREPARATION THEREOF, AS WELL AS COMPONENT MEMBERS FOR CONSTITUTING FILM-FORMING CHAMBERS AND METHOD FOR THE RECOVERY OF FILM-FORMING MATERIALS
08/18/2011US20110199341 Touch sensor configuration
08/18/2011US20110198602 Aluminum alloy film for display device, display device, and sputtering target
08/18/2011US20110198313 Method for the controlled growth of a graphene film
08/18/2011US20110198219 Magnetron sputtering device
08/18/2011US20110198214 Mesoporous silica film and process for production thereof
08/18/2011US20110198213 Sputtering Apparatus, Thin-Film Forming Method, and Manufacturing Method for a Field Effect Transistor
08/18/2011US20110198212 Sputtering apparatus and manufacturing method of semiconductor light-emitting element
08/18/2011US20110198117 Laminate and process for producing the laminate
08/18/2011US20110198033 Shutter device and vacuum processing apparatus
08/18/2011DE102010018758A1 Verschleißfeste Beschichtung für Grenzfläche von Radfelge und Reifen Wear-resistant coating for interface of the wheel rim and tire
08/18/2011DE102010008518A1 Wärmebehandelbares Infrarotstrahlung reflektierendes Schichtsystem und Verfahren zu dessen Herstellung Thermoprocessable infrared reflecting layer system and method for its preparation
08/18/2011DE102009060864A1 Device for electron beam evaporation, comprises a crucible, by which a strip-shaped substrate to be coated is guided into a continuously operating vacuum coating system in a longitudinal direction, and a movable panel arrangement
08/18/2011DE102008050998B4 Transporteinrichtung für langgestreckte Substrate Transport means for elongated substrates
08/18/2011DE102006003847B4 Verfahren und Vorrichtung zum Herstellen eines polykristallinen Keramikfilms auf einem Substrat Method and apparatus for producing a polycrystalline ceramic film on a substrate
08/18/2011DE102004047135B4 Temperfähiges Schichtsystem und Verfahren zu seiner Herstellung Annealable layer system and method for its preparation
08/18/2011CA2789088A1 Easy-clean cooking surface and culinary article or domestic electrical appliance comprising such a cooking surface