C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
10/2011
10/27/2011	US20110259739 Method and System for Large Scale Manufacture of Thin Film Photovoltaic Devices Using Multi-Chamber Configuration
10/27/2011	US20110259738 Magnetron sputtering device
10/27/2011	US20110259733 Magnetic field control for uniform film thickness distribution in sputter apparatus
10/27/2011	US20110259732 Methods for high-rate sputtering of a compound semiconductor on large area substrates
10/27/2011	US20110259418 Manufacturing Apparatus and Method for Large-Scale Production of Thin-Film Solar Cells
10/27/2011	DE102010017896A1 Vorrichtung und Verfahren zum Beschichten von Substraten nach dem EB/PVD-Verfahren Apparatus and method for coating substrates by the EB / PVD method
10/27/2011	DE102010017895A1 Vorrichtung zum Beschichten von Substraten nach dem EB/PVD-Verfahren A device for coating substrates by the EB / PVD method
10/27/2011	DE102010016635A1 Device for vaporizing solid and/or liquid materials useful in a solar cell manufacturing, comprises a heat exchanger block, a heating element to heat the heat exchanger block, a meander-shaped flow channel, an inlet, and an outlet
10/26/2011	EP2381012A1 Modular system for high-rate deposition of thin film layers on photovoltaic module substrates
10/26/2011	EP2381011A1 Evaporation source for evaporating an organic electroluminescent layer
10/26/2011	EP2381010A1 Methods for high-rate sputtering of a compound semiconductor on large area substrates
10/26/2011	EP2381009A1 Seal configuration for a system for continuous deposition of a thin film layer on a substrate
10/26/2011	EP2381007A1 Preparation of atomizing gas, method and equipment of forming novel material by atomizing gas discharging
10/26/2011	EP2379769A1 Method of making cutting tool inserts with high demands on dimensional accuracy
10/26/2011	EP2379768A1 Vacuum deposition sources having heated effusion orifices
10/26/2011	EP2379767A1 Hafnium oxide or zirconium oxide coating
10/26/2011	EP2188411B1 Sputtering system
10/26/2011	EP2069550B1 Display and/or control element in a motor vehicle
10/26/2011	EP2057661B1 Apparatus for the modification of surfaces
10/26/2011	EP1930451B9 High-purity hafnium, target and thin film comprising high-purity hafnium, and process for producing high-purity hafnium
10/26/2011	EP1452490B1 Piezoelectric body, manufacturing method thereof, piezoelectric element having the piezoelectric body, inject head, and inject type recording device
10/26/2011	CN202017046U Combined film-coating fixture
10/26/2011	CN102227514A Sputtering equipment, sputtering method and method for manufacturing electronic device
10/26/2011	CN102227015A Phase transition storage material and preparation method thereof
10/26/2011	CN102226269A Magnetic field adjusting device of cathodic arc
10/26/2011	CN102226268A Initialization method for plane arc metallic target material
10/26/2011	CN102226267A Device for continuously performing primer spraying, drying and electroplating in vacuum chamber
10/26/2011	CN102226266A System for inputting substrates in negative pressure room in vacuum coating operation of Low-E glass
10/26/2011	CN102226265A Amorphous oxide thin film and preparation method thereof
10/26/2011	CN102226264A Method for producing ZnSO alloy film with adjustable sulfur-doped growth band gap
10/26/2011	CN102226263A Cutter tool and its manufacturing method
10/26/2011	CN102226262A Vacuum coating process and coating composite
10/26/2011	CN102226261A Pre-plating cleaning method of inner wall of vehicle headlight bezel
10/26/2011	CN102225640A Film for raising abrasion resistance of compressor slide plate and preparation method thereof
10/26/2011	CN102225598A Solar silicon wafer wire cutting guide roller and manufacturing method and special film coating machine and electroplating machine
10/26/2011	CN102002673B Preparation method of nanocrystalline silicon-aluminum oxide/silicon oxide thermoelectric film material
10/26/2011	CN101818325B Method for preparing coating having continuous transition layer by using intense pulsed ion beam
10/26/2011	CN101818321B AlCrN composite coating on surface of piston ring and process thereof
10/26/2011	CN101798681B Winding-type vacuum coater
10/26/2011	CN101736305B Method for growing ZnO films of piezoelectric thin film transducer by double-end co-sputtering
10/26/2011	CN101313010B Method to produce adhesiveless metallized polyimide film
10/26/2011	CN101248704B A reflector for an infrared radiating element
10/25/2011	US8045832 Mode size converter for a planar waveguide
10/25/2011	US8044595 Operating a plasma process
10/25/2011	US8044508 Method and apparatus for integrated-circuit battery devices
10/25/2011	US8043710 Ultra-hydrophilic and antibacterial thin film coated metal product, and it's manufacturing method
10/25/2011	US8043488 Rotatable sputter target
10/25/2011	US8043487 Chamber shield for vacuum physical vapor deposition
10/25/2011	US8043484 Methods and apparatus for resputtering process that improves barrier coverage
10/25/2011	US8043483 Film forming method by sputtering and sputtering apparatus thereof
10/25/2011	US8043482 Oxide coated cutting insert
10/25/2011	US8043481 Sputtering method and apparatus
10/25/2011	US8043470 Electrode/probe assemblies and plasma processing chambers incorporating the same
10/20/2011	WO2011129456A1 Deposition method and method for manufacturing semiconductor device
10/20/2011	WO2011129341A1 Oriented perovskite oxide thin film
10/20/2011	WO2011129089A1 Manufacturing method for sputtering target and sputtering target
10/20/2011	WO2011129043A1 Deposition apparatus and deposition method
10/20/2011	WO2011128889A1 Hard carbon coating and method of forming the same
10/20/2011	WO2011128044A1 Device for coating a substrate inside a vacuum chamber by means of plasma-assisted chemical vapor deposition
10/20/2011	WO2011128004A1 Target for spark vaporization with physical limiting of the propogation of the spark
10/20/2011	WO2011127504A1 Coating source and process for the production thereof
10/20/2011	US20110256732 Pulsed Plasma to Affect Conformal Processing
10/20/2011	US20110256715 Barrier layer for copper interconnect
10/20/2011	US20110256673 Deposition method and method for manufacturing semiconductor device
10/20/2011	US20110256473 Mask blank substrate set and mask blank set
10/20/2011	US20110256426 Vacuum arc evaporation apparatus and method, and magnetic recording medium formed thereby
10/20/2011	US20110256423 Head comprising a crystalline alumina layer
10/20/2011	US20110256417 Oxidation Resistant Nanocrystalline MCrAl(Y) Coatings And Methods of Forming Such Coatings
10/20/2011	US20110256408 Method of making coated article having anti-bacterial and/or anti-fungal coating and resulting product
10/20/2011	US20110256386 Fabrication of Large-Area Hexagonal Boron Nitride Thin Films
10/20/2011	US20110256385 Bonding film-attached substrate and bonding film-attached substrate manufacturing method
10/20/2011	US20110256361 Electronic device housing and method for making the same
10/20/2011	US20110256356 Metallic Structures with Variable Properties
10/20/2011	US20110253926 Sputtering Target and Method of Forming Film
10/20/2011	US20110253674 Method and Chamber for Inductively Coupled Plasma Processing for Cylinderical Material With Three-Dimensional Surface
10/20/2011	US20110253531 Composite coating apparatus
10/20/2011	US20110253530 Substrate holding device and sputtering apparatus having same
10/20/2011	US20110253529 Ring cathode for use in a magnetron sputtering device
10/20/2011	US20110253525 Thin film shape memory alloy device and method
10/20/2011	US20110253524 Aluminum-scandium alloy film applied to vehicle lamps and manufacturing method thereof
10/20/2011	US20110253523 Sputtering apparatus and method
10/20/2011	US20110253047 System and Method for Improved Thin Film Deposition
10/20/2011	US20110253037 Vacuum heating and cooling apparatus
10/20/2011	CA2795879A1 Hard carbon coating and method of forming the same
10/20/2011	CA2793736A1 Coating source and process for the production thereof
10/19/2011	EP2378538A2 Ring cathode for use in a magnetron sputtering device
10/19/2011	EP2377969A2 Dual surface treated injection molding article and method of manufacturing the same
10/19/2011	EP2377151A1 Method for lowering the pressure in a charge-discharge lock and associated equipment
10/19/2011	EP2376670A1 Vacuum coating system and method for operating a vacuum coating system
10/19/2011	EP2376669A1 Process for preparing znal target
10/19/2011	EP2376668A1 Method for treating a metal element with ion beam
10/19/2011	EP2376667A1 Method and device for coating functional surfaces
10/19/2011	EP2376282A1 Sheet for packaging food
10/19/2011	EP1801898B1 Integrated circuit device and fabrication using metal-doped chalcogenide materials
10/19/2011	EP1794344B1 Preparing and operating a vaporizer body for a pvd metallization installation
10/19/2011	EP1476891B1 Device and method of coating a substrate with magnetic or magnetisable material
10/19/2011	CN202011903U Strengthened diffusion plate
10/19/2011	CN202011902U Vacuum vapor plating device
10/19/2011	CN1997779B Thin film material and method of manufacturing the same
10/19/2011	CN102224620A Method for manufacturing electrochemical element electrode, electrochemical element electrode, and electrochemical element

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