Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
09/2011
09/21/2011CN102191456A Gas-phase deposition material for formation of film, film sheet material provided with the same and laminated sheet material
09/21/2011CN102191455A Vapour deposition material for forming film, film sheet and laminated sheet having the same
09/21/2011CN102191454A Surface modification method for medical titanium metal material
09/21/2011CN102190917A Seven-color rainbow paint, preparation method thereof, and vacuum coating construction method
09/21/2011CN102188968A Core-shell constructed indium-yttrium-antimony-based composite magnetic particle photocatalyst, its preparation and its application
09/21/2011CN101845614B Method for preparing zinc oxide-based sputtering target material
09/21/2011CN101831609B Circulating cooling water system of diffusion pump of vacuum coater
09/21/2011CN101376972B Vacuum sputtering EMI film and electrophoresis combined coating technology for plastic workpiece surface
09/21/2011CN101300657B Magnetically enhanced capacitive plasma source for ionized physical vapor deposition
09/21/2011CN101135033B Conductive, plasma-resistant member
09/21/2011CN101058867B P-type semiconductor zinc oxide films, process for preparation thereof, and pulsed laser deposition method using transparent substrates
09/20/2011US8023189 Retardation compensation element and manufacturing method of the same
09/20/2011US8022291 Method of making front electrode of photovoltaic device having etched surface and corresponding photovoltaic device
09/20/2011US8022012 Device and method for fabricating thin films by reactive evaporation
09/20/2011US8022011 Photocatalyst element, method and device for preparing the same
09/20/2011US8021757 Tool for machining
09/20/2011US8021743 Process chamber component with layered coating and method
09/20/2011US8021723 Method of plasma treatment using amplitude-modulated RF power
09/20/2011US8021527 Coaxial shafts for radial positioning of rotating magnetron
09/15/2011WO2011111712A1 Sputtering device
09/15/2011WO2011111659A1 Heating apparatus and annealing apparatus
09/15/2011WO2011111626A1 Surface treatment device
09/15/2011WO2011111586A1 Laminate and process for production thereof
09/15/2011WO2011111524A1 Substrate wiring method and semiconductor manufacturing device
09/15/2011WO2011111373A1 Sputtering target, method for producing same and method for producing semiconductor device
09/15/2011WO2011111134A1 Vapor deposition mask, vapor deposition apparatus and vapor deposition method
09/15/2011WO2011110413A1 Sliding element, in particular a piston ring, and method for coating a sliding element
09/15/2011WO2011110410A1 Rotatable target, backing tube, sputtering installation and method for producing a rotatable target
09/15/2011WO2011109923A1 Processing procedure and corrosion protection method for magnetic refrigeration material
09/15/2011WO2011062943A3 Planar magnetron sputtering source producing high target utilization and stable coating uniformity over lifetime
09/15/2011WO2011039424A3 Method and apparatus for laser ablation
09/15/2011US20110224071 Outer periphery-coating material, outer periphery-coated honeycomb structure and process for production thereof
09/15/2011US20110223519 Solid oxide fuel cell and method of preparing the same
09/15/2011US20110223445 Method & apparatus for multi-stage sputter deposition of uniform thickness layers
09/15/2011US20110223434 Gradient composition barrier
09/15/2011US20110223346 Sputtering device and sputtering method
09/15/2011US20110223332 Method for depositing cubic boron nitride thin film
09/15/2011US20110222392 Read-only optical information recording medium and sputtering target for depositing reflective film for the optical information recording medium
09/15/2011US20110222144 Method for producing a multilayer coating, optical element and optical arrangement
09/15/2011US20110220903 Reflective anode and wiring film for organic el display device
09/15/2011US20110220495 Ignition apparatus for arc sources
09/15/2011US20110220494 Methods and apparatus for magnetron metallization for semiconductor fabrication
09/15/2011US20110220493 Masking material, piezoelectric vibrator, method of manufacturing piezoelectric vibrator, oscillator, electronic apparatus, and radio-controlled timepiece
09/15/2011US20110220492 Surface planarization method
09/15/2011US20110220491 Electron-assisted deposition
09/15/2011US20110220490 Apparatus And Method Utilizing A Double Glow Discharge Plasma For Sputter Cleaning
09/15/2011US20110220489 Rotatable target, backing tube, sputtering installation and method for producing a rotatable target
09/15/2011US20110220488 Apparatus and Method for Improved Darkspace Gap Design in RF Sputtering Chamber
09/15/2011US20110220487 Protective Enclosure for an Ion Gun, Device for Depositing Materials through Vacuum Evaporation Comprising Such a Protective Enclosure and Method for Depositing Materials
09/15/2011US20110220486 Method of producing alpha crystal structure-based alumina films
09/15/2011US20110220485 Method for manufacturing device and manufacturing apparatus
09/15/2011US20110220382 Method for producing a layer system on a substrate and layer system
09/15/2011DE102010011543A1 Sputtering target comprises a support and a sputtering material fixed on the support by a solder layer formed from a solder material, where the solder layer is formed as foam and tube target
09/15/2011DE102010010642A1 Verfahren zur Herstellung eines bruchgetrennten Bauteils und nach dem Verfahren hergestelltes Bauteil A process for preparing a fraction separate component and component produced by the process
09/15/2011DE102010002839A1 Coating semiconductor wafer in coating system, comprises coating the wafers within functional area, and placing individual wafers in two rows next to each other and in two rows one behind other directly on conveyor belt of transport device
09/15/2011DE102010002688A1 Schraubendruckfeder für einen Ölabstreifring eines Kolbens in einem Verbrennungsmotor und Verfahren zur Beschichtung einer Schraubendruckfeder Helical compression spring for an oil scraper ring of a piston in an internal combustion engine and method for coating a helical compression spring
09/15/2011DE102010002687A1 Verfahren zur Beschichtung zumindest der Innenfläche eines Kolbenrings sowie Kolbenring A method of coating at least the inner surface of a piston ring and piston ring
09/15/2011DE102010002686A1 Gleitelement, insbesondere Kolbenring, und Verfahren zur Beschichtung eines Gleitelements Sliding element, in particular piston ring, and methods for coating a sliding member
09/15/2011DE102009056162A1 Manufacturing defectless crystalline silicon layer on substrate by chemical or physical gas phase deposition, comprises supplying less amount of nitrogen during the coating of the substrate, and supplying other element as dopant material
09/15/2011DE102009041184A1 Beschichtungs-Vorrichtung und -Verfahren Coating apparatus and method
09/14/2011EP2365515A1 Rotatable target, backing tube, sputtering installation and method for producing a rotatable target
09/14/2011EP2173553B1 A laminate and composite layer comprising a substrate and a coating, and a process and apparatus for preparation thereof
09/14/2011EP2107132B1 Winding vacuum film forming process and apparatus
09/14/2011EP2037001B1 Take up type vacuum vapor deposition device
09/14/2011EP1712349B1 Gas barrier film and gas barrier laminate
09/14/2011EP1452619B1 Process for producing a thin metal oxide film
09/14/2011CN201971892U 一种用于真空镀膜机均匀抽气的抽气口及其接头 A vacuum coating machine even exhausting ports for their joints
09/14/2011CN201971891U 一种圆柱型程控电弧蒸发离化沉积装置 One kind of cylindrical ionization programmed arc evaporation deposition apparatus
09/14/2011CN201971890U 一种提高金属合金基体硬度和抗腐蚀性能的涂层结构 A way to improve the metal alloy substrate hardness and corrosion resistance of the coating structure
09/14/2011CN201967854U 一种真空镀铝膜纽扣 A vacuum metallized buttons
09/14/2011CN1962263B Surface-coated article, production method therefor, machine tool, and machine tool apparatus
09/14/2011CN1946869B Vacuum device where power supply mechanism is mounted and power supply method
09/14/2011CN1743495B Organic matter vaporization plating device
09/14/2011CN1718334B Insert for metal cutting
09/14/2011CN102187254A High refractive index materials for energy efficient lamps
09/14/2011CN102187014A Wear and corrosion resistant layered composite
09/14/2011CN102187010A Sputtering apparatus, method for forming thin film, and method for manufacturing field effect transistor
09/14/2011CN102187009A Sintered body for zno-ga2o3 sputtering target and method for producing same
09/14/2011CN102187008A Sputtering apparatus, thin film forming method and method for manufacturing field effect transistor
09/14/2011CN102187007A Sputtering apparatus, thin film forming method and method for manufacturing field effect transistor
09/14/2011CN102185175A Mobile phone, vacuum coated antenna and manufacturing method thereof
09/14/2011CN102185024A Selenylation furnace for treating and preparing CIGS (Copper Indium Gallium Diselenide) solar cell absorbing layer and manufacturing method thereof
09/14/2011CN102184777A BaTi2O5 thin-film capacitor for ferroelectric random access memory and manufacturing method thereof
09/14/2011CN102183629A Manufacturing method of porous anodised aluminum oxide biochip
09/14/2011CN102183558A Graded porous nano alumina/gold composite film electrode and preparation method thereof
09/14/2011CN102181861A Method for surface treatment of metal alloy
09/14/2011CN102181842A Method for modifying titanium surface
09/14/2011CN102181841A Metal vacuum sputtering device and method
09/14/2011CN102181840A Lithium cobalt oxide target material and preparation method thereof
09/14/2011CN102181839A Same end entrance-exit type continuous sputtering film plating device
09/14/2011CN102181838A Chromium plate manufacturing process
09/14/2011CN102181837A Si-SiC target material
09/14/2011CN102181836A Method for connecting target with back plate
09/14/2011CN102181835A Ti-Zr/ZrN nanometer multilayer coating cutter and preparation process thereof
09/14/2011CN102181834A Method for electroplating imitation gold on glaze of enamel product and enamel product
09/14/2011CN102181833A Method for epitaxially growing strontium titanate (STO) thin film on gallium arsenide (GaAs) substrate
09/14/2011CN102181832A Film coating clamp for reeds
09/14/2011CN102181831A Preparation method for copper oxide nano line array film
09/14/2011CN102181830A Silver nanometer material and application thereof
09/14/2011CN102181829A Method for preparing p-type zinc oxide film through K-H co-doping