C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
10/2011
10/12/2011	CN102212780A Method for preparing p-type cadmium sulfide film
10/12/2011	CN102212779A Magnetron sputtering coating device
10/12/2011	CN102212778A Evaporation apparatus
10/12/2011	CN102212655A Laser shock method
10/12/2011	CN102211437A Colored multilayer film structure and film coating method of same
10/12/2011	CN102211188A Reparation method of tungsten titanium alloy target material used in semiconductor and solar sputtering target material industries
10/12/2011	CN102211185A Silver coated copper alloy powder
10/12/2011	CN101655315B Inner plate and crucible assembly for deposition having the same
10/12/2011	CN101511598B Information recording medium, its manufacturing method, and sputtering target for forming information recording medium
10/12/2011	CN101451227B Evaporation mask and method for manufacturing organic electroluminescent device thereby
10/12/2011	CN101391557B Film with false proof function and anti-counterfeiting object containing film
10/12/2011	CN101209604B Stainless steel products and preparation thereof
10/11/2011	US8034406 for integrated substrate processing in Cu metallization. The method includes providing a substrate in a vacuum processing tool containing a plurality of processing systems configured to process the substrate and a substrate transfer system configured to transfer the substrate under vacuum conditions
10/11/2011	US8034218 Low temperature growth of oriented carbon nanotubes
10/11/2011	US8034182 Apparatus for forming a film and an electroluminescence device
10/11/2011	US8034178 Apparatus and method for manufacturing an organic electroluminescence display
10/11/2011	US8033772 Transfer chamber for vacuum processing system
10/11/2011	CA2562402C A hard, wear-resistant aluminum nitride based coating
10/11/2011	CA2552488C Method of making lc polymer film
10/06/2011	WO2011123688A2 Target utilization improvement for rotatable magnetrons
10/06/2011	WO2011123646A2 Cylindrical rotating magnetron sputtering cathode device and method of depositing material using radio frequency emissions
10/06/2011	WO2011123399A2 Apparatus for physical vapor deposition having centrally fed rf energy
10/06/2011	WO2011122662A1 Anti-friction bearing
10/06/2011	WO2011122643A1 Copper foil for printed wiring board and layered body using same
10/06/2011	WO2011122554A1 Cutting tool
10/06/2011	WO2011122553A1 Cutting tool
10/06/2011	WO2011122547A1 Compact, production method therefor, electronic device member and electronic device
10/06/2011	WO2011122546A1 Molded article, method for producing the same, electronic device member, and electronic device
10/06/2011	WO2011122526A1 Cathode structure and process for producing same
10/06/2011	WO2011122497A1 Transparent conductive film, method for producing same, and electronic device using transparent conductive film
10/06/2011	WO2011122411A1 Sputtering device
10/06/2011	WO2011122317A1 Tantalum coil for sputtering and method for processing the coil
10/06/2011	WO2011122282A1 Separator material for fuel cell, separator for fuel cell and fuel cell stack using the same, and method for producing separator material for fuel cell
10/06/2011	WO2011122100A1 Lanthanum hexaboride sintered body, target and lanthanum hexaboride film each comprising same, and process for production of the sintered body
10/06/2011	WO2011122018A1 Thin film formation device and thin film formation method
10/06/2011	WO2011121863A1 Piezoelectric thin-film element, process for producing same, and piezoelectric thin-film device
10/06/2011	WO2011121665A1 Electronic device manufacturing apparatus and electronic device manufacturing method using same
10/06/2011	WO2011121017A1 Method for the production of functionalized elastomeric manufactured articles and manufactured articles thus obtained
10/06/2011	WO2011120782A2 End-block and sputtering installation
10/06/2011	WO2011120267A1 Automatic cooling type power supply device
10/06/2011	WO2011049303A3 In-line vacuum deposition system which is connectable to a coating process, and deposition method using same
10/06/2011	US20110244622 Methods of forming a conductive transparent oxide film layer for use in a cadmium telluride based thin film photovoltaic device
10/06/2011	US20110244621 Methods of forming a conductive transparent oxide film layer for use in a cadmium telluride based thin film photovoltaic device
10/06/2011	US20110244620 Methods Of Forming A Conductive Transparent Oxide Film Layer For Use In A Cadmium Telluride Based Thin Film Photovoltaic Device
10/06/2011	US20110244373 Mask blank, transfer mask, and methods of manufacturing the same
10/06/2011	US20110244371 Microporous thin film comprising nanoparticles, method of forming the same, and fuel cell comprising the same
10/06/2011	US20110244251 Methods Of Forming A Conductive Transparent Oxide Film Layer For Use In A Cadmium Telluride Based Thin Film Photovoltaic Device
10/06/2011	US20110244200 Decorative Film And Method For Manufacturing The Same
10/06/2011	US20110244126 Method for selectively removing hydrogen from molecules
10/06/2011	US20110243835 Indium oxide sintered compact and sputtering target
10/06/2011	US20110242961 Ferroelectric recording medium and method of manufacturing the same, information processing device, and method of processing information
10/06/2011	US20110242702 Magnetic recording medium, method of manufacturing the same, and magnetic recording/reproduction apparatus
10/06/2011	US20110241239 Optical media production system and method for controlling same
10/06/2011	US20110240988 Field effect transistor, method for manufacturing the same, and sputtering target
10/06/2011	US20110240935 Sintered complex oxide and sputtering target comprising same
10/06/2011	US20110240934 Oxide sintered body, manufacturing method therefor, manufacturing method for transparent conductive film using the same, and resultant transparent conductive film
10/06/2011	US20110240846 Semiconductor device, method for manufacturing semiconductor device, apparatus for manufacturing semiconductor device, and method for evaluating semiconductor device
10/06/2011	US20110240602 High-voltage gas cluster ion beam (gcib) processing system
10/06/2011	US20110240468 Target utilization improvement for rotatable magnetrons
10/06/2011	US20110240467 Cylindrical sputtering target, and method for manufacturing same
10/06/2011	US20110240466 Physical vapor deposition chamber with rotating magnet assembly and centrally fed rf power
10/06/2011	US20110240465 End-block and sputtering installation
10/06/2011	US20110240464 Apparatus for physical vapor deposition having centrally fed rf energy
10/06/2011	US20110240462 Deposition apparatus and method for manufacturing semiconductor device
10/06/2011	US20110240461 Deposition system and methods having improved material utilization
10/06/2011	US20110240118 Method and device for scribing a thin film photovoltaic cell
10/06/2011	US20110240115 Doped buffer layer
10/06/2011	US20110239941 Evaporation apparatus
10/06/2011	DE102010054148A1 Sputtering target, useful for sputtering, comprises a matrix material comprising a first oxide comprising e.g. titanium oxide, niobium oxide, vanadium oxide, yttrium oxide, molybdenum oxide and/or tantalum oxide and a metallic component
10/06/2011	CA2795385A1 Method for the production of functionalized elastomeric manufactured articles and manufactured articles thus obtained
10/06/2011	CA2791288A1 Cylindrical rotating magnetron sputtering cathode device and method of depositing material using radio frequency emissions
10/05/2011	EP2371992A1 End-block and sputtering installation
10/05/2011	EP2371991A1 Method for discontinuous refilling of a selenium evaporation chamber
10/05/2011	EP2371990A1 Methods of forming a conductive transparent oxide film layer for use in a cadmium telluride based thin film photovoltaic device
10/05/2011	EP2371989A1 Methods of forming a conductive transparent oxide film layer for use in a cadmium telluride based thin film photovoltaic device
10/05/2011	EP2371988A1 Methods of forming a conductive transparent oxide film layer for use in a cadmium telluride based thin film photovoltaic device
10/05/2011	EP2371987A2 Thermal barrier coating member, method for producing the same, thermal barrier coating material, gas turbine, and sintered body
10/05/2011	EP2370612A1 In-line vacuum coating system
10/05/2011	EP2370611A1 Ito-coated article for use with touch panel display assemblies, and/or method of making the same
10/05/2011	EP2102381B1 Method for the production of an antimicrobial material
10/05/2011	EP1863947B1 Hard material layer
10/05/2011	EP1819842B1 Method of fabricating a scratch resistant coated glass article including carbide layer(s) resistant to fluoride-based etchant(s)
10/05/2011	EP1337683B1 Method for automatic organisation of microstructures or nanostructures and related device obtained
10/05/2011	EP1194385B1 Protective layers for sputter coated article
10/05/2011	CN201999988U Detachable gas inlet and outlet structure
10/05/2011	CN201999987U Cooling blocking board device
10/05/2011	CN201999986U Back panel structure with cooling flow passages
10/05/2011	CN201999985U Circular rotary heating device
10/05/2011	CN102210025A Semiconductor device
10/05/2011	CN102209804A Polymer laminate substrate for formation of epitaxially grown film, and manufacturing method therefor
10/05/2011	CN102209799A Insulator-interposed plasma processing device
10/05/2011	CN102208520A Light emitting diode (LED) wafer anode pad and manufacturing process thereof
10/05/2011	CN102208485A Method of forming a conductive transparent oxide film layer for use in a cadmium telluride based thin film photovoltaic device
10/05/2011	CN102208484A Methods of forming a conductive transparent oxide film layer for use in a cadmium telluride based thin film photovoltaic device
10/05/2011	CN102208483A Methods of forming a conductive transparent oxide film layer for use in a cadmium telluride based thin film photovoltaic device
10/05/2011	CN102208460A Film formation substrate, manufacturing method for film formation substrate and film formation device
10/05/2011	CN102208346A Nonvolatile charge capture type storage device, preparation method thereof and application
10/05/2011	CN102208321A Method and apparatus for laser to induce plasma to inject into substrate
10/05/2011	CN102206812A InGaN thin film with larger band gap and preparation method thereof
10/05/2011	CN102206811A InGaN film with small band gap and preparation method thereof

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