Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
06/2011
06/16/2011DE102010061259A1 Modulares System und Verfahren zur kontinuierlichen Abscheidung einer dünnen Filmschicht auf einem Substrat A modular system and process for the continuous deposition of a thin film layer on a substrate
06/16/2011DE102010061198A1 Aktive Sichtfensterdetektionsanordnung zur Substratdetektion in einem Dampfphasenabscheidungssystem Active window detection device for detecting substrate in a vapor deposition system
06/16/2011DE102010061195A1 System und Verfahren zur Cadmiumtellurid (CdTe)-Rückgewinnung in einer Dampfphasenabscheidungs-Fördereranordnung System and method for cadmium telluride (CdTe) -Rückgewinnung in a vapor phase deposition conveyor assembly
06/16/2011DE102010061125A1 Fördereinrichtung für eine Dampfphasenabscheidungsvorrichtung Conveying means for a vapor phase deposition apparatus
06/16/2011DE102009058038A1 Anordnung zum Temperieren von bandförmigen Substraten Arrangement for controlling the temperature of the band-shaped substrates
06/16/2011DE102009057486A1 Ablenkvorrichtung für Elektronenstrahlen, magnetische Ablenkeinheit für eine solche Ablenkvorrichtung und Vorrichtung zum Bedampfen eines flächigen Substrates mit einer solchen Ablenkvorrichtung For deflecting electron beams, magnetic deflection unit for deflecting and such a device for the vapor deposition of a planar substrate with such deflector
06/16/2011DE102009053903B3 Coating substrate in vacuum chamber having rotating magnetron, comprises guiding past the substrate to the magnetron in substrate transport direction, and coating the substrate by material extracted from target connected with the magnetron
06/16/2011DE102009052873A1 Device for continuously movable infiltration of a flexible band substrate in high vacuum without touching the front side of the band substrate, comprises a sequence of prechambers to which the band substrate passes through
06/16/2011DE102009044838A1 Metastabilisiertes, nanostabilisiertes Material und Verfahren zu dessen Herstellung Metastabilisiertes, nano-stabilized material and process for its preparation
06/16/2011DE102007003272B4 Hartstoffbeschichtungsschicht Hard coating layer
06/16/2011DE10019888B4 Transparente elektronische Bauelementanordnung und Verfahren zu ihrer Herstellung Transparent electronic component assembly and process for their preparation
06/15/2011EP2333132A1 Film-forming method and oil repellent base
06/15/2011EP2332724A1 Gas barrier film
06/15/2011EP2331729A1 Sanitary object
06/15/2011EP2331724A2 Oxyfluoridecoating
06/15/2011EP1201002B1 Fuel cell membrane electrode assemblies with improved power outputs and poison resistance
06/15/2011EP0840676B2 Adhesiveless flexible laminate and process for making adhesiveless flexible laminate
06/15/2011CN201868459U Semiconductor solar coating process chamber
06/15/2011CN201864774U Swing bin for vacuum continuous coating film production line
06/15/2011CN201864773U Slewing mechanism for vacuum continuous film-coating production line
06/15/2011CN201864772U Work rest for vacuum coating
06/15/2011CN201864771U Workpiece bracket for vacuum coater
06/15/2011CN201864770U Evaporation crucible for electron gun
06/15/2011CN201864769U Metal mask plate structure for evaporating color of organic light emitting diode (OLED) display panel
06/15/2011CN1928149B Deposition device and method for manufacturing display device
06/15/2011CN1846013B Vacuum film forming method and device
06/15/2011CN1721569B Coat base with curved surface and method for manufacturing such coat base
06/15/2011CN1679375B Fabrication system, light-emitting device and fabricating method of organic compound-containing layer
06/15/2011CN1664683B 电子电路 Electronic circuit
06/15/2011CN1621555B Mask and container and manufacturing apparatus
06/15/2011CN102099138A Coated member
06/15/2011CN102099137A Hard coating and hard coating furnished tool
06/15/2011CN102098887A Housing of electronic device
06/15/2011CN102097595A Organic lighting device and producing method thereof
06/15/2011CN102097367A Method for integrating Cu and ferric oxide functional film
06/15/2011CN102097267A Method for manufacturing front panel of plasma display screen
06/15/2011CN102097208A Preparation method of magnetic multilayer-film nano bowl monolayer array
06/15/2011CN102097156A Transparent conductive structure, thin film solar cell and manufacturing method thereof
06/15/2011CN102095759A Sensor of gas harmful to neuron based on Y-type zeolite film material
06/15/2011CN102094222A Method for processing surface of multi-scale bionic structure
06/15/2011CN102094182A Method for improving electric conductivity and stability of aluminum-doped ZnO transparent conductive film AZO
06/15/2011CN102094181A Conveyor assembly for a vapor deposition apparatus
06/15/2011CN102094180A Multi-layer film deposition method
06/15/2011CN102094179A RB-SiC base reflector surface modified layer structure and preparation method thereof
06/15/2011CN102094178A Method for preparing high-performance surface acoustic wave device with multilayer film structure
06/15/2011CN102094177A Production method for sputtering aluminum foil on surface of plastic
06/15/2011CN102094176A Moving target device of vacuum sputtering equipment
06/15/2011CN102094175A Powder sintering multicomponent alloy coated target adopting direct water cooling and preparation method thereof
06/15/2011CN102094174A Preparation method of silicon-based composite substrate for electronic device
06/15/2011CN102094173A In-situ plasma Ti/Cu composite coating plating process
06/15/2011CN102094172A Method for preparing TiWN/MoS2 composite film
06/15/2011CN102094171A Method for preparing Al-Si-Y high-temperature protective coating through vacuum arc plating
06/15/2011CN102094170A Zirconium oxide thermal barrier coating for turbine buckets of gas turbine and preparation method thereof
06/15/2011CN102094169A Surface PVD coating method for blade (slip sheet) for novel compressor
06/15/2011CN102094168A 掩膜组件 Mask assembly
06/15/2011CN102094167A Mask for evaporation, and method and apparatus for manufacturing the same
06/15/2011CN102093081A Adaptive graphite-like carbon-based film material for mechanical seal and preparation method thereof
06/15/2011CN102092166A Multilayered gradient diamond like nano composite coating for aluminum alloy piston and preparation method thereof
06/15/2011CN102092159A ZrN/TiMo composite coating for impellers and blades of compressors and preparation method thereof
06/15/2011CN101798671B Novel ReB2/TaN high-hard nano-multilayer film, and preparation method and application thereof
06/15/2011CN101776338B Solar high-temperature and heat-absorbing CrFeON film and preparation process thereof
06/15/2011CN101709450B Method for preparing zirconium-titanium-aluminum-nitrogen nitride gradient hard reaction film
06/15/2011CN101705471B Preparation method of chromium nitride titanium aluminum nitrogen gradient hard reaction film
06/15/2011CN101698934B Hollow cathode electric arc ion coating plating system
06/15/2011CN101661862B Ion source
06/15/2011CN101652498B Plasma generation device, and method and apparatus for forming film using the same
06/15/2011CN101613854B Non-equilibrium magnetron-sputtering rare-earth multivariate graphite composite film and preparation method thereof
06/15/2011CN101582468B Method of high-mobility textured structure IMO/ZnO composite film of solar battery
06/15/2011CN101572279B High mobility textured structure IMO/ZnO composite film grown by sputtering method and application thereof to solar cell
06/15/2011CN101565115B Producing technique of films for aluminized wrapping paper imitating aluminum foil
06/15/2011CN101521085B Nanocrystal iron nitride thin-film material and functions thereof
06/15/2011CN101512039B Device for turning an article in a vacuum coating installation, method of turning an article in a vacuum coating installation and use thereof
06/15/2011CN101509128B Apparatus for treating a substrate
06/15/2011CN101501242B Take-up type vacuum filming device
06/15/2011CN101500742B Room-temperature bonding method and room-temperature bondingapparatus
06/15/2011CN101490304B Plasma film deposition system and method for producing film
06/15/2011CN101426946B Method of removing hard coating film
06/15/2011CN101413101B Metal / ceramic microlaminate material and preparation thereof
06/15/2011CN101410546B Sputtering apparatus
06/15/2011CN101410545B Ion gun system, vapor deposition apparatus and process for producing lens
06/15/2011CN101403098B Magnetic memory material of compound structure of FePt nano-particle monolayer film and B4C and method of producing the same
06/15/2011CN101393294B Interference filter and method for its production
06/15/2011CN101378031B Substrate carrier plateform and substrate processing device
06/15/2011CN101356244B Easy-to-clean, mechanically stable coating composition for metallic surfaces with increased chemical resistance and process for coating a substrate using said composition
06/15/2011CN101353780B Mounting plate with a cooled backing plate set on top
06/15/2011CN101314311B False proof thin film and producing method thereof
06/15/2011CN101271167B A surface treated flake
06/14/2011US7962016 Heating crucible for organic thin film forming apparatus
06/14/2011US7960901 Piezoelectric device having a ferroelectric film including a ferroelectric material
06/14/2011US7960070 Electrocatalyst for ethanol oxidation and direct ethanol fuel cell using the same
06/14/2011US7960043 Photo-induced hydrophilic article and method of making same
06/14/2011US7960033 Transparent conductive film, sintered body target for transparent conductive film fabrication, and transparent conductive base material and display device using the same
06/14/2011US7959988 Coating film forming apparatus and method
06/14/2011US7959782 Method of manufacturing a Ni-Pt alloy
06/14/2011US7959776 Cooled backing plate for a sputtering target, and sputtering target comprising a plurality of backing plates
06/14/2011US7959775 Thermal stress-failure-resistant dielectric windows in vacuum processing systems
06/14/2011US7959769 Deposition of LiCoO2
06/14/2011US7959746 Sputtering target material
06/09/2011WO2011068480A1 Method and system for forming a metal electrode for a solar cell
06/09/2011WO2011068038A1 Cleaning gas