C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
11/2011
11/16/2011	CN101388371B Semiconductor device, display device and manufacture method thereof
11/16/2011	CN101310969B Aluminum/aluminum oxide/Ni-base superalloy composite coating for titanium-aluminum alloy and preparation method thereof
11/16/2011	CN101269557B Method for producing composite binding layer by using combination of plating and electro beam physics vapour deposition
11/15/2011	US8057923 Wetting resistant materials and articles made therewith
11/15/2011	US8057922 Wetting resistant materials and articles made therewith
11/15/2011	US8057856 Method for gettering oxygen and water during vacuum deposition of sulfide films
11/15/2011	US8057649 Microwave rotatable sputtering deposition
11/15/2011	US8057648 Deposition system using noise canceller and its method of control
11/10/2011	WO2011140481A1 Spotless arc directed vapor deposition (sa-dvd) and related method thereof
11/10/2011	WO2011140060A2 Thermal evaporation sources with separate crucible for holding the evaporant material
11/10/2011	WO2011139439A2 Physical vapor deposition chamber with rotating magnet assembly and centrally fed rf power
11/10/2011	WO2011138967A1 Conductive sliding film, member formed from conductive sliding film, and method for producing same
11/10/2011	WO2011138922A1 Transparent conductive film and method for producing same
11/10/2011	WO2011138019A1 Method for the production of biaxially textured films and films obtained using such a method
11/10/2011	WO2011137967A1 Method for spark deposition using ceramic targets
11/10/2011	WO2011137689A1 Vacuum dynamic seal precise transmission mechanism
11/10/2011	WO2011137472A1 Titanium diboride target
11/10/2011	WO2011078626A3 Strip passing apparatus, apparatus for treating surface of strip with the same, and method for treating surface of strip
11/10/2011	WO2011039424A4 Method and apparatus for laser ablation
11/10/2011	US20110274855 Method for coating a component
11/10/2011	US20110274854 Method of making window unit including diamond-like carbon (DLC) coating
11/10/2011	US20110274838 System and process for the continuous vacuum coating of a material in web form
11/10/2011	US20110274393 Erasable Ion Implanted Optical Couplers
11/10/2011	US20110273800 Perpendicular magnetic recording write head with milling defined track width
11/10/2011	US20110273356 Radio wave transmitting decorative member and the production method thereof
11/10/2011	US20110272279 Apparatus for manufacturing semiconductor device and method for manufacturing semiconductor device by using the same
11/10/2011	US20110272278 Sputtering apparatus
11/10/2011	US20110272275 System for Sputtering and Method Thereof
11/10/2011	DE102010028777A1 Removal of backcoat on substrate e.g. glass substrate, involves warming up surface area of edge of back of substrate by electron bombardment for evaporation of solitary particles
11/10/2011	DE102010028558A1 PVD-Hybridverfahren zum Abscheiden von Mischkristallschichten Hybrid PVD process for depositing mixed crystal layers
11/10/2011	DE102010020074A1 Cutting tool comprises a base body having substrate hardness, a clamping surface layer, preferably clamping surface coating, a clamping surface and a clearance surface, which is formed at the base body
11/10/2011	DE102009022620B4 Hartfilm-beschichtetes Element und Vorrichtung zum Formen Hard film-coated member and apparatus for forming
11/09/2011	EP2385155A1 Ceramic thermal barrier coating system with two ceramic layers
11/09/2011	EP2385151A1 System and methods for high-rate co-sputtering of thin film layers on photovoltaic module substrates
11/09/2011	EP2385150A1 Method for the production of biaxially textured films and films obtained using such a method
11/09/2011	EP2384374A1 Tube target
11/09/2011	EP2243149B1 Multiple grooved vacuum coupling
11/09/2011	EP1547974B1 Iron silicide powder and method for production thereof
11/09/2011	CN202030820U Source device for material film production
11/09/2011	CN202030819U Ferroelectric thin-film preparation system based on pulse laser deposition method
11/09/2011	CN1754981B Non-bonded rotatable targets for sputtering
11/09/2011	CN102239276A Plasma processing apparatus, apparatus for manufacturing magnetoresistive element, method for forming magnetic thin film and program for controlling film formation
11/09/2011	CN102239275A Organic compound steam generator and apparatus for producing organic thin film
11/09/2011	CN102237451A Method for improving topography and electrical properties of ZnO (zinc oxide) thin film
11/09/2011	CN102237448A Devices and methods of protecting a cadmium sulfide layer for further processing
11/09/2011	CN102237418A Cadmium sulfide layers for use in cadmium telluride based thin film photovoltaic devices and methods of their manufacture
11/09/2011	CN102234784A Coating system
11/09/2011	CN102234783A A target material pedestal and a film plating apparatus employing the target material pedestal
11/09/2011	CN102234782A Coated umbrella stand
11/09/2011	CN102234781A Coating umbrella stand
11/09/2011	CN102234780A Lens tray clamp of film coating machine
11/09/2011	CN102234779A Methods for high-rate sputtering of a compound semiconductor on large area substrates
11/09/2011	CN102234778A Method and device for vacuum magnetron sputtering of aluminized film on hub of automobile
11/09/2011	CN102234777A Magnetic control sputtering machine and sputtering method for manufacturing film solar battery
11/09/2011	CN102234776A Magnetron sputtering apparatus
11/09/2011	CN102234775A Cadmium sulfide layers for use in cadmium telluride based thin film photovoltaic devices and methods of their manufacture
11/09/2011	CN102234774A System and methods for high-rate co-sputtering of thin film layers on photovoltaic module substrates
11/09/2011	CN102234773A Modular system for high-rate deposition of thin film layers on photovoltaic module substrates
11/09/2011	CN102234772A Coating device
11/09/2011	CN102234771A Pressing blocks used for fixing film forming substrate in deposited film forming process, and deposited film forming method
11/09/2011	CN102234770A Sputtering apparatus and sputtering method
11/09/2011	CN102234769A Sputtering device and sputtering method
11/09/2011	CN102234768A Sputtering device
11/09/2011	CN102234767A Coating device and coating method
11/09/2011	CN102234766A Sputtering device and sputtering target cleaning method
11/09/2011	CN102234765A Preparation method of target material for growing tellurium cadmium mercury film
11/09/2011	CN102234764A Metallization process and welding method for pyrolytic graphite
11/09/2011	CN102234763A Seal configuration for a system for continuous deposition of a thin film layer on a substrate
11/09/2011	CN102234762A 镀膜系统 Coating systems
11/09/2011	CN102234761A Protection structure of electric access device of physical vapor deposition equipment
11/09/2011	CN102234760A Thick paper vacuum aluminum plating production technology and pretreatment device
11/09/2011	CN102234759A Coating method for manufacturing thin film solar cell
11/09/2011	CN102234758A Process for processing titanium-coated screw tap
11/09/2011	CN102233781A Decorative film, method for manufacturing thereof, and decorative molding article
11/09/2011	CN102233698A Surface strengthening matrix and preparation method thereof
11/09/2011	CN102233697A Surface strengthened substrate, and preparation method thereof
11/09/2011	CN101935820B Production method of electrode of dielectric barrier discharge plasma generator
11/09/2011	CN101850256B Preparation method of Y-Sb-based composite magnetic particle optical catalyst in nuclear-shell structures
11/09/2011	CN101831615B Nano composite titanium-chromium-aluminum-silicon nitride cutter coat and preparation method thereof
11/09/2011	CN101824603B Method for manufacturing composite film gas sensor
11/09/2011	CN101748371B Method for preparing insulating film attached to touch screen
11/09/2011	CN101748367B Device and method used for plating films on cavity surfaces of semiconductor lasers
11/09/2011	CN101665907B Process for forming a ferroelectric film through sputtering technology
11/09/2011	CN101519769B Plane magnetron sputtering target for improving magnetic field distribution
11/09/2011	CN101307432B Sputtering bearing device
11/09/2011	CN101180687B Transparent electroconductive film and process for producing transparent electroconductive film
11/09/2011	CN101052754B Method of surface reconstruction for silicon carbide substrate
11/08/2011	US8053364 Closed-loop sputtering controlled to enhance electrical characteristics in deposited layer
11/08/2011	US8053038 Method for making titanium-based compound film of poly silicon solar cell
11/08/2011	US8052853 Sputtering apparatus and method of preventing damage thereof
11/08/2011	US8052852 Magnetron sputtering cathode mechanism
11/08/2011	US8052850 Sputtering apparatus, method of operating the same, and method of manufacturing substrate using the same
11/08/2011	US8052810 Metal structure and fabrication method thereof
11/08/2011	US8051556 Method of manufacturing apparatus for spatial and temporal control of temperature on a substrate
11/03/2011	WO2011137448A2 Silicon-carbon nanostructured electrodes
11/03/2011	WO2011137285A1 Plasma assisted deposition of mo/si multilayers
11/03/2011	WO2011136120A1 Sb-te based alloy sintered compact sputtering target
11/03/2011	WO2011136016A1 Epitaxial film formation method, vacuum treatment device, method for producing semiconductor light-emitting element, semiconductor light-emitting element, lighting device
11/03/2011	WO2011135975A1 Si-Ge LAMINATED THIN FILM AND INFRARED SENSOR USING SAME
11/03/2011	WO2011135810A1 Film deposition system

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