Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
11/2011
11/30/2011CN202054890U 沉积腔 Deposition chamber
11/30/2011CN202054889U 一种整体结构磁控装置 A monolithic structure of magnetic devices
11/30/2011CN202054888U 一种磁控溅射装置 One kind of magnetron sputtering device
11/30/2011CN202054887U 一种脉冲激光沉积系统 A pulsed laser deposition system
11/30/2011CN202054886U Transfer cavity of physical vapor deposition main machine station
11/30/2011CN202054885U 真空高温快速加热装置 Vacuum high temperature rapid heating device
11/30/2011CN102265376A 可旋转溅射靶材座、可旋转溅射靶材、涂覆设备、制造可旋转溅射靶材的方法、靶材座连接装置、以及将用于溅射设备的可旋转溅射靶材座装置连接至靶材座支撑件的方法 Rotatable sputter target holder, a rotatable sputtering target, the coating apparatus, the manufacturing method for a rotatable sputtering target, the target base connecting means, and a rotatable seat to be used for the sputtering target of the sputtering apparatus The method of the target device is connected to the seat support member
11/30/2011CN102265355A 透明导电性层叠体和透明触摸面板 The transparent conductive laminate and a transparent touch panel
11/30/2011CN102265354A 透明导电性层叠体和使用其的透明触摸面板 The transparent conductive laminate and a transparent touch panel using the same
11/30/2011CN102265323A 显示装置 Display device
11/30/2011CN102264942A 成膜装置和使用该成膜装置的基板的制造方法 Film forming apparatus and method of manufacturing the substrate using the deposition apparatus
11/30/2011CN102264941A 粒料的计量和蒸发 Pellets metering and evaporated
11/30/2011CN102264940A 氧化铪或氧化锆镀层 Hafnium oxide or zirconium oxide coating
11/30/2011CN102264810A 用于金属涂层的聚合物组合物和由此制成的制品及其制备方法 Polymer compositions for metal coatings and articles made therefrom and preparation method
11/30/2011CN102264666A Ito烧结体制造方法以及ito溅射靶制造方法 Ito sintered body manufacturing method, and a sputtering target manufacturing method ito
11/30/2011CN102264535A 氧化锌系导电性层叠体及其制造方法 Zinc oxide-based conductive laminate and manufacturing method thereof
11/30/2011CN102263036A 一种制备CdS/ZnS纳米线异质结的方法 A CdS / ZnS nanowire heterojunction prepared
11/30/2011CN102260907A 一种ZnO纳米同质pn结阵列的制备方法 Method for preparing homogeneous nano-ZnO pn junction arrays
11/30/2011CN102260854A 一种自洁太阳能高反射率纳米薄膜及制造方法 A self-cleaning film and method of manufacturing the high reflectivity of solar nano
11/30/2011CN102260853A 基于磁控溅射技术沉积太阳能电池用硅薄膜的方法 Magnetron sputtering deposition of a silicon thin film solar cell based methods
11/30/2011CN102260852A 一种织绒结构azo膜制备方法 A method of producing a film velvet woven structure azo
11/30/2011CN102260851A 溅镀载具 Sputtering vehicle
11/30/2011CN102260850A 一种少液滴电弧靶及带少液滴电弧靶的等离子涂层系统 A Reduced droplet target arc and arc with less droplet target plasma coating system
11/30/2011CN102260849A 团簇束产生装置以及方法、基板处理装置以及方法 Cluster beam generating apparatus and method, substrate processing apparatus and method
11/30/2011CN102260848A 用于卧式镀膜生产线中镀膜箱体上盖的翻转结构 Coating production lines for horizontal flip structure coating atop the box
11/30/2011CN102260847A 一种低熔点金属旋转靶材及生产技术 A low melting point metal rotating target and production technology
11/30/2011CN102260846A 一种多晶二氧化锡阻变薄膜及其制备方法和应用 A polycrystalline tin oxide resistive film and preparation method and application
11/30/2011CN102260845A 镜筒镀膜辅助治具 Tube Coating Auxiliary fixture
11/30/2011CN102260802A 一种靶材制备装置及其靶材加工方法 One kind of target device and target preparation and processing method
11/30/2011CN102259937A 一种钌酸锶靶的制备方法 A method for producing a target strontium ruthenium
11/30/2011CN101906613B 一种在印材上进行局部真空蒸镀的方法 A partial vacuum evaporation method on printed materials
11/30/2011CN101877302B 对腔体抽真空的方法 The method of evacuating the chamber
11/30/2011CN101768722B 一种含氢纳米结构CNx梯度薄膜的制备方法 Method for preparing hydrogen gradient nanostructure films CNx
11/30/2011CN101748370B 用于水润滑的织构化类金刚石复合薄膜的制备方法 Preparation for water lubricated textured DLC composite film
11/30/2011CN101736306B 等离子表面冶金金属线材的生产方法及装置 Method and apparatus for the production of ions and other surface metallurgy metal wire
11/30/2011CN101654334B 离线浅绿色低辐射镀膜玻璃及其制备方法 Offline Low-E coated glass, light green and its preparation method
11/30/2011CN101640233B 用磁控溅射法生产CdS/CdTe太阳能电池的装置 Production of CdS / CdTe solar cells by magnetron sputtering apparatus
11/30/2011CN101638769B 成膜装置及使用该成膜装置的成膜方法 Film forming apparatus and film deposition method using the film forming apparatus
11/30/2011CN101636522B 真空涂覆装置 Vacuum coating equipment
11/30/2011CN101543934B 靶材结构及其制作方法 Target structure and production methods
11/30/2011CN101490766B 氧化锌系透明导体、溅射靶以及该溅射靶的制造方法 Zinc oxide transparent electric conductor, the manufacturing method of the sputtering target and sputtering target
11/30/2011CN101466252B 电磁屏蔽层及其制备方法 Electromagnetic shielding layer and its preparation method
11/30/2011CN101405431B 有凹口的沉积环 There deposition ring recess
11/30/2011CN101348898B 一种改进的真空泵系统 An improved vacuum pumping system
11/30/2011CN101244291B 一种带有复合梯度层的镁或镁合金材料及其制备方法 A complex gradient layer of magnesium or magnesium alloy material and method with
11/29/2011US8066857 Shaped anode and anode-shield connection for vacuum physical vapor deposition
11/29/2011US8066854 Antimicrobial coating methods
11/29/2011US8066853 Method of forming inorganic alignment film, inorganic alignment film, substrate for electronic device, liquid crystal panel and electronic apparatus
11/29/2011US8066825 Co-Fe a ferromagnetic phase, and one or more selected from Zr, Hf, Nb and Ta are incorporated in solid solution form into the Co-Fe phase; capable of achieving a high sputtering efficiency and a high sputtering effect through an increase in leakage magnetic flux during magnetron sputtering
11/29/2011CA2476320C Apparatus and method for arc detection
11/24/2011WO2011146301A1 Chalcogenide-based materials and methods of making such materials under vacuum using post-chalcogenization techniques
11/24/2011WO2011145930A1 Through silicon via treatment device and method for treatment of tsvs in a chip manufacturing process
11/24/2011WO2011145665A1 Sintered zinc oxide tablet and process for producing same
11/24/2011WO2011145628A1 Thermoplastic resin composition for lamp housings, and molded articles
11/24/2011WO2011145456A1 Manufacturing device and manufacturing method for organic el element
11/24/2011WO2011145438A1 Reflection member
11/24/2011WO2011145265A1 Sintered magnesium oxide material, and process for production thereof
11/24/2011WO2011144759A1 Non-continuous bonding of sputtering target to backing material
11/24/2011WO2011090704A3 Method for producing microstructured templates and their use in providing pinning enhancements in superconducting films deposited thereon
11/24/2011US20110287195 Curing Apparatus Employing Angled UVLEDs
11/24/2011US20110287188 Processes for applying a conversion coating with conductive additive(s) and the resultant coated articles
11/24/2011US20110287177 Vacuum processing apparatus, substrate rotation apparatus, and deposition method
11/24/2011US20110286709 Method and System for Edge Cladding of Laser Gain Media
11/24/2011US20110284919 Method for manufacturing group iii nitride semiconductor layer, method for manufacturing group iii nitride semiconductor light-emitting device, and group iii nitride semiconductor light-emitting device, and lamp
11/24/2011US20110284373 Inorganic-Particle-Dispersed Sputtering Target
11/24/2011US20110284372 Cu-Ga ALLOY MATERIAL, SPUTTERING TARGET, METHOD OF MAKING Cu-Ga ALLOY MATERIAL, Cu-In-Ga-Se ALLOY FILM, AND METHOD OF MAKING Cu-In-Ga-Se ALLOY FILM
11/24/2011US20110284366 Coated article with high visible transmission and low emissivity
11/24/2011US20110284365 Lanthanoid aluminate film fabrication method
11/24/2011US20110284364 Aluminum Doped Zinc Oxide Sputtering Targets
11/24/2011US20110283934 Highly productive apparatus for vacuum coating roll substrates
11/24/2011DE112009002468T5 Organische Dünnschicht-Niederschlagsvorrichtung, organische EL-Element-Herstellungsvorrichtung und organisches Dünnschicht-Niederschlagsverfahren Organic thin-film deposition apparatus, organic EL element manufacturing apparatus and organic thin film deposition method
11/24/2011DE102011006829A1 Zylinderbohrung und Verfahren zu deren Herstellung Cylinder bore and processes for their preparation
11/24/2011DE102010021547A1 Depositing thin films on substrates by vacuum deposition method, comprises heating coating material in form of vapor cloud in evaporation source until it vaporizes, and spreading evaporated coating material on surface of substrate
11/23/2011EP2388354A1 Layered thermal barrier coating with blended transition and method of application
11/23/2011EP2388346A1 Production of fine grain niobium products by micro-alloying and ingot metallurgy
11/23/2011EP2388345A1 Fine grain niobium wrought products obtained by VAR ingot metallurgy
11/23/2011EP2387803A1 A method for deposition of at least one electrically conducting film on a substrate
11/23/2011EP2387625A1 Concentric hollow cathode magnetron sputter source
11/23/2011EP2125251B1 Coating method for optical plastic substrates
11/23/2011EP1607417B1 Method of forming thin film
11/23/2011CN202047130U Novel integrated device capable of supplying gas through multistage technology
11/23/2011CN202047129U Novel magnetic baffle plate viewing window
11/23/2011CN202044806U Oil diffusion pump cold well for vacuum coating equipment
11/23/2011CN102257664A Fuel cell separator material, fuel cell separator using same, fuel cell stack, and method for producing fuel cell separator material
11/23/2011CN102257175A Industrial vapour generator for depositing an alloy coating on a metal strip
11/23/2011CN102255040A Continuous preparing method of double-sided superconductive belt material buffer layer
11/23/2011CN102254998A Cadmium-free CuInGaSe thin film solar cell assembly and preparing method of zinc sulfide buffer layer thin film thereof
11/23/2011CN102251287A Method for eliminating defects from semiconductor materials
11/23/2011CN102251224A Device and method for depositing film on SiC fiber surface
11/23/2011CN102251223A Power distribution device for rotating target
11/23/2011CN102251222A Chromium alloy target material and metal material with hard film
11/23/2011CN102251221A Target and semiconductor device processing apparatus using same
11/23/2011CN102251220A Mixed gas supply system, sputtering device and sputtering method
11/23/2011CN102251219A Multichannel pulsed laser deposition method for preparing YSZ buffer layer
11/23/2011CN102251218A Film plating apparatus
11/23/2011CN102251217A Method for increasing bonding area of chips
11/23/2011CN102251216A Method for preparing tungsten-doped vanadium oxide film
11/23/2011CN102251215A Method for preparing AlInN film by double buffer layer technique
11/23/2011CN102251214A Preparation method of boron phosphide wear-resistant corrosion-resistant coating
11/23/2011CN102251213A Vapour deposition protective coating on magnesium alloy surface with corrosion resistance and wear resistance and preparation method thereof