C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
01/2012
01/03/2012	CA2511832C Components for a film-forming device and method for cleaning the same
12/2011
12/29/2011	WO2011163485A1 Fluorinated composition, method of coating the composition, and article thereby
12/29/2011	WO2011162813A1 Bimetallic target
12/29/2011	WO2011162431A1 Separator plate for a fuel cell and a production method therefor
12/29/2011	WO2011162036A1 Sputtering device, deposition method and control device
12/29/2011	WO2011162028A1 Transparent conductive film, method for manufacturing a transparent conductive film, dye-sensitized solar cell, and solid-electrolyte cell
12/29/2011	WO2011162026A1 Conductive-material manufacturing method, conductive material, and battery
12/29/2011	WO2011161912A1 Substrate holder, film-forming device, and film-forming method
12/29/2011	WO2011161903A1 Arc evaporation source having fast film-forming speed, film formation device and manufacturing method for coating film using the arc evaporation source
12/29/2011	WO2011161895A1 Process for production of analysis element chip
12/29/2011	WO2011161745A1 Substrate inverting apparatus, vacuum film-forming apparatus, and substrate inverting method
12/29/2011	WO2011160766A1 Arc deposition source having a defined electric field
12/29/2011	WO2011160749A1 Method and device for coating a surface
12/29/2011	WO2011100102A3 Electron radiation monitoring system to prevent gold spitting and resist cross-linking during evaporation
12/29/2011	US20110318714 Implant material and method for manufacturing the same
12/29/2011	US20110318652 Solid electrolyte battery and process for producing solid electrolyte battery
12/29/2011	US20110318651 Thermoelectric generator
12/29/2011	US20110318607 Aluminum alloy reflective film, automobile light, illuminator, ornamentation, and aluminum alloy sputtering target
12/29/2011	US20110318576 Method for treating a surface of an elastomer part using multi-energy ions he+ and he2+
12/29/2011	US20110318558 Coating, article coated with coating, and method for manufacturing article
12/29/2011	US20110318553 Method and system for manufacturing a transparent body for use in a touch panel
12/29/2011	US20110318534 Low Viscosity Monomer for Patterning Optical Tape
12/29/2011	US20110318506 Optical Tape Media Patterning Using Cationic Polymerizable Monomers
12/29/2011	US20110318504 Method for fabricating composite material comprising nano carbon and metal or ceramic
12/29/2011	US20110318497 Hoistway sheave resurfacing
12/29/2011	US20110317084 Patterned retardation film and method for manufacturing the same
12/29/2011	US20110316393 Piezoelectric film and piezoelectric device
12/29/2011	US20110315949 Apparatus and method for sensing photons
12/29/2011	US20110315936 Sputtering target, oxide semiconductor film and semiconductor device
12/29/2011	US20110315896 Luminescent glass element, producing method thereof and luminescing method thereof
12/29/2011	US20110315895 Luminescent glass element, producing method thereof and luminescing method thereof
12/29/2011	US20110315544 Arc evaporator and method for operating the evaporator
12/29/2011	US20110315543 Forming memory using high power impulse magnetron sputtering
12/29/2011	US20110315214 Transparent electrically conductive substrate carrying thereon a surface electrode, a manufacturing method therefor, a thin-film solar cell and a manufacturing method therefor
12/29/2011	US20110314991 Shearing die and method for manufacturing the same
12/29/2011	DE19983075B3 Organisches Substrat mit durch Magnetronzerstäubung abgeschiedenen optischen Lagen und Verfahren zur Herstellung desselben, sowie Verwendung eines solchen Verfahrens Organic substrate having optical layers deposited by magnetron sputtering and method of manufacturing the same, and the use of such a method
12/29/2011	DE102010030563A1 Producing molded body made of carbon fiber reinforced carbon, comprises e.g. providing layer of fabric, scrim or nonwoven fabric made of carbon containing material, and applying powdered carbon matrix precursor to one side of the layer
12/29/2011	DE102004008425B4 Gasführungsanordnung in einer Vakuumbeschichtungsanlage mit einer längserstreckten Magnetronanordnung Gas guide assembly in a vacuum coating plant with an elongated magnetron
12/29/2011	CA2803087A1 Arc deposition source having a defined electric field
12/29/2011	CA2801629A1 Arc evaporation source having fast film-forming speed, coating film manufacturing method and film formation apparatus using the arc evaporation source
12/28/2011	EP2399696A1 Electrode manufacturing method and electric discharge surface treatment used therein
12/28/2011	EP2398932A1 Simplified powder feeding and vaporization apparatus
12/28/2011	EP2398931A2 A method and arrangement for vapour phase coating of an internal surface of at least one hollow article
12/28/2011	EP2398930A1 Physical vapor deposition with impedance matching network
12/28/2011	EP2066824B1 Method for depositing an oxide layer on absorbers of solar cells and use of the method
12/28/2011	EP1936005B1 HIGH-PURITY Ru ALLOY TARGET, PROCESS FOR PRODUCING THE SAME AND SPUTTERED FILM
12/28/2011	EP1194608B1 Sputtering method using virtual shutter
12/28/2011	CN202090053U 太阳光谱选择性吸收涂层卷对卷连续镀膜生产线 Solar spectrum selective absorbing coating continuous roll-to-roll coating production line
12/28/2011	CN202090052U 一种磁控溅射镀膜设备 One kind of magnetron sputtering equipment
12/28/2011	CN202090051U Target material and internal magnetic pole
12/28/2011	CN202090050U 电阻蒸发镀膜机的钨舟改进结构 Tungsten boat resistance evaporation coating machine improved structure
12/28/2011	CN202090049U 电阻蒸发镀膜机的改进结构 Improve the structure of the resistance evaporation coating machine
12/28/2011	CN202090048U 含轰击杆结构的电阻蒸发镀膜机 Pole structure containing bombardment resistance evaporation coating machine
12/28/2011	CN202090047U 含过滤结构的电阻蒸发镀膜机 Filter structure containing resistance evaporation coating machine
12/28/2011	CN202090046U 电阻蒸发镀膜机 Resistance evaporation coating machine
12/28/2011	CN202090045U 一种处理制备cigs太阳能电池吸收层的硒化炉 A process for preparing cigs furnace selenide solar cell absorber layer
12/28/2011	CN102301451A 晶圆处理沉积屏蔽部件 Wafer processing deposition shield member
12/28/2011	CN102301032A 具有加热的泻流孔的真空沉积源 A vacuum deposition source having a heated effusion holes
12/28/2011	CN102301018A 高纯度铒的制造方法、高纯度铒、包含高纯度铒的溅射靶以及以高纯度铒为主要成分的金属栅膜 The method for producing high purity erbium, erbium high purity, containing erbium sputtering target of high purity and high purity erbium as a main component a metal gate film
12/28/2011	CN102300611A 通过分级升华/凝华而连续提纯固体混合物的方法和设备 Method and apparatus by fractional sublimation / condensate mixture of solid and continuous purification
12/28/2011	CN102300383A 一种电感耦合装置及应用该装置的等离子体处理设备 An inductively coupled plasma processing apparatus and its application device of the apparatus
12/28/2011	CN102299479A Fp腔半导体激光器腔面钝化的方法 Fp cavity semiconductor laser cavity surface passivation method
12/28/2011	CN102298986A 透明导电基板及制造方法、薄膜太阳能电池及制造方法 The transparent conductive substrate and method of manufacturing the thin film solar cell and method of manufacturing
12/28/2011	CN102296277A 等离子处理腔室的基座 Plasma processing chamber base
12/28/2011	CN102296276A 等离子体浸没离子注入设备 Plasma immersion ion implantation equipment
12/28/2011	CN102296275A 基片离子均匀注入的方法 Uniform substrate ion implantation method
12/28/2011	CN102296274A 用于阴极弧金属离子源的屏蔽装置 Metal shielding means for the cathode arc ion source
12/28/2011	CN102296273A 一种真空磁控溅射镀膜用旋转阴极驱动系统 A vacuum magnetron sputtering using a rotary cathode drive system
12/28/2011	CN102296272A 钽靶材制作方法 Tantalum target production methods
12/28/2011	CN102296271A 硬质涂层及其制备方法及具有该涂层的被覆件 Hard coating and preparation method thereof and the covering member having the coating
12/28/2011	CN102296270A 掺杂氧化锌半导体材料及其制备方法与应用 Zinc oxide semiconductor material and its preparation method and application doping
12/28/2011	CN102296269A 一种硬质涂层及其制备方法 A hard coating and its preparation method
12/28/2011	CN102294856A 一种装饰材料及其制备方法 A decorative material and preparation method
12/28/2011	CN102294854A 硬质涂层及其制备方法及具有该涂层的被覆件 Hard coating and its preparation method and the covering member having the coating
12/28/2011	CN102294671A 支撑装置及组装薄膜物理钛腔的线圈与护罩的方法 Coil support means and the shroud assembly physically titanium film chamber method
12/28/2011	CN101948999B 一种低温掺杂发光氮化铝薄膜及其制备方法 A light-emitting aluminum nitride film and preparation method low doping
12/28/2011	CN101899641B 群体定向玻壳蒸镀设备 Groups directional bulb evaporation equipment
12/28/2011	CN101889103B 薄膜形成装置和薄膜形成方法 A thin film forming apparatus and film forming method
12/28/2011	CN101880861B 一种双靶射频磁控共溅射超硬、高效导热、低吸收Al<sub>x</sub>Si<sub>y</sub>N膜的方法 A dual target RF magnetron co-sputtering superhard, efficient thermal conductivity, low absorption Al <sub> x </ sub> Si <sub> y </ sub> N membrane method
12/28/2011	CN101824618B 超硬类金刚石基纳米复合涂层印刷电路板微钻及其制备方法 Superhard diamond-like nanocomposite coating printed circuit board micro-drilling and preparation method
12/28/2011	CN101768747B 一种在钛合金表面进行表面活化处理的方法 A method of surface activation in the titanium alloy surface treatment
12/28/2011	CN101709452B 铝或铝合金溅射靶材的清洗方法 Aluminum or aluminum alloy sputtering target cleaning method
12/28/2011	CN101689592B Ⅲ族氮化物半导体发光元件及其制造方法和灯 Ⅲ nitride semiconductor light emitting device and manufacturing method and light
12/28/2011	CN101688295B 具有分离电极的静电卡盘 Having a separate electrode electrostatic chuck
12/28/2011	CN101631889B 聚脲膜及其成膜方法 Polyurea film and film-forming method
12/28/2011	CN101524930B 一种纸张金属化印刷转移方法 Metal transfer method of printing paper
12/28/2011	CN101518161B 扩径管型等离子体生成装置 Radially enlarged tube-type plasma generating means
12/28/2011	CN101397649B 能够将有机化合物沉积在衬底上的装置 The organic compound can be deposited on the substrate means
12/28/2011	CN101348903B 多功能薄膜沉积设备 Multifunctional thin film deposition apparatus
12/28/2011	CN101298392B 一种装饰防护涂层及其合成方法 A decorative protective coatings and synthetic methods
12/28/2011	CN101228288B 注射型等离子体处理设备和方法 Injection type plasma treatment apparatus and method
12/27/2011	US8084100 Method for the manufacture of a coating
12/27/2011	US8083912 Substrate carrier
12/27/2011	US8083911 Apparatus for treating a substrate
12/27/2011	US8083908 High strength vacuum deposited nitinol alloy films and method of making same
12/27/2011	US8083907 Hydrogen storage nano-foil and method of manufacture
12/27/2011	US8083905 Carbon nanotubes for fuel cells, method for manufacturing the same, and fuel cell using the same
12/27/2011	US8083888 Plasma processing apparatus
12/22/2011	WO2011158828A1 Sputtering film forming device, and adhesion preventing member
12/22/2011	WO2011158650A1 Vapor deposition method and vapor deposition device

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