Patents for C23C 14 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material (67,378)
01/2012
01/12/2012US20120009039 Insert for Milling of Cast Iron
01/12/2012US20120007077 Silicon device structure, and sputtering target used for forming the same
01/12/2012US20120006785 Wear Resistant Vapor Deposited Coating, Method of Coating Deposition and Applications Therefor
01/12/2012US20120006781 Electrode material and applications thereof
01/12/2012US20120006680 Rotary target backing tube bonding assembly
01/12/2012US20120006676 Potassium/molybdenum composite metal powders, powder blends, products thereof, and methods for producing photovoltaic cells
01/12/2012US20120006675 Film forming method, film forming apparatus and control unit for the film forming apparatus
01/12/2012US20120006257 Substrate holder stocker device, substrate processing apparatus, and substrate holder moving method using the substrate holder stocker device
01/12/2012DE112009002156T5 Substrathalteelement, Substratverarbeitungsvorrichtung und Substratverarbeitungsverfahren Substrate support member substrate processing apparatus and substrate processing method
01/12/2012DE102011006354A1 Maskenrohling, Übertragungsmaske, Verfahren zu ihrer Herstellung und Verfahren zum Herstellen eines Halbleiterbauelements Mask blank mask transmission, to processes for their preparation and method of manufacturing a semiconductor device
01/12/2012DE102010036332A1 Verfahren zum Beschichten eines Substrats mittels eines Lichtbogens A method of coating a substrate by means of an arc
01/12/2012DE102010031262A1 Substrate support for transporting disk-shaped substrates in vacuum coating systems, comprises recording plane for substrate, transport plane for supporting substrate support on transport device of vacuum deposition system, and webs
01/12/2012DE102010031259A1 Supporting device for a magnetron arrangement having a rotating target, comprises a drive shaft, at which a first end for connecting to the rotating target is formed and a second end for introducing a torque is formed, and a drive unit
01/12/2012DE102010031245A1 Substratbehandlungseinrichtung The substrate processing apparatus
01/12/2012DE102005035904B4 Vorrichtung zum Behandeln von Substraten Apparatus for processing substrates
01/12/2012CA2803898A1 Potassium/molybdenum composite metal powders, powder blends, products thereof, and methods for producing photovoltaic cells
01/12/2012CA2803160A1 Thermal barrier for turbine blades, having a columnar structure with spaced-apart columns
01/11/2012EP2405566A1 Alternating current power supply for sputtering apparatus
01/11/2012EP2405032A2 Oxidation-Corrosion resistant coating
01/11/2012EP2405029A1 Method for producing an adhesive scratch-proof protective coating on a metallic workpiece
01/11/2012EP2403973A1 Highly ordered arrays of nanoholes in metallic films and methods for producing the same
01/11/2012EP2403899A1 Method for treating a surface of an elastomer part multi-energy ions he+ and he2+
01/11/2012EP1924718B1 Production of fine grain micro-alloyed niobium sheet via ingot metallurgy
01/11/2012EP1338672B1 Piezoelectric thin film and method for preparation thereof, piezoelectric element, ink-jet head, and ink-jet recording device
01/11/2012CN202107761U Thin film flattening device of vacuum aluminizing machine
01/11/2012CN202107760U Fixture of vacuum coating false nail
01/11/2012CN202107759U Lower gripping device for glass substrate loading frame
01/11/2012CN202107758U Vacuum sputtering equipment
01/11/2012CN1610765B Improved method for coating a support with a material
01/11/2012CN1550568B 制造装置和发光装置 Devices and light-emitting device manufacturing
01/11/2012CN102317498A Sputtering target and method for processing sputtering target
01/11/2012CN102317497A Simplified powder feeding and vaporization apparatus
01/11/2012CN102317496A Process for producing multilayered gas-barrier film
01/11/2012CN102317494A Method for producing a heat barrier covering a metal substrate made of a superalloy, and thermomechanical part resulting from said production method
01/11/2012CN102317016A Surface-coated cutting tool
01/11/2012CN102317015A Surface-coated cutting tool
01/11/2012CN102317014A Cutting tool components with wear-resistant cladding layer
01/11/2012CN102315276A Silicon device structure, and sputtering target used for forming the same
01/11/2012CN102312212A Scanning coating device and scan coating assembly
01/11/2012CN102312211A Method for forming amorphous transparent oxide film at low temperature
01/11/2012CN102312210A Plasma immersion ion injection system
01/11/2012CN102312209A Methods and apparatus of arc prevention during RF sputtering of a thin film on a substrate
01/11/2012CN102312208A Method for preparing indium tin oxide (ITO) film on resin substrate by using magnetron sputtering
01/11/2012CN102312207A Film forming device
01/11/2012CN102312206A Sputtering method
01/11/2012CN102312205A Khaki vacuum coated piece and preparation method thereof
01/11/2012CN102312204A Sputtering coating method and device for high vapor pressure material
01/11/2012CN102312203A Vacuum coating system capable of swinging workpiece and swinging carrier
01/11/2012CN102312202A Zinc oxide-based wide bandgap ceramic target and preparation method thereof
01/11/2012CN102312201A Preparation method of Al-doped zinc oxide transparent conductive thin film
01/11/2012CN102312200A Evaporator
01/11/2012CN102312199A Scanning coating device and scan coating assembly
01/11/2012CN102312198A Evaporation source and evaporation coating device
01/11/2012CN102312197A Copper, indium, gallium and selenide (CIGS) solar battery processing equipment and method
01/11/2012CN102312196A Mobile arc discharge ion plating equipment and application thereof
01/11/2012CN102312195A Electromagnetic interference protecting layer and method for preparing plastic shell thereof
01/11/2012CN102312194A Apparatus and methods of forming a conductive transparent oxide film
01/11/2012CN102312193A Vapor plating material for forming films, film sheet with the film and laminated sheet
01/11/2012CN102312192A Seed crystal layer-assisting surface texturing zinc oxide transparent conductive film and preparation method thereof
01/11/2012CN102312191A Method for preparing high-resistance transparent zinc oxide (ZnO) thin film by utilizing direct current magnetic control sputtering equipment
01/11/2012CN102312190A Methods for sputtering a resistive transparent thin film for use in cadmium telluride based photovoltaic devices
01/11/2012CN102312189A Film formation apparatus
01/11/2012CN102312111A Method for preparing TiAl alloy through melting with consumable vacuum arc furnace
01/11/2012CN102310706A Decoration film, decoration device and method for fabricating decoration film
01/11/2012CN102310226A Shearing die and method for manufacturing the same
01/11/2012CN101928920B Multilayer composite wire rotary preparation device and preparation method
01/11/2012CN101887017B Surface plasma resonance sensor chip and preparation method thereof
01/11/2012CN101818330B Unbalanced magnetron sputtering C/Ta graphite-like carbon film and preparation method thereof
01/11/2012CN101805889B Magnetic target and magnetron sputtering device having same
01/11/2012CN101798677B Ultrasonic sample table and method for carrying out powder magnetic control sputtering coating by using same
01/11/2012CN101798105B Preparation technology for growing ZnO nanorod arrays on ITO PET film
01/11/2012CN101788127B Vehicle lamp coating combining process
01/11/2012CN101722000B Preparation method of high-efficiency composite catalyst film for overlength carbon nano tube growth
01/11/2012CN101608305B Method for preparing ZnO nanowire array
01/11/2012CN101276690B Thin film capacitor, thin film capacitor-embedded printed circuit board and manufacturing method of thin film capacitor
01/11/2012CN101258263B Sputtering target, transparent conductive film and transparent electrode
01/10/2012US8093800 Sputtering target, sintered article, conductive film fabricated by utilizing the same, organic EL device, and substrate for use therein
01/10/2012US8093144 Patterning of nanostructures
01/10/2012US8092931 Magnetic disk, method of manufacturing the magnetic disk and method of evaluating the magnetic disk
01/10/2012US8092660 Methods and equipment for depositing hydrophilic coatings, and deposition technologies for thin films
01/10/2012US8092659 Multi-station sputtering and cleaning system
01/10/2012US8092658 Method and apparatus of distributed plasma processing system for conformal ion stimulated nanoscale deposition process
01/10/2012US8092657 Module for coating both sides of a substrate in a single pass
01/10/2012US8092607 Transporting means and vacuum coating installation for substrates of different sizes
01/10/2012US8092585 Enhanced bonding layers on titanium materials
01/10/2012US8092560 Lapping tool and method for manufacturing the same
01/10/2012US8091505 Active material contaaining metal with oxygen, nitrogen, carbon and current collector; testing by irradiating with x-rays; measuring angle of reflected light
01/10/2012CA2672669C Methods for producing even wall down-hole power sections
01/10/2012CA2616781C Endoluminal device exhibiting improved endothelialization and method of manufacture thereof
01/10/2012CA2576541C Apparatus and method for levitation of an amount of conductive material
01/05/2012WO2012002970A1 Molybdenum containing targets
01/05/2012WO2012002969A1 Molybdenum containing targets
01/05/2012WO2012002723A2 Transparent conductive film, method for manufacturing same, and transparent electrode and device using same
01/05/2012WO2012002473A1 Film-forming device and film-forming method
01/05/2012WO2012002383A1 Target mounting mechanism
01/05/2012WO2012002337A1 Powder, sintered body and sputtering target, each containing elements cu, in, ga and se, and method for producing the powder
01/05/2012WO2012002282A1 Film forming method and processing system
01/05/2012WO2012002191A1 Trap device and substrate processing device
01/05/2012WO2012001330A2 Method for the surface treatment of a fluid product dispensing device
01/05/2012WO2012001328A2 Method for the surface treatment of a fluid product dispensing device