Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
06/1994
06/03/1994CA2110414A1 Electrode for use in plasma etching
06/01/1994EP0599709A1 Plasma cutting torch
06/01/1994EP0598842A1 Electrodeless plasma torch apparatus and methods for the dissociation of hazardous waste
06/01/1994EP0422057B1 Cold fusion process in dense boson plasma
06/01/1994DE4240016A1 Treating surfaces of objects using high pressure plasma - produced between two plasma accelerators having compression coils
05/1994
05/31/1994US5317126 Nozzle and method of operation for a plasma arc torch
05/31/1994CA2008174C Rotatable plasma torch
05/26/1994WO1994011544A1 Microwave apparatus for depositing thin films
05/26/1994DE4304613C1 Stabilisation of plasma generation using electron beam evaporator for metals - focusing electron beam on evaporator material within housing and monitoring intensity of light emission above surface, to control power supply to electron gun
05/26/1994DE4302630C1 Coaxial plasma ring accelerator - forms poloidal alternating magnetic field for shape-stabilising plasma confinement
05/26/1994DE4300949C1 Dual microwave interferometer, e.g. for measuring plasma electron density - measures phase-shift in microwave radiation using two mixers coupled to delay and measuring path
05/26/1994DE4239218A1 Cathodic sputtering method - with intermittent reverse polarity of electrodes to suppress overloading of plasma with reactive products
05/25/1994EP0598128A1 Plasma processing apparatus
05/25/1994EP0413749B1 Dual mode flyback power supply
05/25/1994EP0285668B1 Thin film formation apparatus
05/24/1994US5315212 Plasma processing apparatus for generating uniform strip-shaped plasma by propagating microwave through rectangular slit
05/24/1994US5314540 Apparatus for forming diamond film
05/20/1994EP0697935A4 Plasma arc cutting process and apparatus using an oxygen-rich gas shield
05/18/1994EP0597497A1 Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits
05/18/1994EP0597206A1 Process for the reduction of soot particles in exhaust gas streams
05/17/1994US5312778 Etching
05/11/1994EP0596830A1 Plasma spray gun
05/11/1994EP0596551A1 Induction plasma source
05/11/1994EP0596092A1 Process and device for applying pulses on the surface of a solid body
05/11/1994EP0595968A1 Plasma disintegration for waste material
05/10/1994US5310988 Electrode for high current density plasma arc torch
05/10/1994US5310452 Plasma process apparatus and plasma processing method
05/04/1994EP0595671A1 Dry reflow process and apparatus
05/04/1994EP0594750A1 Radiation monitor in a superconducting electromagnet for a particle accelerator
05/04/1994CN2164175Y Plasma generator
05/03/1994US5308949 Nozzle assembly for plasma arc cutting torch
05/03/1994US5308650 Vapor deposition and cladding with microwave pulsation
05/03/1994US5308414 Method and apparatus for optical emission end point detection in plasma etching processes
04/1994
04/28/1994WO1994008748A1 Plasma torch
04/28/1994DE4235953A1 Sputtering source esp for large area deposition - has inexpensive linear hollow cathode formed of parallel planar targets
04/28/1994DE4235476A1 Determining pulsed particle-beam energy in an accelerator - involves calculating energy as function of physical separation between two probes giving predefined phase difference in signals
04/27/1994EP0594328A1 Method for controlling plasma processes
04/27/1994EP0593931A1 Microwave plasmas producing device
04/27/1994CN1085876A Method for prepn. of nanometer calcium using plasma
04/19/1994US5304770 Nozzle structure for plasma torch
04/13/1994EP0592129A1 ECR plasma process
04/13/1994EP0424402B1 Method in a pulsed accelerator for accelerating a magnetized rotating plasma
04/12/1994US5303139 Low frequency, pulsed, bipolar power supply for a plasma chamber
04/12/1994US5302962 Antenna system producing a millimeter wave beam having a gaussian-like distribution
04/12/1994US5302882 Low pass filter for plasma discharge
04/12/1994US5302804 Gas arc constriction for plasma arc welding
04/12/1994US5302803 Apparatus and method for uniform microwave plasma processing using TE1101 modes
04/12/1994US5302266 Method and apparatus for filing high aspect patterns with metal
04/12/1994CA1328490C System for low voltage plasma arc cutting
04/06/1994EP0591018A1 Arc plasma torch and method of application
04/05/1994US5300901 Arrangement for coupling in of microwave energy
04/05/1994US5300861 Method in a pulsed accelerator for accelerating a magnetized rotating plasma
04/05/1994US5300460 UHF/VHF plasma for use in forming integrated circuit structures on semiconductor wafers
03/1994
03/29/1994US5298835 Modular segmented cathode plasma generator
03/29/1994US5298755 Optical ionization detector
03/29/1994US5298714 Plasma torch for the treatment of gases and/or particles and for the deposition of particles onto a substrate
03/29/1994US5298587 Protective film for articles and method
03/22/1994US5296784 Apparatus for the production of glow discharge
03/22/1994US5296672 Electric arc reactor having upstream and downstream electrodes
03/22/1994US5296670 DC plasma arc generator with erosion control and method of operation
03/22/1994US5296668 Gas cooled cathode for an arc torch
03/22/1994US5296667 High velocity electric-arc spray apparatus and method of forming materials
03/22/1994US5296665 Method of restarting a plasma arc torch using a periodic high frequency-high voltage signal
03/17/1994WO1994006263A1 High pressure magnetically assisted inductively coupled plasma
03/17/1994WO1994005828A1 Process for cleaning surfaces with a low-pressure plasma
03/17/1994DE4230779A1 Arc extinction device for vacuum substrate coating device - uses capacitor across anode and cathode DC supply leads providing diversion path
03/17/1994DE4230630A1 Creating or destroying chemical cpds. or bio-substances - by subjecting to electrical spark or discharge with gas flow used for small scale and compact synthesis or gas effluent cleaning
03/17/1994DE4230290A1 Appts. for producing plasma using cathode sputtering - comprises plasma chamber, target connected to electrode, magnetron, and microwave emitter
03/16/1994EP0586579A1 Window for microwave plasma processing device
03/16/1994EP0586370A1 A method for generating and exploiting a plasma ball or a similar phenomenon in a chamber and the chamber.
03/16/1994CN1083870A Unidirectional field generator
03/15/1994US5294773 System for controlling a high plasma torch with high flow rates of plasma-generating gas
03/09/1994EP0585977A1 Plasma arc torch with improved nozzle shield and step flow
03/09/1994EP0585229A1 Cluster tool soft etch module and ecr plasma generator therefor.
03/09/1994EP0312587B1 Plasma focus apparatus with field distortion elements
03/08/1994US5293396 Plasma generating apparatus and method for extreme-ultaviolet laser
03/08/1994US5292395 ECR plasma reaction apparatus having uniform magnetic field gradient
03/03/1994WO1994004461A1 Methods and apparati for producing fullerenes
03/03/1994DE4228551A1 Verfahren zur reinigenden Behandlung von Oberflächen mit einem Niederdruckplasma A method for cleaning treatment of surfaces with a low-pressure plasma
03/02/1994EP0585203A1 Plasma spray gun
03/01/1994US5290993 Microwave plasma processing device
03/01/1994US5290416 Unidirectional field generator
02/1994
02/23/1994EP0583997A1 Topographical selective patterns
02/22/1994US5289509 Shielded comb-line antenna structure for launching plasma waves
02/22/1994US5288969 Electrodeless plasma torch apparatus and methods for the dissociation of hazardous waste
02/22/1994US5288460 High speed, nontoxic, environmentally safe; for medical equipment
02/17/1994WO1994003263A1 Improvements in the conversion of chemical moieties
02/15/1994US5286550 Process for producing a patterned metal surface
02/15/1994US5286297 Multi-electrode plasma processing apparatus
02/10/1994DE4226229A1 Surface treatment using high energy material pulse
02/09/1994EP0581765A1 Long life arcjet thruster having diffuse cathode arc attachment
02/08/1994US5285046 Apparatus for depositing particulate or powder-like material on the surface of a substrate
02/08/1994CA1326886C Plasma generating apparatus and method
02/03/1994WO1994003029A1 On-site, biohazardous waste disposal system
02/03/1994WO1994002739A1 Plasma motor with closed electron drift
02/03/1994WO1994002738A1 Fixed plasma motor
02/03/1994CA2141202A1 On-site, biohazardous waste disposal system
02/03/1994CA2139581A1 Fixed plasma motor
02/01/1994US5283530 Electron acceleration system
02/01/1994US5283498 High-power radiator