Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
10/2005
10/19/2005CN1684224A Methods and array for creating a mathematical model of a plasma processing system
10/19/2005CN1224298C Electric plasma processing device
10/19/2005CN1223613C Continuous processing apparatus by plasma polymerization with vertical chamber
10/18/2005US6956885 Electromagnetic radiation generation using a laser produced plasma
10/18/2005US6956329 Apparatus and method for forming a high pressure plasma discharge column
10/18/2005US6955794 Slot discharge non-thermal plasma apparatus and process for promoting chemical reaction
10/13/2005WO2005096681A1 Plasma torch spectrometer
10/13/2005WO2005096363A1 Method of plasma treatment and process for producing electronic appliance
10/13/2005WO2005096361A1 Silicon electrode plate having excellent durability for plasma etching
10/13/2005WO2005096345A1 Apparatus and method for plasma treating an article
10/13/2005WO2005095007A1 Method and apparatus for coating a substrate using dielectric barrier discharge
10/13/2005WO2005094502A2 Pulsed power system including a plasma opening switch
10/13/2005US20050227118 Plasma resistant member
10/13/2005US20050227115 Submerged plasma generator, method of generating plasma in liquid and method of decomposing toxic substance with plasma in liquid
10/13/2005US20050227017 Low temperature deposition of silicon nitride
10/13/2005US20050226802 Gel and powder making
10/13/2005US20050226383 Apparatus, system, and method for high flux, compact compton x-ray source
10/13/2005US20050225739 Exposure apparatus and device fabrication method using the same
10/13/2005US20050224709 Short torch design for direct liquid sample introduction using conventional and micro-nebulizers for plasma spectrometry
10/13/2005US20050224344 Plasma processing apparatus and method
10/13/2005US20050224337 Plasma processing apparatus and method
10/13/2005US20050224182 Plasma processing apparatus
10/13/2005US20050224178 Heating jacket for plasma etching reactor, and etching method using same
10/13/2005US20050223995 Vacuum treatment installation with a variable pump arrangement
10/13/2005US20050223992 Miniature microwave plasma torch application and method of use thereof
10/13/2005US20050223990 Plasma processing system and its substrate processing process, plasma enhanced chemical vapor deposition system and its film deposition process
10/13/2005DE102004013946A1 Gas flow generating method for drive of air cushion vehicle, involves forming cross sections of antennae in type of hyper bola, where emitted electrical field perpendicular to antennae is modified from point to point in quadrate
10/12/2005CN1682578A Plasma-spraying device
10/12/2005CN1682344A Method and apparatus for the compensation of edge ring wear in a plasma processing chamber
10/12/2005CN1681092A Plasma processing apparatus and method
10/12/2005CN1223242C Apparatus for fixing electrode in plasma polymerizing apparatus
10/12/2005CN1223241C Constant-pressure radio frequency cold plasma system and spray gun thereof
10/12/2005CN1223088C Method for controlling generator output
10/12/2005CN1222762C Apparatus for detecting plasma anomalous discharge and method of detecting the same
10/11/2005US6953908 Plasma processing apparatus
10/11/2005US6953005 Plasma processing apparatus utilizing a surface wave plasma
10/06/2005WO2005094140A1 Plasma generating equipment
10/06/2005WO2005094139A1 Electrode for plasma generation, plasma generator and plasma processing apparatus
10/06/2005WO2005094138A1 Plasma generation power supply apparatus
10/06/2005WO2005093806A1 Semiconductor manufacturing equipment and method for manufacturing semiconductor device
10/06/2005WO2005093800A1 Method of impurity introduction, impurity introduction apparatus and semiconductor device produced with use of the method
10/06/2005WO2005034183A3 Method and apparatus for determining plasma impedance
10/06/2005WO2004081503A3 Discharge produced plasma euv light source
10/06/2005US20050221021 Method and system for performing atomic layer deposition
10/06/2005US20050220245 Formation of a field reversed configuration for magnetic and electrostatic confinement of plasma
10/06/2005US20050218816 High current density ion source
10/06/2005US20050218814 System and method for generating a discharge in gases
10/06/2005US20050217992 Magnetron sputtering source and chamber therefor
10/06/2005US20050217798 Plasma processing apparatus
10/06/2005US20050217797 Methods and array for creating a mathematical model of a plasma processing system
10/06/2005DE102004011118A1 External electrode for a plasma beam source preferably a high frequency source has hole pattern in a screen
10/05/2005EP1582606A1 Vacuum treating apparatus with variable pumping arrangement.
10/05/2005EP1582270A1 Method and apparatus for coating a substrate using dielectric barrier discharge
10/05/2005EP1581359A1 Mig-plasma welding
10/05/2005CN1679137A Cathode for vacuum sputtering treatment machine
10/05/2005CN1679136A Gas tube end cap for a microwave plasma generator
10/05/2005CN1678164A 等离子割炬 Plasma torch
10/05/2005CN1678163A System and method for X-ray generation
10/05/2005CN1677624A Plasma processing device and method thereof
10/05/2005CN1222197C Ion beam radiation device and method for choking basis charge accumulation
10/05/2005CN1222196C Switch type charge amplifier plasma lightning-protection system
09/2005
09/29/2005WO2005091687A1 Micro plasma jet generator
09/29/2005WO2005089818A1 Microwave plasma sterilizing method and device
09/29/2005US20050214475 Floor tile coating system
09/29/2005US20050214181 Producing plasma at a low voltage which has high treatment efficiency and maintains stable plasma by suppressing heat generation
09/29/2005US20050214179 Low current plasmatron fuel converter having enlarged volume discharges
09/29/2005US20050213709 Miniature x-ray source with improved output stability and voltage standoff
09/29/2005US20050213708 System and method for X-ray generation
09/29/2005US20050212450 Method and system for detecting electrical arcing in a plasma process powered by an AC source
09/29/2005US20050212442 Ion accelerator arrangement
09/29/2005US20050212441 Plasma processing method and apparatus
09/29/2005US20050211384 Thermally sprayed member, electrode and plasma processing apparatus using the electrode
09/29/2005DE112004000057T5 Plasmabehandlungsapparat, Verfahren zur Herstellung eines Reaktionsgefäßes zur Plasmaerzeugung und Plasmabehandlungsverfahren Plasma processing apparatus, method for the preparation of a reaction vessel for the plasma generation and plasma treatment process
09/28/2005EP1579744A2 Nozzle for a device for electron-beam welding
09/28/2005EP1579023A2 Plasma-assisted melting
09/28/2005EP1578524A1 Plasma reactor and electrode plate used in the same
09/28/2005CN1675737A Plasma processor with electrode simultaneously responsive to plural frequencies
09/28/2005CN1675730A Method for electrostatic fluid acceleration control of a fluid flow
09/28/2005CN1674205A Plasma focus light source with impoved pulse power system
09/28/2005CN1674179A Condenser arrester ball apparatus
09/28/2005CN1673145A Vacuum treatment installation with a variable pump arrangement
09/27/2005US6949716 Process for treating with an atmospheric plasma electrically conductive materials and a device therefor
09/27/2005US6949174 Milling apparatus
09/27/2005US6949165 Plasma processing apparatus
09/27/2005US6949144 Low pressure plasma processing apparatus and method
09/27/2005US6948305 Method and apparatus for balancing the emission current of neutralizers in ion thruster arrays
09/22/2005WO2005089031A1 Plasma generator
09/22/2005WO2005087977A1 Expanding thermal plasma deposition system
09/22/2005WO2005038879A3 Boron ion delivery system
09/22/2005WO2004093116A3 Retractable electrode coolant tube
09/22/2005WO2004050939A3 Plasma-assisted melting
09/22/2005US20050207536 X-ray-generating devices and exposure apparatus comprising same
09/22/2005US20050206290 Method and apparatus for stabilizing of the glow plasma discharges
09/22/2005US20050205414 Method and apparatus for improving sidewall coverage during sputtering in a chamber having an inductively coupled plasma
09/22/2005US20050205208 Plasma processing apparatus and control method thereof
09/22/2005US20050205016 Plasma treatment apparatus and plasma treatment method
09/22/2005DE10323777B4 Corona-Gerät mit zwei Elektroden und zur Oberflächenbehandlung von Drosselklappen-Körpern aus Kunststoff Corona device with two electrodes and for surface treatment of throttle bodies made of plastic
09/22/2005DE102004010261A1 Plasma generator for vacuum coating processes uses arc generation controlled by anode current measurement
09/21/2005EP1578177A1 Plasma cutting method using double-flow gas
09/21/2005EP1576863A1 Method and equipment for generating a gas plasma ball