Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
11/2005
11/17/2005US20050254544 Gas-tight electrode for carbothermic reduction furnace
11/17/2005US20050254543 Lining for carbothermic reduction furnace
11/17/2005US20050254535 Apparatus, system, and method for generating phase-locked harmonic RF source from an optical pulse train
11/17/2005US20050254534 Apparatus, system, and method for frequency stabilized mode-locked laser
11/17/2005US20050253529 Plasma-assisted gas production
11/17/2005US20050253092 Radiation source, lithographic apparatus, and device manufacturing method
11/17/2005US20050252610 Plasma processor
11/17/2005CA2538368A1 Method of forming stable states of dense high-temperature plasma
11/16/2005EP1493172B1 An atmospheric pressure plasma assembly
11/16/2005EP1121706B1 Integrated power modules for plasma processing systems
11/16/2005CN2741318Y Radio-frequency transmitter and induced coupling plasma generator
11/16/2005CN1227710C Method and apparatus for producing uniform process rates
11/16/2005CN1227389C In-situ monitoring plasma etching apparatus and method
11/15/2005US6965629 Autofuses; cycle discharging between ablation electrodes; fhigh power pulsation; fineness powder
11/15/2005US6965117 Extreme UV light source and semiconductor exposure device
11/14/2005CA2467321A1 Polymeric coupling agents and pharmaceutically-active polymers made therefrom
11/10/2005WO2005107341A1 Plasma processing method and system therefor
11/10/2005WO2005104801A2 Systems, methods and devices for x-ray device focal spot control
11/10/2005US20050249898 Silicon oxide or silicon oxynitride layers on substrates; high barrier property and better transparency; used as a wrapping material for foods, drugs, a packaging material for electronic devices
11/10/2005US20050249324 Rotating plasma current drive
11/10/2005US20050247885 Closed drift ion source
11/10/2005US20050247404 Plasma processing apparatus and plasma processing method
11/10/2005DE202004020594U1 Arrangement for coupling of infrared (IR) radiation into reactor vessels has compactly designed optical head
11/10/2005CA2554976A1 Plasma processing method and system therefor
11/09/2005EP1594161A1 Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method
11/09/2005EP1145273B1 Low contamination high density plasma etch chambers and methods for making the same
11/09/2005CN2739922Y 等离子发生器 Plasma generator
11/09/2005CN2739921Y Composite film low temperature plasma integrated generator
11/09/2005CN2738870Y Gas treatment apparatus using non-balanced plasma
11/09/2005CN1694977A High velocity method for deposing diamond films from a gaseous phase in shf discharge plasma and device for carrying out said method
11/09/2005CN1226777C Plasma device and plasma generating method
11/09/2005CN1226450C Processing method and apparatus for plasma
11/08/2005US6963479 Method of and apparatus for electrostatic fluid acceleration control of a fluid flow
11/08/2005US6963162 Gas distributor for an ion source
11/08/2005US6963045 Plasma arc cutting torch nozzle
11/08/2005US6963044 Coating apparatus and processes for forming low oxide coatings
11/03/2005WO2005104634A2 Method and system for performing atomic layer deposition
11/03/2005WO2005102585A2 Systems and methods for providing plasma arc torch parts and inventories to distributors
11/03/2005WO2005000363B1 Atmospheric pressure non-thermal plasma device to clean and sterilize the surface of probes, cannulas, pin tools, pipettes and spray heads
11/03/2005US20050244572 Technique to prevent tin contamination of mirrors and electrodes in an EUV lithography system
11/03/2005US20050243969 Systems, methods and devices for x-ray device focal spot control
11/03/2005US20050243966 X-ray transmissive optical mirror apparatus
11/03/2005US20050242070 Plasma torch for microwave induced plasmas
11/03/2005US20050242068 Systems and methods for providing plasma arc torch parts and inventories to distributors
11/03/2005US20050241994 Such as direct natural gas to hydrocarbon fuels and hydrocarbon oxidates, using a dielectric barrier discharge plasma cell, a solid oxide electrochemical cell, oxygen-containing gas and ultraviolet radiation; efficiency
11/03/2005US20050241769 Plasma processing apparatus and plasma processing method
11/03/2005US20050241768 High frequency plasma generator and high frequency plasma generating method
11/03/2005US20050241583 Method for the production of a disk-form workpiece based on a dielectric substrate as well as vacuum treatment installation for same
11/03/2005US20050241582 Atmospheric pressure plasma assembly
11/03/2005DE19983211B4 System und Verfahren der Substratverarbeitung sowie deren Verwendung zur Hartscheibenherstellung System and method of substrate processing and the use thereof for the hard disk producing
11/03/2005DE10334452A1 Catalyst arrangement, for use in storage ring for executing experiments of high-level particle physics, has cavity providing closed path,where path and field component are measured, so that integral in component runs over path circumference
11/03/2005CA2563624A1 Systems and methods for providing plasma arc torch parts and inventories to distributors
11/02/2005CN1692476A Plasma processing apparatus
11/02/2005CN1691505A Plasma controller
11/02/2005CN1691288A Substrate cleaning apparatus and method
11/02/2005CN1689970A Fullerene-containing carbon, production method and device
11/01/2005US6960888 Method of producing and accelerating an ion beam
11/01/2005US6960737 Gas flow pre-charge for a plasma arc torch
11/01/2005US6960284 Rotational and reciprocal radial movement of a sputtering magnetron
10/2005
10/27/2005WO2005101927A1 Power supply circuit for plasma generation, plasma generating apparatus, plasma processing apparatus and plasma-processed object
10/27/2005WO2005101926A2 Apparatus, system, and method for high flux, compact compton x-ray source
10/27/2005WO2005101925A2 Apparatus, system, and method for optical pulse gain enhancement for high-finesse external cavity
10/27/2005WO2004108589A3 Nanoparticle coated nanostructured surfaces for detection, catalysis and device applications
10/27/2005US20050238818 Plasma processing method and plasma processing apparatus
10/27/2005US20050238817 Method and electrode assembly for non-equilibrium plasma treatment
10/27/2005US20050238807 Refurbishment of a coated chamber component
10/27/2005US20050236377 Merie plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression
10/27/2005US20050236374 Device for processing welding wire
10/27/2005DE102005011592A1 System und Verfahren zur Röntgenstrahlerzeugnung System and method for X-ray beam generating drying
10/27/2005DE10143377B4 Mikrowellenreaktor und Verfahren zur Steuerung von Reaktionen von aktivierten Molekülen Microwave reactor and method for controlling reactions of activated molecules
10/26/2005EP1589793A1 High frequency power supply device and plasma generator
10/26/2005EP1589792A2 Light source apparatus and exposure apparatus having the same
10/26/2005EP1588592A1 Plasma generating electrode assembly
10/26/2005EP1588591A1 Device for injection of a pulsed supersonic gas stream
10/26/2005EP0972431B1 Particle manipulation
10/26/2005CN1689132A Method and apparatus for producing uniform processing rates
10/26/2005CN1225005C Method and apparatus for controlling the volume of a plasma
10/25/2005US6958630 High-frequency detection method and high-frequency detection circuit
10/25/2005US6958484 Method and apparatus for 2-d spatially resolved optical emission and absorption spectroscopy
10/25/2005CA2215324C Fast quench reactor and method
10/20/2005WO2005099322A1 Coaxial microwave plasma torch
10/20/2005WO2005099321A1 Method and device (variants) for producing high heat energy
10/20/2005WO2005099320A2 Method and device for producing low-pressure plasma and the use thereof
10/20/2005WO2005098083A2 Miniature microwave plasma torch application and method of use thereof
10/20/2005WO2005062335A3 Device for producing excited and/or ionised particles in a plasma and method for producing ionised particles
10/20/2005WO2005056864A1 Shielded ceramic thermal spray coatings
10/20/2005US20050233091 Plasma-assisted coating
10/20/2005US20050233086 Method of producing a shaped article having excellent barrier properties
10/20/2005US20050233077 Method and device for plasma treating workpieces
10/20/2005US20050230645 Extreme ultraviolet light source
10/20/2005US20050230351 Plasma processing method and apparatus
10/20/2005US20050229564 Exhaust gas treating apparatus
10/20/2005CA2561657A1 Coaxial microwave plasma torch
10/19/2005EP1586221A1 Ion accelerator arrangement
10/19/2005EP1585999A2 Methods and apparatus for preparing specimens for microscopy
10/19/2005EP1585667A2 Ion accelerator arrangement
10/19/2005CN2735710Y A plasma driving device
10/19/2005CN2734396Y Synchronous powder transmission surface metallurgy plasma torch
10/19/2005CN1685466A Apparatus and method for use of optical system with a plasma processing system
10/19/2005CN1685465A Method and apparatus for an improved deposition shield in a plasma processing system