Patents for H05H 1 - Generating plasma; Handling plasma (22,647) |
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09/21/2005 | EP1576862A2 Tip gas distributor |
09/21/2005 | CN1672237A Method for adjusting voltage on a powered faraday shield |
09/21/2005 | CN1672236A Evaluation of chamber components having textured coatings |
09/21/2005 | CN1670997A Plasma resonant cavity tunable waveguide device |
09/21/2005 | CN1670912A Plasma treatment apparatus and plasma treatment method |
09/21/2005 | CN1220409C An active gas generating method and apparatus thereof |
09/21/2005 | CN1220252C Plasma processing apparatus capable of evaluating processing property |
09/21/2005 | CN1219972C Plasma accelerator arrangement |
09/21/2005 | CN1219912C Plasma polymerization system and method for plasma polymerization |
09/20/2005 | US6946793 a perimeter boundary wall of increased wall thickness to provide electrical insulation between the conductive channels and the housing and to provide robust crush resistance when inserting the element into a reactor housing |
09/20/2005 | US6946617 Method and apparatus for alignment of components of a plasma arc torch |
09/20/2005 | US6946616 Plasma arc torch cooling system |
09/20/2005 | US6946054 Modified transfer function deposition baffles and high density plasma ignition therewith in semiconductor processing |
09/20/2005 | CA2409420C Plasma arc cutting process and apparatus using an oxygen-rich gas shield |
09/20/2005 | CA2205576C An apparatus for generation of a linear arc discharge for plasma processing |
09/15/2005 | US20050202184 Expanding thermal plasma deposition system |
09/15/2005 | US20050202183 Plasma processing system, plasma processing method, plasma film deposition system, and plasma film deposition method |
09/15/2005 | US20050202173 Diamond synthesis |
09/15/2005 | US20050200304 Arrangement for generating pulsed currents with a high repetition rate and high current strength for gas discharge pumped radiation sources |
09/15/2005 | US20050200289 Electrostatic fluid accelerator |
09/15/2005 | US20050200256 Method and device for compressing a substance by impact and plasma cathode thereto |
09/15/2005 | US20050199603 Thermal projection device |
09/15/2005 | US20050199594 Plasma cutting torch with differentiated gas injection ducts |
09/15/2005 | US20050199593 MIG-plasma welding |
09/15/2005 | US20050199491 Shields usable with an inductively coupled plasma reactor |
09/15/2005 | US20050199340 processing materials inside an atmospheric-pressure radiofrequency nonthermal plasma discharge |
09/15/2005 | DE10195251B4 Plasmaverarbeitungssystem und Verfahren Plasma processing system and method |
09/14/2005 | EP1575342A2 Plasma cutting torch with distinguished gas injection circuits |
09/14/2005 | EP1575059A1 Method for generating high-speed particle and system for generating high-speed particle |
09/14/2005 | EP1574117A2 Plasma arc torch quick disconnect |
09/14/2005 | EP1572409A2 Apparatus and methods for connecting a plasma arc torch lead to a power supply |
09/14/2005 | EP1391142B1 Plasma torch |
09/14/2005 | EP1044458B1 Dual face shower head magnetron, plasma generating apparatus and method of coating a substrate |
09/14/2005 | CN1669368A Plasma torch for microwave induced plasmas |
09/14/2005 | CN1669110A Plasma implantation system and method with target movement |
09/14/2005 | CN1669109A Plasma processing apparatus and plasma processing method |
09/14/2005 | CN1669108A Capacitively coupled plasma reactor with magnetic plasma control |
09/14/2005 | CN1219419C Substrate electrode material processing apparatus and method |
09/13/2005 | US6943879 Method for monitoring and/or controlling the status of a plasma in a plasma spectrometer and spectrometer for implementing such a method |
09/13/2005 | US6943316 Arrangement for generating an active gas jet |
09/09/2005 | WO2005083241A1 Plasma reactor power source, plasma reactor, exhaust gas purification device and exhaust gas purifying method |
09/08/2005 | US20050196549 Microwave enhanced CVD method and apparatus |
09/08/2005 | US20050196548 Corrosion resistance effect of the surface layer achieved without the structure of the applied layer having to be subsequently densified by mechanical means; plasma-based vapor deposition that forms a dense, fine-grained, largely pore-free structure; coatings of aluminum and its alloys |
09/08/2005 | US20050194355 Method for adjusting voltage on a powered faraday shield |
09/08/2005 | US20050194354 Plasma processing method and plasma processing device |
09/08/2005 | US20050194097 Plasma processing apparatus and method of designing the same |
09/08/2005 | US20050194094 Window type probe, plasma monitoring device, and plasma processing device |
09/07/2005 | CN1666322A Plasma processing device |
09/07/2005 | CN1666316A Method and apparatus for non-invasive measurement and analysis of semiconductor process parameters |
09/07/2005 | CN1666315A Method and apparatus for non-invasive measurement and analysis of semiconductor process parameters |
09/07/2005 | CN1666314A Method and apparatus for non-invasive measurement and analys of semiconductor plasma parameters |
09/07/2005 | CN1664996A Plasma processing apparatus and method of designing the same |
09/07/2005 | CN1664995A Plasma processing method and plasma processing device |
09/07/2005 | CN1218613C Method for producing single particle nano beam |
09/06/2005 | US6940036 Laser-plasma hybrid welding method |
09/06/2005 | US6939813 Apparatus for improved low pressure inductively coupled high density plasma reactor |
09/06/2005 | US6939519 Power system for sterilization systems employing low frequency plasma |
09/01/2005 | WO2005081592A1 An apparatus for plasma treatment |
09/01/2005 | WO2005080873A1 Device and method for destroying liquid, powder or gaseous waste using an inductively coupled plasma |
09/01/2005 | WO2005079218A2 Short torch design for direct liquid sample introduction using conventional and micro-nebulizers for plasma spectrometry |
09/01/2005 | US20050191417 microstructure or nanostructure elongated tubes or wires of carbon, boron nitride, gallium nitride or zinc oxide, formed by gas discharge, laser ablation or chemical vapor deposition; electronics having high aspect ratios |
09/01/2005 | US20050189069 Plasma processing system and method |
08/31/2005 | EP1569268A1 Plasma processing system and method and electrode plate of plasma processing system |
08/31/2005 | EP1567258A1 Apparatus for manufacturing particles using corona discharge and method thereof |
08/31/2005 | EP1228522B1 Vacuum circuit for a device for treating a receptacle with low pressure plasma |
08/31/2005 | CN2722561Y Long-life negative cathode of air plasma generator |
08/31/2005 | CN1663326A Method and arrangement for producing radiation |
08/31/2005 | CN1663029A Magnetron plasma processing apparatus |
08/31/2005 | CN1663017A Productivity enhancing thermal sprayed yttria-containing coating for plasma reactor |
08/31/2005 | CN1663016A Multi-part electrode for a semiconductor processing plasma reactor and method of replacing a portion of a mutli-part electrode |
08/31/2005 | CN1662339A Plasma arc torch consumables cartridge |
08/31/2005 | CN1662338A Plasma arc torch electrode |
08/31/2005 | CN1662337A Plasma arc torch tip |
08/31/2005 | CN1662114A Plasma antenna |
08/31/2005 | CN1217561C Twin plasma torch apparatus |
08/31/2005 | CN1217560C Extreme ultraviolet source based on colliding neutral beams |
08/31/2005 | CN1217390C Device and method for plasma processing and slow-wave plate |
08/31/2005 | CN1217388C Plasma processing device and exhaust ring |
08/30/2005 | US6937455 Spark management method and device |
08/30/2005 | US6937127 Apparatus for manipulating magnetic fields |
08/30/2005 | US6936787 Inductively-coupled plasma torch |
08/30/2005 | US6936786 Dual mode plasma arc torch |
08/30/2005 | US6936310 Plasma processing method |
08/30/2005 | US6936228 suppresses an influence on a magnetic field due to heat generated from discharge plasma, and can stably manufacture a high-purity carbon nanotube with excellent industrial efficiency |
08/30/2005 | US6936144 High frequency plasma source |
08/30/2005 | US6935351 Method of cleaning CVD device and cleaning device therefor |
08/30/2005 | US6935269 Apparatus for treating the surface with neutral particle beams |
08/25/2005 | WO2005079124A1 Plasma producing device |
08/25/2005 | WO2005079123A2 Plasma-generating device and method of treating a gaseous medium |
08/25/2005 | WO2005078782A1 Plasma processing apparatus and plasma processing method |
08/25/2005 | WO2005078257A1 Method of generating on-board hydrogen and supply of same |
08/25/2005 | WO2005077030A2 Mounting system for an x-ray tube |
08/25/2005 | US20050186132 Vaporizing and oxidizing solid precursors in the plasma reaction region of the non-transferred DC plasma apparatus continuously, and blowing the plasma jet containing the vaporized and oxidized precursor through a vortical cooling gas. |
08/25/2005 | US20050185359 Wafer Stage |
08/25/2005 | US20050184670 Device for confinement of a plasma within a volume |
08/25/2005 | US20050184034 Method for using a microwave source for reactive atom-plasma processing |
08/25/2005 | US20050183944 Reducing stress in coatings produced by physical vapour deposition |
08/25/2005 | US20050183821 Method and apparatus for non-invasive measurement and analysis of semiconductor process parameters |
08/25/2005 | US20050183668 Plasma antenna |
08/25/2005 | US20050183666 Shower plate having projections and plasma CVD apparatus using same |