Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
09/2005
09/21/2005EP1576862A2 Tip gas distributor
09/21/2005CN1672237A Method for adjusting voltage on a powered faraday shield
09/21/2005CN1672236A Evaluation of chamber components having textured coatings
09/21/2005CN1670997A Plasma resonant cavity tunable waveguide device
09/21/2005CN1670912A Plasma treatment apparatus and plasma treatment method
09/21/2005CN1220409C An active gas generating method and apparatus thereof
09/21/2005CN1220252C Plasma processing apparatus capable of evaluating processing property
09/21/2005CN1219972C Plasma accelerator arrangement
09/21/2005CN1219912C Plasma polymerization system and method for plasma polymerization
09/20/2005US6946793 a perimeter boundary wall of increased wall thickness to provide electrical insulation between the conductive channels and the housing and to provide robust crush resistance when inserting the element into a reactor housing
09/20/2005US6946617 Method and apparatus for alignment of components of a plasma arc torch
09/20/2005US6946616 Plasma arc torch cooling system
09/20/2005US6946054 Modified transfer function deposition baffles and high density plasma ignition therewith in semiconductor processing
09/20/2005CA2409420C Plasma arc cutting process and apparatus using an oxygen-rich gas shield
09/20/2005CA2205576C An apparatus for generation of a linear arc discharge for plasma processing
09/15/2005US20050202184 Expanding thermal plasma deposition system
09/15/2005US20050202183 Plasma processing system, plasma processing method, plasma film deposition system, and plasma film deposition method
09/15/2005US20050202173 Diamond synthesis
09/15/2005US20050200304 Arrangement for generating pulsed currents with a high repetition rate and high current strength for gas discharge pumped radiation sources
09/15/2005US20050200289 Electrostatic fluid accelerator
09/15/2005US20050200256 Method and device for compressing a substance by impact and plasma cathode thereto
09/15/2005US20050199603 Thermal projection device
09/15/2005US20050199594 Plasma cutting torch with differentiated gas injection ducts
09/15/2005US20050199593 MIG-plasma welding
09/15/2005US20050199491 Shields usable with an inductively coupled plasma reactor
09/15/2005US20050199340 processing materials inside an atmospheric-pressure radiofrequency nonthermal plasma discharge
09/15/2005DE10195251B4 Plasmaverarbeitungssystem und Verfahren Plasma processing system and method
09/14/2005EP1575342A2 Plasma cutting torch with distinguished gas injection circuits
09/14/2005EP1575059A1 Method for generating high-speed particle and system for generating high-speed particle
09/14/2005EP1574117A2 Plasma arc torch quick disconnect
09/14/2005EP1572409A2 Apparatus and methods for connecting a plasma arc torch lead to a power supply
09/14/2005EP1391142B1 Plasma torch
09/14/2005EP1044458B1 Dual face shower head magnetron, plasma generating apparatus and method of coating a substrate
09/14/2005CN1669368A Plasma torch for microwave induced plasmas
09/14/2005CN1669110A Plasma implantation system and method with target movement
09/14/2005CN1669109A Plasma processing apparatus and plasma processing method
09/14/2005CN1669108A Capacitively coupled plasma reactor with magnetic plasma control
09/14/2005CN1219419C Substrate electrode material processing apparatus and method
09/13/2005US6943879 Method for monitoring and/or controlling the status of a plasma in a plasma spectrometer and spectrometer for implementing such a method
09/13/2005US6943316 Arrangement for generating an active gas jet
09/09/2005WO2005083241A1 Plasma reactor power source, plasma reactor, exhaust gas purification device and exhaust gas purifying method
09/08/2005US20050196549 Microwave enhanced CVD method and apparatus
09/08/2005US20050196548 Corrosion resistance effect of the surface layer achieved without the structure of the applied layer having to be subsequently densified by mechanical means; plasma-based vapor deposition that forms a dense, fine-grained, largely pore-free structure; coatings of aluminum and its alloys
09/08/2005US20050194355 Method for adjusting voltage on a powered faraday shield
09/08/2005US20050194354 Plasma processing method and plasma processing device
09/08/2005US20050194097 Plasma processing apparatus and method of designing the same
09/08/2005US20050194094 Window type probe, plasma monitoring device, and plasma processing device
09/07/2005CN1666322A Plasma processing device
09/07/2005CN1666316A Method and apparatus for non-invasive measurement and analysis of semiconductor process parameters
09/07/2005CN1666315A Method and apparatus for non-invasive measurement and analysis of semiconductor process parameters
09/07/2005CN1666314A Method and apparatus for non-invasive measurement and analys of semiconductor plasma parameters
09/07/2005CN1664996A Plasma processing apparatus and method of designing the same
09/07/2005CN1664995A Plasma processing method and plasma processing device
09/07/2005CN1218613C Method for producing single particle nano beam
09/06/2005US6940036 Laser-plasma hybrid welding method
09/06/2005US6939813 Apparatus for improved low pressure inductively coupled high density plasma reactor
09/06/2005US6939519 Power system for sterilization systems employing low frequency plasma
09/01/2005WO2005081592A1 An apparatus for plasma treatment
09/01/2005WO2005080873A1 Device and method for destroying liquid, powder or gaseous waste using an inductively coupled plasma
09/01/2005WO2005079218A2 Short torch design for direct liquid sample introduction using conventional and micro-nebulizers for plasma spectrometry
09/01/2005US20050191417 microstructure or nanostructure elongated tubes or wires of carbon, boron nitride, gallium nitride or zinc oxide, formed by gas discharge, laser ablation or chemical vapor deposition; electronics having high aspect ratios
09/01/2005US20050189069 Plasma processing system and method
08/2005
08/31/2005EP1569268A1 Plasma processing system and method and electrode plate of plasma processing system
08/31/2005EP1567258A1 Apparatus for manufacturing particles using corona discharge and method thereof
08/31/2005EP1228522B1 Vacuum circuit for a device for treating a receptacle with low pressure plasma
08/31/2005CN2722561Y Long-life negative cathode of air plasma generator
08/31/2005CN1663326A Method and arrangement for producing radiation
08/31/2005CN1663029A Magnetron plasma processing apparatus
08/31/2005CN1663017A Productivity enhancing thermal sprayed yttria-containing coating for plasma reactor
08/31/2005CN1663016A Multi-part electrode for a semiconductor processing plasma reactor and method of replacing a portion of a mutli-part electrode
08/31/2005CN1662339A Plasma arc torch consumables cartridge
08/31/2005CN1662338A Plasma arc torch electrode
08/31/2005CN1662337A Plasma arc torch tip
08/31/2005CN1662114A Plasma antenna
08/31/2005CN1217561C Twin plasma torch apparatus
08/31/2005CN1217560C Extreme ultraviolet source based on colliding neutral beams
08/31/2005CN1217390C Device and method for plasma processing and slow-wave plate
08/31/2005CN1217388C Plasma processing device and exhaust ring
08/30/2005US6937455 Spark management method and device
08/30/2005US6937127 Apparatus for manipulating magnetic fields
08/30/2005US6936787 Inductively-coupled plasma torch
08/30/2005US6936786 Dual mode plasma arc torch
08/30/2005US6936310 Plasma processing method
08/30/2005US6936228 suppresses an influence on a magnetic field due to heat generated from discharge plasma, and can stably manufacture a high-purity carbon nanotube with excellent industrial efficiency
08/30/2005US6936144 High frequency plasma source
08/30/2005US6935351 Method of cleaning CVD device and cleaning device therefor
08/30/2005US6935269 Apparatus for treating the surface with neutral particle beams
08/25/2005WO2005079124A1 Plasma producing device
08/25/2005WO2005079123A2 Plasma-generating device and method of treating a gaseous medium
08/25/2005WO2005078782A1 Plasma processing apparatus and plasma processing method
08/25/2005WO2005078257A1 Method of generating on-board hydrogen and supply of same
08/25/2005WO2005077030A2 Mounting system for an x-ray tube
08/25/2005US20050186132 Vaporizing and oxidizing solid precursors in the plasma reaction region of the non-transferred DC plasma apparatus continuously, and blowing the plasma jet containing the vaporized and oxidized precursor through a vortical cooling gas.
08/25/2005US20050185359 Wafer Stage
08/25/2005US20050184670 Device for confinement of a plasma within a volume
08/25/2005US20050184034 Method for using a microwave source for reactive atom-plasma processing
08/25/2005US20050183944 Reducing stress in coatings produced by physical vapour deposition
08/25/2005US20050183821 Method and apparatus for non-invasive measurement and analysis of semiconductor process parameters
08/25/2005US20050183668 Plasma antenna
08/25/2005US20050183666 Shower plate having projections and plasma CVD apparatus using same