Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
05/2007
05/24/2007US20070116887 Method and system for performing plasma enhanced atomic layer deposition
05/24/2007US20070116884 Process for coating articles and articles made therefrom
05/24/2007US20070116873 Apparatus for thermal and plasma enhanced vapor deposition and method of operating
05/24/2007US20070116872 Apparatus for thermal and plasma enhanced vapor deposition and method of operating
05/24/2007US20070114903 Multi-channel plasma accelerator
05/24/2007US20070113979 Slotted Electrostatic Shield Modification for Improved Etch and CVD Process Uniformity
05/24/2007US20070113978 Plasma processing apparatus and method
05/24/2007US20070113867 Polymer treatment using a plasma brush
05/24/2007US20070113788 Plasma processing equipment
05/23/2007EP1787500A2 Microwave plasma nozzle with enhanced plume stability and heating efficiency
05/23/2007EP1628688B1 Treatment of biological material containing living cells using a plasma generated by a gas discharge
05/23/2007CN1969596A A novel plasmatorch and its application in methods for conversion of matter
05/23/2007CN1969365A Charge neutralization device
05/23/2007CN1968715A Polymeric coupling agents and pharmaceutically-active polymers made therefrom
05/23/2007CN1317731C Adjustable dual frequency voltage dividing plasma reactor
05/23/2007CN1317423C Method and device for atmospheric plasma processing
05/22/2007US7220937 Plasma reactor with overhead RF source power electrode with low loss, low arcing tendency and low contamination
05/22/2007US7220463 Method for obtaining nanoparticles
05/22/2007US7220462 a plasma medium is injected between barrier electrodes to prevent the ingress of air during treatment of the substrate; motion of the substrate tends to entrain air into the electrode assembly
05/22/2007US7220461 forming by chemical vapor deposition; reforming film using oxidizing gases and reducing gases
05/18/2007WO2007008616A3 Plasma gas distributor with integral metering and flow passageways
05/17/2007US20070110920 Method of forming vertical inorganic alignment layer and liquid crystal display apparatus having the same
05/17/2007US20070110919 Method for producing photocatalytically active polymers
05/17/2007US20070110918 improved chemical vapor deposition process which can suppress the backward flow of the deposition material gas, such as monosilane gas
05/17/2007US20070110208 Antimatter electrical generator
05/17/2007US20070108042 Method for shaping a magnetic field in a magnetic field-enhanced plasma reactor
05/16/2007EP1786245A2 Apparatus and method for forming a plasma
05/16/2007EP1786075A1 Method for operating a vacuum-plasma processing apparatus
05/16/2007EP1269514B1 An enhanced resist strip in a dielectric etcher using downstream plasma and plasma apparatus used therefor
05/16/2007CN2901783Y Energy saving type ionic gas attenuating plasma arc generator
05/16/2007CN2901782Y 便携式等离子束发生器 Portable plasma beam generator
05/16/2007CN1965396A Silicon electrode plate having excellent durability for plasma etching
05/16/2007CN1965104A Expanding thermal plasma deposition system
05/16/2007CN1316857C Method and device for photo catalytically treating organicwaste water by medium barrier discharging induced semiconductor
05/16/2007CN1316580C Electrode assembly for the removal of surface oxides by electron attachment
05/16/2007CN1316547C Plasma reactor coil magnet system
05/16/2007CN1316539C External magnetic insulation ion diode for prdoucing large area strong flow pulse ionic beam
05/15/2007US7217939 Capillary tubing
05/15/2007US7217407 Plasma synthesis of metal oxide nanoparticles
05/15/2007US7217326 Chemical vapor deposition apparatus
05/10/2007WO2007052711A1 Plasma processing apparatus
05/10/2007WO2006055258B1 Plasma arc torch having an electrode with internal passages
05/10/2007US20070104892 Method for fixing metal particles and method for manufacturing substrate containing metal particles, method for manufacturing substrate containing carbon nanotube, and method for manufacturing substrate containing semiconductor-crystalline rod, employing thereof
05/10/2007US20070104888 Method for the organised growth of nanostructures
05/10/2007US20070102290 Novel material development apparatus and novel material development method using arc plasma
05/10/2007US20070102119 Plasma processing system and plasma processing method
05/10/2007US20070101938 Inductively coupled plasma processing apparatus having internal linear antenna for large area processing
05/09/2007EP1783813A1 Frequency based controlling of microwave plasma process
05/09/2007EP1782841A1 Atmospheric multi-phasic controlled injection discharge plasma process and reactor for disinfection and purification of liquids and gases
05/09/2007EP1781836A2 Plasma enhanced chemical vapor deposition system for forming carbon nanotubes
05/09/2007EP1781444A1 Dc-dc converter with over-voltage protection circuit
05/09/2007EP1376669B1 Plasma processing device
05/09/2007CN1315150C Apparatus for plasma pulse injection
05/08/2007US7214413 Method and device for generating an activated gas curtain for surface treatment
05/08/2007US7214280 Plasma-assisted decrystallization
05/08/2007CA2303897C Dual face shower head electrode for a magnetron plasma generating apparatus
05/03/2007WO2007049454A1 Sheet-like plasma generator, and film deposition method and equipment employing such sheet-like plasma generator
05/03/2007WO2007048993A2 Plasma abatement device
05/03/2007WO2007048743A1 Rotating machines for treating containers
05/03/2007WO2007048170A1 Reactor for producing controlled nuclear fusion
05/03/2007WO2007007003A3 Method for plasma treatment of gas effluents
05/03/2007WO2006081420B1 Automatic gas control for a plasma arc torch
05/03/2007US20070099010 An etch stop layer for a metallization layer with enhanced adhesion, etch selectivity and hermeticity
05/03/2007US20070098980 Highly Tetrahedral Amorphous Carbon Coatings and Systems and Methods for Their Production
05/03/2007US20070098917 Plasma Boriding Method
05/03/2007US20070098916 System and method for modulation of power and power related functions of PECVD discharge sources to achieve new film properties
05/03/2007US20070098913 Method for coating turbine engine components with metal alloys using high velocity mixed elemental metals
05/03/2007US20070098912 Method for producing functionally graded coatings using cold gas-dynamic spraying
05/03/2007US20070098893 Coated substrate created by systems and methods for modulation of power and power related functions of PECVD discharge sources to achieve new film properties
05/03/2007US20070098890 Lowering dielectric constant of insulating film formed by chemical vapor deposition, where process gas containing hydrogen atoms is supplied into reaction vessel, and microwave is introduced into vessel to supply uniform electromagnetic wave, thereby generating plasma containing hydrogen radical
05/03/2007US20070098129 Plasma containment method
05/03/2007US20070096659 Controlled fusion in a field reversed configuration and direct energy conversion
05/03/2007US20070095476 Plasma discharger
05/03/2007DE112005000236T5 Plasmafackel-Spektrometer Plasma Torch Spectrometer
05/03/2007CA2637162A1 Reactor for producing controlled nuclear fusion
05/02/2007EP1779089A2 Electrode-less discharge extreme ultraviolet light source
05/02/2007EP1300057B1 Coil for vacuum plasma processor
05/02/2007EP1269020B1 Plasma accelerator arrangement
05/02/2007EP1147242A4 Large area plasma source
05/02/2007EP1027475A4 Large area microwave plasma apparatus with adaptable applicator
05/02/2007EP0933009B1 Integral spring consumables for plasma arc torch using contact starting system
05/02/2007CN1956618A 干蚀刻方法 The dry etching method
05/02/2007CN1956143A Capacity coupling plasma reactor with temperature uniform distribution wafer supporting
05/02/2007CN1956138A Adjustable electrode assembly for use in processing substrates of differing widths in a plasma processing system
05/02/2007CN1314301C An atmospheric pressure plasma assembly
05/02/2007CN1314300C Star pinch x-ray and extreme ultraviolet photon source
05/02/2007CN1314075C Shielding system for plasma chamber
05/02/2007CN1314072C Merie plasma reactor with showerhead RF electrode tuned to the plasma with arcing suppression
05/01/2007US7212078 Method and assembly for providing impedance matching network and network assembly
05/01/2007US7211708 Exhaust processing method, plasma processing method and plasma processing apparatus
05/01/2007US7211227 Air pollution control; catalytic exhaust system; mutlilayer dielectric with gap spacer
05/01/2007US7211197 Exposure layer of copper by etching ,with gas, silicon nitride layer; using mixture of trifluoromethane and oxygen; suppression oxidation
05/01/2007US7210424 High-density plasma processing apparatus
04/2007
04/26/2007WO2007048098A2 Erosion resistant coatings
04/26/2007WO2007047203A2 One touch connection and disconnection method and apparatus
04/26/2007WO2007045479A1 Hollow sphere with a coating and method and device for the production thereof
04/26/2007WO2006122256B1 Generating discrete gas jets in plasma arc torch applications
04/26/2007US20070092761 Wear-resistant structure
04/26/2007US20070092740 Metal coatings
04/26/2007US20070092734 Method for deposition of titanium oxide by a plasma source