| Patents for H05H 1 - Generating plasma; Handling plasma (22,647) |
|---|
| 01/31/2007 | CN1905777A Plane Faraday screening system of radio frequency inductive coupled plasma source |
| 01/31/2007 | CN1905135A Plasma etching apparatus |
| 01/31/2007 | CN1298200C Powder plasma welding device and welding method |
| 01/31/2007 | CN1298199C Plasma treatment method and apparatus |
| 01/31/2007 | CN1298198C Inductively coupled plasma generator having lower aspect ratio |
| 01/31/2007 | CN1298027C 等离子体处理装置 Plasma processing apparatus |
| 01/31/2007 | CN1298017C Lifting and supporting device, coating and etching method and apparatus |
| 01/31/2007 | CN1297494C Method and apparatus for under water decomposition of organic content of electrically conductive aqueous waste solutions |
| 01/30/2007 | US7170579 Light source unit, exposure apparatus, and device manufacturing method |
| 01/25/2007 | WO2007011121A1 Plasma reactor having multiple antenna structure |
| 01/25/2007 | WO2006114161A8 Improved plate-shaped carbon fibre composite material |
| 01/25/2007 | WO2006080870A8 A thermal spraying method and device |
| 01/25/2007 | WO2006055258A3 Plasma arc torch having an electrode with internal passages |
| 01/25/2007 | US20070020451 Moisture barrier coatings |
| 01/25/2007 | US20070020399 Diffusion barrier and protective coating for turbine engine component and method for forming |
| 01/25/2007 | US20070020168 Synthesis of long and well-aligned carbon nanotubes |
| 01/24/2007 | EP1745683A2 A novel plasmatorch and its application in methods for conversion of matter |
| 01/24/2007 | EP1745682A2 Apparatus, system, and method for high flux, compact compton x-ray source |
| 01/24/2007 | EP1665324B1 Electron cyclotron resonance (ecr) plasma source having a linear plasma discharge opening |
| 01/24/2007 | EP1451861A4 Apparatus and method for reactive atom plasma processing for material deposition |
| 01/24/2007 | CN1901774A Inductively coupled plasma processing apparatus |
| 01/24/2007 | CN1901773A Plasma torch with interchangeable electrode systems |
| 01/24/2007 | CN1901772A Apparatus to treat a substrate |
| 01/24/2007 | CN1296975C Processing apparatus for plasma |
| 01/23/2007 | US7166965 Waveguide and microwave ion source equipped with the waveguide |
| 01/23/2007 | US7166336 DLC film, DLC-coated plastic container, and method and apparatus for manufacturing DLC-coated plastic container |
| 01/23/2007 | US7166335 Layer formation method, and substrate with a layer formed by the method |
| 01/23/2007 | US7166206 Generating a stream of bubbles containing a source of the material, and applying a potential difference across the cathode and anode so that the resulting glow discharge forms a plasma of ionised gaseous molecules within the bubbles |
| 01/23/2007 | US7166175 Method and device for hardening a metal component by plasma pulse technology |
| 01/18/2007 | WO2007008616A2 Plasma gas distributor with integral metering and flow passageways |
| 01/18/2007 | WO2007006518A2 Plasma-generating device, plasma surgical device and use of plasma surgical device |
| 01/18/2007 | WO2007006517A2 Plasma-generating device, plasma surgical device and use of a plasma surgical device |
| 01/18/2007 | WO2007006516A2 Plasma-generating device, plasma surgical device, use of a plasma-generating device and method of generating a plasma |
| 01/18/2007 | WO2007006298A2 Device for producing an atmospheric pressure plasma |
| 01/18/2007 | WO2006014862A3 Plasma nozzle array for providing uniform scalable microwave plasma generation |
| 01/18/2007 | WO2006014455A3 Microwave plasma nozzle with enhanced plume stability and heating efficiency |
| 01/18/2007 | WO2006012179A3 Expanded thermal plasma apparatus |
| 01/18/2007 | US20070014714 at a relatively low temperature using water plasma; purity, quality for e.g. semiconductor devices; vacuum deposition |
| 01/18/2007 | US20070013284 Plasma accelerating apparatus and plasma processing system having the same |
| 01/18/2007 | US20070012659 High aspect ratio etch using modulation of RF powers of various frequencies |
| 01/18/2007 | US20070012401 Plasma processing apparatus |
| 01/18/2007 | DE102005032890A1 Vorrichtung zur Erzeugung von Atmosphärendruck-Plasmen An apparatus for generating atmospheric-pressure plasma |
| 01/18/2007 | CA2614378A1 Plasma-generating device, plasma surgical device and use of plasma surgical device |
| 01/18/2007 | CA2614375A1 Plasma-generating device, plasma surgical device and use of a plasma surgical device |
| 01/18/2007 | CA2614372A1 Plasma-generating device, plasma surgical device, use of a plasma-generating device and method of generating a plasma |
| 01/17/2007 | EP1743951A2 Microplasma deposition apparatus and methods |
| 01/17/2007 | EP1743351A2 Pulsed power system including a plasma opening switch |
| 01/17/2007 | EP1023771B1 Electrical impedance matching system and method |
| 01/17/2007 | CN1897786A Multi chamber plasma process system |
| 01/17/2007 | CN1896301A Sputtering source, device comprising the sputtering source and method of producing flat panels |
| 01/17/2007 | CN1295946C Method and device for compressing a substance by impact and plasma cathode thereto |
| 01/17/2007 | CN1295757C Control method of semiconductor processing device |
| 01/16/2007 | US7164571 Wafer stage with a magnet |
| 01/16/2007 | US7163721 Method to plasma deposit on organic polymer dielectric film |
| 01/16/2007 | US7163641 Method of forming high aspect ratio apertures |
| 01/16/2007 | US7163602 Apparatus for generating planar plasma using concentric coils and ferromagnetic cores |
| 01/11/2007 | WO2007004576A1 Plasma treatment apparatus and plasma treatment method |
| 01/11/2007 | US20070009673 Insulation film and method for manufacturing same |
| 01/11/2007 | US20070009405 Method and apparatus for producing gas atom containing fullerene, and gas atom containing fullerene |
| 01/10/2007 | EP1741123A2 Systems, methods and devices for x-ray device focal spot control |
| 01/10/2007 | EP1040500A4 A plasma generating apparatus having an electrostatic shield |
| 01/10/2007 | EP0976141B1 Apparatus and method for controlling ion energy and plasma density in a plasma processing system |
| 01/10/2007 | CN1892980A Chamber isolation valve RF grounding |
| 01/10/2007 | CN1294615C Method of fabricating coated process chamber component |
| 01/10/2007 | CN1294614C Ion source, ion injection equipment, manufacturing method of semiconductor device |
| 01/09/2007 | US7161163 Method and arrangement for the plasma-based generation of soft x-radiation |
| 01/09/2007 | US7161112 Toroidal low-field reactive gas source |
| 01/09/2007 | US7160585 Magnetic field and an electronic cyclotron resonance zone facilitating ionization and/or dissociation of the injected gas; screening operation |
| 01/09/2007 | US7159537 Device for fixing a gas showerhead or target plate to an electrode in plasma processing systems |
| 01/09/2007 | US7159536 Device and method for generating a local by micro-structure electrode dis-charges with microwaves |
| 01/04/2007 | WO2007000989A1 Electromagnetic wave control element, electromagnetic wave control device, electromagnetic wave control plasma, and electromagnetic wave control method |
| 01/04/2007 | US20070003197 Method and device for manufacturing optical preforms, as well as the optical fibres obtained therewith |
| 01/04/2007 | US20070002996 Tabletop nuclear fusion generator |
| 01/04/2007 | US20070001571 Method and device for the generation of a plasma through electric discharge in a discharge space |
| 01/04/2007 | US20070000867 Plasma processing method and apparatus thereof |
| 01/04/2007 | DE202006017024U1 Vorrichtung zum Behandeln von Substraten Apparatus for processing substrates |
| 01/04/2007 | DE10202311B4 Vorrichtung und Verfahren zur Plasmabehandlung von dielektrischen Körpern Apparatus and method for plasma treatment of dielectric bodies |
| 01/03/2007 | EP1739717A1 Plasma generator with a slot antenna |
| 01/03/2007 | EP1739716A1 HF plasma process system |
| 01/03/2007 | EP1079423B1 Apparatus for gas processing |
| 01/03/2007 | EP0941640B1 Plasma arc torch and method using contact starting system |
| 01/03/2007 | CN1890019A Method of reducing NOx in diesel engine exhaust |
| 01/03/2007 | CN1889225A Hollow electrode structure including multi-hole and plasma polymerization processing apparatus utilizing the said structure |
| 01/03/2007 | CN1293789C Plasma device and plasma generating method |
| 01/03/2007 | CN1293788C Plasma generation and control device and method |
| 01/03/2007 | CN1293608C 半导体器件及其制造方法以及等离子加工装置 Semiconductor device and manufacturing method, and a plasma processing apparatus |
| 01/03/2007 | CN1293596C Chamber components having textured surfaces and method of manufacture |
| 01/03/2007 | CN1293592C Electron gun |
| 01/03/2007 | CN1292882C Method for improving glue performance of crop straw and urea resin interface using plasma |
| 01/02/2007 | US7157123 Substrate coating region and electrode cleaning region; rotatable electrode positioned in deposition chamber having interior cavitiy with magnet systems disposed |
| 01/02/2007 | US7156949 Plasma processing apparatus |
| 01/02/2007 | US7156046 Plasma CVD apparatus |
| 12/28/2006 | WO2006137832A2 Portable microwave plasma systems including a supply line for gas and microwaves |
| 12/28/2006 | WO2004097843A3 Apparatus and method for ignition of high-gain thermonuclear microexplosions with electric-pulse power |
| 12/28/2006 | US20060292891 Cascade source and a method for controlling the cascade source |
| 12/28/2006 | US20060292397 Method for micromachining metallic materials |
| 12/28/2006 | US20060292392 Corrosion-resistant coating for metal substrate |
| 12/28/2006 | US20060291627 EUV, XUV, and X-ray wavelength sources created from laser plasma produced from liquid metal solutions |
| 12/28/2006 | US20060291605 Nuclear waste disposal through proton decay |
| 12/28/2006 | US20060290301 Apparatus for generating excited and/or ionized particles in a plasma and a method for generating ionized particles |