Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
02/2008
02/14/2008WO2007133904A3 Dielectric devices for a plasma arc torch
02/14/2008US20080038926 Method of treating a mask layer prior to performing an etching process
02/14/2008US20080038555 Spherical particles having nanometer size, crystalline structure, and good sphericity and method for producing
02/14/2008US20080038483 Adhesion of hydrophobic coatings on eyeglass lenses
02/14/2008US20080038481 Fabricating and cleaning chamber components having textured surfaces
02/14/2008US20080038480 Plasma method for biomedical material onto hydrophilic polymer sheet
02/14/2008US20080038462 Method of forming a carbon layer on a substrate
02/14/2008US20080037713 Systems, methods and devices for x-ray device focal spot control
02/14/2008US20080037128 Coatings for replicating the spectral performance of colored glass
02/14/2008US20080035613 Machine for the Treatment of Bottles That are Equipped with an Interchangeable Connection Cartridge
02/14/2008US20080035608 Surface processing apparatus
02/14/2008US20080035058 Plasma Processing Unit
02/13/2008EP1887841A1 Plasma generating apparatus and plasma generating method
02/13/2008EP1887668A1 Gas excitation device having bridged electrode and gas excitation method
02/13/2008EP1700515B1 Electrode for generating a dielectric barrier discharge plasma
02/13/2008CN101124349A Plasma film deposition equipment
02/13/2008CN101124089A 纳米级电子光刻 Nanoscale electron lithography
02/13/2008CN101123844A Microwave plasm reaction cavity
02/13/2008CN101123843A Plasma generator, base material processing device comprising same and base material processing method
02/13/2008CN101123201A Stage for plasma processing apparatus, and plasma processing apparatus
02/13/2008CN101123200A Stage for plasma processing apparatus, and plasma processing apparatus
02/13/2008CN101123178A Plasma processing device
02/13/2008CN101121095A Low temperature plasma device for treating volatile organic
02/13/2008CN100369529C Ion accelerator arrangement
02/13/2008CN100369528C Ion accelerator arrangement
02/13/2008CN100369213C Plasma processing device and method thereof
02/13/2008CN100369192C Semiconductor processing system reaction chamber
02/11/2008CA2593498A1 Inductively coupled plasma mass spectrometer
02/07/2008US20080032063 Plasma deposition apparatus and deposition method utilizing same
02/07/2008US20080032043 Method and apparatus for processing the peripheral and edge portions of a wafer after performance of a surface treatment thereon
02/07/2008US20080031420 X-ray transmissive optical mirror apparatus
02/07/2008US20080030152 Boron Nitride Thin-Film Emitter and Production Method Thereof, and Electron Emitting Method Using Boron Nitride Thin-Film Emitter
02/07/2008US20080029485 Systems and Methods for Precision Plasma Processing
02/07/2008US20080029484 In-situ process diagnostics of in-film aluminum during plasma deposition
02/07/2008US20080029483 Method of treating a mask layer prior to performing an etching process
02/07/2008US20080029030 Plasma Generator
02/06/2008EP1883429A1 Apparatus and method for purification and disinfection of liquid, solid or gaseous substances
02/06/2008CN201018710Y Dielectric barrier subarea discharge path device
02/06/2008CN201018709Y Plasma testing apparatus in low temperature plasma disinfection device
02/06/2008CN201017846Y Plasma generator
02/06/2008CN201017845Y Differential feeding media blocking discharging low-temperature plasma device
02/06/2008CN101119609A Narrow slit and large slit combination type microwave plasma reaction cavity
02/06/2008CN101119608A Method to reduce microwave plasma excitated difficulty
02/06/2008CN101118854A Plasma etching system
02/06/2008CN100367829C Plasma exciting method
02/05/2008US7327089 Beam plasma source
02/05/2008US7326875 Method for supplying a plasma torch with a gas, mixed gas, or gas mixture, comprising volumetric flow regulation in combination with pressure regulation; and arrangement for carrying out said method
02/05/2008US7326874 Vented shield system for a plasma arc torch
02/05/2008US7326872 Multi-frequency dynamic dummy load and method for testing plasma reactor multi-frequency impedance match networks
02/05/2008US7326444 Methods for improving integration performance of low stress CDO films
02/05/2008US7325511 Microwave plasma processing apparatus, microwave processing method and microwave feeding apparatus
01/2008
01/31/2008WO2008013626A1 Method and apparatus for automatically controlling gas pressure for a plasma cutter
01/31/2008WO2008013256A1 End point detectable plasma etching method and plasma etching apparatus
01/31/2008WO2008013112A1 Microwave plasma source and plasma processing apparatus
01/31/2008WO2008013087A1 Standing wave measuring unit in waveguide and standing wave measuring method, electromagnetic wave using device, plasma processing device, and plasma processing method
01/31/2008WO2008011877A2 Apparatus and method for energy conversion
01/31/2008WO2007130156A3 Energy generation apparatus and method
01/31/2008US20080026589 Electrode for plasma processes and method for manufacture and use thereof
01/31/2008US20080026574 Method and apparatus of distributed plasma processing system for conformal ion stimulated nanoscale deposition process
01/31/2008US20080026168 Isotope-doped carbon nanotube
01/31/2008US20080026162 Radical-enhanced atomic layer deposition system and method
01/31/2008US20080025899 Plasma surface treatment method, quartz member, plasma processing apparatus and plasma processing method
01/31/2008US20080024126 Beam Measuring Equipment and Beam Measuring Method Using the Same
01/31/2008US20080023657 Extreme ultraviolet light source
01/31/2008US20080023317 Device and method for gas treatment using pulsed corona discharges
01/31/2008DE10260614B4 Plasmaparametersteuerung unter Verwendung von Lerndaten Plasma parameter control using the learning data
01/31/2008DE102006034988A1 Ionenquelle zur Erzeugung negativ geladener Ionen Ion source for generating negatively charged ions
01/30/2008CN101113514A Substrate processing apparatus
01/30/2008CN100366129C Method and arrangement for producing radiation
01/29/2008US7323655 Inductively coupled plasma reactor for producing nano-powder
01/29/2008US7323231 Apparatus and methods for plasma vapor deposition processes
01/29/2008US7323230 Anodizing an aluminum surface to form an Al2O3 layer; coating the oxide surface with aluminum by chemical vapor deposition from an aluminum-containing energized process gas; remelting the aluminum, and forming a second Al2O3 layer over the aluminum layer; completely fills the penetrating surface features
01/29/2008US7323218 Synthesis of composite nanofibers for applications in lithium batteries
01/29/2008US7323081 High-frequency plasma processing apparatus
01/29/2008US7323062 Thermal projection device
01/29/2008US7323061 Thermal spraying instrument
01/29/2008US7322313 Plasma processing system
01/24/2008WO2008010537A1 Plasma processing device, plasma processing method, and plasma surface processing method
01/24/2008WO2008010520A1 Shower plate, method for producing the same, plasma processing apparatus using the shower plate, plasma processing method, and method for manufacturing electronic device
01/24/2008WO2008009559A2 Device and method for producing and/ or confining a plasma
01/24/2008WO2008009558A1 Device and method for producing and confining a plasma
01/24/2008WO2006103828A8 Method of manufacturing magnetic recording medium, magnetic recording medium and surface treatment apparatus
01/24/2008US20080020138 Method for manufacturing poorly conductive layers
01/24/2008US20080018023 Expanded PTFE Articles and Method of Making Same
01/24/2008US20080017111 Semiconductor Manufacturing Device and Method for Manufacturing Semiconductor Devices
01/24/2008DE112006000772T5 Verfahren zur Herstellung eines amorphen Kohlenstofffilms A process for producing an amorphous carbon film
01/24/2008DE10008485B4 Hochfrequenz-Anpassnetzwerk High-frequency matching network
01/23/2008EP1880034A1 Method and apparatus for fine particle liquid suspension feed for thermal spray system and coatings formed therefrom
01/23/2008EP1503880A4 Plasma arc torch tip
01/23/2008EP1451892A4 Plasma production device and method and rf driver circuit
01/23/2008EP1203513B1 High-speed symmetrical plasma treatment system
01/23/2008CN101112132A Submerged plasma-use electrode, submerged plasma generating device and submerged plasma generating method
01/23/2008CN101111122A Distributed permanent magnetic field device used for electron cyclotron resonance plasma source
01/23/2008CN101111121A Etching machine electrode structure and manufacturing method thereof
01/23/2008CN101111120A Cooling device and system for a plasma arc torch and associated method
01/23/2008CN101111119A Micro-current target laser plasma soft X ray-extreme ultraviolet light source
01/23/2008CN101110347A Double offset frequency plasma body reactor with electrostatic chuck voltage feedback control
01/23/2008CN100364035C Procedure and device for the production of a plasma
01/22/2008US7320941 Plasma stabilization method and plasma apparatus
01/17/2008WO2008007784A1 Capacitive-coupled magnetic neutral line plasma sputtering system
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