Patents for H05H 1 - Generating plasma; Handling plasma (22,647) |
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02/14/2008 | WO2007133904A3 Dielectric devices for a plasma arc torch |
02/14/2008 | US20080038926 Method of treating a mask layer prior to performing an etching process |
02/14/2008 | US20080038555 Spherical particles having nanometer size, crystalline structure, and good sphericity and method for producing |
02/14/2008 | US20080038483 Adhesion of hydrophobic coatings on eyeglass lenses |
02/14/2008 | US20080038481 Fabricating and cleaning chamber components having textured surfaces |
02/14/2008 | US20080038480 Plasma method for biomedical material onto hydrophilic polymer sheet |
02/14/2008 | US20080038462 Method of forming a carbon layer on a substrate |
02/14/2008 | US20080037713 Systems, methods and devices for x-ray device focal spot control |
02/14/2008 | US20080037128 Coatings for replicating the spectral performance of colored glass |
02/14/2008 | US20080035613 Machine for the Treatment of Bottles That are Equipped with an Interchangeable Connection Cartridge |
02/14/2008 | US20080035608 Surface processing apparatus |
02/14/2008 | US20080035058 Plasma Processing Unit |
02/13/2008 | EP1887841A1 Plasma generating apparatus and plasma generating method |
02/13/2008 | EP1887668A1 Gas excitation device having bridged electrode and gas excitation method |
02/13/2008 | EP1700515B1 Electrode for generating a dielectric barrier discharge plasma |
02/13/2008 | CN101124349A Plasma film deposition equipment |
02/13/2008 | CN101124089A 纳米级电子光刻 Nanoscale electron lithography |
02/13/2008 | CN101123844A Microwave plasm reaction cavity |
02/13/2008 | CN101123843A Plasma generator, base material processing device comprising same and base material processing method |
02/13/2008 | CN101123201A Stage for plasma processing apparatus, and plasma processing apparatus |
02/13/2008 | CN101123200A Stage for plasma processing apparatus, and plasma processing apparatus |
02/13/2008 | CN101123178A Plasma processing device |
02/13/2008 | CN101121095A Low temperature plasma device for treating volatile organic |
02/13/2008 | CN100369529C Ion accelerator arrangement |
02/13/2008 | CN100369528C Ion accelerator arrangement |
02/13/2008 | CN100369213C Plasma processing device and method thereof |
02/13/2008 | CN100369192C Semiconductor processing system reaction chamber |
02/11/2008 | CA2593498A1 Inductively coupled plasma mass spectrometer |
02/07/2008 | US20080032063 Plasma deposition apparatus and deposition method utilizing same |
02/07/2008 | US20080032043 Method and apparatus for processing the peripheral and edge portions of a wafer after performance of a surface treatment thereon |
02/07/2008 | US20080031420 X-ray transmissive optical mirror apparatus |
02/07/2008 | US20080030152 Boron Nitride Thin-Film Emitter and Production Method Thereof, and Electron Emitting Method Using Boron Nitride Thin-Film Emitter |
02/07/2008 | US20080029485 Systems and Methods for Precision Plasma Processing |
02/07/2008 | US20080029484 In-situ process diagnostics of in-film aluminum during plasma deposition |
02/07/2008 | US20080029483 Method of treating a mask layer prior to performing an etching process |
02/07/2008 | US20080029030 Plasma Generator |
02/06/2008 | EP1883429A1 Apparatus and method for purification and disinfection of liquid, solid or gaseous substances |
02/06/2008 | CN201018710Y Dielectric barrier subarea discharge path device |
02/06/2008 | CN201018709Y Plasma testing apparatus in low temperature plasma disinfection device |
02/06/2008 | CN201017846Y Plasma generator |
02/06/2008 | CN201017845Y Differential feeding media blocking discharging low-temperature plasma device |
02/06/2008 | CN101119609A Narrow slit and large slit combination type microwave plasma reaction cavity |
02/06/2008 | CN101119608A Method to reduce microwave plasma excitated difficulty |
02/06/2008 | CN101118854A Plasma etching system |
02/06/2008 | CN100367829C Plasma exciting method |
02/05/2008 | US7327089 Beam plasma source |
02/05/2008 | US7326875 Method for supplying a plasma torch with a gas, mixed gas, or gas mixture, comprising volumetric flow regulation in combination with pressure regulation; and arrangement for carrying out said method |
02/05/2008 | US7326874 Vented shield system for a plasma arc torch |
02/05/2008 | US7326872 Multi-frequency dynamic dummy load and method for testing plasma reactor multi-frequency impedance match networks |
02/05/2008 | US7326444 Methods for improving integration performance of low stress CDO films |
02/05/2008 | US7325511 Microwave plasma processing apparatus, microwave processing method and microwave feeding apparatus |
01/31/2008 | WO2008013626A1 Method and apparatus for automatically controlling gas pressure for a plasma cutter |
01/31/2008 | WO2008013256A1 End point detectable plasma etching method and plasma etching apparatus |
01/31/2008 | WO2008013112A1 Microwave plasma source and plasma processing apparatus |
01/31/2008 | WO2008013087A1 Standing wave measuring unit in waveguide and standing wave measuring method, electromagnetic wave using device, plasma processing device, and plasma processing method |
01/31/2008 | WO2008011877A2 Apparatus and method for energy conversion |
01/31/2008 | WO2007130156A3 Energy generation apparatus and method |
01/31/2008 | US20080026589 Electrode for plasma processes and method for manufacture and use thereof |
01/31/2008 | US20080026574 Method and apparatus of distributed plasma processing system for conformal ion stimulated nanoscale deposition process |
01/31/2008 | US20080026168 Isotope-doped carbon nanotube |
01/31/2008 | US20080026162 Radical-enhanced atomic layer deposition system and method |
01/31/2008 | US20080025899 Plasma surface treatment method, quartz member, plasma processing apparatus and plasma processing method |
01/31/2008 | US20080024126 Beam Measuring Equipment and Beam Measuring Method Using the Same |
01/31/2008 | US20080023657 Extreme ultraviolet light source |
01/31/2008 | US20080023317 Device and method for gas treatment using pulsed corona discharges |
01/31/2008 | DE10260614B4 Plasmaparametersteuerung unter Verwendung von Lerndaten Plasma parameter control using the learning data |
01/31/2008 | DE102006034988A1 Ionenquelle zur Erzeugung negativ geladener Ionen Ion source for generating negatively charged ions |
01/30/2008 | CN101113514A Substrate processing apparatus |
01/30/2008 | CN100366129C Method and arrangement for producing radiation |
01/29/2008 | US7323655 Inductively coupled plasma reactor for producing nano-powder |
01/29/2008 | US7323231 Apparatus and methods for plasma vapor deposition processes |
01/29/2008 | US7323230 Anodizing an aluminum surface to form an Al2O3 layer; coating the oxide surface with aluminum by chemical vapor deposition from an aluminum-containing energized process gas; remelting the aluminum, and forming a second Al2O3 layer over the aluminum layer; completely fills the penetrating surface features |
01/29/2008 | US7323218 Synthesis of composite nanofibers for applications in lithium batteries |
01/29/2008 | US7323081 High-frequency plasma processing apparatus |
01/29/2008 | US7323062 Thermal projection device |
01/29/2008 | US7323061 Thermal spraying instrument |
01/29/2008 | US7322313 Plasma processing system |
01/24/2008 | WO2008010537A1 Plasma processing device, plasma processing method, and plasma surface processing method |
01/24/2008 | WO2008010520A1 Shower plate, method for producing the same, plasma processing apparatus using the shower plate, plasma processing method, and method for manufacturing electronic device |
01/24/2008 | WO2008009559A2 Device and method for producing and/ or confining a plasma |
01/24/2008 | WO2008009558A1 Device and method for producing and confining a plasma |
01/24/2008 | WO2006103828A8 Method of manufacturing magnetic recording medium, magnetic recording medium and surface treatment apparatus |
01/24/2008 | US20080020138 Method for manufacturing poorly conductive layers |
01/24/2008 | US20080018023 Expanded PTFE Articles and Method of Making Same |
01/24/2008 | US20080017111 Semiconductor Manufacturing Device and Method for Manufacturing Semiconductor Devices |
01/24/2008 | DE112006000772T5 Verfahren zur Herstellung eines amorphen Kohlenstofffilms A process for producing an amorphous carbon film |
01/24/2008 | DE10008485B4 Hochfrequenz-Anpassnetzwerk High-frequency matching network |
01/23/2008 | EP1880034A1 Method and apparatus for fine particle liquid suspension feed for thermal spray system and coatings formed therefrom |
01/23/2008 | EP1503880A4 Plasma arc torch tip |
01/23/2008 | EP1451892A4 Plasma production device and method and rf driver circuit |
01/23/2008 | EP1203513B1 High-speed symmetrical plasma treatment system |
01/23/2008 | CN101112132A Submerged plasma-use electrode, submerged plasma generating device and submerged plasma generating method |
01/23/2008 | CN101111122A Distributed permanent magnetic field device used for electron cyclotron resonance plasma source |
01/23/2008 | CN101111121A Etching machine electrode structure and manufacturing method thereof |
01/23/2008 | CN101111120A Cooling device and system for a plasma arc torch and associated method |
01/23/2008 | CN101111119A Micro-current target laser plasma soft X ray-extreme ultraviolet light source |
01/23/2008 | CN101110347A Double offset frequency plasma body reactor with electrostatic chuck voltage feedback control |
01/23/2008 | CN100364035C Procedure and device for the production of a plasma |
01/22/2008 | US7320941 Plasma stabilization method and plasma apparatus |
01/17/2008 | WO2008007784A1 Capacitive-coupled magnetic neutral line plasma sputtering system |