| Patents for H05H 1 - Generating plasma; Handling plasma (22,647) |
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| 12/13/2007 | WO2007142296A1 Ion generating device, and neutron generating apparatus |
| 12/13/2007 | WO2007142166A2 Atmospheric pressure plasma generating method, plasma processing method and component mounting method using same, and device using these methods |
| 12/13/2007 | WO2007109356A3 Device and method for etching flash memory gate stacks comprising high-k dielectric |
| 12/13/2007 | WO2006017340A3 Plasma enhanced chemical vapor deposition system for forming carbon nanotubes |
| 12/13/2007 | US20070286967 Plasma processing apparatus and plasma processing method |
| 12/13/2007 | US20070286966 Method of depositing an abrasion-resistant layer onto an electroluminescent plastic window |
| 12/13/2007 | US20070286965 Methods for the reduction and elimination of particulate contamination with cvd of amorphous carbon |
| 12/13/2007 | US20070286954 Methods for low temperature deposition of an amorphous carbon layer |
| 12/13/2007 | US20070285022 Tunable Plasma Frequency Devices |
| 12/13/2007 | US20070284044 Method and apparatus for measuring electron density of plasma and plasma processing apparatus |
| 12/13/2007 | US20070283888 Plasma Reactor for the Treatment of Large Size Substrates |
| 12/13/2007 | DE112005003029T5 In-Flüssigkeit-Plasmaelektrode, In-Flüssigkeit-Plasmaerzeugungsvorrichtung, und In-Flüssigkeit-Plasmaerzeugungsverfahren In-liquid plasma electrode, in-liquid plasma-generating device, and in-liquid plasma generating method |
| 12/13/2007 | DE102006026787A1 Verfahren und Vorrichtung zur selektiven Anregung einer Ionisation oder einer Dissoziation mit monochromatischem Licht Method and apparatus for the selective excitation of an ionization or dissociation with monochromatic light |
| 12/12/2007 | EP1864555A1 A plasma spectroscopy system with a gas supply |
| 12/12/2007 | EP1576862A4 Tip gas distributor |
| 12/12/2007 | EP1487604A4 Contact start plasma arc torch and method of initiating a pilot arc |
| 12/12/2007 | EP1478485A4 Dual mode plasma arc torch |
| 12/12/2007 | CN200990717Y Big size graphite electrode |
| 12/12/2007 | CN101088309A Process for determining local emissivity profile of suprathermal electrons |
| 12/12/2007 | CN101086964A 等离子体掺杂方法 Plasma doping method |
| 12/12/2007 | CN101086953A Semiconductor substrate processing apparatus, method, and medium |
| 12/12/2007 | CN100355325C Gas distribution electrode for plasma etching machine |
| 12/12/2007 | CN100355040C Plasma processing method, detecting method of completion of seasoning, plasma processing apparatus |
| 12/12/2007 | CN100355038C Plasma processor and variable impedance apparatus correcting method |
| 12/12/2007 | CN100354453C Layer formation method, and substrate with a layer formed by the method |
| 12/11/2007 | US7308078 X-ray micro-target source |
| 12/11/2007 | US7307475 RF generator with voltage regulator |
| 12/11/2007 | US7306830 High intensity-discharge lamps; applying amorphous thin layers of TiO2 and SiO2 by plasma impulse chemical vapor deposition at high power density and increased substrate temperatures using small growth rates to form interference layer less than 1200 nm thick and a minimized UV-active defective spot rate |
| 12/11/2007 | US7306829 RF plasma reactor having a distribution chamber with at least one grid |
| 12/11/2007 | US7306745 Method and apparatus for stabilizing a plasma |
| 12/11/2007 | US7305934 Plasma treatment apparatus and plasma generation method |
| 12/06/2007 | WO2007140425A2 Process chamber for dielectric gapfill |
| 12/06/2007 | WO2007139379A1 Method and apparatus for deposition using pulsed atmospheric pressure glow discharge |
| 12/06/2007 | WO2007139020A1 Electrode for plasma reactor vessel, and plasma reactor vessel |
| 12/06/2007 | WO2007138837A1 Production method of gas barrier resin substrate and production system of gas barrier resin substrate |
| 12/06/2007 | US20070281107 Plasma processing method |
| 12/06/2007 | US20070281106 Process chamber for dielectric gapfill |
| 12/06/2007 | US20070281105 Atomic Layer Deposition of Oxides Using Krypton as an Ion Generating Feeding Gas |
| 12/06/2007 | US20070281083 Elimination of first wafer effect for pecvd films |
| 12/06/2007 | US20070278429 High flux, high energy photon source |
| 12/06/2007 | DE102005049266B4 Vorrichtung und Verfahren zur Plasmabehandlung von Objekten Apparatus and method for plasma treatment of objects |
| 12/05/2007 | CN101084701A Plasma arc torch having an electrode with internal passages |
| 12/05/2007 | CN101083868A Preionization igniting device based atmosphere pressure discharging cold plasma generators |
| 12/05/2007 | CN101083203A Plasma processing device and eletronode used |
| 12/05/2007 | CN100353816C Apparatus and method for radio frequency decoupling and bias voltage control in a plasma reactor |
| 12/05/2007 | CN100353484C Method for adjusting voltage on a powered faraday shield |
| 12/04/2007 | US7304438 Method and apparatus for preventing instabilities in radio-frequency plasma processing |
| 12/04/2007 | US7304435 Device for confinement of a plasma within a volume |
| 12/04/2007 | US7303790 Electron cyclotron resonance plasma deposition process and device for single-wall carbon nanotubes and nanotubes thus obtained |
| 12/04/2007 | US7303789 Methods for producing thin films on substrates by plasma CVD |
| 12/04/2007 | US7303141 Gas supplying apparatus |
| 12/04/2007 | US7302910 Plasma apparatus and production method thereof |
| 12/04/2007 | CA2313756C Plasma mass filter |
| 12/04/2007 | CA2260505C Plasma producer with a holder |
| 11/29/2007 | WO2007136843A2 Processing cellulosic material utilizing atmospheric-pressure plasma |
| 11/29/2007 | WO2007136043A1 Planar antenna member and plasma processing deice using same |
| 11/29/2007 | WO2007135860A1 Discharge device and air purifying device |
| 11/29/2007 | WO2007134432A1 Highly ordered structure pyrolitic graphite or carbon-carbon composite cathodes for plasma generation in carbon containing gases |
| 11/29/2007 | WO2007095870B1 A method of gasification of substances by electric arc and an apparatus |
| 11/29/2007 | WO2007092611A3 Disposable liners for etch chambers and etch chamber components |
| 11/29/2007 | WO2006135446A3 Method of forming a porous metal catalyst on a substrate for nanotube growth |
| 11/29/2007 | US20070275193 Functional Materials and Novel Methods for the Fabrication of Microfluidic Devices |
| 11/29/2007 | US20070274893 Microwave Plasma Apparatus |
| 11/29/2007 | DE10239130B4 Verfahren zur Bestimmung des Druckes im Arbeitsgas von Plasmen A method for determining the pressure in the working gas plasmas |
| 11/29/2007 | CA2652428A1 Highly ordered structure pyrolitic graphite or carbon-carbon composite cathodes for plasma generation in carbon containing gases |
| 11/28/2007 | EP1860927A2 Automatic gas control for a plasma arc torch |
| 11/28/2007 | EP1858651A1 Sealable biaxially oriented polypropylene film for packaging |
| 11/28/2007 | CN101080133A Inductively coupled plasma reactor |
| 11/28/2007 | CN100352316C Plasma processor and plasma processing method |
| 11/28/2007 | CN100352315C Device for injection of a pulsed supersonic gas stream |
| 11/27/2007 | US7301972 Apparatus, system, and method for frequency stabilized mode-locked laser |
| 11/27/2007 | US7300537 Productivity enhancing thermal sprayed yttria-containing coating for plasma reactor |
| 11/22/2007 | WO2007133904A2 Dielectric devices for a plasma arc torch |
| 11/22/2007 | WO2007111671A8 Polyimide substrate and method of manufacturing printed wiring board using the same |
| 11/22/2007 | WO2007028813A3 Method and device for igniting and generating an expanding diffuse microwave plasma and method and device for plasma treating surfaces and substances by using this plasma |
| 11/22/2007 | WO2007025505A3 Plasma welding and cutting torch comprising a cooling system |
| 11/22/2007 | WO2007018575A3 Ion generation by the temporal control of gaseous dielectric breakdown |
| 11/22/2007 | US20070269612 Method and an Apparatus for Applying a Coating on a Substrate |
| 11/22/2007 | US20070266948 Device for Controlling Electron Temperature in an Ecr Plasma |
| 11/22/2007 | US20070266947 Plasma generating device |
| 11/22/2007 | US20070266946 Semiconductor device manufacturing apparatus and method of using the same |
| 11/22/2007 | US20070266945 Plasma cvd apparatus equipped with plasma blocking insulation plate |
| 11/22/2007 | DE10323014B4 Düse für Plasmabrenner Nozzle for plasma torch |
| 11/22/2007 | DE10210421B4 Elektrodenelement für Plasmabrenner sowie Verfahren zur Herstellung Electrode element for plasma torches and methods for preparing |
| 11/22/2007 | DE102006023232A1 Data storage method for use in plasma process output supply system, involves storing data, which are stored in first in, first out memory, in permanent memory, during occurrence of preset event |
| 11/21/2007 | EP1855833A2 Plasmas and methods of using them |
| 11/21/2007 | CN200980199Y An industrial plasma spray gun |
| 11/21/2007 | CN101076504A Lining for carbothermic reduction furnace |
| 11/21/2007 | CN101076221A Multiple radiation sources plasma generating and processing |
| 11/21/2007 | CN101076220A 电感耦合等离子体处理装置和等离子体处理方法 Apparatus and plasma processing method of inductively coupled plasma processing |
| 11/21/2007 | CN101076219A Decoupling reactive ion etching chamber containing multiple processing platforms |
| 11/21/2007 | CN100350818C Plasma-spraying device |
| 11/21/2007 | CN100350545C Plasma reaction chamber component having improved temp uniformity |
| 11/20/2007 | US7297968 Debris collector for EUV light generator |
| 11/20/2007 | US7297892 Systems and methods for laser-assisted plasma processing |
| 11/20/2007 | US7297637 Use of pulsed grounding source in a plasma reactor |
| 11/20/2007 | US7297376 Method to reduce gas-phase reactions in a PECVD process with silicon and organic precursors to deposit defect-free initial layers |
| 11/20/2007 | US7296533 Radial antenna and plasma device using it |
| 11/20/2007 | CA2311867C Plasma arc torch head |
| 11/15/2007 | WO2007131040A2 Method and apparatus for photo-excitation of chemicals for atomic layer deposition of dielectric film |