| Patents for H05H 1 - Generating plasma; Handling plasma (22,647) |
|---|
| 08/31/2006 | US20060192156 Light source apparatus and exposure apparatus having the same |
| 08/31/2006 | DE19651811B4 Vorrichtung zum Belegen eines Substrats mit dünnen Schichten Device to occupy a substrate with thin layers |
| 08/30/2006 | EP1305604A4 Plasma source for spectrometry |
| 08/30/2006 | EP1147691A4 Plasma vacuum pump |
| 08/30/2006 | CN1826843A Plasma treating apparatus and its electrode structure |
| 08/30/2006 | CN1826422A Nitriding method and device |
| 08/30/2006 | CN1825556A Wafer holder and method of holding a wafer |
| 08/30/2006 | CN1825536A Substrate processing apparatus and substrate processing method |
| 08/30/2006 | CN1825505A Inductance coupled coil and inductance coupled plasma device |
| 08/29/2006 | US7098599 Plasma generator |
| 08/29/2006 | US7098422 Electrode element for plasma torch and method for the production |
| 08/29/2006 | US7098420 Electrode for use with atmospheric pressure plasma emitter apparatus and method for using the same |
| 08/29/2006 | US7097886 Deposition process for high aspect ratio trenches |
| 08/29/2006 | US7097735 Plasma processing device |
| 08/29/2006 | US7097675 Diatomic hydrogen and unsaturated hydrocarbons are produced as reactor gases in a fast quench reactor, during fast quenching unsaturated hydrocarbons are further decomposed by reheating the reactor gases, more hydrogen is produced elemental carbon |
| 08/29/2006 | US7096660 Plasma impulse device |
| 08/24/2006 | WO2006089080A2 Abrasion resistant coatings with color component for gemstones and such |
| 08/24/2006 | WO2006003374A3 Method and apparatus for heating a gas stream |
| 08/24/2006 | US20060189168 Plasma generator, ozone generator, substrate processing apparatus and manufacturing method of semiconductor device |
| 08/24/2006 | US20060188661 Method of forming film pattern, method of manufacturing device, electro-optical device, and electronic apparatus |
| 08/24/2006 | US20060186838 Apparatus for magnetic and electrostatic confinement of plasma |
| 08/24/2006 | US20060186094 Method for supplying a plasma torch with a gas, mixed gas, or gas mixture, comprising volumetric flow regulation in combination with pressure regulation; and arrangement for carrying out said method |
| 08/24/2006 | US20060185795 Anodized substrate support |
| 08/24/2006 | DE10242895B4 Verfahren zur Evakuierung eines thermisch isolierenden Paneels mit Plasmaanregung Procedures for the evacuation of a thermally insulating panel plasma excitation |
| 08/23/2006 | EP1693014A1 Apparatus and method for calibration of thermal energy delivery in plasma tissue surface treatment system |
| 08/23/2006 | EP1692922A1 Plasma spraying device |
| 08/23/2006 | EP1406730A4 Adjustable injector assembly for melted powder coating |
| 08/23/2006 | EP1190605A4 Microwave plasma burner |
| 08/23/2006 | CN1823554A Plasma processing apparatus and method for producing same |
| 08/23/2006 | CN1822913A Plasma generators, reactor systems and related methods |
| 08/23/2006 | CN1822745A Plasma generation apparatus |
| 08/23/2006 | CN1822317A Electrode subassembly |
| 08/23/2006 | CN1821448A Plasma processing apparatus and components thereof, and method for detecting life span of the components |
| 08/23/2006 | CN1820723A Tissue treatment system |
| 08/23/2006 | CN1271687C Self-adption plasma attribute system |
| 08/22/2006 | US7095178 Plasma processing apparatus, method for operating the same, designing system of matching circuit, and plasma processing method |
| 08/22/2006 | US7094706 Device and method for etching a substrate by using an inductively coupled plasma |
| 08/22/2006 | US7094315 Chamber configuration for confining a plasma |
| 08/22/2006 | US7094314 Atmospheric pressure non-thermal plasma device to clean and sterilize the surfaces of probes, cannulas, pin tools, pipettes and spray heads |
| 08/22/2006 | US7093774 Device for injecting a pulsed supersonic gas stream |
| 08/22/2006 | US7093421 Spark igniter for gas turbine engine |
| 08/17/2006 | WO2006085887A1 Sealable biaxially oriented polypropylene film for packaging |
| 08/17/2006 | WO2006042740A3 Process and device for sterilising ambient air |
| 08/17/2006 | US20060182942 Conductive organic-inorganic hybrid material comprising a mesoporous phase, membrane, electrode and fuel cell |
| 08/17/2006 | US20060182883 Abrasion resistant coatings with color component for gemstones and such |
| 08/16/2006 | EP1689907A2 Plasma production device and method and rf driver circuit with adjustable duty cycle |
| 08/16/2006 | EP1689549A2 Plasma generators, reactor systems and related methods |
| 08/16/2006 | EP1488443B1 Device for confinement of a plasma within a volume |
| 08/16/2006 | CN2807699Y Heavy current plasma welding gun |
| 08/16/2006 | CN2807421Y Jigger coupling circuit and jigger coupling plasma apparatus |
| 08/16/2006 | CN1820141A Plasma jet spark plug |
| 08/16/2006 | CN1819737A Barrier glow discharging plasma generator and generation with atmosphere medium |
| 08/16/2006 | CN1819736A Side RF coil and side heater for plasma processing apparatus |
| 08/16/2006 | CN1270587C Plasma blowtorch |
| 08/16/2006 | CN1270349C Device and method for generating local plasma by micro-structure electrode discharges with microwaves |
| 08/15/2006 | US7092488 EUV, XUV, and X-ray wavelength sources created from laser plasma produced from liquid metal solutions |
| 08/15/2006 | US7091507 Light generator and exposure apparatus |
| 08/15/2006 | US7090811 Method of reducing NOx in diesel engine exhaust |
| 08/15/2006 | US7090742 Device for producing inductively coupled plasma and method thereof |
| 08/10/2006 | WO2006083725A2 Vacuum deposition of coating materials on powders |
| 08/10/2006 | WO2006083627A1 Plasma sensors for endpoint and end-of-life detection with self-diagnostic sensor |
| 08/10/2006 | WO2006082731A1 Film-forming apparatus, matching unit, and impedance control method |
| 08/10/2006 | WO2006081637A1 Atmospheric-pressure plasma jet |
| 08/10/2006 | WO2006004399A3 Method and means for generation of a plasma at atmospheric pressure |
| 08/10/2006 | US20060177698 Aluminum vanadium nitride and carbonitride coatings have a NaCl crystal structure; excellent hardness and lubricity; for cutting tools such as chip, drill, and end mill, forging dies, and jigs and tools such as blanking punch |
| 08/10/2006 | US20060177600 Inductive plasma system with sidewall magnet |
| 08/10/2006 | US20060177599 Dual plasma beam sources and method |
| 08/10/2006 | US20060177598 Atomisation of a precursor into an excitation medium for coating a remote substrate |
| 08/10/2006 | US20060177596 Method and apparatus for the production of metal coated steel products |
| 08/10/2006 | US20060177579 Plasma enhanced atomic layer deposition using an apparatus of reaction chamber having a rotary disk, susceptors; spraying a first reactive gas, a second reactive gas of H2, N2, O2, N2O or NH3 excited by plasma and an inert gas |
| 08/10/2006 | US20060176045 Plasma reactor and method of determining abnormality in plasma reactor |
| 08/10/2006 | CA2596589A1 Atmospheric-pressure plasma jet |
| 08/09/2006 | EP1689216A1 Atmospheric-pressure plasma jet |
| 08/09/2006 | CN1816243A Ion source apparatus and method |
| 08/09/2006 | CN1815689A Plasma processing apparatus |
| 08/09/2006 | CN1269387C Apparatus and method for confining plasma |
| 08/09/2006 | CN1268981C Attenuated phase shifting mask having embedded bi-layer structure for and method for making same |
| 08/08/2006 | US7088047 reduced electron temperature for etching oxide film, ensure high selectivity by reducing a volume of chamber, can accurately fabricate a large-diameter semiconductor wafer by establishing rotation symmetry of a plasma density profile; ground end of antenna elements is positioned close to the chamber |
| 08/08/2006 | US7087912 Ion beam irradiation apparatus for suppressing charge up of substrate and method for the same |
| 08/08/2006 | US7087271 Silicon oxycarbide; vapor deposition |
| 08/08/2006 | US7086347 Apparatus and methods for minimizing arcing in a plasma processing chamber |
| 08/03/2006 | WO2006081420A2 Automatic gas control for a plasma arc torch |
| 08/03/2006 | WO2006081004A2 Methods and arrangement for the reduction of byproduct deposition in a plasma processing system |
| 08/03/2006 | WO2006080870A1 A thermal spraying method and device |
| 08/03/2006 | WO2006080629A1 Plasma chamber |
| 08/03/2006 | WO2005125287A3 Device for creating a local plasma at the location of an object |
| 08/03/2006 | WO2005125286A3 Device for the treatment of a substrate by means of at least one plasma jet |
| 08/03/2006 | US20060172086 Supplying an organometallic gas containing cobalt or cobalt and iron and a carrier gas to a gas cluster ion beam apparatus; forming a barrier to manganese diffusion on ferromagnetic or an antiferromagnetic interface surface by irradiating the surface with the beam of gas cluster ions produced |
| 08/03/2006 | US20060172085 Method and apparatus for chemical plasma processing of plastic container |
| 08/03/2006 | US20060172065 Vacuum deposition of coating materials on powders |
| 08/03/2006 | DE102004023368B4 Surface tempering unit comprises a layer exposed to heat or a particle stream, made of wear resistant material composed of two egments, and two tempering elements |
| 08/02/2006 | EP1686843A2 Plasma arc torch |
| 08/02/2006 | EP1686842A1 Plasma torch |
| 08/02/2006 | EP1686092A1 Method for producing nanostructured carbon material, nanostructured carbon material produced by such method, and substrate having such nanostructured carbon material |
| 08/02/2006 | EP1684915A1 Method and device for continuous treatment of the surface of an elongate object |
| 08/02/2006 | EP1304731B1 Method of cleaning cvd device and cleaning device therefor |
| 08/02/2006 | EP1262093A4 Apparatus for fixing an electrode in plasma polymerizing apparatus |
| 08/02/2006 | EP1095217A4 Plasma vacuum pumping cell |
| 08/02/2006 | EP1038046A4 Plasma reactor with a deposition shield |
| 08/02/2006 | CN1813332A Sidewall magnet improving uniformity of inductively coupled plasma and shields used therewith |