Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
10/2007
10/16/2007CA2356583C Torch for powder plasma buildup welding
10/11/2007WO2007114882A1 Plasma torch with post flow control
10/11/2007WO2007114556A1 Dc arc plasmatron and method of using the same
10/11/2007WO2007114247A1 Plasma generating apparatus and plasma generating method
10/11/2007WO2007095870A3 A method of gasification of substances by electric arc and an apparatus
10/11/2007WO2006101994A3 Coated article with anti-reflective coating and method of making same
10/11/2007US20070239205 Plasma-treated vascular occlusion devices and methods
10/11/2007US20070237279 System and method for fusion power generation using very high electrical potential difference
10/11/2007US20070237278 Inertial fusion reactor device
10/11/2007US20070236148 Plasma processing apparatus
10/11/2007DE10358505B4 Plasmaquelle zur Erzeugung eines induktiv gekoppelten Plasmas Plasma source for generating an inductively coupled plasma
10/10/2007CN101053071A 等离子体处理方法 The plasma processing method
10/10/2007CN101052265A Plasma treatment apparatus
10/10/2007CN101052264A Method for suppressing plasma unstable
10/10/2007CN101050922A Heat treatment oven, panel display element production device, method and panel display element
10/10/2007CN101049583A Method for producing density ions in high performance in flue
10/10/2007CN100342759C Method of generating extreme ultraviolet radiation
10/09/2007US7279845 Plasma processing method and apparatus
10/09/2007US7279358 Mounting method and mounting device
10/09/2007US7279066 Apparatus for forming silicon oxide film
10/04/2007WO2007111779A2 Method of integrating peald ta-containing films into cu metallization
10/04/2007WO2007111671A1 Polyimide substrate and method of manufacturing printed wiring board using the same
10/04/2007WO2007111251A1 Surface processing apparatus
10/04/2007WO2007111204A1 Electrode and vacuum processing apparatus
10/04/2007WO2007110060A2 Apparatus and use of the apparatus for measuring the density of a plasma
10/04/2007WO2007109906A1 Method and apparatus for nanopowder and micropowder production using axial injection plasma spray
10/04/2007WO2007059012A3 Enhanced plasma filter
10/04/2007WO2006101886A3 A plasma enhanced atomic layer deposition system and method
10/04/2007US20070231716 Plasma etching chamber and method for manufacturing photomask using the same
10/04/2007US20070231495 Method of forming multi-layer films using corona treatments
10/04/2007US20070228617 Ethylene/tetrafluoroethylene copolymer molding and method for its production
10/04/2007US20070228294 Charge Neutralizing Device
10/04/2007DE4308632B4 Verfahren und Vorrichtung zum Nachbehandeln von Aluminium-beschichteten Kunststoff-Folien Method and apparatus for after-treatment of aluminum-coated plastic films
10/04/2007DE10339495B4 Anordnung zur optischen Detektion eines bewegten Targetstromes für eine gepulste energiestrahlgepumpte Strahlungserzeugung Arrangement for optical detection of a moving target current for a pulsed energy beam pumped radiation generation
10/04/2007DE102006014574A1 Optical radiation e.g. solar radiation, energy conversion method, involves absorbing optical radiation by optical plasma, and inducing regular load separation in independent gas discharge
10/04/2007DE102006011312A1 Vorrichtung zur Plasmabehandlung unter Atmosphärendruck An apparatus for plasma treatment under atmospheric pressure
10/04/2007CA2647621A1 Method and apparatus for nanopowder and micropowder production using axial injection plasma spray
10/03/2007EP1841295A2 Plasma generating electrode inspection device
10/03/2007EP1840950A1 Plasma processing method
10/03/2007EP1213749B1 Plasma processing apparatus and method of plasma processing
10/03/2007CN101049054A 等离子体系统 Plasma system
10/03/2007CN101049053A 等离子体系统 Plasma system
10/03/2007CN101048029A Microwave plasma processing apparatus, method for manufacturing microwave plasma processing apparatus and plasma processing method
10/03/2007CN101047143A Basal plate carrying table and basal plate processing device
10/03/2007CN101047118A Plasma processing apparatus and plasma processing method
10/03/2007CN100341386C Inductive coupled antenna and plasma processor using the same
10/03/2007CN100341123C Method for producing aluminium nitride chip
10/03/2007CN100341120C Plasma processing device and method thereof
10/03/2007CN100341107C Plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression
10/02/2007US7277526 Apparatus, system, and method for high flux, compact compton x-ray source
10/02/2007US7276816 High-frequency matching network
10/02/2007US7276266 Functionalization of carbon nanotubes
09/2007
09/27/2007WO2007108549A1 Plasma processing apparatus and plasma processing method
09/27/2007US20070224376 Metallized multi-layer films, methods of manufacture and articles made therefrom
09/27/2007US20070224364 Plasma processing apparatus, plasma processing method, plasma film deposition apparatus, and plasma film deposition method
09/27/2007US20070224346 Increased adhesion of aromatic polyimide substrate to the subsequently plated metal layers by using the palladium activator in the conditioning and etching solution and the inclusion of ammonium chloride in the electroless nickel plating bath; durability; cost efficiency; microelectronic packaging
09/27/2007US20070222119 Electret article having heteroatoms and low fluorosaturation ratio
09/27/2007US20070221833 Plasma generating apparatus and method using neutral beam
09/27/2007US20070221634 Plasma Torch Spectrometer
09/27/2007US20070221623 Plasma processing apparatus and method
09/27/2007DE202007010299U1 Lichtbogenschweißbrenner nach dem Plasmaschweißverfahren Arc welding torch after the plasma welding process
09/27/2007DE19882576B4 Grünling-Elektrode zur Funkenentladungsbehandlung, zugehöriges Herstellungsverfahren, und Verfahren zum Recyceln einer Grünling-Elektrode Green compact electrode for spark discharge treatment manufacturing method thereof, and a method for recycling green compact electrode
09/27/2007DE102006013871A1 Elektrochemisches Verfahren zur Abscheidung von nanoskaligen Metallen, Halbmetallen und Verbindungen dieser Metalle und/oder Halbmetalle an der Grenzfläche zwischen einer Niedertempereturentladung und einer ionischen Flüssigkeit An electrochemical process for deposition of nanoscale metals, semimetals and compounds of these metals and / or semi-metals at the interface between a Niedertempereturentladung and an ionic liquid
09/26/2007EP1838140A2 Plasma generation electrode, plasma reactor, and exhaust gas cleaning apparatus
09/26/2007EP1836718A1 Microplasma array
09/26/2007EP1836011A1 Plasma system and apparatus
09/26/2007EP1836001A2 Organic electronic devices and methods
09/26/2007EP1252647B1 Impedance adapted microwave energy coupling device
09/26/2007CN200953682Y Double-gas sources based atomosphere discharge cold plasma generator
09/26/2007CN101043786A Inductively coupled plasma generating equipment for concave cavity coil antenna
09/26/2007CN101043785A Heater lead mechanism for plasma shower
09/26/2007CN101043784A Hybrid plasma reactor
09/26/2007CN101042991A Plasma processing apparatus
09/26/2007CN101042990A Plasma processing apparatus and method
09/26/2007CN101042989A Plasma processing apparatus
09/26/2007CN100339945C Plasma processing system and cleaning method for the same
09/26/2007CN100339943C Multirate processing for metrology of plasma RF source
09/26/2007CN100339505C Surface activated plasma CVD system
09/25/2007US7274435 Exposure apparatus and device fabrication method using the same
09/25/2007US7274030 Apparatus for the temporally stable generation of EUV radiation by means of a laser-induced plasma
09/25/2007US7274015 Capacitive discharge plasma ion source
09/25/2007US7273996 Inductively coupled plasma alignment apparatus and method
09/25/2007US7273995 Plasma generator
09/25/2007US7273638 High density plasma oxidation
09/25/2007CA2437591C Plasma torch used for heating molten steel
09/20/2007WO2007106611A2 Rf plasma-enhanced deposition of fluorinated films
09/20/2007WO2007105428A1 Plasma generation device nozzle, plasma generation device, plasma surface treatment device, plasma generation method, and plasma surface treatment method
09/20/2007WO2007105411A1 Plasma generator and method of generating plasma using the same
09/20/2007WO2007105330A1 Glow plasma generator and method for generating glow plasma
09/20/2007WO2007104512A1 Device for plasma treatment at atmospheric pressure
09/20/2007WO2007104404A1 Apparatus for producing a plasma jet
09/20/2007US20070218683 Method of integrating PEALD Ta- containing films into Cu metallization
09/20/2007US20070218214 Method of improving adhesion property of dielectric layer and interconnect process
09/20/2007DE102006012100B3 Vorrichtung zur Erzeugung eines Plasma-Jets An apparatus for generating a plasma jet
09/20/2007DE102004044357B4 Vorrichtung zur Durchführung der Oberflächenbehandlung von Bauteilen in der Plasmatechnik Apparatus for carrying out the surface treatment of parts in the plasma technology
09/19/2007EP1835789A1 Plasma generating electrode and plasma reactor
09/19/2007CN101039544A Plasma processor with electrode simultaneously responsive to plural frequencies
09/19/2007CN101039543A Adjustable height pif probe
09/19/2007CN101038889A Substrate table and substrate processing apparatus
09/19/2007CN101038869A Water-cooling plasma shower