| Patents for H05H 1 - Generating plasma; Handling plasma (22,647) |
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| 10/04/2006 | CN1840740A Plasma processing device |
| 10/04/2006 | CN1278392C Plasma processor and plasma processing method |
| 10/03/2006 | US7117064 Method of depositing dielectric films |
| 10/03/2006 | US7115881 Positioning and motion control by electrons, ions, and neutrals in electric fields |
| 10/03/2006 | US7115306 Depositing aluminum layer on substrate, forming insulating layer over aluminum layer, patterning to expose a side of aluminum layer, forming holes in exposed side of aluminum layer, depositing catalyst metal layer on bottoms of holes, growing carbon nanotubes from catalyst metal layer; uniform diameters |
| 10/03/2006 | US7114337 Air/fuel injection system having cold plasma generating means |
| 10/03/2006 | CA2118081C Production of fluorocarbon compounds |
| 09/28/2006 | WO2006101994A2 Coated article with anti-reflective coating and method of making same |
| 09/28/2006 | WO2006101886A2 A plasma enhanced atomic layer deposition system and method |
| 09/28/2006 | WO2006100936A1 Thermal cutting device |
| 09/28/2006 | WO2006100217A1 Photon source comprising an electron cyclotron resonance multicharged ion plasma source |
| 09/28/2006 | WO2006100030A1 Method and system for plasma treatment under high pressure |
| 09/28/2006 | US20060216912 Methods to manufacture contaminant-gettering materials in the surface of EUV optics |
| 09/28/2006 | US20060216433 Method of stabilizing film quality of low-dielectric constant film |
| 09/28/2006 | US20060216432 Plasma treatment method and method of manufacturing semiconductor device |
| 09/28/2006 | US20060214270 Semiconductor device and fabrication method therefor, capacitive element and fabrication method therefor, and MIS type semiconductor device and fabrication method therefor |
| 09/28/2006 | US20060213865 Method and device for plasma-etching organic material film |
| 09/28/2006 | US20060213759 Pyrolysis apparatus and pyrolysis method |
| 09/28/2006 | US20060213539 Method for cleaning thin-film forming apparatus |
| 09/28/2006 | US20060213444 Deposition apparatus and deposition method |
| 09/28/2006 | DE102005012360A1 Arc cutting wire for arc spreading has curved guide element with roller on the inside of the curve and a ceramic guide rail on the outside |
| 09/28/2006 | CA2601729A1 Method for operating a pulsed arc vaporizer source as well as a vacuum process installation with pulsed arc vaporization source |
| 09/27/2006 | EP1705965A1 Method and system for plasma treatment under high pressure |
| 09/27/2006 | EP1704756A2 Plasma treatment of large-scale components |
| 09/27/2006 | EP1704575A2 Method of and apparatus for electrostatic fluid acceleration control of a fluid flow |
| 09/27/2006 | EP1464210B1 Method and device for compressing a substance by impact and plasma cathode therefor |
| 09/27/2006 | EP1157598A4 Method and apparatus for deposition of diamond-like carbon coatings from a hall-current ion source |
| 09/27/2006 | CN1838387A Etching method and apparatus |
| 09/27/2006 | CN1838386A Plasma processing device |
| 09/27/2006 | CN1838381A Method for electrically discharging substrate, substrate processing apparatus and program |
| 09/26/2006 | US7112926 Matching unit and plasma processing system |
| 09/26/2006 | US7112352 Apparatus and method for depositing large area coatings on planar surfaces |
| 09/21/2006 | WO2006097649A1 Method and device for generating a thermal flux loaded with particles |
| 09/21/2006 | WO2005001845A3 Fusion apparatus and methods |
| 09/21/2006 | US20060210783 Coated article with anti-reflective coating and method of making same |
| 09/21/2006 | US20060210723 Plasma enhanced atomic layer deposition system and method |
| 09/21/2006 | DE102005007370B3 Ultraviolet light source for e.g. ultraviolet microscopy, has dielectric arranged between two electrodes, where one electrode includes tip directed to another electrode, such that shortest distance is defined between electrodes |
| 09/20/2006 | EP1476588B1 Method of cleaning the surface of a material coated with an organic substance and a generator and device for carrying out said method |
| 09/20/2006 | EP1433194A4 Method and apparatus to produce ions and nanodrops from taylor cones of volatile liquids at reduced pressures |
| 09/20/2006 | CN1836059A 新型金属带产品 The new metal band Product |
| 09/20/2006 | CN1836058A 新型金属带产品 The new metal band Product |
| 09/20/2006 | CN1835205A Substrate mounting table, substrate processing apparatus and substrate processing method |
| 09/20/2006 | CN1835203A Substrate supporting member and substrate processing apparatus |
| 09/20/2006 | CN1834614A Artificial ablation testing machine for heat isolating material floor |
| 09/20/2006 | CN1276692C Controlled fusion in field reversed configuration and direct energy conversion |
| 09/19/2006 | US7109660 Plasma processing device and baffle plate thereof |
| 09/19/2006 | CA2132825C Process for coating a substrate with a material giving a polished effect |
| 09/14/2006 | WO2006094913A1 Method of operating a flow-through plasma device |
| 09/14/2006 | WO2005115065A3 A novel plasmatorch and its application in methods for conversion of matter |
| 09/14/2006 | US20060204672 Coated product and method of production thereof |
| 09/14/2006 | US20060201533 Cvd apparatus and method for cleaning cvd apparatus |
| 09/13/2006 | EP1701598A1 Method of operating a flow-through plasma device |
| 09/13/2006 | EP1701597A1 Plasma generating electrode, its manufacturing method, and plasma reactor |
| 09/13/2006 | EP1700515A2 Electrode for generating a dielectric barrier discharge plasma |
| 09/13/2006 | EP1488669B1 Atmospheric plasma surface treatment method and device for same |
| 09/13/2006 | EP1232676B1 Method and apparatus to facilitate restriking in an arc-furnace |
| 09/13/2006 | EP1123642B1 Plasma accelerator arrangement |
| 09/13/2006 | CN2817291Y Long-life plasma welding torch |
| 09/13/2006 | CN1833473A Plasma processing method and apparatus |
| 09/13/2006 | CN1833313A Device and method for surface treatment such as plasma treatment |
| 09/13/2006 | CN1833050A Method of manufacturing vacuum plasma treated workpieces and system for vacuum plasma treating workpieces |
| 09/13/2006 | CN1833045A Shielded ceramic thermal spray coating |
| 09/13/2006 | CN1832657A Vacuum plasma generator |
| 09/13/2006 | CN1832656A Plasma apparatus and apparatus for fabricating optical fiber preform by using the same |
| 09/13/2006 | CN1832655A Coaxial low-temp plasma material processor |
| 09/13/2006 | CN1832654A Lamp of supply high frequency plasma flame gas stream |
| 09/12/2006 | US7105208 Methods and processes utilizing microwave excitation |
| 09/12/2006 | US7105080 Digital, programmable unit with storage means for the operating programs |
| 09/12/2006 | US7104690 Diagnosing system for an x-ray source assembly |
| 09/12/2006 | US7104217 Plasma processing apparatus |
| 09/08/2006 | WO2006092985A1 Microwave plasma processing device |
| 09/07/2006 | US20060199459 Formation of a field reversed configuration for magnetic and electrostatic confinement of plasma |
| 09/07/2006 | US20060198965 Method and system for coating internal surfaces using reverse-flow cycling |
| 09/07/2006 | US20060198944 Feedback enhanced plasma spray tool |
| 09/07/2006 | US20060198484 Propulsion motor |
| 09/07/2006 | US20060198483 Magnetized plasma fusion reactor |
| 09/07/2006 | US20060196762 capable of simultaneously generating different states of plasma upon application of voltage between the pair of electrodes due to the different arrangement patterns of the through-holes in the conductive films; |
| 09/07/2006 | US20060196605 Method and apparatus for plasma processing |
| 09/07/2006 | US20060196483 Fuel vaporization systems for vaporizing liquid fuel |
| 09/07/2006 | US20060196425 Reflectors, substrate processing apparatuses and methods for the same |
| 09/07/2006 | US20060196424 Plasma generating electrode assembly |
| 09/06/2006 | EP1699274A1 Plasma discharger |
| 09/06/2006 | EP1699076A1 Plasma generator and plasma etching device |
| 09/06/2006 | EP1697962A1 Method of and arrangement for removing contaminants from a substrate surface using an atmospheric pressure glow plasma |
| 09/06/2006 | EP1697961A1 Method and apparatus for stabilizing a glow discharge plasma under atmospheric conditions |
| 09/06/2006 | CN2814892Y Negative pole structure capable of making controlled compensation to consuming part |
| 09/06/2006 | CN1828843A Dielectric etch method with high source and low bombardment plasma providing high etch rates |
| 09/06/2006 | CN1828825A Gas supply member and plasma processing apparatus |
| 09/06/2006 | CN1828274A Plasma processing method and apparatus, and method for measuring a density of fluorine in plasma |
| 09/06/2006 | CN1273626C Equipment for intensifying hydrogen reduction for metallic oxide |
| 09/06/2006 | CN1273423C Treatment of fluorocarbon feedstocks |
| 09/06/2006 | CN1273245C Process and device for treating molten metals by moving electric arc |
| 09/05/2006 | US7101458 Plasma processing method and apparatus |
| 09/05/2006 | US7100532 Plasma production device and method and RF driver circuit with adjustable duty cycle |
| 08/31/2006 | WO2006090037A1 Microwave plasma exciters |
| 08/31/2006 | WO2005038871A3 Monosilane or disilane derivatives and method for low temperature deposition of silicon-containing films using the same |
| 08/31/2006 | US20060194437 Use of pulsed grounding source in a plasma reactor |
| 08/31/2006 | US20060193996 Method for pecvd deposition of selected material films |
| 08/31/2006 | US20060193983 Apparatus and methods for plasma vapor deposition processes |
| 08/31/2006 | US20060193420 Method for cavitating fluids within a cavitation chamber using a hydraulically actuated driver |