H05H 1 - Generating plasma; Handling plasma

Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
11/2006
11/28/2006	US7141510 Plasma processing method
11/28/2006	US7141499 Apparatus and method for growth of a thin film
11/28/2006	US7141278 Thin film forming method
11/28/2006	US7141277 Self-generating inorganic passivation layers for polymer-layered silicate nanocomposites
11/23/2006	WO2006124968A2 A process for low temperature plasma deposition of an optical absorption layer and high speed optical annealing
11/23/2006	WO2006123526A1 Plasma treatment apparatus
11/23/2006	WO2006123524A1 Plasma generating apparatus and plasma treatment apparatus
11/23/2006	WO2006123258A2 Water purification and treatment device and method for desalting or purifying water
11/23/2006	US20060263540 Process for low temperature plasma deposition of an optical absorption layer and high speed optical annealing
11/23/2006	US20060263523 Positioning substrate; chemisorption; contacting cycles
11/23/2006	US20060260748 Plasma processing apparatus and method
11/22/2006	EP1725086A1 Plasma processing method and system therefor
11/22/2006	EP1224683B1 Method and apparatus for low voltage plasma doping using dual pulses
11/22/2006	EP1057205B1 Rf powered plasma enhanced chemical vapor deposition reactor and methods of effecting plasma enhanced chemical vapor deposition
11/22/2006	CN1867691A Method of spray plating
11/22/2006	CN1286350C Microwave plasma source and its producing method
11/22/2006	CN1286349C Plasma processing device and plasma processing method
11/22/2006	CN1285761C Injector and method for prolonged introduction of reagents into plasma
11/22/2006	CN1285758C Low contamination plasma chamber components and method for making same
11/21/2006	US7138180 Exposing surface to plasma comprising sulfur fluoride and converting the polymeric surface into a film comprising at least 90 atomic percent carbon; diamond-like hardness; useful for windows, medical implants, lenses, such as eyeglass lenses, and the like
11/21/2006	US7138034 Electrode member used in a plasma treating apparatus
11/21/2006	US7137353 Method and apparatus for an improved deposition shield in a plasma processing system
11/21/2006	US7137352 Plasma processing system in which wafer is retained by electrostatic chuck
11/16/2006	WO2006122256A2 Generating discrete gas jets in plasma arc torch applications
11/16/2006	WO2006120942A1 Plasma generating apparatus and plasma generating method
11/16/2006	WO2006120904A1 Surface wave excitation plasma processing system
11/16/2006	WO2006003374A8 Method and apparatus for heating a gas stream
11/16/2006	US20060257584 Atomic layer deposition method of depositing an oxide on a substrate
11/16/2006	US20060257566 Isotope-doped carbon nanotube and method and apparatus for forming the same
11/16/2006	US20060257562 wear and heat resistance; vapor deposition, lamination; for application to cutting tools
11/16/2006	US20060257558 Plasma polymerization of atomically modified surfaces
11/16/2006	US20060257280 Decontamination of fluids or objects contaminated with chemical or biological agents using a distributed plasma reactor
11/16/2006	US20060254521 Electron cyclotron resonance (ecr) plasma source having a linear plasma discharge opening
11/16/2006	US20060254517 Plasma booster for plasma treatment installation
11/16/2006	DE102005022174A1 Plasma acoustic transducer e.g. microphone, uses ionized oscillating air molecules for modulating voltage or producing sound waves
11/15/2006	EP1677972A4 Composite materials made from pretreated, adhesive coated beads
11/15/2006	EP1161855B1 An ion accelerator
11/15/2006	EP1068632B1 Contamination controlling method and plasma processing chamber
11/15/2006	CN1864449A Adaptively plasma source for generating uniform plasma
11/15/2006	CN1864448A Method for making infused composite
11/15/2006	CN1863429A Double hole type atmos glow discharge low-temp plasma source
11/15/2006	CN1863428A 等离子体激发系统 Plasma excitation system
11/15/2006	CN1863427A Plasma processing device and method
11/15/2006	CN1862252A X-ray human body safety check apparatus
11/14/2006	US7136141 Lithographic apparatus with debris suppression, and device manufacturing method
11/14/2006	US7135653 Multi-phase alternating current plasma generator
11/14/2006	US7135409 Plasma etching method for semiconductor device
11/09/2006	WO2006118813A1 Interchangeable plasma nozzle interface
11/09/2006	WO2006118161A1 Substrate treating apparatus and electrode
11/09/2006	WO2006118042A1 Surface wave excitation plasma generator and surface wave excitation plasma processing system
11/09/2006	WO2006116828A1 Apparatus and method for purification and disinfection of liquid, solid or gaseous substances
11/09/2006	WO2006073622A3 Low-pressure removal of photoresist and etch residue
11/09/2006	WO2006028551A3 Method and device for registration and immobilization
11/09/2006	WO2005098930A3 Process for producing semi-conductor coated substrate
11/09/2006	WO2005098083A3 Miniature microwave plasma torch application and method of use thereof
11/09/2006	US20060251828 Plasma film-forming method and plasma film-forming apparatus
11/09/2006	US20060251799 Forming the protected layer from magnesium oxide including substances or structures that enable creation of first and energy levels in an area of a forbidden band in a vicinity of a conduction band; heating or plasma discharge in O2 or H2; reduced black noise; maintainwd wall charge retention
11/09/2006	US20060249698 Debris collector for euv light generator
11/09/2006	US20060249481 Plasma processing method
11/09/2006	US20060249367 Plasma catalyst
11/09/2006	CA2603999A1 Apparatus and method for purification and disinfection of liquid, solid or gaseous substances
11/09/2006	CA2601769A1 Interchangeable plasma nozzle interface
11/08/2006	EP1203396B1 Method for etching a substrate using an inductively coupled plasma
11/08/2006	EP1028662A4 Method of plasma incision of matter with a specifically tuned radiofrequency electromagnetic field generator
11/08/2006	EP0796355A4 Apparatus for generating plasma by plasma-guided microwave power
11/08/2006	CN1859825A Atmospheric pressure discharge cold plasma generator based on double gas source
11/08/2006	CN1859824A Atmospheric pressure glow discharge control method and its circuit based on pulse density modulation
11/08/2006	CN1858298A Tunable plasma resonant cavity
11/07/2006	US7132996 Plasma production device and method and RF driver circuit
11/07/2006	US7132621 Plasma catalyst
11/07/2006	US7132620 Inductive thermal plasma torch
11/07/2006	US7132619 Plasma arc torch electrode
11/07/2006	US7132618 MERIE plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression
11/07/2006	US7132134 Staggered in-situ deposition and etching of a dielectric layer for HDP CVD
11/07/2006	US7132040 Matching unit for semiconductor plasma processing apparatus
11/07/2006	US7132039 Manufacturing apparatus and method for carbon nanotube
11/07/2006	US7131174 Ceramic electronic device and method of production of same
11/02/2006	WO2006114793A1 An improved plasma torch for use in a waste processing chamber
11/02/2006	WO2006114161A1 Improved plate-shaped carbon fibre composite material
11/02/2006	WO2005104634A3 Method and system for performing atomic layer deposition
11/02/2006	WO2005101926A3 Apparatus, system, and method for high flux, compact compton x-ray source
11/02/2006	US20060246291 Method for forming functional layers
11/02/2006	US20060244385 Pulsed plasma accelerator and method
11/02/2006	EP1718135A1 Plasma generator
11/02/2006	EP1716728A2 Plasma-generating device and method of treating a gaseous medium
11/02/2006	EP1716727A1 An apparatus for plasma treatment
11/02/2006	EP1716365A1 Device and method for destroying liquid, powder or gaseous waste using an inductively coupled plasma
11/02/2006	EP1277223B1 Electrode apparatus for a plasma reactor
11/02/2006	DE102005018926A1 Workpiece surface characterization method, for aircraft construction, involves determining light intensity in one spectral range as measure for concentration of material replaced from workpiece surface by impact of plasma beam
11/02/2006	CA2606013A1 An improved plasma torch for use in a waste processing chamber
11/01/2006	CN1857040A Plasma processing method and apparatus thereof
11/01/2006	CN1856859A Method and apparatus for preventing instabilities in radio-frequency plasma processing
11/01/2006	CN1856211A Plasma processing apparatus and method
11/01/2006	CN1283131C Multi-coil induction plasma torch for solid state power supply
11/01/2006	CN1282986C Enhanced resist strip in dielectric ethcher using downstream plasma
11/01/2006	CN1282692C Dielectric coated pole, plasma discharge processing apparatus and thin-film forming method
10/2006
10/31/2006	US7130379 Device and method for generating an x-ray point source by geometric confinement
10/31/2006	US7129656 Apparatus for magnetic and electrostatic confinement of plasma
10/31/2006	US7128805 Multiple elliptical ball plasma apparatus
10/26/2006	WO2006113737A2 Plasma arc torch providing angular shield flow injection

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