| Patents for H05H 1 - Generating plasma; Handling plasma (22,647) |
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| 08/22/2007 | CN2937841Y Microway plasma burner |
| 08/22/2007 | CN1333489C Plasma resonant cavity tunable waveguide device |
| 08/22/2007 | CN101023714A Plasma processing apparatus |
| 08/22/2007 | CN101023713A Plasma processing apparatus |
| 08/22/2007 | CN101022693A Cleaning method for substrate processing chamber, storage medium, and substrate processing chamber |
| 08/22/2007 | CN101022074A Differential feed dielectric barrier discharging low-temperature plasma device |
| 08/21/2007 | US7259623 RF generator with reduced size and weight |
| 08/21/2007 | US7259622 RF generator with phase controlled MOSFETs |
| 08/21/2007 | US7259378 Closed drift ion source |
| 08/21/2007 | US7258899 Selecting a porous substrate, selecting a precursor, wetting said surface of said porous substrate with precursor solution to coat said porous substrate, removing liquid solvent, introducing precursor coated porous substrate into plasma reaction chamber; evacuating |
| 08/21/2007 | CA2179655C Plasma torch having essentially symmetrical structure |
| 08/16/2007 | WO2007091672A1 Plasma treatment device, and plasma treatment method |
| 08/16/2007 | WO2007091435A1 Plasma treatment apparatus |
| 08/16/2007 | WO2007048993A3 Plasma abatement device |
| 08/16/2007 | WO2006070107A8 Device for gaseous plasma sterilization |
| 08/16/2007 | US20070190266 Water vapor passivation of a wall facing a plasma |
| 08/16/2007 | US20070190249 Material for chemical vapor deposition and thin film forming method |
| 08/16/2007 | DE102005018926B4 Verfahren und Plasmadüse zum Erzeugen eines mittels hochfrequenter Hochspannung erzeugten atmosphärischen Plasmastrahls umfassend eine Vorrichtung jeweils zur Charakterisierung einer Oberfläche eines Werkstückes A method and plasma nozzle for generating a high-frequency high voltage generated by means of atmospheric plasma jet comprising a device in each case for characterization of a surface of a workpiece |
| 08/15/2007 | EP1819208A2 Device and method for creating activated and/or ionised particles in a plasma |
| 08/15/2007 | EP1818534A1 Method and device for supercharging air in an internal combustion engine |
| 08/15/2007 | EP1276356B1 Apparatus for plasma processing |
| 08/15/2007 | EP1166323B1 Method and apparatus for compensating non-uniform wafer processing in plasma processing |
| 08/15/2007 | CN1332420C Preloaded plasma reactor device and its use |
| 08/15/2007 | CN1331789C Glass treating method and glass treating apparatus utilizing the same method |
| 08/15/2007 | CN101018444A Magnetic and electrostatic confinement of plasma in a field reversed configuration |
| 08/15/2007 | CN101017771A Gas supply apparatus, substrate processing apparatus and gas supply method |
| 08/15/2007 | CN101017769A Plasma processing apparatus and plasma processing method |
| 08/15/2007 | CN101016610A Hybrid plasma-cold spray method and apparatus |
| 08/14/2007 | US7255773 Plasma processing apparatus and evacuation ring |
| 08/14/2007 | US7255062 Pseudo surface microwave produced plasma shielding system |
| 08/14/2007 | CA2210130C Device for treating planar elements with a plasma jet |
| 08/09/2007 | WO2007089712A2 Composite diamond assembly |
| 08/09/2007 | WO2007089478A1 Hybrid electrode for a plasma arc torch and methods of manufacture thereof |
| 08/09/2007 | WO2007089061A1 Plasma generating apparatus |
| 08/09/2007 | WO2007088904A1 Microwave plasma processing apparatus |
| 08/09/2007 | WO2007088817A1 Light source device, substrate treating device, and substrate treating method |
| 08/09/2007 | WO2007087661A1 Method and device for the continuous plasma treatment of materials, in particular for the descaling of a metal strand |
| 08/09/2007 | US20070184210 chemical vapor deposition; atomic layer deposition; nitridation |
| 08/09/2007 | US20070184209 Coating method of material for inkjet printing |
| 08/09/2007 | US20070184208 Selecting a porous substrate, selecting a precursor, wetting said surface of said porous substrate with precursor solution to coat said porous substrate, removing liquid solvent, introducing precursor coated porous substrate into plasma reaction chamber; evacuating |
| 08/09/2007 | US20070182327 Manufacturing method of electrode for atmospheric pressure plasma, electrode structure, and atmospheric pressure plasma apparatus using the same |
| 08/09/2007 | US20070181868 Silicon electrode plate for plasma etching with superior durability |
| 08/09/2007 | US20070181146 Plasma cvd apparatus and dry cleaning method of the same |
| 08/08/2007 | EP1668966B1 Pulsed plasma accelerator and operating method thereof |
| 08/08/2007 | EP1643001A4 High velocity method for deposing diamond films from a gaseous phase in shf discharge plasma and device for carrying out said method |
| 08/08/2007 | EP1366647A4 Apparatus for generating low temperature plasma at atmospheric pressure |
| 08/08/2007 | CN101015038A Exposure equipment and exposure method |
| 08/08/2007 | CN101014223A Plasma generater |
| 08/08/2007 | CN101014222A Device for carrying out method of cleaning the surface of a material coated with an organic substance and a generator |
| 08/07/2007 | US7253117 Methods for use of pulsed voltage in a plasma reactor |
| 08/07/2007 | US7252744 Forming a thermal plasma tail flame with an electrical arc, generating a high temperature zone |
| 08/07/2007 | CA2351854C Plasma generator |
| 08/07/2007 | CA2306568C Deposition of coatings using an atmospheric pressure plasma jet |
| 08/02/2007 | WO2007086875A1 Work processing system and plasma generating apparatus |
| 08/02/2007 | WO2007086430A1 Plasma discharge reactor and plasma discharge generation method |
| 08/02/2007 | WO2007028184A3 Coupling device for a water vapour cutting device |
| 08/02/2007 | WO2007013875A3 A portable microwave plasma discharge unit |
| 08/02/2007 | WO2007006298A3 Device for producing an atmospheric pressure plasma |
| 08/02/2007 | US20070178249 Methods of forming metal layers using metal-organic chemical vapor deposition |
| 08/02/2007 | US20070178234 Method of cleaning surface of semiconductor substrate, method of manufacturing thin film, method of manufacturing semiconductor device, and semiconductor device |
| 08/02/2007 | US20070176562 Power supply circuit for plasma generation, plasma generating apparatus, plasma processing apparatus and plasma processed object |
| 08/02/2007 | US20070175750 Galvanic anode system for corrosion protection of steel and method for production thereof |
| 08/02/2007 | US20070175747 Plasma processing method and apparatus thereof |
| 08/02/2007 | DE10358329B4 Vorrichtung zur Erzeugung angeregter und/oder ionisierter Teilchen in einem Plasma und Verfahren zur Erzeugung ionisierter Teilchen An apparatus for generating excited and / or ionized particles in a plasma and method for generating ionized particles |
| 08/02/2007 | DE102006004040A1 Vorrichtung und Verfahren zur Erzeugung eines Plasmas Apparatus and method for generating a plasma |
| 08/01/2007 | EP0878115B1 Electrode for plasma generator the generator comprising same and process for treatment of solidifying liquid metal |
| 08/01/2007 | CN2930194Y Glow discharge low temperature plasma device |
| 08/01/2007 | CN1330219C RF plasma reactor and method for manufacturing the substrate |
| 08/01/2007 | CN1329962C Flat panel display manufacturing apparatus |
| 08/01/2007 | CN1329957C Surface processing device |
| 07/31/2007 | US7250370 Two step post-deposition treatment of ILD layer for a lower dielectric constant and improved mechanical properties |
| 07/31/2007 | US7250197 Plasma treatment of contact lens and IOL |
| 07/31/2007 | US7250196 Positioning a substrate within a vacuum chamber, positioning a depositant in a filament , reducing the pressure in the vacuum chamber, introducing a gas into the vacuum chamber at a rate to raise the pressure in the vacuum chamber, applying direct current, applying radio frequency signal, heating |
| 07/26/2007 | WO2007083867A1 Planar-type icp antenna for generating high density plasma |
| 07/26/2007 | WO2007083653A1 Plasma processing apparatus |
| 07/26/2007 | WO2007028183A3 Vapor plasma burner |
| 07/26/2007 | WO2007028182A3 Method for operation of a steam plasma burner and steam cutting device |
| 07/26/2007 | WO2007028180A3 Device for exchanging a nozzle of a vapor plasma burner and nozzle and guard ring |
| 07/26/2007 | US20070172666 RF plasma-enhanced deposition of fluorinated films |
| 07/26/2007 | US20070172602 Method of forming a plasma and use for decontamination by decomposition of toxic substances |
| 07/26/2007 | US20070172017 Formation of a field reversed configuration for magnetic and electrostatic confinement of plasma |
| 07/26/2007 | US20070172016 Nuclear Fusion Containment Complex and Systems Network for the Thermal Durational Enhancement of Contained Heat Processes |
| 07/26/2007 | US20070172015 Nuclear fusion containment complex and systems network for the thermal durational enhancement of contained heat processes |
| 07/26/2007 | US20070169698 Ring plasma jet method and apparatus for making an optical fiber preform |
| 07/25/2007 | EP1811545A1 Exposure equipment and exposure method |
| 07/25/2007 | EP1322892B1 System and method for decongesting a waste converting apparatus |
| 07/25/2007 | EP1322891B1 System and method for removing blockages in a waste converting apparatus |
| 07/25/2007 | CN2927603Y High-speed cold plasma array generator of atmosphere radio-frequency discharge |
| 07/25/2007 | CN1328755C Low contaminatino, high density plasma etch chamber and method for making the same |
| 07/25/2007 | CN1328751C Device for coating of objects |
| 07/25/2007 | CN101005727A Electrode for generating plasma and plasma processing apparatus using same |
| 07/25/2007 | CN101005031A Plasma processing apparatus and controlling method for plasma processing apparatus |
| 07/25/2007 | CN101005011A 等离子体处理装置 Plasma processing apparatus |
| 07/25/2007 | CN101005007A Plasma processing apparatus and plasma processing method |
| 07/24/2007 | US7248003 Electrostatic fluid accelerator for and method of controlling a fluid flow |
| 07/24/2007 | US7247993 Ion accelerator arrangement |
| 07/24/2007 | US7247992 Ion accelerator arrangement |
| 07/24/2007 | US7247340 Method of making a superconducting conductor |
| 07/24/2007 | US7247221 System and apparatus for control of sputter deposition process |
| 07/19/2007 | WO2007081202A1 Method and apparatus for controlled deposition of material by means of plasma on a three-dimensional substrate |