Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
01/2008
01/17/2008WO2002104085A3 A closed-drift hall effect plasma vacuum pump for process reactors
01/17/2008US20080014445 Chamberless Plasma Deposition of Coatings
01/17/2008US20080014371 Method of Producing a Coated Fishing Hook
01/17/2008US20080014369 Two Step Post-Deposition Treatment of ILD Layer for a Lower Dielectric Constant and Improved Mechanical Properties
01/17/2008US20080011424 Multi-station decoupled reactive ion etch chamber
01/17/2008US20080011422 Plasma Processing System And Apparatus And A Sample Processing Method
01/17/2008DE10215660B4 Hochfrequenz-Elektronenquelle, insbesondere Neutralisator High-frequency electron source, in particular neutralizer
01/17/2008DE102006031742A1 Blasting arm for producing air-ionizing focus, has ray generator, which generates main beam, with air ionization characteristics, or ray deflection system, where electronic controlled ray deflection element has multiple small moving mirrors
01/16/2008EP1878325A1 An improved plasma torch for use in a waste processing chamber
01/16/2008EP1878324A2 Plasma arc torch providing angular shield flow injection
01/16/2008EP1877354A1 Improved plate-shaped carbon fibre composite material
01/16/2008CN101107693A Magnetron control method, magnetron service life judgment method, microwave generation device, magnetron service life judgment device, processing device, computer program, and storage medium
01/16/2008CN101106074A Plasma etch reactor
01/16/2008CN100362624C Device for controlling D.C. bias on wafer
01/15/2008CA2355659C Electrostatic fluid accelerator
01/15/2008CA2299638C Plasma discharge truing apparatus and fine-machining methods using the apparatus
01/10/2008WO2008004528A1 Plasma abnormal discharge diagnosis method, plasma abnormal discharge diagnosis system, and computer program
01/10/2008WO2008004318A1 Method of microwave plasma treatment and apparatus therefor
01/10/2008US20080008844 Method for growing arrays of aligned nanostructures on surfaces
01/10/2008US20080008842 Method for plasma processing
01/10/2008US20080008841 Method For Increasing Surface Energy Of Low Energy Substrate Utilizing A Limited Length Corona Or Plasma Discharge Treatment To Improve Adherence Of A Subsequently Applied Secondary Coating Thereto
01/10/2008US20080006536 Processing cellulosic material utilizing atmospheric-pressure plasma
01/10/2008DE112006000320T5 Filmausbilde-Vorrichtung, Abgleichvorrichtung und Impedanz-Steuerungsverfahren Film forming apparatus, and impedance matching device control method
01/09/2008EP1875785A1 Interchangeable plasma nozzle interface
01/09/2008CN201004732Y A plasm generation device for blocking light discharge via an atmospherical pressure medium
01/09/2008CN201002169Y LGK type inversion plasma cutting power supply
01/09/2008CN201002015Y Conic tooth shaped medium-barrier discharge plasma chemical reactor
01/09/2008CN101102637A Method for plasma processing
01/08/2008US7317186 Short torch design for direct liquid sample introduction using conventional and micro-nebulizers for plasma spectrometry
01/08/2008US7316199 Method and apparatus for controlling the magnetic field intensity in a plasma enhanced semiconductor wafer processing chamber
01/03/2008WO2008001853A1 Plasma processing method and equipment
01/03/2008WO2008001809A1 Microwave plasma processing device
01/03/2008WO2008001723A1 Thin film forming apparatus and thin film forming method
01/03/2008WO2008000608A1 Method and furnace for melting steel scrap
01/03/2008WO2008000586A1 Method and device for introducing dust into a molten both of a pyrometallurgical installation
01/03/2008WO2007110060A3 Apparatus and use of the apparatus for measuring the density of a plasma
01/03/2008WO2007076280A3 Side-specific treatment of textiles using plasmas
01/03/2008US20080003358 Power loading substrates to reduce particle contamination
01/03/2008US20080002813 Apparatus system, and method for high flux, compact compton x-ray source
01/03/2008DE102006030801A1 Plasmaprozesssystem mit einer elektrostatischen Probenhalteanordnung und Verfahren zur Entkopplung einer DC-Spannungsquelle Plasma process system having an electrostatic sample holding arrangement and method for decoupling a DC-voltage source
01/03/2008DE102006028614A1 Flow surface unit e.g. spoiler, operating method for e.g. aircraft, involves generating electrical power pulses, supplying electrodes with power pulses, and producing plasma in gaseous medium that surrounds electrodes in electrodes
01/02/2008EP1874099A1 Plasma torch for overcladding an optical fiber
01/02/2008EP1872637A1 Plasma coating device and method
01/02/2008EP1503879A4 Plasma arc torch consumables cartridge
01/02/2008CN101099419A Surface wave excitation plasma processing system
01/02/2008CN101098582A Plasma torch for overcladding an optical fiber
01/02/2008CN100359647C Plasma processing method and post-processing method
01/02/2008CN100359087C Plasma treatment apparatus and method
01/01/2008US7314651 Film forming method and film forming device
12/2007
12/27/2007WO2007149945A2 Methods and apparatus for depositing a microcrystalline silicon film for photovoltaic device
12/27/2007WO2007148868A1 Induction concentration remote atmospheric pressure plasma generating apparatus
12/27/2007WO2007148690A1 Microwave introducing apparatus and plasma processing apparatus
12/27/2007WO2007148569A1 Plasma processing apparatus, plasma processing method and photoelectric conversion element
12/27/2007WO2007148470A1 Treating apparatus, method of treating and plasma source
12/27/2007WO2006012165A3 Plasma jet generating apparatus and method of use thereof
12/27/2007US20070298590 Methods and apparatus for depositing a microcrystalline silicon film for photovoltaic device
12/27/2007US20070298189 Plasma process for surface treatment of workpieces
12/27/2007US20070298187 Thermal Spraying Method and Device
12/27/2007US20070295701 Novel Plasmatorch and Its Application in Methods for Conversion of Matter
12/27/2007DE4409761B4 Einrichtung zur plasmagestützten Verdampfung in einem Bogenentladungsplasma Means for plasma-assisted evaporation in an arc discharge plasma
12/26/2007EP1608479A4 Vented shield system for a plasma arc torch
12/26/2007EP1297891B1 Apparatus for processing gases by plasma
12/26/2007CN200997721Y Automatic arc-voltage controlling system of digital controlled plasma cutter
12/26/2007CN200997720Y Plasma torch device for producing activated gas
12/26/2007CN101095379A Low-pressure removal of photoresist and etch residue
12/26/2007CN101094558A Electrical spray nozzle for slurry
12/26/2007CN101094557A Plasma control using dual cathode frequency mixing
12/26/2007CN101093801A Plasma doping apparatus
12/26/2007CN101091872A Cleaning plant for waste gas of plasma
12/26/2007CN101091871A Equipment for treating industrial waste gas of plasma in low temperature
12/26/2007CN100358198C Method for uniform glow discharge in atmosphere air
12/26/2007CN100358080C Gas distribution apparatus for semiconductor processing
12/25/2007US7312584 Plasma-generation power-supply device
12/25/2007US7311946 Carbiding, nitriding or metallization; vapor deposition of carbides, carbonitrides, nitrides or metal silicon nitrides or carbides from organometallic compounds in presence of adhesion promoter; forming copper film
12/25/2007US7311851 Apparatus and method for reactive atom plasma processing for material deposition
12/25/2007US7311797 Productivity enhancing thermal sprayed yttria-containing coating for plasma reactor
12/25/2007US7311796 Plasma processing apparatus
12/21/2007WO2007145229A1 Shower plate, method for manufacturing the shower plate, plasma processing apparatus using the shower plate, plasma processing method and electronic device manufacturing method
12/21/2007WO2007144061A1 Method and apparatus for generating a plasma and use of the same
12/20/2007US20070292630 Method And Apparatus For Heating A Gas Stream
12/20/2007US20070290620 Portable Microwave Plasma Systems Including A Supply Line For Gas And Microwave
12/20/2007DE102006027853A1 Verfahren und Vorrichtung zum Erzeugen eines Plasmas sowie Verwendung derselben Method and apparatus for generating a plasma, and using the same
12/19/2007EP1867221A2 Apparatus and process for generating, accelerating and propagating beams of electrons and plasma
12/19/2007EP1867220A1 Method and device for generating a thermal flux loaded with particles
12/19/2007EP1867219A2 Arrangement for monitoring thermal spray processes
12/19/2007EP1866947A1 Termination of secondary frequencies in rf power delivery
12/19/2007EP1866140A1 Device for treating surface of a polymolecular formed product
12/19/2007CN200991805Y Air plasma cutting machine
12/19/2007CN200991804Y Super portable interference-free arc-striking air plasma cutting machine
12/19/2007CN101091420A Surface wave excitation plasma generator and surface wave excitation plasma processing system
12/19/2007CN101090598A Plasma processing apparatus and plasma processing method
12/19/2007CN101090597A Method for determining plasma characteristics
12/19/2007CN101090259A High AC current high RF power ac-rf decoupling filter for plasma reactor heated electrostatic chuck
12/19/2007CN101090071A 等离子体掺杂方法 Plasma doping method
12/19/2007CN101090070A 等离子体掺杂方法 Plasma doping method
12/19/2007CN101090069A 等离子体掺杂方法 Plasma doping method
12/19/2007CN101090068A 等离子体掺杂方法 Plasma doping method
12/19/2007CN100356164C Dielectric barrier discharge atomizing/ionizing method and apparatus therefor
12/18/2007US7309843 Plasma-assisted joining
12/13/2007WO2007143301A2 Controlled zone microwave plasma system
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