Patents for H05H 1 - Generating plasma; Handling plasma (22,647)
06/2007
06/26/2007US7235162 Cathode for vacuum sputtering treatment machine
06/26/2007US7234413 Plasma processing apparatus
06/21/2007WO2006002258A3 High velocity thermal spray apparatus
06/21/2007US20070141274 Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatus
06/21/2007US20070141273 Method of forming organosilicon oxide film and multilayer resist structure
06/21/2007US20070141270 Heterogeneous composite bodies with isolated lenticular shapped cermet regions
06/21/2007US20070140401 Producing a design for a nuclear fuel element
06/21/2007US20070140400 Cold fusion apparatus
06/21/2007US20070137572 Plasma processing apparatus
06/21/2007US20070137569 Electrode assembly for a non-equilibrium plasma treatment
06/20/2007EP1798397A1 Laser ignition system
06/20/2007EP1797747A2 Plasma torch
06/20/2007EP1797746A2 Microwave plasma apparatus with vorticular gas flow
06/20/2007EP1797212A1 Deposition system, method and materials for composite coatings
06/20/2007EP1618767B1 Apparatus and method for forming a plasma
06/20/2007EP1437035A4 Antenna structure for inductively coupled plasma generator
06/20/2007CN2914323Y Air-feeding system of cold plasma shower
06/20/2007CN1984523A Plasma processing apparatus and method
06/20/2007CN1983518A Plasma processing apparatus and method
06/20/2007CN1983459A First wall component with ring segment
06/20/2007CN1981876A Plasma surface processor of multi-capacity coupled radio-frequency
06/20/2007CN1322793C Surface wave plasma treatment apparatus using multi-slot antenna
06/20/2007CN1322559C Plasma processor
06/20/2007CN1322556C Work treating method and treating device
06/20/2007CN1322539C Wafer area pressure control for plasma confinement and method, device
06/19/2007US7232985 Controlled fusion in a field reversed configuration and direct energy conversion
06/19/2007US7232975 Plasma generators, reactor systems and related methods
06/19/2007US7232767 Slotted electrostatic shield modification for improved etch and CVD process uniformity
06/19/2007US7232591 Method of using an adhesive for temperature control during plasma processing
06/14/2007WO2007067086A1 Plasma processing device
06/14/2007WO2007066606A1 Plasma film deposition equipment
06/14/2007WO2007066574A1 Sheet plasma film forming apparatus
06/14/2007WO2007066548A1 Sheet plasma film-forming apparatus
06/14/2007WO2006134123A3 Method and device for producing large atmospheric pressure plasmas
06/14/2007US20070134436 Method for forming a superhard amorphous carbon coating in vacuum
06/14/2007US20070134417 decomposing the precursor of indium, and chemical vapor depositing iridium on the substrate in an oxidizing ambient environment which contain an oxidizing gas such as oxygen, ozone, air, and nitrogen oxide; precursors include Lewis base stabilized Ir(I) beta -diketonates
06/14/2007US20070134414 Surface-treatment method and equipment
06/14/2007US20070131170 Plasma CVD apparatus, and method for forming film and method for forming semiconductor device using the same
06/13/2007EP1796442A1 Plasma processing system
06/13/2007EP1794600A1 Probe for measuring characteristics of an excitation current of a plasma, and associated plasma reactor
06/13/2007EP1435106B1 Lifting and supporting device
06/13/2007EP1374277B1 Inductive plasma processor including current sensor for plasma excitation coil
06/13/2007CN2912017Y Large aperture plasma electrode pockels case
06/13/2007CN1981061A Gas-tight electrode for carbothermic reduction furnace
06/13/2007CN1321548C Touch glow-discharge plasma generating apparatus
06/12/2007US7229675 Protective coating method for pieces made of heat resistant alloys
06/07/2007WO2007064066A1 Apparatus for converting gas using gliding plasma
06/07/2007WO2007063987A1 Method for processing/washing with ultra-pure water plasma foams and apparatus for the method
06/07/2007WO2007063708A1 Plasma treatment device
06/07/2007WO2007062605A1 Plasma source
06/07/2007US20070128865 Method of forming insulating film, method of manufacturing semiconductor device and their controlling computer program
06/07/2007US20070128455 Highly stable surface plasmon resonance plates, microarrays, and methods
06/07/2007US20070128441 Process for the production of strongly adherent coatings
06/07/2007US20070128375 Method and device for continuously treating the surface of an elongate object
06/07/2007CA2664957A1 Apparatus for converting gas using gliding plasma
06/06/2007EP1552727A4 Inductively coupled plasma generator having lower aspect ratio
06/06/2007CN2909782Y Atmosphere glow discharge circuitof regulating pulse density
06/06/2007CN1977110A Vacuum pumping circuit and machine for treating containers equipped with same
06/06/2007CN1973991A Synchronous gas-liquid purifying high voltage DC/pulse discharge method and device
06/06/2007CN1320596C 感应耦合等离子体处理装置 Inductively coupled plasma processing apparatus
06/05/2007US7227097 Plasma generation and processing with multiple radiation sources
06/05/2007US7226643 Thermal pyrolysising chemical vapor deposition method for synthesizing nano-carbon material
06/05/2007US7226524 Plasma processing apparatus
06/05/2007US7225754 Plasma processing apparatus including a plurality of plasma processing units having reduced variation
06/05/2007US7225740 Electromagnetic pulse transmitting system and method
05/2007
05/31/2007WO2007062311A2 Laser treatment of metal
05/31/2007WO2007061879A1 Inductively-coupled rf power source
05/31/2007WO2007061633A2 Method and system for performing plasma enhanced atomic layer deposition
05/31/2007WO2007060867A1 Microwave introduction device
05/31/2007WO2007028184A8 Coupling device for a water vapour cutting device
05/31/2007WO2005070167A3 Nanoscale electric lithography
05/31/2007US20070123005 Film formation apparatus, method for forming film, and method for manufacturing photoelectric conversion device
05/31/2007US20070122562 Solid-free-form fabrication process and apparatus including in-process workpiece cooling
05/31/2007US20070122548 Lapping tool and method for manufacturing the same
05/31/2007US20070121267 High-frequency power supply system
05/31/2007US20070119828 Plasma generating electrode, its manufacturing method, and plasma reactor
05/31/2007US20070119376 Matching device and plasma processing apparatus
05/31/2007DE102005056726A1 Verfahren zur oxidativen Behandlung von Gasinhaltsstoffen, das nach dem Prinzip der nichtthermischen, plasmachemischen Umsetzung arbeitet A process for the oxidative treatment of gas constituents and operating according to the principle of the non-thermal plasma chemical reaction
05/30/2007EP1791402A2 Plasma lineation electrode
05/30/2007EP1790201A2 Plasma nozzle array for providing uniform scalable microwave plasma generation
05/30/2007EP1214732B1 Semiconductor processing equipment having radiant heated ceramic liner
05/30/2007EP1212777B1 Ion beam vacuum sputtering apparatus and method
05/30/2007EP1073779A4 Reduced impedance chamber
05/30/2007CN2907173Y Large-area parallel connected high density inductively coupled plasma source
05/30/2007CN1973364A 多频等离子体刻蚀反应器 Multi-frequency plasma etch reactor
05/30/2007CN1973338A Systems and methods for plasma containment
05/30/2007CN1973060A Machine for the treatment of bottles that are equipped with an interchangeable connection cartridge
05/30/2007CN1972552A Plasma processing apparatus
05/29/2007USRE39657 Sterilization by low energy electron beam
05/29/2007US7223699 Plasma etch reactor and method
05/29/2007US7223449 Film deposition method
05/29/2007US7223448 Methods for providing uniformity in plasma-assisted material processes
05/29/2007US7223446 Plasma CVD apparatus and dry cleaning method of the same
05/24/2007WO2007027347A3 Contact start plasma torch and method of operation
05/24/2007US20070118211 Method for preparing drug eluting medical devices and devices obtained therefrom
05/24/2007US20070116986 Method for depositing zinc oxide at low temperatures and products formed thereby
05/24/2007US20070116891 Plasma brush apparatus and method
05/24/2007US20070116890 Method for coating turbine engine components with rhenium alloys using high velocity-low temperature spray process
05/24/2007US20070116889 Laser treatment of metal
05/24/2007US20070116888 Method and system for performing different deposition processes within a single chamber