| Patents for H02N 13 - Clutches or holding devices using electrostatic attraction, e.g. using johnson-rahbek effect (1,323) |
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| 02/13/2003 | US20030030960 Semiconductor wafer processing apparatus and method |
| 02/13/2003 | US20030029572 Semiconductor wafer processing apparatus and method |
| 01/09/2003 | WO2003003449A2 Ceramic electrostatic chuck and method of fabricating same |
| 01/09/2003 | WO2003003448A2 High temperature electrostatic chuck |
| 01/08/2003 | CN1390379A Bead or particle manipulating chucks |
| 01/07/2003 | US6504641 Driver and method of operating a micro-electromechanical system device |
| 01/03/2003 | WO2003001658A1 Controlled resistivity boron nitride electrostatic chuck apparatus for retaining a semiconductor wafer and method of fabricating the same |
| 01/02/2003 | US20030003749 High temperature electrostatic chuck |
| 01/02/2003 | EP1138111B1 Electrostatic maintaining device |
| 01/02/2003 | EP1070381B1 Electrostatic wafer clamp having low particulate contamination of wafers |
| 12/31/2002 | US6501636 Electrostatic clamp for holding workpieces with irregular surfaces |
| 12/31/2002 | US6500265 Apparatus for electrostatically maintaining subtrate flatness |
| 12/27/2002 | WO2002047120A3 Cooling gas delivery system for a rotatable semiconductor substrate support assembly |
| 12/26/2002 | US20020196596 Controlled resistivity boron nitride electrostatic chuck apparatus for retaining a semiconductor wafer and method of fabricating the same |
| 12/19/2002 | WO2002101807A1 Electrostatic interaction systems and methods thereof |
| 12/18/2002 | CN1385358A Application of fixator for preventing outer-plane movement of minimal resolution memory actuator |
| 12/17/2002 | US6496350 Electrostatic wafer chucks and charged-particle-beam exposure apparatus comprising same |
| 12/12/2002 | US20020187618 Electrostatic interaction systems and methods thereof |
| 12/12/2002 | DE10201863A1 Waferraumhaltevorrichtung, die auf einer elektrostatischen Aufnahmevorrichtung installiert ist und Verfahren zur Herstellung derselben Wafer space holding device that is installed on an electrostatic recording apparatus and method for manufacturing the same |
| 12/10/2002 | US6491571 Substrate for use in wafer attracting apparatus and manufacturing method thereof |
| 12/05/2002 | US20020181184 Wafer space supporting apparatus installed on electrostatic chuck and method for fabricating the same |
| 12/03/2002 | US6490144 Support for supporting a substrate in a process chamber |
| 12/03/2002 | US6488820 Method and apparatus for reducing migration of conductive material on a component |
| 11/28/2002 | US20020176219 Electrostatic chuck |
| 11/26/2002 | US6487063 Electrostatic wafer chuck, and charged-particle-beam microlithography apparatus and methods comprising same |
| 11/21/2002 | US20020171326 Use of standoffs to protect atomic resolution storage mover for out-of-plane motion |
| 11/20/2002 | EP1258979A2 Actuators with micro-movers |
| 11/19/2002 | US6483690 Ceramic electrostatic chuck assembly and method of making |
| 11/14/2002 | WO2002091458A1 Method of producing electrostatic chucks and method of producing ceramic heaters |
| 11/14/2002 | US20020167780 Electrostatic sensing chuck using area matched electrodes |
| 11/12/2002 | US6479410 Processing method for object to be processed including a pre-coating step to seal fluorine |
| 11/05/2002 | US6475351 AC waveforms biasing for bead manipulating chucks |
| 10/31/2002 | US20020159217 Electrostatic chuck and substrate processing apparatus |
| 10/09/2002 | EP1246589A2 Skin-gripper |
| 10/08/2002 | US6462928 Electrostatic chuck having improved electrical connector and method |
| 10/03/2002 | US20020141134 Electrostatic wafer clamp |
| 10/03/2002 | US20020141132 Electrostatic chuck apparatus and method for efficiently dechucking a substrate therefrom |
| 10/03/2002 | US20020139473 Electrostatic chuck having bonded structure and method of manufacturing the same |
| 10/03/2002 | US20020139307 Cooling gas delivery system for a rotatable semiconductor substrate support assembly |
| 10/02/2002 | EP1244821A1 Articles coated with aluminum nitride by chemical vapor deposition |
| 09/26/2002 | US20020135968 Wafer chuck system |
| 09/17/2002 | US6452775 Electrostatic chuck and method for manufacturing the same |
| 09/12/2002 | US20020126437 Electrostatic chuck system and method for maintaining the same |
| 09/10/2002 | CA2251586C Electrostatic chucks |
| 08/29/2002 | WO2001043184A9 Electrostatic chucks with flat film electrode |
| 08/27/2002 | US6440486 Method of depositing particles with an electrostatic chuck |
| 08/21/2002 | CN1365518A Electrostatic chuck and treating device |
| 08/15/2002 | US20020109954 Electrostatic chucks and process for producing the same |
| 08/08/2002 | WO2002060711A1 Method for controlling a polyphase and reversible rotating electrical machine for heat-engine motor vehicle |
| 07/23/2002 | US6423400 Electrostatic chucks formed by lamination of aluminum nitride with high melting metals and an adhesive layer, for coating silicon wafers; corrosion resistance |
| 07/18/2002 | US20020093722 Driver and method of operating a micro-electromechanical system device |
| 07/18/2002 | US20020093251 Actuator with a flexure arrangement to accommodate a long range of motion |
| 07/17/2002 | EP1223664A2 Actuator with a flexure arrangement to accomodate a long range of motion |
| 06/27/2002 | US20020082668 Skin-gripper |
| 06/25/2002 | US6410172 Articles coated with aluminum nitride by chemical vapor deposition |
| 06/20/2002 | WO2002049200A1 Electrostatic device for holding an electronic component wafer |
| 06/13/2002 | WO2002047120A2 Cooling gas delivery system for a rotatable semiconductor substrate support assembly |
| 06/06/2002 | US20020067585 Electrostatic wafer chucks and charged-particle-beam exposure apparatus comprising same |
| 06/06/2002 | US20020066531 Manufactured by charging to heated dryer surface at same time but from separate sources organic polymer having amine groups in backbone and sufficient amount of zirconium compound having valence of plus four to crosslink polymer to fibrous web |
| 06/05/2002 | EP1210760A1 Bead or particle manipulating chucks |
| 06/04/2002 | US6399143 Method for clamping and electrostatically coating a substrate |
| 05/14/2002 | US6388861 Electrostatic wafer clamp |
| 04/23/2002 | US6377060 Method and apparatus for wafer detection |
| 04/18/2002 | US20020044404 Electrostatic chuck |
| 04/17/2002 | EP0876608B1 Process and device for generating resonance phenomena in particle suspensions |
| 04/16/2002 | US6373679 Electrostatic or mechanical chuck assembly conferring improved temperature uniformity onto workpieces held thereby, workpiece processing technology and/or apparatus containing the same, and method(s) for holding and/or processing a workpiece with the same |
| 04/09/2002 | US6370006 Electrostatic chuck having a plurality of gas inlet channels |
| 04/09/2002 | US6370005 Electrostatic sensing chuck using area matched electrodes |
| 04/09/2002 | US6370004 Electrostatic chuck |
| 03/27/2002 | EP1191581A1 Electrostatic chuck and treating device |
| 03/26/2002 | US6361645 Method and device for compensating wafer bias in a plasma processing chamber |
| 03/14/2002 | US20020030960 Automatic discharge apparatus for residual charge on an electrostatic chuck |
| 03/12/2002 | USRE37580 Guard ring electrostatic chuck |
| 03/07/2002 | WO2001096219A3 Electro-adhesion device |
| 03/07/2002 | US20020027762 Electrostatic chuck |
| 02/26/2002 | US6351367 Electrostatic holding apparatus having insulating layer with enables easy attachment and detachment of semiconductor object |
| 02/21/2002 | US20020021545 Electrostatic chucking device and manufacturing method thereof |
| 02/20/2002 | EP1180793A2 Electrostatic chuck and manufacturing method thereof |
| 02/07/2002 | US20020015275 AC waveforms biasing for bead manipulating chucks |
| 02/06/2002 | EP1178597A1 Electrostatic devices for mechanical blocking |
| 02/05/2002 | USRE37541 Electrostatic chuck with reference electrode |
| 01/24/2002 | WO2002007212A1 Holding device for treated body |
| 01/24/2002 | US20020008015 Multilayer; uniform adhesion |
| 01/17/2002 | US20020006724 Composite friction elements for brakes and clutches; uniform array of predominately glass strands of reinforcing fibers, in a matrix of phenolic resin material |
| 01/09/2002 | CN1330806A Electrostatic sensing chuck using area matched electrodes |
| 01/03/2002 | US20020000521 Method and apparatus for conditioning an electrostatic chuck |
| 12/27/2001 | US20010055190 Electrostatic chuck |
| 12/27/2001 | US20010055189 Electrostatic chucking system, and apparatus and method of manufacturing a semiconductor device using the electrostatic chucking system |
| 12/27/2001 | US20010054389 Electro-static chucking mechanism and surface processing apparatus |
| 12/20/2001 | WO2001096219A2 Electro-adhesion device |
| 12/20/2001 | US20010052319 Plasma processing apparatus and plasma processing method |
| 12/13/2001 | WO2001043184A3 Electrostatic chucks with flat film electrode |
| 11/29/2001 | US20010046112 Monocrystalline ceramic electrostatic chuck |
| 11/22/2001 | WO2001032121A3 Skin-gripper |
| 11/22/2001 | US20010043452 Electrostatic chucks with flat film electrode |
| 11/20/2001 | US6320737 Electrostatic chucking device |
| 10/24/2001 | EP1148541A1 Method and apparatus for conditioning an electrostatic chuck |
| 10/24/2001 | EP0699606B1 Electrostatic levitation conveyor and electrostatic levitation electrodes thereof |
| 10/23/2001 | US6307728 Method and apparatus for dechucking a workpiece from an electrostatic chuck |
| 10/16/2001 | US6304424 Method and apparatus for minimizing plasma destabilization within a semiconductor wafer processing system |