| Patents for H02N 13 - Clutches or holding devices using electrostatic attraction, e.g. using johnson-rahbek effect (1,323) |
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| 02/09/1989 | WO1989001259A1 Micropositioner systems and methods |
| 01/04/1989 | EP0297227A2 Machine unit having retaining device using static electricity |
| 12/14/1988 | EP0294556A2 Electrostatic holding apparatus |
| 12/06/1988 | US4789803 Micropositioner systems and methods |
| 06/14/1988 | US4751609 Electrostatic holding apparatus |
| 09/08/1987 | US4692836 Electrostatic chucks |
| 08/18/1987 | US4688141 Device for electrostatically suspending a body or sample |
| 01/29/1986 | EP0169762A1 Device for electrostatically suspending a body or sample |
| 06/04/1985 | US4521854 Closed loop electrostatic levitation system |
| 05/28/1985 | US4520421 Specimen supporting device |
| 10/25/1983 | US4412133 Electrostatic cassette |
| 07/19/1983 | US4393967 Semiconductors |
| 06/14/1983 | CA1148101A1 Electrostatic clutch |
| 05/24/1983 | US4384918 Method and apparatus for dry etching and electrostatic chucking device used therein |
| 03/09/1983 | EP0073439A2 Device for holding sheet-like objects, in particular a drawing board or registration pad |
| 04/14/1982 | EP0049588A2 Method and apparatus for dry etching and electrostatic chucking device used therein |
| 05/20/1981 | EP0028707A1 Electrostatic clutch |
| 03/17/1981 | US4257083 Process for preserving pastel works of art |
| 02/06/1980 | EP0007918A1 Substrate clamping techniques in ic fabrication processes |
| 01/15/1980 | US4184188 Substrate clamping technique in IC fabrication processes |
| 08/09/1979 | WO1979000510A1 Substrate clamping techniques in ic fabrication processes |
| 04/05/1977 | US4016456 Multielectrode grid for aligning polarized particles such as asbestos |
| 11/23/1976 | US3993509 Semiconductor device manufacture |