| Patents for H02N 13 - Clutches or holding devices using electrostatic attraction, e.g. using johnson-rahbek effect (1,323) |
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| 04/07/2004 | CN1487360A Chuck, photoetching apparatus and components producing method |
| 04/01/2004 | US20040060172 Electrostatic gripper and process for producing it |
| 03/24/2004 | EP1399964A2 Ceramic electrostatic chuck and method of fabricating same |
| 03/24/2004 | EP1399963A2 High temperature electrostatic chuck |
| 03/18/2004 | US20040051992 Disc drive slider with protruding electrostatic actuator electrode |
| 03/04/2004 | US20040040665 Electrostatic chuck device |
| 03/04/2004 | DE19758730B4 Electrostatic chuck for manufacturing pharmaceutical products e.g. tablets, inhaler substrate |
| 02/25/2004 | CN1139975C Operating method and device of base plate and sticking checking method and device used thereof |
| 02/10/2004 | US6689984 Susceptor with built-in electrode and manufacturing method therefor |
| 02/10/2004 | US6689249 Shield or ring surrounding semiconductor workpiece in plasma chamber |
| 02/10/2004 | US6689221 Cooling gas delivery system for a rotatable semiconductor substrate support assembly |
| 02/05/2004 | DE10232080A1 Elektrostatischer Greifer und Verfahren zu dessen Herstellung An electrostatic gripper and process for its preparation |
| 02/04/2004 | EP1387392A2 Electrostatic gripper and method of producing the same |
| 02/04/2004 | CN1472037A Cling table and basement machining apparatus |
| 02/03/2004 | US6687113 Electrostatic chuck |
| 02/03/2004 | US6684994 Electrostatic devices for mechanical blocking |
| 01/28/2004 | EP1385056A2 Method and apparatus for reducing thermal stress in a wafer |
| 01/22/2004 | US20040012767 Chuck, lithographic projection apparatus, method of manufacturing a chuck and device manufacturing method |
| 01/02/2004 | EP1376682A1 Methods and apparatuses for clamping and declamping a semiconductor wafer in a wafer processing system |
| 12/30/2003 | US6670038 Method of depositing particles with an electrostatic chuck |
| 12/30/2003 | US6669783 High temperature electrostatic chuck |
| 12/24/2003 | WO2003003449A3 Ceramic electrostatic chuck and method of fabricating same |
| 12/17/2003 | EP0907964B1 Methods and apparatuses for clamping and declamping a semiconductor wafer in a wafer processing system |
| 12/16/2003 | US6665168 Electrostatic chuck apparatus and method for efficiently dechucking a substrate therefrom |
| 12/04/2003 | WO2003100849A1 Semiconductor processor |
| 12/04/2003 | US20030222416 Electrostatic chucking stage and substrate processing apparatus |
| 12/02/2003 | US6657359 Method of driving an electrostatic actuator with spatially-alternating voltage patterns |
| 11/19/2003 | CN1456933A Sucker, photoetching projective apparatus, method for producing sucker and component producing method |
| 11/18/2003 | US6648976 Apparatus and method for plasma processing |
| 11/05/2003 | EP1359466A1 Chuck, lithographic projection apparatus, method of manufacturing a chuck and device manufacturing method |
| 11/04/2003 | US6643115 Electrostatic chuck |
| 10/29/2003 | EP1355795A1 Method for controlling a polyphase and reversible rotating electrical machine for heat-engine motor vehicle |
| 10/28/2003 | US6639783 Multi-layer ceramic electrostatic chuck with integrated channel |
| 10/28/2003 | CA2183709C Electrostatic chuck member and a method of producing the same |
| 10/23/2003 | US20030196599 Apparatus for clamping a planar substrate |
| 10/22/2003 | CN1125531C Electrostatic chuck assembly |
| 10/21/2003 | US6636413 Electrostatic chucks and process for producing the same |
| 10/14/2003 | US6632512 Ceramic substrate |
| 10/07/2003 | US6631062 Electrically conductive ceramic material, a process of producing same, and an electrostatic chuck |
| 10/02/2003 | US20030184731 Electro adhesion device |
| 10/02/2003 | US20030183335 Methods and apparatus for determining an etch endpoint in a plasma processing system |
| 10/01/2003 | CN1446395A Electro-adhesion device |
| 09/25/2003 | US20030180459 Plasma vapor deposition; precoating with dielectric after cleaning |
| 09/23/2003 | US6625003 Method and apparatus for balancing an electrostatic force produced by an electrostatic chuck |
| 09/18/2003 | US20030176079 Periodic clamping method and apparatus to reduce thermal stress in a wafer |
| 09/17/2003 | CN1121261C AC waveform biasing for bead manipulating chucks |
| 09/11/2003 | US20030169553 High temperature DC chucking and RF biasing cable with high voltage isolation for biasable electrostatic chuck applications |
| 09/10/2003 | EP1342311A1 Electrostatic device for holding an electronic component wafer |
| 09/04/2003 | WO2003073495A1 Method of carrying substrate |
| 09/04/2003 | US20030165044 Electrostatic chuck and method of treating substrate using electrostatic chuck |
| 09/04/2003 | US20030165043 Hybrid ceramic electrostatic clamp |
| 08/28/2003 | US20030161088 Electrostatic chuck for holding wafer |
| 08/27/2003 | CN1439173A Methods and apparatus for determining an etch endpoint in a plasma processing system |
| 08/26/2003 | US6611417 Wafer chuck system |
| 08/20/2003 | CN1437764A Holding device for treated body |
| 08/19/2003 | US6608746 Automatic discharge apparatus for residual charge on an electrostatic chuck |
| 08/05/2003 | US6603651 Electrostatic chuck |
| 07/31/2003 | US20030142456 Nanoscale grasping device, method for fabricating the same, and method for operating the same |
| 07/15/2003 | US6592671 Apparatus for clamping a planar substrate |
| 07/08/2003 | US6590760 Joint structure of ceramics and metal and intermediate insertion member used in this joint structure |
| 07/03/2003 | US20030123213 Electrostatic chuck and manufacturing method therefor |
| 06/12/2003 | WO2003049180A1 Electrostatic clampless holder module and cooling system |
| 06/12/2003 | US20030106647 Apparatus for holding an object to be processed |
| 06/05/2003 | US20030104186 Ceramic substrate |
| 06/05/2003 | US20030102772 Use of standoffs to protect atomic resolution storage mover for out-of-plane motion |
| 06/03/2003 | US6572814 Method of fabricating a semiconductor wafer support chuck apparatus having small diameter gas distribution ports for distributing a heat transfer gas |
| 05/21/2003 | EP1210760A4 Bead or particle manipulating chucks |
| 05/21/2003 | EP1121752A4 Electrostatic sensing chuck using area matched electrodes |
| 05/20/2003 | US6567257 Method and apparatus for conditioning an electrostatic chuck |
| 05/15/2003 | WO2003039759A1 Immobilizing device |
| 05/15/2003 | US20030090070 Chucking apparatus and production method for the same |
| 05/15/2003 | US20030089687 Susceptor with built-in electrode and manufacturing method therefor |
| 05/13/2003 | US6562187 Methods and apparatus for determining an etch endpoint in a plasma processing system |
| 05/08/2003 | WO2003003448A3 High temperature electrostatic chuck |
| 05/08/2003 | US20030087023 Method of depositing particles with an electrostatic chuck |
| 05/06/2003 | US6557248 Method of fabricating an electrostatic chuck |
| 04/17/2003 | US20030072122 Method and apparatus for holding a substrate |
| 04/17/2003 | US20030070616 Comprising tetraalkylammonium F(HF)x salts and a nitrile solvent, wherein alkyl groups are of 1-4 carbon atoms; useful in short term, high energy applications such as electric vehicles or cellular communication |
| 04/16/2003 | CN1411026A Method and device for clamping substrate |
| 04/15/2003 | US6549393 Semiconductor wafer processing apparatus and method |
| 04/10/2003 | US20030067734 Methods for electrostatically chucking an object to an electrostatic chuck that reduce uncorrectable placement error of the object |
| 04/10/2003 | US20030066587 Susceptor for semiconductor manufacturing equipment and process for producing the same |
| 04/09/2003 | CN1409871A Electrostatic chuck with flat film electrode |
| 04/08/2003 | CA2264317C Susceptor for semiconductor manufacturing equipment and process for producing the same |
| 04/02/2003 | EP1298720A1 Method and apparatus for holding a substrate |
| 04/01/2003 | US6541892 Actuator with a flexure arrangement to accommodate a long range of motion |
| 03/27/2003 | US20030057803 Use of standoffs to protect atomic resolution storage mover for out-of-plane motion |
| 03/26/2003 | EP1295385A2 Electro-adhesion device |
| 03/20/2003 | WO2003023828A1 Guard heater and pressure chamber assembly including the same |
| 03/20/2003 | US20030053283 Method and apparatus for balancing an electrostatic force produced by an electrostatic chuck |
| 03/18/2003 | US6535372 Controlled resistivity boron nitride electrostatic chuck apparatus for retaining a semiconductor wafer and method of fabricating the same |
| 03/13/2003 | US20030047551 Guard heater and pressure chamber assembly including the same |
| 03/12/2003 | EP1291903A2 Workpiece holder for processing apparatus, and processing apparatus using the same |
| 03/04/2003 | US6529362 Monocrystalline ceramic electrostatic chuck |
| 02/27/2003 | US20030038482 Method for controlling a polyphase and reversible rotating electrical machine for heat engine motor vehicle |
| 02/27/2003 | US20030038114 System and method for dechucking a workpiece from an electrostatic chuck |
| 02/26/2003 | EP0890189B1 Dynamic feedback electrostatic wafer chuck |
| 02/26/2003 | EP0880818B1 Low voltage electrostatic clamp for substrates such as dielectric substrates |
| 02/18/2003 | US6522519 Electrostatic chucking device and methods for holding microlithographic sample |
| 02/13/2003 | WO2002101807A9 Electrostatic interaction systems and methods thereof |