| Patents for H02N 13 - Clutches or holding devices using electrostatic attraction, e.g. using johnson-rahbek effect (1,323) |
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| 02/09/2012 | WO2012019017A2 Electrostatic chuck and methods of use thereof |
| 02/09/2012 | WO2012017378A2 Methods for stabilizing contact surfaces of electrostatic chucks |
| 02/09/2012 | US20120033340 Electrostatic chuck and methods of use thereof |
| 02/08/2012 | CN102346300A Liquid device and display apparatus |
| 02/08/2012 | CN101874298B 静电型加固装置 Electrostatic reinforcement device |
| 02/02/2012 | US20120026480 Image-Compensating Addressable Electrostatic Chuck System |
| 02/01/2012 | CN101796626B 静电吸盘装置中的气体供给结构的制造方法及静电吸盘装置气体供给结构以及静电吸盘装置 The method of manufacturing an electrostatic chuck apparatus and a gas supply structure of gas supply structure and the electrostatic chuck apparatus and an electrostatic chuck apparatus |
| 01/19/2012 | DE112009002400T5 Verfahren zum Handhaben eines Substrats A method for handling a substrate |
| 01/18/2012 | EP1952436B1 Bipolar carrier wafer and mobile bipolar electrostatic wafer arrangement |
| 01/18/2012 | CN101335227B Polyceramic e-chuck |
| 01/18/2012 | CN101223637B Apparatus for removing foreign material from substrate and method for removing foreign material from substrate |
| 01/17/2012 | US8098475 Electrostatic clamp, lithographic apparatus and method of manufacturing an electrostatic clamp |
| 01/04/2012 | CN102308380A Electrocstatic chuck system and process for radially tuning the temperature profile across the surface of a substrate |
| 12/28/2011 | CN101688295B 具有分离电极的静电卡盘 Having a separate electrode electrostatic chuck |
| 12/22/2011 | US20110310525 System for securely dechucking wafers |
| 12/21/2011 | CN102292807A Euv光刻用反射型掩模基板的制造方法 Euv lithography method for manufacturing a reflective mask substrate |
| 12/01/2011 | WO2011150311A1 Substrate supports for semiconductor applications |
| 12/01/2011 | WO2011149918A2 High surface resistivity electrostatic chuck |
| 11/30/2011 | CN102265390A 静电卡盘用卡板的制造方法 The method for producing an electrostatic chuck pallets |
| 11/24/2011 | WO2011116357A3 Electroadhesive device, method of adhering a device and electrolaminate system |
| 11/17/2011 | WO2011063084A3 Electrostatic chuck with reduced arcing |
| 11/10/2011 | WO2011090650A3 Electrostatic chucks and methods for refurbishing same |
| 10/25/2011 | US8043433 High efficiency electro-static chucks for semiconductor wafer processing |
| 09/29/2011 | WO2011118658A1 Electrostatic chuck |
| 09/28/2011 | EP2368263A2 Electrostatic chuck |
| 09/22/2011 | WO2011116357A2 Materials for electroadhesion and electrolaminates |
| 09/15/2011 | WO2011111486A1 Grasping apparatus |
| 09/14/2011 | CN102187447A Method for inspecting electrostatic chuck, and electrostatic chuck apparatus |
| 09/14/2011 | CN102187446A Electrostatic chuck, and method for manufacturing the chuck |
| 09/07/2011 | CN102177578A Substrate managing method |
| 08/31/2011 | EP2362415A1 Electrostatic chuck device and method for determining adsorbed state of wafer |
| 08/18/2011 | WO2011100028A1 Electroadhesive gripping |
| 08/17/2011 | CN102160275A Two-sided fixing structure, exhibiting or indicating apparatus using same, dust collecting apparatus, and plant growing apparatus |
| 08/17/2011 | CN102160167A Electrostatic chuck assembly |
| 08/17/2011 | CN102160165A Electrostatic chuck |
| 08/09/2011 | US7995324 Electrostatic attraction apparatus for glass substrate and method of attracting and releasing the same |
| 08/04/2011 | WO2011093451A1 Electrostatic chuck apparatus |
| 08/03/2011 | CN102144285A Electrostatic chuck device and method for determining adsorbed state of wafer |
| 07/28/2011 | WO2011090650A2 Electrostatic chucks and methods for refurbishing same |
| 07/28/2011 | DE112009001988T5 Verfahren zur Bestimmung einer Anwendungsgrenze einer elektrostatischen Haltevorrichtung A method for determining an application limit of a electrostatic chuck |
| 07/27/2011 | CN101317328B Micro-electromechanical device |
| 07/20/2011 | CN102132395A Electrostatic chuck and vacuum processing apparatus |
| 07/19/2011 | US7983017 Electrostatic chuck and method of forming |
| 07/13/2011 | CN102124554A Method for determining service limit of electrostatic chuck |
| 07/13/2011 | CN101189772B Electrostatic chuck with smart lift-pin mechanism for a plasma reactor |
| 07/07/2011 | WO2011081087A1 Scanning electron microscope |
| 07/07/2011 | US20110162526 Two-sided attraction structure, exhibiting or indicating apparatus using same, dust collecting apparatus, and plant growing apparatus |
| 06/30/2011 | DE112009002174T5 Elektrostatische Haltevorrichtung und Unterdruck-Bearbeitungsvorrichtung An electrostatic chuck and the vacuum processing apparatus |
| 06/29/2011 | EP2339741A1 Two-sided fixing structure, exhibiting or indicating apparatus using same, dust collecting apparatus, and plant growing apparatus |
| 06/08/2011 | EP2330619A1 Electrostatic chuck |
| 06/08/2011 | CN102089875A Bipolar electrostatic chuck |
| 05/26/2011 | WO2011063084A2 Electrostatic chuck with reduced arcing |
| 05/18/2011 | EP2321846A2 Electrostatic chuck assembly |
| 05/18/2011 | CN102067302A Electrostatic chuck |
| 05/11/2011 | CN101625954B Repairing method of electrostatic sucking electrode |
| 05/10/2011 | US7940511 Electrostatic clamp, lithographic apparatus and method of manufacturing an electrostatic clamp |
| 05/05/2011 | WO2011014328A3 Light-up prevention in electrostatic chucks |
| 04/14/2011 | DE102010039104A1 Optimierer einer elektrostatischen Klemme Optimizer electrostatic clamp |
| 04/06/2011 | EP2306505A1 Bipolar electrostatic chuck |
| 03/31/2011 | WO2010132640A3 Electrostatic chuck with polymer protrusions |
| 03/29/2011 | US7916447 Electrostatic chuck for substrate stage, electrode used for the chuck, and treating system having the chuck and electrode |
| 03/03/2011 | WO2010124268A3 Substrate support having side gas outlets and methods |
| 03/01/2011 | USRE42175 Electrostatic chucking stage and substrate processing apparatus |
| 02/23/2011 | EP2286448A1 Electrostatic chuck |
| 02/03/2011 | WO2011014328A2 Light-up prevention in electrostatic chucks |
| 02/03/2011 | WO2011013593A1 Actuator element and method for manufacturing actuator element |
| 01/19/2011 | CN101953174A Digital speaker apparatus |
| 01/06/2011 | WO2011001978A1 Electrostatic attracting structure and fabricating method therefor |
| 12/29/2010 | WO2010109373A3 Method and apparatus for reduction of voltage potential spike during dechucking |
| 12/23/2010 | US20100321856 Method of platen fabrication to allow electrode pattern and gas cooling optimization |
| 12/22/2010 | CN101026119B Etch resistant wafer processing apparatus and method for producing the same |
| 12/08/2010 | EP2259298A1 Plasma treatment apparatus, and method for controlling substrate attraction force in plasma treatment apparatus |
| 12/08/2010 | CN1790889B Processing method of adsorbate and electrostatic sucking method |
| 12/07/2010 | US7848077 Electrostatic chuck device |
| 11/18/2010 | WO2010132640A2 Electrostatic chuck with polymer protrusions |
| 11/10/2010 | CN101884225A Direct digital speaker apparatus having a desired directivity pattern |
| 11/10/2010 | CN101884161A Electrostatic chuck and method of forming it |
| 10/28/2010 | WO2010124268A2 Substrate support having side gas outlets and methods |
| 10/28/2010 | US20100271744 System and method of sensing and removing residual charge from a processed wafer |
| 10/27/2010 | CN1833352B Actuator element and production method therefor |
| 10/27/2010 | CN101874298A Electrostatic reinforcing apparatus |
| 10/21/2010 | US20100265631 Removal of charge between a substrate and an electrostatic clamp |
| 10/12/2010 | US7813103 Time-based wafer de-chucking from an electrostatic chuck having separate RF BIAS and DC chucking electrodes |
| 10/07/2010 | US20100254064 Method for manufacturing gas supply structure in electrostatic chuck apparatus, gas supply structure in electrostatic chuck apparatus, and electrostatic chuck apparatus |
| 09/30/2010 | WO2010109373A2 Method and apparatus for reduction of voltage potential spike during dechucking |
| 09/29/2010 | EP2232693A2 Electrostatic chuck and method of forming it |
| 09/07/2010 | US7791857 Electrostatic chuck device |
| 08/12/2010 | WO2010090948A1 Electrostatic chuck system and process for radially tuning the temperature profile across the surface of a substrate |
| 08/11/2010 | CN101803000A Method of manufacturing electrostatic chuck mechanism |
| 08/11/2010 | CN101802998A Electrostatic chuck |
| 08/05/2010 | WO2010087345A1 Method of manufacturing reflective mask blanks for euv lithography |
| 08/04/2010 | CN101796626A Method for manufacturing gas supply structure in electrostatic chuck apparatus, gas supply structure in electrostatic chuck apparatus, and electrostatic chuck apparatus |
| 07/29/2010 | US20100187777 Pin lifting system |
| 07/27/2010 | US7764483 Semiconductor etching apparatus |
| 07/22/2010 | WO2010082606A1 Electrostatic chuck and method for manufacturing electrostatic chuck |
| 07/20/2010 | US7760484 Electrostatic chuck |
| 07/08/2010 | US20100171382 Magnetic transmission device |
| 07/06/2010 | US7751171 Nanoscale grasping device, method for fabricating the same, and method for operating the same |
| 07/01/2010 | WO2010073514A1 Method for manufacturing chuck plate for electrostatic chuck |
| 06/24/2010 | US20100156054 High temperature electrostatic chuck bonding adhesive |