| Patents for H02N 13 - Clutches or holding devices using electrostatic attraction, e.g. using johnson-rahbek effect (1,323) |
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| 03/05/2015 | WO2015031041A1 Barrier layers for electrostatic chucks |
| 03/03/2015 | US8971010 Electrostatic chuck and method of manufacturing electrostatic chuck |
| 03/03/2015 | US8971009 Electrostatic chuck with temperature control |
| 02/25/2015 | EP2839506A1 Electrostatic clamp |
| 02/12/2015 | WO2015020810A1 Electrostatic carrier for thin substrate handling |
| 02/12/2015 | WO2015020791A1 In-situ removable electrostatic chuck |
| 01/29/2015 | WO2015013142A1 An electrostatic chuck for high temperature process applications |
| 01/22/2015 | US20150021944 Carrier device and ceramic member |
| 01/20/2015 | US8937800 Electrostatic chuck with advanced RF and temperature uniformity |
| 01/14/2015 | CN102473668B 静电吸附构造体及其制造方法 Electrostatic adsorption structure and manufacturing method thereof |
| 01/07/2015 | CN104272450A 静电夹具和静电夹具的制造方法 Electrostatic chuck manufacturing method and electrostatic chuck |
| 12/24/2014 | CN104247002A 具有增强射频及温度均匀性的静电夹盘 Having enhanced temperature uniformity of RF and electrostatic chucks |
| 12/24/2014 | CN104247001A 具有馈通结构的基板支撑件 Feed-through structure having a substrate support member |
| 12/17/2014 | CN104221272A 太阳能晶片静电卡盘 The solar wafer electrostatic chuck |
| 12/10/2014 | CN104205321A 具有实时热区调节能力的高温静电夹具 High temperature electrostatic chuck with real ability to regulate the hot zone |
| 12/10/2014 | CN101953174B 数字扬声器装置 Digital speaker apparatus |
| 12/09/2014 | US8908349 Member for semiconductor manufacturing apparatus |
| 12/04/2014 | US20140355179 Method of preventing cracking in glass display screens |
| 10/14/2014 | US8861171 Electroadhesive handling and manipulation |
| 10/14/2014 | US8861170 Electrostatic chuck with photo-patternable soft protrusion contact surface |
| 10/07/2014 | US8854790 Electrostatic chuck assembly |
| 10/02/2014 | WO2014157571A1 Electrostatic chuck |
| 10/02/2014 | WO2014157014A1 Chuck apparatus |
| 10/02/2014 | WO2014156619A1 Electrostatic chuck device |
| 09/25/2014 | WO2014149182A1 Methods and apparatus for electrostatic chuck repair and refurbishment |
| 09/25/2014 | US20140284412 Electrostatically pinned glass roll, methods and apparatus for making |
| 09/18/2014 | WO2014144599A1 System and methods for electroadhesion based pick and place assembly |
| 09/18/2014 | US20140268478 Methods and apparatus for electrostatic chuck repair and refurbishment |
| 09/11/2014 | US20140251701 High voltage converters for electrostatic applications |
| 09/09/2014 | US8829397 Corrosion-resistant multilayer ceramic member |
| 07/30/2014 | CN101802998B 静电夹具 Electrostatic chuck |
| 07/24/2014 | WO2014110798A1 Electrostatic actuator and manufacturing method thereof |
| 07/24/2014 | US20140202618 Bonding method, mounting table and substrate processing apparatus |
| 07/03/2014 | DE102013203555B3 Electrostatic levitator for use in measuring system, has electrode system for generating electrostatic field, in which sample is set into floating condition, where electrode system has three main electrodes |
| 07/02/2014 | CN103907181A 静电吸盘 Electrostatic chuck |
| 06/26/2014 | WO2014099559A1 Single-body electrostatic chuck |
| 06/26/2014 | WO2014098224A1 Sample holder |
| 06/25/2014 | CN103890928A 静电夹盘 The electrostatic chuck |
| 06/25/2014 | CN103890927A 交流驱动静电吸盘 AC drive electrostatic chuck |
| 06/19/2014 | US20140169927 Micro pick up array with integrated pivot mount |
| 06/12/2014 | US20140159324 Compliant micro device transfer head array with metal electrodes |
| 06/05/2014 | WO2014084334A1 Electrostatic chuck |
| 06/04/2014 | CN103843129A Electrostatic chuck with temperature control |
| 06/04/2014 | CN103843128A Electrostatic chuck |
| 06/04/2014 | CN102308380B Electrocstatic chuck system and process for radially tuning the temperature profile across the surface of a substrate |
| 05/30/2014 | WO2014080688A1 Electrostatic chuck and power supply system |
| 05/29/2014 | US20140146434 Mounting table structure and method of holding focus ring |
| 05/15/2014 | US20140133062 Additional force augmented electroadhesion |
| 05/13/2014 | US8724289 Substrate temperature adjusting-fixing device |
| 05/06/2014 | US8717737 Substrate conveyance method and substrate conveyance system |
| 05/01/2014 | US20140116622 Electrostatic chuck and substrate processing apparatus |
| 04/17/2014 | WO2014059325A1 Vacuum augmented electroadhesive device |
| 04/17/2014 | US20140104744 Conformable Electroadhesive Gripping System |
| 04/17/2014 | US20140104743 Electrostatic chuck |
| 04/03/2014 | US20140091232 Charged particle beam apparatus and electrostatic chuck apparatus |
| 03/27/2014 | DE102012109073A1 Verfahren zum Betrieb einer Greifvorrichtung sowie elektrostatische Greifvorrichtung Method for operating a gripping apparatus as well as electrostatic gripping device |
| 03/20/2014 | WO2014042174A1 Detachment control method and plasma processing device |
| 03/19/2014 | CN103650127A Electrostatic chuck assembly |
| 03/13/2014 | WO2014039655A1 Portable electrostatic chuck carrier for thin substrates |
| 03/13/2014 | WO2013166324A3 Electroadhesive conveying surfaces |
| 03/13/2014 | US20140071582 Electrostatic chuck |
| 03/13/2014 | US20140071580 Mass transfer tool |
| 03/06/2014 | US20140064905 Electroadhesive System for Capturing Objects |
| 03/06/2014 | US20140063680 Substrate fixing device and method for manufacturing the same |
| 03/06/2014 | US20140061180 Electrostatic chuck with radiative heating |
| 02/27/2014 | US20140055907 Electrostatic Carrier Tray |
| 02/06/2014 | US20140036404 Vacuum Augmented Electroadhesive Device |
| 01/23/2014 | WO2014012638A1 Electro-adhesion gripper for holding workpieces |
| 01/15/2014 | CN102362342B Method and apparatus for reduction of voltage potential spike during dechucking |
| 01/09/2014 | US20140009861 Detachable generator device |
| 01/08/2014 | CN103503128A Electrostatic chuck device |
| 01/01/2014 | CN103493194A Electrostatic chuck aln dielectric repair |
| 12/26/2013 | US20130340942 Edge seal for lower electrode assembly |
| 12/05/2013 | DE102013105470A1 Elektrostatisches Chuck-System und Verfahren The electrostatic chuck system and method |
| 12/04/2013 | CN102160167B Electrostatic chuck assembly |
| 12/04/2013 | CN101884225B Direct digital speaker apparatus having a desired directivity pattern and control method thereof |
| 11/21/2013 | US20130308244 Electrostatic chuck and method for manufacturing the electrostatic chuck |
| 11/21/2013 | US20130308116 Electrostatic clamp, lithographic apparatus and method of manufacturing an electrostatic clamp |
| 11/14/2013 | WO2013168471A1 Electrostatic chuck and production method for electrostatic chuck |
| 11/14/2013 | WO2013168191A1 Electrostatic actuator and variable-capacity device |
| 11/13/2013 | CN103392227A Mobile, transportable electrostatic substrate retaining arrangement |
| 11/07/2013 | WO2013166329A2 Electroadhesive handling and manipulation |
| 11/07/2013 | WO2013166324A2 Electroadhesive conveying surfaces |
| 11/07/2013 | WO2013166317A2 Handling and sorting materials using electroadhesion |
| 11/07/2013 | US20130294875 Electroadhesive Conveying Surfaces |
| 11/07/2013 | DE102012212465B3 Elektroadhäsionsgreifer zum Halten von Werkstücken Elektroadhäsionsgreifer for holding workpieces |
| 10/31/2013 | WO2013163220A1 Electrostatic chuck with advanced rf and temperature uniformity |
| 10/31/2013 | WO2013162820A1 High temperature electrostatic chuck with real-time heat zone regulating capability |
| 10/31/2013 | WO2013162792A1 Electrostatic chuck having reduced power loss |
| 10/31/2013 | US20130286533 Member for semiconductor manufacturing apparatus |
| 10/31/2013 | US20130286530 Methods and apparatus toward preventing esc bonding adhesive erosion |
| 10/31/2013 | US20130284374 High temperature electrostatic chuck with real-time heat zone regulating capability |
| 10/24/2013 | US20130279066 Electrostatic chuck with advanced rf and temperature uniformity |
| 10/23/2013 | EP2652781A1 Mobile, transportable electrostatic substrate retaining arrangement |
| 10/22/2013 | US8564925 Wafer chuck for EUV lithography |
| 10/17/2013 | WO2013153566A1 Electrostatic actuator, variable-capacitance capacitor, electric switch, and electrostatic actuator driving method |
| 10/03/2013 | WO2013148406A1 Substrate support with feedthrough structure |
| 09/19/2013 | WO2013137414A1 Electrostatic chuck device and method for producing same |
| 09/19/2013 | US20130242455 Electroadhesive Handling And Manipulation |
| 09/18/2013 | CN103308450A Electrostatic inductive absorption type inspection table for electronic components |