| Patents for H02N 13 - Clutches or holding devices using electrostatic attraction, e.g. using johnson-rahbek effect (1,323) |
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| 07/14/2005 | US20050152089 Electrostatic chuck and manufacturing method for the same, and alumina sintered member and manufacturing method for the same |
| 07/14/2005 | US20050152088 Substrate holding system and exposure apparatus using the same |
| 07/06/2005 | EP0948805B1 Wafer electrical discharge control |
| 06/30/2005 | US20050140962 Lithographic apparatus and device manufacturing method |
| 06/23/2005 | WO2005057772A1 Actuator element and production method therefor |
| 06/23/2005 | WO2005057280A2 Lithographic apparatus and device manufacturing method |
| 06/16/2005 | WO2005055313A1 Electrostatic chuck, exposure apparatus, and object chucking method |
| 06/16/2005 | US20050128674 Ceramic chuck |
| 06/16/2005 | US20050128459 Lithographic apparatus and device manufacturing method |
| 06/16/2005 | US20050127619 Electrostatic clampless holder module and cooling system |
| 06/16/2005 | US20050126480 Immobilizing device |
| 06/07/2005 | US6902682 Method and apparatus for electrostatically maintaining substrate flatness |
| 05/26/2005 | WO2005048341A1 Electrostatic chuck including a heater mechanism |
| 05/25/2005 | EP1532728A1 Improved platen for electrostatic wafer clamping apparatus |
| 05/17/2005 | US6894402 Method for controlling a polyphase and reversible rotating electrical machine for heat engine motor vehicle |
| 05/03/2005 | US6888693 Disc drive slider with protruding electrostatic actuator electrode |
| 04/06/2005 | EP1521120A2 Substrate holding system and exposure apparatus using the same |
| 04/05/2005 | US6875927 Copper wire bundles with barrier overcoatings; oxidation resistance; mica layer and glass fiber layers |
| 03/24/2005 | WO2005027219A1 Clamping of semiconductor wafers to an electrostatic chuck |
| 03/23/2005 | CN1599953A Electrostatic clampless holder module and cooling system |
| 03/16/2005 | CN1595632A Electrostatic chuck and treating device |
| 03/16/2005 | CN1595631A Electrostatic chuck and treating device |
| 03/10/2005 | US20050052817 Clamping and de-clamping semiconductor wafers on an electrostatic chuck using wafer inertial confinement by applying a single-phase square wave ac clamping voltage |
| 03/09/2005 | EP1513191A2 Heating apparatus having electrostatic adsorption function |
| 03/08/2005 | US6864957 Chuck, lithographic projection apparatus, method of manufacturing a chuck and device manufacturing method |
| 03/08/2005 | US6863281 Chucking apparatus and production method for the same |
| 03/03/2005 | US20050045619 Heating apparatus having electrostatic adsorption function |
| 02/22/2005 | US6858265 Technique for improving chucking reproducibility |
| 02/17/2005 | US20050036268 Dechucking method and apparatus for workpieces in vacuum processors |
| 02/16/2005 | CN1581460A Electrode piece for electrostatic chuck, electrostatic chuck device and its adsorptiong method |
| 02/10/2005 | WO2004095477A3 High-performance electrostatic clamp comprising a resistive layer, micro-grooves, and dielectric layer |
| 02/09/2005 | CN1577791A Electrostatic chuck having electrode with rounded edge |
| 02/03/2005 | US20050024809 Electrostatic chuck |
| 01/27/2005 | US20050018379 Ceramic substrate |
| 01/27/2005 | US20050018377 Electrostatic chuck |
| 01/27/2005 | US20050018376 Electrostatic chuck for wafer |
| 01/27/2005 | US20050018168 Substrate holding device, substrate processing apparatus using the same, and method for aligning and holding substrate |
| 01/27/2005 | US20050016465 Electrostatic chuck having electrode with rounded edge |
| 01/26/2005 | EP1501116A2 Electrostatic chuck having electrode with rounded edge |
| 01/13/2005 | WO2005004229A1 Electrostatic chuck for substrate stage, electrode used for the chuck, and treating system having the chuck and the electrode |
| 01/11/2005 | US6841917 Electrostatic levitation and attraction systems and methods |
| 01/11/2005 | US6841899 Actuator, actuator driving method, and atcuator system |
| 12/23/2004 | WO2004112123A1 Dipolar electrostatic chuck |
| 12/09/2004 | US20040246459 Lithographic support structure |
| 12/08/2004 | CN1179407C Electrostatic chuck and treating device |
| 11/25/2004 | US20040233609 Electrostatic chuck and its manufacturing method |
| 11/18/2004 | US20040227924 Transfer apparatus for transferring an object, lithographic apparatus employing such a transfer apparatus, and method of use thereof |
| 11/11/2004 | US20040223285 Wafer heating apparatus having electrostatic adsorption function |
| 11/11/2004 | US20040223284 Electrostatic attracting method, electrostatic attracting apparatus, and bonding apparatus |
| 11/10/2004 | EP1475821A2 Wafer heating apparatus having electrostatic adsorption function |
| 11/04/2004 | WO2004095477A2 High-performance electrostatic clamp comprising a resistive layer, micro-grooves, and dielectric layer |
| 11/04/2004 | US20040218340 Electrostatic chuck for an electrically insulative substrate, and a method of using same |
| 11/02/2004 | US6813134 Electrostatic chucking device and manufacturing method thereof |
| 10/28/2004 | US20040212946 High-performance electrostatic clamp comprising a resistive layer, micro-grooves, and dielectric layer |
| 10/14/2004 | US20040201443 Actuator, actuator driving method, and actuator system |
| 10/13/2004 | CN1537328A High temperature electrostatic chuck |
| 10/07/2004 | US20040196614 Electrostatic chuck and production method therefor |
| 10/06/2004 | EP1465012A2 Supporting structure for use in a lithographic apparatus |
| 10/06/2004 | EP1465011A1 Transfer apparatus for transferring an object and method of use thereof and lithographic projection apparatus comprising such a transfer apparatus |
| 10/06/2004 | CN1534386A Supporting structure used for photoetching equipment |
| 10/06/2004 | CN1534385A Transferring equipment used for transferring matter and its use method and photoetching projection equipment containing said transferring equipment |
| 09/15/2004 | CN1529908A Ceramic electrostatic chuck assembly and method of making |
| 09/14/2004 | US6791817 Electro adhesion device |
| 09/14/2004 | US6790375 Dechucking method and apparatus for workpieces in vacuum processors |
| 09/09/2004 | DE10201863B4 Waferraumhaltevorrichtung, die auf einer elektrostatischen Aufnahmevorrichtung installiert ist, und Verfahren zur Herstellung derselben Wafer space holding device that is installed on an electrostatic recording apparatus, and method for manufacturing the same |
| 09/01/2004 | EP1452239A1 Immobilizing device |
| 09/01/2004 | CN1525547A Plate electrode for static electricity sucking disk devices and static electricity sucking disk device using the same |
| 08/31/2004 | US6785115 Electrostatic chuck and substrate processing apparatus |
| 08/31/2004 | US6784630 Use of standoffs to protect atomic resolution storage mover for out-of-plan motion |
| 08/31/2004 | US6784593 Use of standoffs to protect atomic resolution storage mover for out-of-plane motion |
| 08/31/2004 | US6784592 Use of standoffs to protect atomic resolution storage mover for out-of-plane motion |
| 08/25/2004 | CN1523579A Disk drive slider provided with projecting electrostatic actuator electrode |
| 08/25/2004 | CN1163955C Susceptor for semiconductor manufacturing equipment and process for producing the same |
| 08/19/2004 | WO2004070829A1 Electrostatic bonding chuck with integrated radio frequency electrode and thermostatic means |
| 08/19/2004 | US20040160021 Electrostatic chucking device and manufacturing method thereof |
| 08/19/2004 | CA2514616A1 Electrostatic bonding chuck with integrated radio frequency electrode and thermostatic means |
| 08/17/2004 | US6778377 Electrostatic chucking system, and apparatus and method of manufacturing a semiconductor device using the electrostatic chucking system |
| 08/11/2004 | EP1086524A4 Chuck apparatus for clamping a planar substrate in an electrostatic coating method |
| 08/03/2004 | US6770379 Susceptor for semiconductor manufacturing equipment and process for producing the same |
| 07/28/2004 | CN1516256A Method for moving chip and electrostatic sucking disc device |
| 07/27/2004 | US6768627 Electrostatic chuck and processing apparatus for insulative substrate |
| 07/22/2004 | WO2004061941A1 Electrostatic chuck |
| 07/07/2004 | EP1435646A2 Wafer electrical discharge control by wafer lifter system |
| 07/06/2004 | US6760213 Electrostatic chuck and method of treating substrate using electrostatic chuck |
| 07/01/2004 | US20040124595 Electrostatic chuck and production method therefor |
| 06/22/2004 | US6754062 Hybrid ceramic electrostatic clamp |
| 06/17/2004 | US20040114124 Chuck, lithographic apparatus and device manufacturing method |
| 06/16/2004 | EP1342311B1 Electrostatic device for holding an electronic component wafer |
| 06/09/2004 | CN1153343C Method of holding wafer and electrostatic chucking device |
| 06/01/2004 | US6744618 Electrostatic chucks with flat film electrode |
| 05/25/2004 | US6741447 Wafer space supporting apparatus installed on electrostatic chuck and method for fabricating the same |
| 05/19/2004 | CN1150608C Method and apparatus for determining wafer warpage for optimized electrostatic chuck clamping voltage |
| 05/11/2004 | US6734117 Periodic clamping method and apparatus to reduce thermal stress in a wafer |
| 05/11/2004 | US6733624 Apparatus for holding an object to be processed |
| 05/04/2004 | US6730276 Multilayer; uniform adhesion |
| 04/22/2004 | WO2004034461A1 Electrode configuration for retaining cooling gas on electrostatic wafer clamp |
| 04/20/2004 | US6724609 Electrostatic sensing chuck using area matched electrodes |
| 04/15/2004 | US20040070914 Electrostatic device for holding an electronic component wafer |
| 04/08/2004 | WO2004030197A1 Electrostatic holding device and electrostatic tweezers using same |
| 04/08/2004 | US20040066601 Electrode configuration for retaining cooling gas on electrostatic wafer clamp |