| Patents for H02N 13 - Clutches or holding devices using electrostatic attraction, e.g. using johnson-rahbek effect (1,323) |
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| 06/25/1996 | US5530616 Electrostastic chuck |
| 06/12/1996 | EP0681757B1 Magnetic force-transmitting device |
| 06/11/1996 | US5525642 Electroresponsive polymer systems |
| 06/04/1996 | US5522131 Electrostatic chuck having a grooved surface |
| 05/28/1996 | US5521790 Electrostatic chuck having relatively thick and thin areas and means for uniformly cooling said thick and thin areas during chuck anodization |
| 05/01/1996 | EP0582566B1 Ceramic electrostatic chuck |
| 04/16/1996 | US5508327 Electroresponsive polymer systems |
| 03/13/1996 | EP0701319A1 Electrostatic substrat holder |
| 03/13/1996 | EP0700593A1 Releasing a workpiece from an electrostatic chuck |
| 03/13/1996 | CN1118639A Magnetic force-transmitting device |
| 03/06/1996 | EP0699606A1 Electrostatic levitation conveyor and electrostatic levitation electrodes thereof |
| 01/24/1996 | EP0693771A1 Electrostatic chuck for a substrate in a process chamber |
| 01/24/1996 | EP0693770A1 Electrostatic chuck for magnetic flux processing |
| 01/23/1996 | US5486974 Electrostatic attraction board system |
| 01/17/1996 | EP0692814A1 Multi-electrode electrostatic chuck |
| 01/17/1996 | EP0692156A1 Electrostatic chuck with conformal insulator film |
| 12/12/1995 | US5474614 Method and apparatus for releasing a semiconductor wafer from an electrostatic clamp |
| 11/15/1995 | EP0681757A1 Magnetic force-transmitting device. |
| 11/14/1995 | US5467249 Electrostatic chuck with reference electrode |
| 10/31/1995 | US5463526 Hybrid electrostatic chuck |
| 10/31/1995 | US5463525 Guard ring electrostatic chuck |
| 10/17/1995 | US5459632 Releasing a workpiece from an electrostatic chuck |
| 09/28/1995 | WO1995025689A1 Electrostatic levitation conveyor and electrostatic levitation electrodes thereof |
| 09/26/1995 | US5452510 Method of making an electrostatic chuck with oxide insulator |
| 09/19/1995 | US5452177 Electrostatic wafer clamp |
| 09/14/1995 | WO1995024764A1 Releasing a workpiece from an electrostatic chuck |
| 09/08/1995 | WO1995024070A1 Electrostatic chuck |
| 08/30/1995 | EP0669644A2 Electrostatic chuck |
| 08/23/1995 | EP0668608A1 Electrostatic chuck with erosion-resistant electrode connection |
| 08/03/1995 | WO1995020838A1 Electrostatic chuck with conformal insulator film |
| 07/27/1995 | WO1995020263A1 Hybrid electrostatic chuck |
| 07/05/1995 | EP0620953A4 Electrostatic wafer clamp. |
| 07/05/1995 | EP0375731B1 Micropositioner systems and methods |
| 06/28/1995 | EP0660500A1 Electrostatic chuck with reference electrode |
| 06/28/1995 | EP0660499A1 Guard ring electrostatic chuck |
| 06/28/1995 | EP0660388A1 Method of making an electrostatic chuck with oxide insulator |
| 06/28/1995 | EP0660378A1 Electrostatic chuck with oxide insulator |
| 06/20/1995 | US5426558 Anti-stick electrostatic chuck for a low pressure environment |
| 01/25/1995 | EP0635870A1 An electrostatic chuck having a grooved surface |
| 01/24/1995 | US5384682 Electrostatic chuck |
| 01/24/1995 | US5384681 Electrostatic chuck |
| 01/17/1995 | US5382469 Ceramic-titanium nitride electrostatic chuck |
| 10/26/1994 | EP0620953A1 Electrostatic wafer clamp |
| 09/14/1994 | EP0615280A1 Electrostatic chuck |
| 08/04/1994 | WO1994017583A1 Magnetic force-transmitting device |
| 08/04/1994 | CA2154165A1 Magnetic power transmission device |
| 06/28/1994 | US5325261 Electrostatic chuck with improved release |
| 06/28/1994 | US5324053 Electrostatic chuck |
| 05/26/1994 | WO1994011944A1 Electrostatic wafer clamp |
| 05/24/1994 | US5315473 Method of electrostatically clamping a workpiece |
| 05/17/1994 | CA1329638C Machine unit having retaining device using static electricity |
| 05/17/1994 | CA1329637C Electrostatic holding apparatus |
| 04/12/1994 | US5303117 Electrostatic positioner |
| 02/17/1994 | WO1994003964A1 Static support system |
| 01/25/1994 | CA2019941C Electrostatic levitation furnace |
| 11/09/1993 | US5260849 Electrostatic attracting sheet |
| 11/02/1993 | US5258047 Holder device and semiconductor producing apparatus having same |
| 10/19/1993 | US5255153 Electrostatic chuck and plasma apparatus equipped therewith |
| 07/28/1993 | EP0552877A1 Isolated electrostatic chuck and excitation method |
| 07/20/1993 | US5229910 Billboard device |
| 05/25/1993 | US5213349 Electrostatic chuck |
| 05/12/1993 | EP0541400A2 Anti-stick electrostatic chuck for a low pressure environment |
| 05/04/1993 | US5207437 Ceramic electrostatic wafer chuck |
| 04/13/1993 | US5202179 Used in a paper sheet appracting devices of X-Y plotter or copying machine |
| 03/23/1993 | US5196999 Electrostatic levitation furnace |
| 03/02/1993 | US5191506 Ceramic electrostatic chuck |
| 02/16/1993 | US5187399 Levitated micromotor |
| 01/12/1993 | US5179498 Electrostatic chuck device |
| 12/22/1992 | US5173834 Electrostatic attraction apparatus |
| 11/24/1992 | US5166856 Electrostatic chuck with diamond coating |
| 11/12/1992 | WO1992020093A1 Ceramic electrostatic chuck |
| 11/11/1992 | EP0512936A1 Temperature cycling ceramic electrostatic chuck |
| 10/13/1992 | US5155652 Temperature cycling ceramic electrostatic chuck |
| 09/30/1992 | EP0506537A1 Electrostatic chuck |
| 08/12/1992 | EP0498752A1 Electrostatic chuck with diamond coating |
| 05/27/1992 | EP0486966A1 Electrostatic chuck |
| 05/26/1992 | US5117121 Method of and apparatus for applying voltage to electrostatic chuck |
| 04/08/1992 | EP0478875A2 Billboard device |
| 03/31/1992 | US5099571 Method for fabricating a split-ring electrostatic chuck |
| 03/11/1992 | EP0473930A1 Electrostatic chuck |
| 03/04/1992 | EP0473178A2 Ink jet recording apparatus and electric field control method therefor |
| 10/08/1991 | US5055964 Electrostatic chuck having tapered electrodes |
| 09/18/1991 | EP0446405A1 Electrostatic attracting sheet |
| 07/31/1991 | EP0439000A1 Electrostatic clamp and method |
| 05/14/1991 | US5015906 Electrostatic levitation control system for micromechanical devices |
| 01/22/1991 | US4987332 Robot hand for electrostatically applying thin workpiece to mold |
| 01/16/1991 | EP0407894A2 Electrostatic levitation furnace |
| 12/18/1990 | US4978118 Paper sheet transporting method that applies an electrostatic attractive force between a paper sheet and a reinforcing insulating sheet prior to feeding |
| 12/12/1990 | EP0401489A2 Electrostratic attracting sheet |
| 12/12/1990 | EP0401451A1 Electrostatic absorption sheet |
| 12/04/1990 | US4975802 Electrostatic adsorbing apparatus having electrostatic adsorbing plate for adsorbing and laminating a plurality of objects to be adsorbed |
| 10/31/1990 | EP0395340A2 Method of and apparatus for applying voltage to electrostatic chuck |
| 10/25/1990 | CA2015383A1 Method of and apparatus for applying voltage to electrostatic chuck |
| 10/23/1990 | US4965429 For encoding a code strip |
| 10/17/1990 | EP0392399A2 Method and apparatus for wafer transfer |
| 10/09/1990 | US4962441 Isolated electrostatic wafer blade clamp |
| 08/29/1990 | EP0384751A2 Electrostatic locating apparatus |
| 07/18/1990 | EP0378350A2 Paper sheet transporting method |
| 09/05/1989 | US4864461 Machine unit having retaining device using static electricity |
| 08/29/1989 | US4861665 Electrostatic absorption sheet |