Patents
Sitemap › H02 - Generation, conversion, or distribution of electric power › H02N - Electric machines not otherwise provided for › H02N 13 - Clutches or holding devices using electrostatic attraction, e.g. using johnson-rahbek effect
Patents for H02N 13 - Clutches or holding devices using electrostatic attraction, e.g. using johnson-rahbek effect (1,323)
09/2013
09/12/2013WO2013133492A1 Electrostatic inductive absorption type inspection table for electronic components
09/12/2013WO2013132804A1 Transfer apparatus and ceramic member
09/12/2013WO2013132803A1 Transfer apparatus and ceramic member
09/06/2013WO2013127589A1 Electrostatic clamp
08/2013
08/21/2013CN101558660B Apparatus and methods for generating pressure waves
08/08/2013US20130201598 Electrostatic chuck and method of manufacturing electrostatic chuck
08/07/2013CN103236413A Electrostatic chuck
08/07/2013CN102132395B Electrostatic chuck and vacuum processing apparatus
08/01/2013WO2013112487A1 High voltage converters for electrostatic applications
08/01/2013WO2013111363A1 Electrostatic chuck
07/2013
07/24/2013CN103222043A High conductivity electrostatic chuck
07/24/2013CN102187446B Electrostatic chuck, and method for manufacturing the chuck
06/2013
06/27/2013WO2013093238A1 Support including an electrostatic substrate holder
06/20/2013US20130155569 High Conductivity Electrostatic Chuck
06/20/2013US20130155568 Extended and independent rf powered cathode substrate for extreme edge tunability
06/20/2013US20130153147 Dechuck control method and plasma processing apparatus
06/13/2013WO2013032260A3 Electrostatic chuck
06/05/2013CN102067302B 静电夹头 Electrostatic chuck
05/2013
05/30/2013WO2013076755A1 Electrostatic actuator, variable capacitor, and electric switch
05/16/2013US20130120897 Electrostatic Chuck with Photo-Patternable Soft Protrusion Contact Surface
05/10/2013WO2013067218A1 Solar wafer electrostatic chuck
05/02/2013WO2013062833A1 Electrostatic chuck
05/02/2013US20130107415 Electrostatic chuck
05/02/2013US20130105087 Solar wafer electrostatic chuck
05/01/2013CN103081088A Electrostatic chuck and methods of use thereof
05/01/2013CN103081086A Substrate support with symmetrical feed structure
04/2013
04/18/2013WO2013032260A9 Electrostatic chuck
04/17/2013CN103053018A Electrostatic chuck and production method thereof
04/11/2013WO2012158528A3 High temperature electrostatic chuck with radial thermal chokes
04/11/2013US20130088809 Electrostatic chuck with temperature control
04/11/2013US20130088808 Electrostatic chuck
04/04/2013WO2013049589A1 Electrostatic chuck with temperature control
04/04/2013WO2013049586A1 Electrostatic chuck
04/04/2013WO2013047648A1 Electrostatic chuck
04/04/2013WO2013047647A1 Alternating current drive electrostatic chuck
03/2013
03/27/2013CN102187447B Method for inspecting electrostatic chuck, and electrostatic chuck apparatus
03/21/2013US20130070384 High Surface Resistivity Electrostatic Chuck
03/20/2013CN102986017A High surface resistivity electrostatic chuck
03/07/2013WO2013032260A2 Electrostatic chuck
03/07/2013US20130058001 Electroadhesive gripping
03/05/2013US8390980 Electrostatic chuck assembly
02/2013
02/28/2013US20130048217 Electrostatic chuck and semiconductor/liquid crystal manufacturing equipment
02/07/2013US20130033690 Electrostatic clamp, lithographic apparatus and method of manufacturing an electrostatic clamp
01/2013
01/23/2013EP2548299A2 Materials for electroadhesion and electrolaminates
01/10/2013WO2013006407A1 Electrostatic chuck assembly
01/10/2013US20130010398 Materials for Electroadhesion and Electrolaminates
01/03/2013US20130003248 Substrate lifting method and substrate lifting device
01/02/2013CN102144285B Electrostatic chuck device and method for determining adsorbed state of wafer
12/2012
12/19/2012EP2533951A1 Electroadhesive gripping
12/12/2012CN102160165B 静电吸盘 Electrostatic chuck
12/06/2012WO2012166256A1 Electrostatic chuck aln dielectric repair
12/06/2012WO2012165250A1 Electrostatic adsorption body and electrostatic adsorption device using same
11/2012
11/29/2012WO2012161128A1 Charged particle beam apparatus and electrostatic chuck apparatus
11/21/2012CN102792437A Electrostatic chuck
11/15/2012US20120288619 Electrostatic chuck, thin film deposition apparatus including the electrostatic chuck, and method of manufacturing organic light emitting display apparatus by using the thin film deposition apparatus
11/08/2012WO2012150028A1 Apparatus for holding articles and a fixture equipped therewith for a vehicle
11/08/2012US20120281334 Electrostatic chuck apparatus
11/07/2012EP2519967A2 Mobile electrostatic carriers for thin wafer processing
11/01/2012WO2012147931A1 Electrostatic chuck device
10/2012
10/17/2012CN102741998A Electrostatic chuck apparatus
09/2012
09/26/2012CN102696101A Electrostatic chucks and methods for refurbishing same
09/07/2012WO2012096982A4 Electroadhesive system for capturing objects
08/2012
08/08/2012CN102089875B Bipolar electrostatic chuck
08/07/2012US8238072 Bipolar electrostatic chuck
07/2012
07/25/2012CN101501834B Electrostatic chuck device
07/19/2012WO2012096982A1 Electroadhesive system for capturing objects
07/04/2012CN101401292B Electrostatic holding device vacuum environment device using the device and connection device
06/2012
06/28/2012WO2012054689A3 Substrate support with symmetrical feed structure
06/21/2012WO2012082188A1 High efficiency electrostatic chuck assembly for semiconductor wafer processing
06/21/2012WO2012079750A1 Mobile, transportable electrostatic substrate retaining arrangement
06/21/2012WO2012047636A3 Vacuum process chamber component and methods of making
06/20/2012EP2466633A1 High efficiency electrostatic chuck assembly for semiconductor wafer processing
06/07/2012WO2012017378A3 Methods for stabilizing contact surfaces of electrostatic chucks
06/07/2012US20120141661 Substrate supports for semiconductor applications
06/06/2012EP2460179A2 Light-up prevention in electrostatic chucks
06/06/2012DE112009003808T5 Verfahren zur Herstellung einer Halteplatte zur Verwendung in einer elektrostatischen Haltevorrichtung A process for producing a support plate for use in an electrostatic chuck
05/2012
05/31/2012WO2012033922A3 High conductivity electrostatic chuck
05/31/2012WO2012019017A3 Electrostatic chuck and methods of use thereof
05/23/2012CN102473672A 静电夹头中的点火防止 The electrostatic chuck to prevent the ignition
05/23/2012CN102473668A 静电吸附构造体及其制造方法 Electrostatic adsorption structure and manufacturing method
05/17/2012US20120120545 Electrostatic attracting structure and fabricating method therefor
05/09/2012EP2450948A1 Electrostatic attracting structure and fabricating method therefor
05/09/2012CN102449754A Electrostatic chuck with polymer protrusions
05/03/2012US20120106024 Electrostatically-assisted centrifugation apparatus and related methods
05/02/2012CN101401198B Electrostatic attraction apparatus for glass substrate and method for attracting and releasing such glass substrate
04/2012
04/26/2012WO2012054689A2 Substrate support with symmetrical feed structure
04/25/2012CN1685599B Electrostatic holding device
04/17/2012US8158955 Charged particle beam application apparatus
04/12/2012WO2012047636A2 Vacuum process chamber component and methods of making
04/11/2012EP2158787B1 Direct digital speaker apparatus having a desired directivity pattern
03/2012
03/28/2012CN102396060A Substrate support having side gas outlets and methods
03/21/2012EP2430654A2 Electrostatic chuck with polymer protrusions
03/21/2012EP1997135B1 Method and device for electrostatically fixing substrates having a conductive layer
03/15/2012WO2012033922A2 High conductivity electrostatic chuck
03/01/2012WO2012026421A1 Electrostatic chuck apparatus and method for manufacturing same
03/01/2012WO2011149918A3 High surface resistivity electrostatic chuck
02/2012
02/29/2012EP1129481B1 Method and device for compensating wafer bias in a plasma processing chamber
02/23/2012US20120044609 Electrostatic Chuck With Polymer Protrusions
02/22/2012CN102362342A Method and apparatus for reduction of voltage potential spike during dechucking
02/16/2012WO2012020832A1 Electrostatic chuck and production method thereof
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