| Patents for H02N 13 - Clutches or holding devices using electrostatic attraction, e.g. using johnson-rahbek effect (1,323) |
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| 10/04/2001 | EP1138111A1 Electrostatic maintaining device |
| 09/27/2001 | US20010024349 Method of fabricating a semiconductor wafer support chuck apparatus having small diameter gas distribution ports for distributing a heat transfer gas |
| 09/25/2001 | US6295194 Bead or particle manipulating chucks |
| 09/25/2001 | US6294024 Electrostatic chucks and a particle deposition apparatus therefor |
| 09/19/2001 | CN1071275C Device for conveying sheets in a printing machine |
| 09/18/2001 | US6292346 Equipment for holding a semiconductor wafer, a method for manufacturing the same, and a method for using the same |
| 09/12/2001 | EP1132948A2 Substrate holding device, semiconductor manufacturing apparatus and device manufacturing device |
| 09/12/2001 | CN1312970A Chuck apparatus for clamping a planar substrate in an electrostatic coating method |
| 09/12/2001 | CN1312734A AC waveform biasing for bead manipulating chucks |
| 09/05/2001 | EP1129481A1 Method and device for compensating wafer bias in a plasma processing chamber |
| 09/04/2001 | US6284093 Shield or ring surrounding semiconductor workpiece in plasma chamber |
| 08/30/2001 | US20010018098 Method of depositing particles with an electrostatic chuck |
| 08/28/2001 | US6280584 Compliant bond structure for joining ceramic to metal |
| 08/21/2001 | US6278600 Electrostatic chuck with improved temperature control and puncture resistance |
| 08/16/2001 | EP1124256A1 Ceramic substrate |
| 08/14/2001 | US6273023 Plasma processing apparatus capable of reliably, electrostatically attracting and holding and thus fixing semiconductor wafer |
| 08/08/2001 | EP1121752A1 Electrostatic sensing chuck using area matched electrodes |
| 08/07/2001 | US6272002 Electrostatic holding apparatus and method of producing the same |
| 07/31/2001 | US6268994 Electrostatic chuck and method of manufacture |
| 07/31/2001 | US6267225 Sheet-conveying device for machines used in the printing technology field |
| 07/25/2001 | EP1118425A2 Method and apparatus for dechucking a workpiece from an electrostatic chuck |
| 07/25/2001 | EP1118113A1 Methods and apparatus for determining an etch endpoint in a plasma processing system |
| 07/24/2001 | US6265758 Semiconductor active electrostatic device |
| 07/10/2001 | US6259592 Apparatus for retaining a workpiece upon a workpiece support and method of manufacturing same |
| 07/03/2001 | US6256187 Electrostatic chuck device |
| 07/03/2001 | US6255223 Substrate handling method and apparatus, and attractive force inspection method and apparatus used therewith |
| 06/28/2001 | US20010004921 Methods and apparatus for determining an etch endpoint in a plasma processing system |
| 06/26/2001 | US6252758 Method for reducing particles from an electrostatic chuck and an equipment for manufacturing a semiconductor |
| 06/14/2001 | WO2001043184A2 Electrostatic chucks with flat film electrode |
| 06/13/2001 | CN1067177C 静电式夹盘 Electrostatic chuck |
| 06/07/2001 | US20010002871 Method for reducing particles from an electrostatic chuck and an equipment for manufacturing a semiconductor |
| 05/31/2001 | WO2001038600A1 Articles coated with aluminum nitride by chemical vapor deposition |
| 05/31/2001 | US20010002283 Apparatus for clamping a planar substrate |
| 05/17/2001 | WO2001035459A1 Ceramic substrate |
| 05/10/2001 | WO2001032121A2 Skin-gripper |
| 05/10/2001 | WO2001032114A1 Skin-gripper |
| 05/08/2001 | US6228278 Methods and apparatus for determining an etch endpoint in a plasma processing system |
| 04/25/2001 | EP1093399A1 Ac waveforms biasing for bead manipulating chucks |
| 04/10/2001 | US6215643 Electrostatic chuck and production method therefor |
| 04/10/2001 | US6215642 Vacuum compatible, deformable electrostatic chuck with high thermal conductivity |
| 04/10/2001 | US6215640 Apparatus and method for actively controlling surface potential of an electrostatic chuck |
| 03/28/2001 | EP1086524A1 Chuck apparatus for clamping a planar substrate in an electrostatic coating method |
| 03/28/2001 | CN1288800A Method and apparatus for reducing moving of conuctive materials on component |
| 03/15/2001 | WO2001018949A1 Bead or particle manipulating chucks |
| 03/15/2001 | CA2383893A1 Bead or particle manipulating chucks |
| 03/06/2001 | US6198616 Method and apparatus for supplying a chucking voltage to an electrostatic chuck within a semiconductor wafer processing system |
| 02/28/2001 | EP1079419A2 Method and apparatus for reducing migration of conductive material on a component |
| 02/27/2001 | US6195246 Electrostatic chuck having replaceable dielectric cover |
| 02/13/2001 | US6187149 Electrostatic chuck for attracting charged grains to a bead collection zone on a bead contact surface |
| 01/24/2001 | EP1070381A1 Electrostatic wafer clamp having low particulate contamination of wafers |
| 01/23/2001 | US6177023 Method and apparatus for electrostatically maintaining substrate flatness |
| 01/16/2001 | US6175485 Electrostatic chuck and method for fabricating the same |
| 01/02/2001 | US6169652 Electrostatically screened, voltage-controlled electrostatic chuck |
| 12/26/2000 | US6166897 Static chuck apparatus and its manufacture |
| 12/26/2000 | US6166432 Substrate for use in wafer attracting apparatus and manufacturing method thereof |
| 12/20/2000 | EP1061639A2 Chucking system amd method |
| 12/19/2000 | US6163448 Apparatus and method for ex-situ testing of performance parameters on an electrostatic chuck |
| 12/12/2000 | US6160244 Susceptors |
| 11/30/2000 | WO2000072376A1 Electrostatic chuck and treating device |
| 11/21/2000 | US6151203 Connectors for an electrostatic chuck and combination thereof |
| 11/21/2000 | US6149774 AC waveforms biasing for bead manipulating chucks |
| 10/31/2000 | US6141203 Electrostatic chuck |
| 10/19/2000 | WO2000062411A1 Electrostatic devices for mechanical blocking |
| 10/18/2000 | EP1044494A1 Method and apparatus for clamping a substrate |
| 10/17/2000 | US6134096 Substrate, insulating dielectric layer and electrode between the two; object is attracted onto electrode via insulating dielectric layer, which utilizes a gas-introducing hole to form a gas-diffusing depression for uniform heat conduction |
| 09/20/2000 | EP0857154B1 Device for conveying sheets in a printing machine |
| 09/19/2000 | US6122159 Electrostatic holding apparatus |
| 09/19/2000 | US6120278 Device for laying a film emerging from a slot die onto a rotating take-off roll |
| 09/05/2000 | US6115232 Method for forming an ion implanted electrostatic chuck |
| 08/01/2000 | US6097408 Ink jet recording apparatus |
| 07/04/2000 | US6084763 Method of holding wafer, method of removing wafer and electrostatic chucking device |
| 06/15/2000 | WO2000035003A1 Apparatus and method for actively controlling surface potential of an electrostatic chuck |
| 06/13/2000 | US6075375 Apparatus for wafer detection |
| 05/30/2000 | US6069785 Method for restoring an electrostatic chuck force |
| 05/18/2000 | WO2000028654A1 Electrostatic maintaining device |
| 05/02/2000 | US6056861 Process and device for generating resonance phenomena in particle suspensions |
| 04/20/2000 | WO2000022722A1 Electrostatic sensing chuck using area matched electrodes |
| 04/20/2000 | CA2346240A1 Electrostatic sensing chuck using area matched electrodes |
| 04/18/2000 | US6051303 Semiconductor supporting device |
| 04/13/2000 | WO2000021127A1 Method and device for compensating wafer bias in a plasma processing chamber |
| 04/12/2000 | EP0993024A2 Electrostatic chuck |
| 04/12/2000 | EP0992106A1 A method and an apparatus for offsetting plasma bias voltage in bipolar electrostatic chucks |
| 04/06/2000 | WO2000019592A1 Dechucking method and apparatus for workpieces in vacuum processors |
| 04/06/2000 | WO2000019520A1 Methods and apparatus for determining an etch endpoint in a plasma processing system |
| 03/02/2000 | DE19936405A1 Electrostatic clamping device, used e.g. for clamping wafers for further processing, has a ceramic layer attached to a metal substrate by an elastic insulating layer containing rubber and phenolic antioxidant |
| 02/24/2000 | WO1999052144A9 Electrostatic chuck power supply |
| 02/22/2000 | US6028762 Electrostatic chuck |
| 02/08/2000 | US6023405 Electrostatic chuck with improved erosion resistance |
| 02/02/2000 | EP0900475A4 Electrostatic chuck |
| 01/20/2000 | WO1999060613A3 Method and apparatus for minimizing plasma destabilization within a semiconductor wafer processing system |
| 01/12/2000 | EP0971391A2 A method for reducing particles from an electrostatic chuck and an equipment for manufacturing a semiconductor |
| 01/12/2000 | EP0970517A1 Unbalanced bipolar electrostatic chuck power supplies and methods therefor |
| 12/16/1999 | WO1999065136A1 Chuck apparatus for clamping a planar substrate in an electrostatic coating method |
| 12/16/1999 | WO1999064148A1 Ac waveforms biasing for bead manipulating chucks |
| 12/16/1999 | CA2333130A1 Ac waveforms biasing for bead manipulating chucks |
| 12/16/1999 | CA2333116A1 Chuck apparatus for clamping a planar substrate in an electrostatic coating method |
| 12/08/1999 | EP0962961A2 Susceptors |
| 12/07/1999 | US5996218 Method of forming an electrostatic chuck suitable for magnetic flux processing |
| 11/30/1999 | US5995357 Ceramic member-electric power supply connector coupling structure |
| 11/25/1999 | WO1999060613A2 Method and apparatus for minimizing plasma destabilization within a semiconductor wafer processing system |