Patents
Sitemap › H02 - Generation, conversion, or distribution of electric power › H02N - Electric machines not otherwise provided for › H02N 13 - Clutches or holding devices using electrostatic attraction, e.g. using johnson-rahbek effect
Patents for H02N 13 - Clutches or holding devices using electrostatic attraction, e.g. using johnson-rahbek effect (1,323)
08/1998
08/12/1998EP0857154A1 Device for conveying sheets in a printing machine
08/11/1998US5793192 For controlling a direct current power supply
08/11/1998US5792562 Electrostatic chuck with polymeric impregnation and method of making
08/04/1998US5790365 Method and apparatus for releasing a workpiece from and electrostatic chuck
08/04/1998US5789843 Electrostatically levitated conveyance apparatus and electrode thereof for electrostatic levitation
07/1998
07/29/1998EP0855764A2 Ceramic member-electric power supply connector coupling structure
07/15/1998EP0853333A1 Apparatus for controlling backside gas pressure beneath a semiconductor wafer
07/07/1998US5777838 Electrostatic chuck and method of attracting wafer
06/1998
06/25/1998WO1998027577A1 Wafer electrical discharge control by wafer lifter system
06/09/1998US5764471 Method and apparatus for balancing an electrostatic force produced by an electrostatic chuck
06/03/1998EP0845802A2 Substrate support member for uniform heating of a substrate
05/1998
05/27/1998EP0844659A2 Puncture resistant electrostatic chuck
05/19/1998US5754391 Electrostatic chuck
05/19/1998US5753132 Method of making electrostatic chuck with conformal insulator film
05/12/1998US5751538 Mask holding device and method for holding mask
05/12/1998US5751537 Multielectrode electrostatic chuck with fuses
05/06/1998EP0840434A2 Improved topographical structure of an electrostatic chuck and method of fabricating same
05/06/1998EP0839404A1 Electrostatic chuck assembly
05/05/1998US5748436 Ceramic electrostatic chuck and method
05/05/1998US5748435 Apparatus for controlling backside gas pressure beneath a semiconductor wafer
05/05/1998US5748434 Shield for an electrostatic chuck
04/1998
04/28/1998US5745332 Monopolar electrostatic chuck having an electrode in contact with a workpiece
04/28/1998US5745331 For holding substrates
04/14/1998US5740009 Apparatus for improving wafer and chuck edge protection
04/07/1998US5737178 Monocrystalline ceramic coating having integral bonding interconnects for electrostatic chucks
04/07/1998US5737175 Bias-tracking D.C. power circuit for an electrostatic chuck
03/1998
03/17/1998US5729423 Puncture resistant electrostatic chuck
03/04/1998EP0827187A2 Method and apparatus for cooling a workpiece using an electrostatic chuck
02/1998
02/25/1998CN1174446A Method of holding wafer, method of removing wafer and electrostatic chucking device
02/19/1998WO1998007231A1 Process for providing a glass dielectric layer on an electrically conductive substrate and electrostatic chucks made by the process
02/04/1998EP0822590A2 Method and apparatus for releasing a workpiece from an electrostatic chuck
02/04/1998EP0620953B1 Electrostatic wafer clamp
01/1998
01/13/1998US5708557 Puncture-resistant electrostatic chuck with flat surface and method of making the same
01/13/1998US5708556 For supporting a wafer
01/13/1998US5708250 Voltage controller for electrostatic chuck of vacuum plasma processors
01/13/1998US5707588 Droplet floating apparatus
01/08/1998WO1998000861A1 Methods and apparatuses for clamping and declamping a semiconductor wafer in a wafer processing system
12/1997
12/23/1997US5701228 Stage system or device
12/16/1997US5699223 Method of removing substrate and apparatus for controlling applied voltage
11/1997
11/27/1997WO1997044891A1 Electrostatic chuck
11/27/1997CA2254051A1 Electrostatic chuck
11/25/1997US5691876 High temperature polyimide electrostatic chuck
11/12/1997EP0806834A2 Method and apparatus for balancing an electrostatic force produced by an electrostatic chuck
11/12/1997EP0806797A2 Monopolar electrostatic chuck having an electrode in contact with a workpiece
11/05/1997EP0805487A2 Multielectrode electrostatic chuck with fuses
11/04/1997US5684669 Method for dechucking a workpiece from an electrostatic chuck
10/1997
10/16/1997WO1997038481A1 Process for providing a glass-ceramic dielectric layer on an electrically conductive substrate and electrostatic chucks made by the process
10/16/1997WO1997038480A1 Electrostatic chucks
10/14/1997US5677824 Electrostatic chuck with mechanism for lifting up the peripheral of a substrate
10/09/1997WO1997037382A1 Dynamic feedback electrostatic wafer chuck
09/1997
09/23/1997US5671119 Process for cleaning an electrostatic chuck of a plasma etching apparatus
09/23/1997US5671117 Electrostatic chuck
09/10/1997EP0794566A1 Wafer spacing mask for a substrate support chuck and method of fabricating same
09/09/1997US5665260 Ceramic electrostatic chuck with built-in heater
09/02/1997US5663865 Ceramic electrostatic chuck with built-in heater
08/1997
08/27/1997EP0791956A2 Electrostatic chuck
08/20/1997CN1157482A Electrostatic chuck
08/12/1997US5656093 Wafer spacing mask for a substrate support chuck and method of fabricating same
07/1997
07/16/1997EP0700593A4 Releasing a workpiece from an electrostatic chuck
07/09/1997EP0783175A2 Lift pin for dechucking substrates
07/08/1997US5646814 Multi-electrode electrostatic chuck
07/03/1997WO1997023945A1 Low voltage electrostatic clamp for substrates such as dielectric substrates
06/1997
06/10/1997US5638249 Electrostatic support system
06/05/1997WO1997020210A1 Process and device for generating resonance phenomena in particle suspensions
06/03/1997US5636098 Barrier seal for electrostatic chuck
06/03/1997US5634266 Method of making a dielectric chuck
05/1997
05/20/1997US5631803 Erosion resistant electrostatic chuck with improved cooling system
05/09/1997WO1997016366A1 Device for conveying sheets in a printing machine
04/1997
04/30/1997DE19643106A1 Einrichtung zum Fördern von Bogen in einer drucktechnischen Maschine Means for feeding sheets in a printing process machine
04/29/1997US5625526 Electrostatic chuck
04/08/1997US5618350 Processing apparatus
03/1997
03/20/1997DE19544127C1 Suspended particle micro-manipulation
03/18/1997US5612851 Guard ring electrostatic chuck
03/18/1997US5612850 Releasing a workpiece from an electrostatic chuck
03/13/1997WO1997009774A1 Electrostatic drive
03/12/1997EP0762491A2 Electrostatic chuck member and a method of producing the same
02/1997
02/25/1997US5606485 Electrostatic chuck having improved erosion resistance
02/25/1997US5606484 Ceramic electrostatic chuck with built-in heater
01/1997
01/30/1997WO1997003495A1 Electrostatic chuck assembly
01/30/1997DE19533173C1 Elektrostatischer Antrieb An electrostatic drive
01/22/1997EP0755066A1 Electrostatic chuck
01/07/1997US5592358 Electrostatic chuck for magnetic flux processing
12/1996
12/10/1996US5583736 Micromachined silicon electrostatic chuck
11/1996
11/13/1996EP0742588A2 Method of protecting electrostatic chuck
11/13/1996EP0742580A2 Barrier seal for electrostatic chuck
11/05/1996US5572398 Tri-polar electrostatic chuck
10/1996
10/15/1996US5566043 Ceramic electrostatic chuck with built-in heater
10/01/1996US5561585 Electrostatic chuck with reference electrode
09/1996
09/25/1996EP0734055A2 Anti-stick electrostatic chuck for a low pressure environment
09/25/1996EP0734053A1 Improvements in or relating to electrostatic chucks for holding substrates in process chambers
09/25/1996EP0734052A1 Improvements in or relating to electrostatic holding systems for holding substrates in processing chambers
09/24/1996US5558837 Droplet floating apparatus
09/03/1996US5552955 Substrate removal method and mechanism for effecting the method
08/1996
08/07/1996EP0725426A2 High temperature polymide electrostatic chuck
07/1996
07/31/1996EP0724285A2 Electrostatic chuck and method of making
07/23/1996US5539179 For holding an object with the use of a coilombic force
07/16/1996US5535507 Method of making electrostatic chuck with oxide insulator
07/10/1996EP0721210A1 Improvements in or relating to electrostatic chucks
07/09/1996US5535090 Electrostatic chuck
07/02/1996US5532903 Membrane electrostatic chuck
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