| Patents for H02N 13 - Clutches or holding devices using electrostatic attraction, e.g. using johnson-rahbek effect (1,323) |
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| 05/09/2007 | CN1315172C Plate electrode for static electricity sucking disk devices and static electricity sucking disk device using the same |
| 04/25/2007 | EP1044494A4 Method and apparatus for clamping a substrate |
| 04/24/2007 | US7209339 Electrostatic chuck for an electrically insulative substrate, and a method of using same |
| 04/11/2007 | CN1945905A Feeding power connector and electro-static chuck device |
| 04/11/2007 | CN1310285C Processing device |
| 04/04/2007 | CN1941317A High temperature electrostatic chuck |
| 03/27/2007 | US7196896 Dechucking method and apparatus for workpieces in vacuum processors |
| 03/21/2007 | CN1934693A Bipolar electrostatic chuck |
| 03/07/2007 | EP1399963B1 High temperature electrostatic chuck |
| 02/28/2007 | CN2874916Y Stable steady float lift machine |
| 02/08/2007 | DE112005000621T5 Bipolare elektrostatische Haltevorrichtung Bipolar electrostatic chuck |
| 02/07/2007 | CN1299345C Electrostatic clampless holder module and cooling system |
| 02/01/2007 | WO2007013619A1 Sample holder, sample suction apparatus using such sample holder and sample processing method using such sample suction apparatus |
| 01/25/2007 | WO2007010747A1 Conductive polymeric actuator element |
| 01/24/2007 | CN1296983C Ceramic electrostatic chuck assembly and method of making |
| 01/18/2007 | WO2007007731A1 Apparatus for removing foreign material from substrate and method for removing foreign material from substrate |
| 01/17/2007 | CN1898611A Chuck system, lithographic apparatus using the same and device manufacturing method |
| 01/11/2007 | WO2007005925A1 Clamp for use in processing semiconductor workpieces |
| 01/03/2007 | CN1293620C High temperature electrostatic chuck |
| 12/28/2006 | WO2006052576A3 Encapsulated wafer processing device and process for making thereof |
| 12/26/2006 | US7154731 Reflective coating for electrostatic chucks |
| 12/20/2006 | CN1291381C Slider and apparatus for accessing data on disk, and slider production method |
| 12/19/2006 | US7151658 High-performance electrostatic clamp comprising a resistive layer, micro-grooves, and dielectric layer |
| 12/13/2006 | CN1289258C Cling table and basement machining apparatus |
| 12/06/2006 | CN1875471A Clamping of semiconductor wafers to an electrostatic chuck |
| 11/30/2006 | WO2006126503A1 Electrostatic chuck |
| 11/30/2006 | US20060266981 Electrode coated with a first gel of carbon nanotubes, ionic liquid and polymer (hexafluoropropylene-vinylidene fluoride polymer; second ion-conductive gel layer of ionic liquid and polymer; top layer of first gel composition; flexed or deformed by creating a potential difference between layers. |
| 11/28/2006 | US7142406 Electrostatic chuck of semiconductor fabrication equipment and method for chucking wafer using the same |
| 11/28/2006 | US7142405 Electrostatic chuck and production method therefor |
| 11/09/2006 | WO2006117871A1 Electrostatic chuck apparatus |
| 11/07/2006 | US7133273 Electrostatic device for holding an electronic component wafer |
| 11/02/2006 | WO2006115731A1 Electrostatic chuck for semiconductor workpieces |
| 10/18/2006 | CN1280177C Application of fixator for preventing outer-plane movement of minimal resolution memory actuator |
| 10/17/2006 | US7123350 Substrate holding device, substrate processing apparatus using the same, and method for aligning and holding substrate |
| 10/10/2006 | US7119884 Lithographic apparatus and device manufacturing method |
| 09/28/2006 | DE112004001044T5 Elektrostatische Aufspannvorrichtung mit Heizvorrichtung An electrostatic chuck with heater |
| 09/20/2006 | EP1702900A1 Alumina-sintered body and associated manufacturing method, and electrostatic chuck and associated manufacturing method |
| 09/20/2006 | EP1702241A2 Chuck system, lithographic apparatus using the same and device manufacturing method |
| 09/19/2006 | US7110091 Lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 09/13/2006 | EP1295385B1 Electro-adhesion device |
| 09/13/2006 | CN1833352A Actuator element and production method therefor |
| 09/05/2006 | US7102872 Electrostatic chuck |
| 08/23/2006 | EP1693950A1 Actuator element and production method therefor |
| 08/15/2006 | US7092231 Chuck, lithographic apparatus and device manufacturing method |
| 08/09/2006 | CN1816909A Electrostatic chuck for substrate stage, electrode used for same, and processing system having the chuck and electrode |
| 08/08/2006 | US7088431 Lithographic apparatus and device manufacturing method |
| 07/27/2006 | US20060164786 Electrostatic chuck for substrate stage, electrode used for the chuck, and treating system having the chuck and electrode |
| 07/27/2006 | US20060164785 Electrostatic bonding chuck with integrated radio frequency electrode and thermostatic means |
| 07/20/2006 | US20060158823 Electrostatic chuck device |
| 07/20/2006 | US20060158822 Method for attracting glass substrate with electrostatic chuck and electrostatic chuck |
| 07/20/2006 | US20060158821 Dipolar electrostatic chuck |
| 07/19/2006 | CN1806324A Dipolar electrostatic chuck |
| 07/12/2006 | CN2796098Y Six plase rotary power supply device |
| 07/11/2006 | US7075772 Electrostatic gripping device |
| 06/28/2006 | CN1795551A Electrostatic chuck including a heater mechanism |
| 06/28/2006 | CN1261995C Holding device for treated body |
| 06/27/2006 | US7068489 Electrostatic chuck for holding wafer |
| 06/21/2006 | CN1790889A Processing method of adsorbate and electrostatic sucking method |
| 06/07/2006 | EP1665365A1 Clamping of semiconductor wafers to an electrostatic chuck |
| 06/07/2006 | CN1258812C Semiconductor wafer lifting device and methods for implementing the same |
| 05/31/2006 | EP0970517B1 Unbalanced bipolar electrostatic chuck power supplies and methods therefor |
| 05/31/2006 | CN1258256C Electro-adhesion device |
| 05/25/2006 | US20060111191 Torque transfer system and method of using the same |
| 05/24/2006 | CN1777987A High-performance electrostatic clamp comprising a resistive layer, micro-grooves, and dielectric layer |
| 05/11/2006 | US20060098379 Electrostatic chuck including a heater mechanism |
| 05/10/2006 | CN1771592A Work neutralizing method and apparatus thereof |
| 05/09/2006 | US7042697 Electrostatic chucks and electrostatically attracting structures |
| 05/03/2006 | CN1767260A Micro current battery |
| 04/26/2006 | CN1253286C Electrostatic adsorption table and substrate processing apparatus |
| 04/12/2006 | EP1644962A2 Substrate support having dynamic temperature control |
| 04/11/2006 | US7026174 Method for reducing wafer arcing |
| 03/28/2006 | US7019956 Electrostatic chuck having bonded structure and method of manufacturing the same |
| 03/15/2006 | EP1635388A1 Dipolar electrostatic chuck |
| 03/09/2006 | WO2005064400A3 Chuck system, lithographic apparatus using the same and device manufacturing method |
| 02/15/2006 | CN1242453C Multilayer electrostatic suction disk and its making method |
| 02/02/2006 | WO2005057280A3 Lithographic apparatus and device manufacturing method |
| 02/02/2006 | US20060023393 Electrostatic holding device and electrostatic tweezers using the same |
| 12/29/2005 | WO2005124728A1 Electrostatically chargeable supporting element for supporting light objects (paper) |
| 12/29/2005 | US20050286202 Electrostatic chuck, device manufacturing apparatus, and device manufacturing method |
| 12/13/2005 | US6975497 Method for reducing particles from an electrostatic chuck and an equipment for manufacturing a semiconductor |
| 12/08/2005 | US20050272273 Method and apparatus for electrostatically maintaining substrate flatness |
| 11/17/2005 | WO2005109489A1 Work neutralizing method and apparatus thereof |
| 11/16/2005 | EP1595284A1 Electrostatic bonding chuck with integrated radio frequency electrode and thermostatic means |
| 11/15/2005 | US6965506 System and method for dechucking a workpiece from an electrostatic chuck |
| 10/20/2005 | US20050231887 Electrostatic chucks having barrier layer |
| 10/19/2005 | CN1685599A Electrostatic holding device |
| 10/13/2005 | DE102005013904A1 Elektrostatische Haltevorrichtung und dieselbe verwendendes Substrathalteverfahren An electrostatic chuck and the same-use substrate holding method |
| 09/29/2005 | WO2005091356A1 Bipolar electrostatic chuck |
| 09/29/2005 | US20050213279 Electrostatic chuck and substrate fixing method using the same |
| 09/27/2005 | US6950297 Electrostatic chuck and manufacturing method therefor |
| 09/27/2005 | US6950296 Nanoscale grasping device, method for fabricating the same, and method for operating the same |
| 09/27/2005 | US6949726 Heating apparatus having electrostatic adsorption function |
| 09/22/2005 | US20050207089 Substrate holder and exposure apparatus using same |
| 09/21/2005 | EP1577937A1 Electrostatic chuck |
| 09/20/2005 | US6947274 Clamping and de-clamping semiconductor wafers on an electrostatic chuck using wafer inertial confinement by applying a single-phase square wave AC clamping voltage |
| 08/17/2005 | CN1215546C Methods and apparatus for determining an etch endpoint in a plasma processing system |
| 08/10/2005 | EP0992106B1 A method and an apparatus for offsetting plasma bias voltage in bipolar electrostatic chucks |
| 07/28/2005 | US20050163598 Method for carrying substrate |
| 07/19/2005 | US6919124 Ceramic substrate |
| 07/14/2005 | WO2005064400A2 Chuck system, lithographic apparatus using the same and device manufacturing method |